CT扩散炉培训教材(设备中英文版).ppt

centrotherm扩散炉设备培训equipmenttrainingofcentrothermDiffusionfurnace Centrotherm扩散炉的组成 A Loadingbox推舟部分B TGA有毒气体排放C Heatingfurnace加热部分D Gascabinet气柜 设备平面结构Equipmentplanestructure 1 CMI电脑2 Loadingbox上料箱3 Toxicgases有毒气体排放4 Furnace炉体5 Gasbox气源柜 Loadingbox上料箱 Baddlehead舟头 Loadingwafer加栽的硅片 Loadingbox上料箱 Mechanicalarm机械臂 Loadingbox上料箱 Storagerack1 2存储位1 2 Paddlebearing adjustablepaddleposition碳化硅桨支座 调节桨位置 TGA有毒气体排放 quartzdoor石英门 Doorcylinder炉门气缸 Heatingfurnace炉膛 1 CMSmodule3 Powerconnectioncover2 Thermocoupleconnection4 Temperaturesensormodule Gascabinet气源柜 1 Flowmeter气体流量计2 Pneumaticvalve气动阀 1 2 Coolingwaterinletandwatersystem冷却水系统 Coolingtothetopofthefurnacebodyandfurnace对炉膛顶部和炉体进行冷却 Thermostaticbath恒温槽 OnthePOCL3constanttemperatureprocess normaltemperature20degrees对POCL3进行恒温作用 正常工艺温度20度 Siliconcarbidepaddle碳化硅桨 Bearingquartzandsilicon andoutofthecarriership承载石英舟和硅片石英舟进出的载体 Rangedetectionalarm范围检测报警器 Detectionofarangeofwhetherobject avoidhitboatphenomenon thisrangecanbeadjusted检测某个范围内是否有物体 避免出现撞舟现象 些范围可进行调节 CommunicationNetworkOverview通信网络总览 Heatingsystem加热系统 Coolingsystem冷却系统 1 Heatexchanger2 Cooling3 Shutoffvalve 1 Cooling4 Heatexchanger2 Themainfan5 Electronicdevices3 Coolingtheairpassage Alarmlampinformation Operationpanel操作面板 operationpanel4keyboardTouchscreen5touchscreenbuttonUSBsocket Operationpanel操作面板 TheequipmenthasthefollowingbuttonStopaction AllthemechanicalactionofloadingboxarestopLoadingboxlighting open closethelampoftheloadingboxAuto handmanualswitch Loadingandunloadingoftheoperatingsystemcanmanualoperationinanopenfeedingbox4Allowstounlock Pressthisbutton tounlockthecar Operationpanel操作面板 1pushbuttonABCkeyboardcall4pushbuttonrightmousebuttonPushbuttontaskchange5pushbuttonshiftPushbuttonbrightnessABCkeyboardcall callsup clossesthekeyboardonthetouchscreen keyboardentriescanbecarriedoutdirectlyonthetouchsceen Pushbuttontaskchange changesataskwindowsPushbuttonbrightness pressthisbuttontogetherwiththeshifebuttontoincreasethebrightnessofthetouchscress Pushbuttonrightmousebutton opensrightmousebuttoncontextmenu pressthisbuttontogetherwiththeshiftbuttontoreducethetouchscreen Pushbuttonshift callsupthesecondkeyboardlevel pushthisbushbuttontogetherwiththerequiredfunctionbutton CMIinterfaceCMI桌面信息 Systemname7alarmcloseDatetime8notesCentrothermlogoandsystem9additionalinformationInformationbuttonCurrentdisplayareainthe10systemmodeInformationfield11connectionstatewithCEC GEMSystemstatusLogin logoutbutton CMIinterfaceCMI桌面信息 Jobs4setupSystem5alarmsDatslog6help onlinehelp TheCMIuserinterfaceCMI使用者桌面 Titlebar3navigationbarCommandbar4informationfieldwithvariablefieldareas 简单介绍CESAR界面AbriefintroductiontoCESARinterface 上图是CESAR的界面 1 系统工艺状态2 工艺时间状态3 时间日期4 气体流量状态5 系统准备状态6 温度检测显示ThisisaCESARinterface 1 Systemprocess2 Processtime3 Timeanddate4 Gasflowstate5 Systemreadiness6 Temperaturedetectionanddisplay CT操作注意事项CToperationmattersneedingattention 1 SLS处于 UP 位置时 管内有舟时不可手动进桨SLSinthe UP position theinnertubehasaboatcannotbemanuallyintothepaddle 2 SLS处于 DOWN 位置时 桨上有舟时不得手动进舟 SLSinthe DOWN position thepaddleisnotmanuallyintotheboatboat 3 桨上有舟时 舟不在正确位置 不准切换到自动运行模式 Oarsonaboat theboatisnotinthecorrectposition arenotallowedtoswitchtoautomaticrunningmode CT操作注意事项CToperationmattersneedingattention 4 进舟 退舟失败报警时 一定要检查舟的位置是否在合理的位置 才可以对报警进行复位 自动 手动的切换要谨慎 若舟不在正确位置 请手动移至正确位置后再对报警进行复位 炉门以桨的位置作为开闭标准 Intotheboat boatbackfailurealarm besuretochecktheboatpositionisinareasonableposition canalarmreset automatic manualswitchmustbecareful iftheshipisnotinthecorrectposition pleasemanuallymovedtothecorrectpositionafterthealarmreset doortopaddlepositionasopeningandclosingstandard 5 舟位于存储架 storage2 3 时 一定要确认存储架上的感应器有没有感应到 否则有可能导致撞舟 Whentheboatislocatedonthestoragerack storage2 3 makesurethatthestorageracksensorissensed otherwisemaycausethebumpedboat 6 从手动切换自动时 Grip一定要在Middle位置 否则机械臂可能因无法正常运行而报警 Frommanualautomatic GripmustbeintheMiddleposition ormechanicalarmmaybeduetonormaloperationandalarm 7 进舟后 工艺无法运行 先确认舟在桨上的位置 以及Tube readySLS UPTGA YES然后进行操作 Intheboat technologycannotrun makesuretheboatontheoarposition aswellasTube readySLS UPTGA YESthenoperation 8 机械臂运动时不要上料 以免上料时抖动机械臂撞到舟 Asmechanicalarmmovementnotfeeding inordertoavoidfeedingtimejittermechanicalarmhittheboat 9 单一炉管有故障时 应该及时琐闭并降温 以节约能源 Singletubehasfault shouldbetimelyandclosedandcooling inordertosaveenergy 常见故障 1 ProcessrecipehasterminatedwitherrorstateAC进行中的工艺以错误状态结束 警报确认Tostore储存Tostoreenableunload储存并缷下Restartrecipe重新开始工艺A 用于选错工艺号 手动结束工艺 重新开始新的其他工艺时进行选择B 多数情况下选择此项C 工艺中断需要重新进行时选择 但不建议使用 建议选择 B ProcessrecipehasterminatedwitherrorstateACOngoingprocesstoendtheerrorstatus AlarmconfirmationTostoreTostoreenableunloadRestartrecipeA Usedthewrongprocessnumber Handendoftheprocess StartanewchoicewhenotherprocessesB Inmostcases choicethisoneC Interruptsneedtore processtheselection butnotrecommended recommendedtochoose B Boatalreadyintube Select Process 0 Unload 1 选择0或1说明 当管内有舟存在时 异常排除后手动运行工艺时会出现此提示Boatalreadyintube Select Process 0 Unload 1 Description Whenthetubehasaboatthere theexceptionruleoutrunningprocessmanuallyafterthispromptwillappear Losthomingcheckpoti失去引导 检查位置 一般此警报会自动解除 说明 此警报会自动解除 但需要检查一下桨是否在原点位置即可LosthomingcheckpotiCheckthelocation usuallythealarmwillbeautomaticallylifted Description Thisalarmwillbeautomaticallylifted butneedCheckwhethertheoriginlocationtopaddle 4 Recipeabort2 processaborttocontinue enterAB工艺退出 运行终止 继续 请输入AB说明 对工艺异常结束的手动确认 然后就会出现报警Recipeabort2 processaborttocontinue enterABDescription Themanualconfirmationprocessends 5 Recipecouldn tbestartedpleasecheckprotocolforreason 工艺不能运行 请检查原因Recipecouldn tbestartedpleasecheckprotocolforreason 6 Boatsensorofgradhaschangedwithoutpermission机械手上的传感器被非允许的改动说明 机械臂在上下移动的时候 前后不能移动 若前后位置发生移动机械将被锁定 出现报警 此报警需设备人员的密码登陆在Handing对话框中的Tech模式下进行复位BoatsensorofgradhaschangedwithoutpermissionDescription Theroboticarmtomoveupanddownwhenyoucannotmovearound ifthelocationismovedaroundthemachinewillbelocked analarm thealarmequipment personnelneedtologinapassworddialogboxintheTechHandingresetmode 7 Thereisalreadyanactiverecipe工艺名fromlocaltisting已有 工艺在此管的工艺列表中说明 这两个报警经常出现 若能够确认此管未有工艺在运行 就必须将此管重新启动 如果有工艺运行 可以将工艺手动停止 或者等待工艺结束 Thereisalreadyanactiv