P5000-SiO2-Dry-Etcher-PM-SOP.docx

杭州天野通讯设备有限公司文件编号Document NO版本号REV页数Page#TY-HZ-CM-PM-0001A20文件名称Title钝化层干法刻蚀设备保养规范说明书P5000 SiO2 Dry Etcher PM SOP部门DepartmentCHIP.TEAM生效日期Revising Date2017-3-8目录1. 目的：.2版面居中2. 适用范围：.23. 定义：.24. 权责：.25. 材料、工具和易损配件：.36. 相关文件：.47. 作业安全卫生环保须知：.47.1 作业安全.47.2 卫生环保须知.58. 作业内容.58.1 PM执行频率.58.2 操作步骤.59. 记录.1910.文件更改记录19编制黄相如批准1 目的（purpose）为工程师机台保养提供一个保养规范，提高保养效率；A standard of the maintenance for Machine maintenance engineer, to improve maintenance efficiency;2 实用范围（Scope）SiO2 PM 机台的保养SiO2 machines PM3 定义（Definition）SOP: standard operation procedure(标准操作流程)PM: preventing maintenance(预防保养)TMP: turbo molecular pump（分子泵） 4 权责（Responsibility）本类机台归属于芯片工程部，主要用于二氧化硅钝化层的刻蚀，机台管理人为黄相如The machines belong to the etching of the chip segment, mainly used for etching SiO2 passivation, owner is Xiangru Huang5 材料，工具和易损配件（material ，tools and vulnerable parts）名称（name） 作用 function 图片 picture异丙醇 IPA清洗备件 clean parts内六角扳手 allen wrench拧螺丝 turn screw氮气枪 N2 GUN清除灰尘 clean partical无尘布 clean cloth清洗备件 clean parts吸尘器 cleaner清楚灰尘 clean partical清洗机 cleaning machine清洗备件 clean parts烘烤机 bakeing machine烘烤备件 bake parts盖板 cover盖住静电吸盘，防止灰尘掉在上面Cover the electrodestatic chuck,In case partical fall on it6 相关文件（Related Documents）参照AMAT P5000 Operation ManualRefer to AMAT P5000 Operation Manual7 作业安全卫生环保须知(operation security, health and environmental notes)7.1 作业安全(operation security) 在做机台保养前需要对机台挂好保养状态，防止外人操作机台对保养人员造成损伤，由于此机台用到的制程气体含有含氟气体，因此设备保养人员在对机台进行保养时需要佩戴防毒面具； Link PM status for equipment before do PM to tools, In case other person operate tool and damage PM persons. Because the tools use process gas containing CF4, PM person must wear gas mask when doing PM to tools.7.2 卫生环保须知(environmental notes) 由于机台的尾气中含有CF4，因此需要在泵浦的排气端加入湿法静气器； Exhaust of equipment contains CF4， so we need equip the wet scrubber at the backend of dry pupm . 8 作业内容（Operation content）8.1 PM执行频率(PM implementation frequence ) 在机台无异常情况下，每2000片wafer做一次保养，误差为正负150片In the normal status , do once PM every 2000pics. The error of plus or minus is 150pics8.2操作步骤（step）1. 首先确认下机台的状态，确保需要PM的腔体没有Run 货，挂好 PM工作牌，把 Automatic改成 Manual。First ensure that the chamber need PM is not running, display the PM indicate board, modify the equipment mode from automatic to manual.2.将需要PM的腔体切换成 OFFLINE。Take the PM chamber to offline3.对PM的腔体做 Cycle purge（30次）Cycle purge(30 times)to chamber of PM4.等Cycle purge完了之后，就可以Vent Chamber。 Vent chamber after completed cycle purge.4.1首先将Gate valve关闭； First close the Gate valve4.2然后将Turbo off掉，看到Turbo Controller上显示“LEVITATION”就表示 Turbo已经停止转动了，可以做下一步动作了；Close turbo, when turbo controller show “LEVITATION” message, it means the turbo have completed stop. We could do next action.4.3将Fore line valve和N2关闭; Close Fore line valve and N2 4.5将腔体Vent valve打开; Open the vent valve of chamber.4.6待Chamber vent 到ATM后，就可以开腔了。 Open the chamber after chamber vent to ATM.5.作业人员佩戴好防毒面具，开始PM作业。 The person of PM need wear mask and do PM.6.关闭Gas 手动阀，卸下 Chamber LID 的螺丝，打开Chamber LID，并拿下 Chamber LID.拿下后要去关闭腔体Vent valve。 Close the gas manual valve, take down the screw of chamber lid, open chamber lid and take down the chamber lid and close the chamber vent valve.7.用一字螺丝刀拧开Inner quartz window 上的12个螺丝帽（要当心这个是很脆弱的，容易坏）， 拿走之后就能看见下面的螺丝了，拆下螺丝并拿走Inner quartz window. Use flathead screwdriver to take down 12 screws of the inner quartz window ( you must carefully because of fragile),you will see the under screws and take down them and quartz window.8.取出Quartz external ring ，小心放在塑料膜上（易碎）。 Take out the quartz external ring and carefully put it on plastic film (fragile).9.取下 Quartz clamp ring cover ，小心放在塑料膜上（易碎）。Take down quartz clamp ring cover and carefully put it on plastic film (fragile)10. 取下 Quartz pipe ring 和 ESC Clamp O-ring ，小心放在塑料膜上。Take down the quartz o-ring and ESC clamp O-ring, carefully put them on plastic film.11.清洗腔体以及 Load Lock，先用吸尘器吸走肉眼看得见的粉尘颗粒，再用沾了IPA 的无尘布去擦拭腔体内壁以及ESC。 Clean chamber and load lock, first use cleaner clean visible particle. then use clean room wiper clean chamber inner wall and ESC.12.清洗Parts ，用IPA 清洗刚刚从 Chamber 内拆除下来的Parts。 Clean the parts uninstall from the chamber using IPA13.安装Parts，先装Quartz pipe ring ； 接着安装 ESC Clamp O-ring ；然后安装Quartz clamp ring cover ；再装Quartz clamp ring cover ；然后安装 Quartz external ring ；装上Inner quartz window ；最后装上 Chamber LID Install Quartz pipe ring, ESC Clamp O-ring, Quartz clamp ring cover, than install Quartz clamp ring cover, Quartz external ring, at last, install the chamber Lid.14.Pump down:先打开腔体的粗抽阀 Rough valve ，将腔体的压力抽到 200mT 以下，打开Fore line valve , 点击 Turbo 的 “ON”; 等 Turbo 完全开起来之后，打开 Gate valve和 N2. Pump down chamber: first open the rough valve, pumping the chamber pressure under 200mT, open Fore line valve, then turn on turbo, after turbo pump full start, open the gate valve and N2 valve.15.完成PM 现场的6S； Finished the 6S of PM scole 16.Leak rate test，等腔体压力抽下去之后，就可去设置Leak rate test ，让腔体 Purge 30分钟之后再做 Leak test （Leak Rate 5 mT/min）。 Leak rate test, set leak rate test and purge 30 minutes to chamber and then do leak test after pump down chamber. （Leak Rate 5 mT/min）.17. 等Leak check OK后，拿测试片去做测试，测试没问题了通知作业员。 After leak OK, use test wafer to do test, if test ok then inform operator.附件Attachments名称Name编号Code版本号Edit