半导体厂务常用缩写

CUP Central Utility Plant 中央動力廠房GEX General EXhaust 普通及熱排氣SEX Scrubber EXhaust 酸排氣VEX Volatile orgaic compound EXhaust 有機溶劑排氣AEX Ammonia EXhaust 鹼性排氣PCW Plant Cooling Water 工藝冷卻水PV Process Vacuum 工藝真空HV House Vacuum 真空吸塵CW City Water 自來水FMCS Faility Monitoring Contro System 廠務監控系統 MCC Motor Control Center 馬達控制中心 VFD Variable Frequency Device 變頻器 CCTV Close Circuit Televsion 閉路電視 PA Public Adress system 廣播系統FA Fire Alarmsystem 火災報警系統UPW Ultra Pure Water 超純水FWW Fluoride Waste Water 低濃度氫氟酸廢水IWW Industry Waste Water 工業廢水 OWW Organic Waste Water 有機溶劑廢水 DAHW Drain AmoniaHydride Waste 含氨廢水 RCL Recycle water 製程回收循環水RCM Reclaim water 製程回收再利用水HFW High Fluoride Waste water 高濃度氫氟酸廢水 BGW Backgriding Waste water 晶背研磨廢水 SAW Sulfuric Acid Waste water硫酸廢液 PAW Phosphoric Acid Waste water 磷酸廢液 SW Stripper Waste water 剝離液廢液TW Thinner Waste water 清洗廢液PIX Pix waste water PIX廢液SLOW Oxide slurry waste water 介電質研磨廢水 SLWP Metal slurry waste water 金屬研磨廢水 SLWP Poly slurry waste water 多晶硅研磨廢水 PN2 Process N2 製程用氮氣 GN2 General N2 一般用氮氣CDA Compressor Dry Air 壓縮乾燥空氣 VMB Valve Manifold Box 閥箱 空調系統 AHU Air Handling Unit 空调箱 MAU Make-upAir Unit 外气空调箱VAV Variable Air Volumebox 可变风量风箱FFU Fan Filter Unit 风车过滤器 HEPA High Efficiency Particulate Filter 高效率过滤器 ULPA Ultra Low Penetration Filter 超高效率过滤器 A/S AirShower 空气浴尘室CUP Central Utility Plant 中央動力廠房電力系統 FMCS Faility Monitoring Control System 廠務監控系統 MCC Motor Control Center 馬達控制中心 VFD Variable Frequency Device 變頻器 CCTV Close Circuit Televsion 閉路電視 SCADA SupervisoryControl And Data Acquisition 监视控制和数据搜集系MCC Motor ControlCenter 馬達控制中心VFD Variable Frequency Device 變頻器 水處理系統 UPW Ultra Pure Water 超純水 RO Reverse Osmosis 逆滲透膜TOC Total Organic Carbon 總有機碳 MB Mixed Bed 混床UF UltraFiltration 超濾SC Strong Cation 強陽離子SA Strong Anion 強陰離子WA Weak Anion 弱陰離子DO Dissolved Oxygen 溶解氧MD Membrane Degasify 脫氣膜GF Gravity Filter 重力式過濾器.DI Deionize 去離子水氣體/化學系統 CQC Continuous Quality Control连续品质控制系统VMB Valve Manifold Box 閥箱VMP Valve Manifold Panel 閥盘 GMS Gas Monitoring System气体监测系统 CDS Chemical Dispense System 化學系统 SDS Slurry Dispense System 化學研磨系统 环境安全卫生 ESH Environment Safety Health 环境安全卫生 SCBA Self Contained Brathing Apparatus 自给式空气呼吸器 HVAC AHU Air Handling Unit 空调箱MAU Make-up Air Unit 外气空调箱 VAV Variable Air Volumebox 可变风量风箱 FD Fire Damper 防火风门FSD combinedFire Smoke Damper 防火防烟风门 SD SmokeDamper 防烟风门PHX Platedtype Heat Exanger 板式热交换器FFU Fan Filter Unit 风车过滤器 HEPA High Efficiency Particulate Filter 高效率过滤器 ULPA Ultra Low Penetration Filter 超高效率过滤器 A/S Air Shower 空气浴尘室A/L Air Lock 气闭门室DCC Dry Cooling Coil 干盤管 FCU Fan Coil Unit 小型冷风机SF Smoke Fan 消防排烟风车EF Exhaust Fan 通风排气风车CUP Central Utility Plant 中央動力廠房 GEX General EXhaust 普通及熱排氣SEX Scrubber EXhaust 酸排氣VEX Volatile orgaic compound EXhaust 有機溶劑排氣AEX Ammonia EXhaust 鹼性排氣PCW Process Cooling Water 工藝冷卻水PV Plant Vacuum 工藝真空HV House Vacuum 真空吸塵CW City Water 自來水FMCS Faility Monitoring Control System 廠務監控系統 MCC Motor Control Center 馬達控制中心 VFD Variable Frequency Device 變頻器CCTV Close Circuit Televsion 閉路電視 PA Public Adress system 廣播系統FA Fire Alarmsystem 火災報警系統UPW Ultra Pure Water 超純水RO reverse Osmosis 逆滲透膜TOC totalorganic carbon 總有機碳 MB mixed bed 混床UF ultrafiltration 超濾SC strong cation 強陽離子SA strongAnion 強陰離子WA weak Anion 弱陰離子DO dissolved oxygen 溶解氧MD membrane Degasify 脫氣膜GF gravity Filter 重力式過濾器.DI deionize 去離子水FWW Fluoride Waste Water 低濃度氫氟酸廢水 IWW Industry Waste Water 工業廢水 OWW Organic Waste Water 有機溶劑廢水DAHW Drain Amonia Hydride Wastewater 含氨廢水 RCL Recycle water 製程回收循環水RCM Reclaim water 製程回收再利用水HFW High Fluoride Waste 高濃度氫氟酸廢液 BGW Backgriding Waste water 晶背研磨廢水 SAW Sulfuric Acid Waste 硫酸廢液 PAW Phosphoric Acid Waste 磷酸廢液 SW Stripper Waste 剝離液廢液TW Thinner Waste 清洗廢液PIX PIX waste PIX廢液SLW-O SLurry Wastewater Oxide 介電質研磨廢水SLW-M SLurry Wastewater Metal 金屬研磨廢水 SLW-P SLurry Wastewater Poly 多晶硅研磨廢水 PN2 Process N2 製程用氮氣GN2 General N2 一般用氮氣