Semiconductor_physics_and_devices_B1ppt课件

.,Semiconductorphysics&devices（1）,Instructor：Asso.Prof.Tao-LeiZHENG,.,Introduction绪论,Asemiconductorisakindofconductor.半导体导体的一种introduction:TherelationbetweensemiconductormaterialsanddevicesorICs,半导体材料与器件或集成电路的关系TheimportanceofSemiconductorProcesstotheproduction/fabricationofintegratedcircuits半导体工艺对集成电路生产制造的重要性1.1crystalstructure晶体结构lattice晶格basicvector基矢unitcell元胞3basiccubicstructure(simplecubic,body-centeredcubic,face-centeredcubic)3种基本立方结构primitivecell原胞固体物理学元胞,.,Whatisasemiconductor?,asitsnameimplies如名所寓Theconductivitiesofthesekindsofmaterialarebetweenthoseofmetals(conductors)andinsulators这些材料的电阻率在金属（导体）和绝缘体之间Theyarefabricatedthroughprocessflowtoprovidevariousdevices(conductors)withtheirownspecialproperties它们通过工艺流水制出以提供具有自身特别性能的各种器件pnjunctionisthemostimportantbuildingblocktogointoactioninasemiconductordevicepn结是在半导体器件中发挥最重要作用的构件,.,DevelopmentofSemiconductor,Materialprocess(材料工艺）Oxidation（氧化）Thinfilmgrowth(薄膜生长)ordeposition（淀积）Photolithography（光刻）Etch（刻蚀）Metallization（金属化）Silicidation（硅化）DevicesBipolartransistor（双极晶体管）FieldEffectTransistor（场效应晶体管）SchottkyBarrierDiode（肖特基势垒二极管）MESFET（金属半导体场效应晶体管）ApplicationHighpowerHighspeed,.,prospectofsemiconductor,Semiconductorlighting（半导体照明）Photovoltaiccell（光伏电池）CMOSimageprocessingchip（图像处理芯片）bio-chipforfastdiagnosis（用于快速检验的生物芯片）,.,Contentsofthiscourse,SemiconductorphysicsSemiconductorofequilibriumSemiconductorofnon-equilibriumConductingabilityofsemiconductorBuildingblocksThepnjunctionTheMOScapacitanceSemiconductordevicesDiodesTransistors:bipolarjunctiontransistorandunipolarMOSFETJFETandMESFETThyristorOpticaldevices:photoresistor,lightemittingdiode(LED),laserdiode,solarcell,.,SyllabusofclassroomCourse,Illustrator:Tao-LeiZhengSubject:SemiconductorPhysicsandDevices:BasicprinciplesCourseNo.10L206QAttribute:BasicTheoryofthespecialtyCredit:4hoursPrerequisite:AdvancedMathematics,CollegePhysics,fundamentalsofelectroniccircuit,.,Functionandobjectives:,Functioncorecourseforadvancedcoursesofvariousspecialtiesofinformation,suchaselectronicScienceandTechnology,TelecommunicationandautomationObjective:fromthewholeillustrationofthiscourse,studentscannotonlylearnthebasictheoryofsemiconductorphysicsanddevicesaswellasprincipleofICdesign,haveagoodknowledgeofactualstructureofsemiconductordevice,theirmechanismofoperation,theirpropertiesandapplications.haveanideaaboutthestructureandtheprocessofanintegratedcircuit,whichishelpfultounderstandthemethodology,flowchartandrulesofdesignofICslayout.hopefulforthestudentstogetaninsightofdependenceofthecharacteristicsofthesemiconductordevicesuponthesizesofitsmicrostructure.,.,Catalog,goaltoequipthestudentswiththeessentialtheoryofsemiconductorphysics,devicesandskillsofICsdesigntomakethemwellpreparedforthedesignofsemiconductordevicesorintegratedcircuits.Maintopicsmaterial,solidtheory,semiconductorphysics,bipolarjunctiontransistor,FieldEffectTransistor,Hetero-structurejunctiondevices,BipolarandMOSIC,Microelectronictechnologyetc.,.,Chapter1crystalstructure,CrystalpropertyDefinitemelting-andboiling-temperatureTransparentTrue?WhataboutmetalsPeriodicityRegulararrangementextendinginspaceAunittorepeatinthevolume,.,unitcells,CubicstructureofcrystalSc:simplecubic,showedinFig.(a)Bcc:body-centeredcubic,showedinFig.(b)Fcc:face-centeredcubic,showedinFig.(c),.,Primitivecell,Thesmallestunitcell(approximatelyinthesmallcubic:thereisatetrahedron),.,Basicvector,ai(i=1,2,3)orabcThewholecrystallatticecanbeexpressedR=pa+qb+sc(p,q,sareintegers),.,Planesincrystalexpressedas(abc),ThewaytodetermineMillerindices:firstIntercepts2ndReciprocal3rdSmallestdenominatorParallelplanesMillerindicesCr