ESD知识-经典的ppt课件

ESDBestPracticalSharing,TITLQRA,1,2,Index,ESDHistoryDefinitionofESDMaterialReduceESDDamagedMethodologyESDChecklist,313141718464752,Page,2,ReminderthatESDisaseriousproblemintheentireelectronicsindustry.提醒所有员工“静电”对IC材料的破坏是一个非常严重的问题,它是整个半导体所面临的一项挑战.,WhyDoWeNeedESDTraining?,为何需要此ESD训练课程?,Itisbelievedthat25%ofallcomponentfailuresarearesultofESD.相信有大约25%的IC材料是因静电(ESD)的影响而遭破坏,3,3,ElectricalOverStress(EOS)-Theexposureofanitemtoacurrentorvoltagebeyonditsmaximumratings.EOS-指一个IC材料受到超过其所能负荷的电压,电流而遭受到破坏的状态,Definitions定义,ElectrostaticDischarge(ESD)-Thetransferofelectrostaticchargebetweenbodiesorsurfacesatdifferentelectrostaticpotential.ESDisasubsetofEOS.ESD-即静电放电之意.指不同电位的二个物体之间产生的电荷急骤流动的现象.,4,4,ConductorsvsInsulators,带静电的絶缘体ChargedInsulator,带静电的导体ChargedConductor,Conductorevenlydistributeschargeoverentiresurface平均分布于整个表面,Oppositepolaritychargescanexistonthesameinsulator.不同极性的电荷会同时存在絶缘体上,Conductorcompletelydischargeswhengrounded.,Insulatoarsdonotallowchargetoflow.Groundinganinsulatorneitherremoveschargeorpreventssurfacecharges.,5,5,Staticelectricityhasbeenacuriosityformanyhundredsofyears.,History,Today,specialprecautionsaretakenbyindustrieswherestaticsparkscouldcauseanexplosion,e.g.,flourmills,hospitaloperatingrooms,etc.在今天,静电所产生的破坏已引起工业界的注意.例如:面粉厂的尘爆,院的手术过程,IC制造工业等.,AftertheinventionofgunpowderbytheChinese,itwasnolongeracuriosityforanyonemanufacturingthatproduct.静电现象一直存在于人类历史中,以前则被认为是一种奇特的异象,6,6,Strangefailuresoccurred,andthecauseoftheproblemwasnoteasilyseenwiththeopticalmicroscopes-failureanalysisread:causeunknown.静电造成一些奇特而不易察觉的破坏,F/A分析的结论往往是:原因不明.,EOS/ESDisperhapsthemostsignificantfailuremechanismintheelectronicsindustrytoday.EOS/ESD对半导体之元件的破坏,可能是当今半导体界最头痛,也是最严重的一个问题.,History,7,7,FundamentalsofStatic-Tribocharging磨擦产生静电,Thissituationoccurswhenoneorbothofthematerialsareinsulators.但这种情况为发生在其中一种物质为绝缘体,Whenevertwodissimilarmaterialsmakecontactandthenareseparated,astaticchargeiscreated.二种不同性质的物质碰在一起再分离也会产生静电.,8,8,TriboelectricSeries,Factorstoconsider:,Humidity:湿度Speedofseparation:分离速度Typeofmaterial:材料性质Contactarea:接触面积,IncreasingPositive,Air:空气HumanHand:手RabbitFur:兔毛Glass:玻璃Mica:humanhair:头发Nylon:尼龙Wool:毛Silk:丝Aluminum:锡Paper:纸Cotton:棉Steel:铜铁Wood:木头Amber:HardRubber:橡胶Nickel,Copper,Brass,SilverPolyester:聚醋棉PolyethylenePolypropylene:软片PVC(Vinyl),IncreasingNegative,9,9,静电放电的模型,Human-BodyModel,HBM)人体放电模型MachineModel,MM)机器放电模型ChargedDeviceModel,CDM)元件充电模型模拟由个人之手指尖端放电至元件的现像,GroundedSurface,10,HBM波形,C=100PFR=1.5K,Standard,资料来源:工研院电子所,11,自动组装之制造环境ESD模型,电感,I(A),Time(ns),MM,12,CDMEvent的来源,CDM,测试机台自动插件IC的包装(Tube),13,Definition定义(1),1.Conductivematerial-ESDprotectivematerialhavingasurfaceresistivitylessthan1xE5ohms/squareoravolumeresistivitylessthan1x10E4ohm-cm.导体-ESD保护物质其表面电阻系数小于1x10E5欧姆/单位面积或容积电阻系数小于1x10E4欧姆-公分者.,14,Staticdissipativematerial-Amaterialhavingasurfaceresistivityofatleast1x10E5ohms/squareor1x10E4ohm-cmvolumeresistivity,butlessthan1x10E12ohm/squaresurfaceresistivityor1x10E11ohm-cmvolumeresistivity.静电传导物质-表面电阻系数介于1x10E5与1x10E12欧姆/单位面积,或容积电阻系数介于1x10E4与1x10E11欧姆-公分者.,Definition定义(2),15,3.Insulativematerial-Amaterialhavingasurfaceresistivityofatleast1x10E12ohms/squareor1x10E11ohm-cmvolumeresistivity.绝缘物质-物质它的表面电阻系数大于1x10E12欧姆/单位面积或容积电阻系数大于1x10E11欧姆-公分者.,Definition定义(3),16,InsutaticMaterial-Materialthatminimizesthegenerationofstaticchargelessthan+/-200(TCP100V)voltswhenrubbedagainstitself,orwhenseparatedfromitselforothersimilarmaterials.抗静电物质-物质若经自己相互磨擦或相互分开或与其它类似物质分开时不产生大于+/-200(TCP100V)伏特的静电压者.,Definition定义(4),17,SafetyArea安全区域,Theoperationwhereallleadsareatcommonvoltagepotential.(Wiresarebondedandtiebarisnotseparatedsuchassealing,molding,PMIandsoon.)材料所有的脚都在等电位.(已接线,且脚尚未分离.如过炉,压模,压模前检查等区域).,18,Equipment设备,a)ElectrostaticVoltmeters/fieldmeters:静电表b)DigitalOHMMeter:数位欧姆表c)AirIonizer:离子风扇d)WriststraporFootStrap(Optional):静电手环或脚环e)ConductiveBag&AntistaticMagazine:导电袋及抗静电管f)CautionLabel:提醒标签g)Anti-StaticVoidFiller:抗静电泡垫h)DissipativeTable/FloorMAT(Optional):静电地毡或桌垫i)Esdprotectedworkstation:无静电工作桌j)CautionSign:提醒广告牌k)ESDProtectiveShoesTester:静电鞋测试器,19,DigitalOHMMeter数位欧姆表,Shallbecapableofmeasuringadcresistanceof0.1ohmthrough1megohm+/-10%withanopencircuitvoltagegreaterthan1.5V.三用电表或直流电阻表应可量测0.1欧姆到1M欧姆+/-10%范围的电阻,且开路电压应大于1.5V以上.,20,AirIonizer离子风扇(1),Thedevicesatworkstationmustbewithin4feetmaximumaremeasuredbyverticallinefromthefaceoftheionizersandaround45degreesoneachsideofthisline.switchedonandproperlydirectedacrosstheworksurface.工作时必须置于距离离子风扇4英尺圆弧内,两边各近似45度角范围内.且方向正对着工作区域任何静电敏感的材料放于工作台之前,必须把离子风扇先打开,而且中途不可关掉.,21,1.IonizerBalance+/-35V余额电压离子风扇的余额=30cm,5min.小于+/-35V2.Ionizerchargedecaytime.来量测离子风扇的放电衰退程度./=10E5to/=1Mohmto=/450Mohm静电防护鞋回路1M欧姆到450M欧姆间.,36,ESDProtectiveSmocks静电防护衣,1.ESDprotectivesmocks./=+/-200V(TCP:100V)静电防护衣静电压小于或等于200伏特(TCP:100V)TheESDprotectivesmocksshallbebuttoned(exceptforthecollar)wheneverthewearerisatanESDprotectedworkstationorinadesignatedESDprotectedarea.当穿者在静电防护工作站或静电保护区内时,静电防护衣的钮扣(衣领上的除外)或拉鍊需要扣好,拉好,37,ESDGround静电接地(1),TheESDgroundshallbetheequipmentgroundorearthground.Equipmentgroundistheelectricalground(green)wireatreceptaclesthathavebeentestedWhenbothequipmentandearthgroundsareusedatthesameESDprotectiveworkstationtheyshallbebondedtogetheratsomepointinthegroundsystem.静电接地应使用设备接地或大地接地.设备接地是电源插中的电气接地(绿)线它需经过测试.当两种接地方式于同一静电防护工作站均被采用时,在接地系统上它们必须被连结在一起.,38,EachESDworkstationshallbeindividuallyconnectedtotheESDground.Thegroundingshouldnotbehookedinseries.Thisistoavoidtheadditiveresultofresistiveandresultinginincreaseofdecaytime,alsotoavoidthegroundingdisconnectedsimultaneouslywhenanygroundingwirebecomeopen.每个静电工作站必须个别的连结到静电接地.当一个静电工作站上有很多静电工作面时则每一个静电工作面需个别的接到静电接地点.接地线也不可串接,为的是防止增加衰减时间,并防止同时断路的发生.,ESDGround静电接地(2),39,Anyinsulatormaterialswhichmakecontactwithorcomewithintwelve(12)inchesofthesemiconductordevicesastheypassthroughthetestequipmentshouldbereplaced(wherepractical)withantistaticorstaticdissipativematerials.Ifthisisnotfeasible,theinsulatormaterialsshouldbetreatedwithanantistaticsolution.Inaddition,anymetalpartsinthetestequipmentwhichcomeincontactwithsemiconductordevicesatanytimeshouldbegrounded.Thisisespeciallyimportanttoavoidthechargeddevicemodelfailuresinhighlysensitivesemiconductordevices.电性测试设备上的任何绝缘物若会接触到或靠近半导体材料12英吋以内时应以抗静电或静电传导物取代之.如果不可能的话,则该绝缘物必须用抗静电溶液处理过.此外,测试机台上的金属零件部份若会接触到半导材料时则该金属部份无论何时均要接地.是非常重要的,可以避免高敏感的半导体材料因静电而受损伤.,ESDGround静电接地(3),40,Impedanceofequipmentgroundingconductorislessthan1.0ohm.设备接地导线的阻抗需小于1欧姆.Note:Alligatorclipforwriststrapisnotallowedtouse.鳄鱼夹头禁止使用.,ESDGround静电接地(4),41,Gloves/Fingercoats手套/手指套,Onlycottongloves,antistatic/conductivegloves,orantistatic/conductivefingercotsshouldbeusedforhandlingESDsdevices.当需要用手套或手指套时,只有棉手套,抗静电/导电手套或抗静电/导电手指套可用来处理静电敏感材料.PeoplehandlingESDSdevices.Theyshouldusethegloves,fingercotsorgloveswithfangcots.处理静电敏感材料时,可只用手套,手指套或手套加上手指套.,42,StorageAreas储存地区,WhenthestorageshelvingisnotanESDprotectedareaorworkstation,theESDSdevicesshallbeinESDprotectivepackaging.若储物架不是一个静电防护区域或工作站,则静电敏感材料必须置于静电防护包装物中.2.Thegroundchainfortrailers(forWipe/finishgood)enoughtocompletelycontactwithgroundandkeepthechainclean,replacinganewoneifnecessary.装载材料成品的推车必须要有接地鍊条,其长度要能够完全与地面接触,并保持干净整洁,若不洁净则必需更换之.,43,MobileEquipment可移动的设备,Mobileequipment(e.g.,carts,chairs,tablesshallnotgenerateelectrostaticvoltagesgreaterthan+/-200V(TCP100V)withintwelve(12)inchesofunprotectedESDSdevicesduringuse.可移动的设备(例如:车子,椅子,桌子)在使用时若接近未受保护的静电敏感材料12英吋以内不得产生大于+/-200(TCP100V)伏特之静电压.,44,MethodsforMinimizingStaticCharging低静电的方法AntistaticSolution抗静电液,Antistaticchemicals(antistatsolutions)canbeusedtopreventstaticchargegenerationonstaticgenerating/chargingmaterialsintheworkorstorageareas.Duringapplicationofanyantistaticchemical,theusermustconsiderthefollowing:抗静电化学物(抗静电液)可以用来防止在工作或储存区的静电产生或充电物发生静电充电.在使用任何抗静电化学物时,使用者应考虑下列:1.抗静电液要选择不会污染静电敏感材料者.2.抗静电喷剂或溶液不可用于能够产生能量的电气部份或设备上.3.当装置或包装体直接暴露在喷雾下时不可使用抗静电溶液.4.静电溶液需要的程度以及使用频率要根据在正常作业下使用静电伏特计来做静电压量测的结果来做决定.,45,MethodsforMinimizingStaticCharging低静电的方法RelativeHumidityControl相对湿度的控制,Relativehumidityhasasignificantimpactonthegenerationofstaticelectricityanditscontrolisrecommendedwherepracticable.相对湿度对静电产生有很大的影响如有能力最好要加以控制.Note:Therecommendedminimumhumidityis40%R.H.注:建议最小的湿度为40%R.H.,46,MethodsforMinimizingStaticCharging低静电的方法Training训练,Itstheresponsibilityofeachareasupervisortomakesurethathis/herpeoplereceiveESDcontroltraininginitiallyforworkinginhandlingESDSitems.每一区域的主管必须确定其操作静电敏感材料的人员,须受过ESD的训练.Note:PersonnelenteringESDprotectedareasshouldreceiveESDawarenesstraining.注:进入静电防护区域之人员必须受过静电认知训练.,47,CheckList检查表(1),1_Doesthecalibrationsystemforallinspection,measuringandtestequipmentusedtoperformrequiredESDitemcheckslistedinTable1meettheTITLcalibrationrequirementsofTQ-General01002有ESD量测仪器是否都有校正,且都在有效期内?2_AregroundedflooringorfloormatscoveringthefloorareaswherepersonnelormobileESDprotectiveworkstationsareusingfloorgroundingmethods?使用静电防护鞋的工作区域是否配合有接地良好之静电防护地板?3_Iseachpersonhandlingorwithintwelve(12)inchesofunprotectedESDSdevicesgroundedbyeitherawriststraporESDprotectivefootwear?在接近ESDS产品(即IC材料)12英吋范围内的人员是否都有戴静电手环或穿静电鞋?4_Whenpersonnelfloorgroundingmethodsareused,istheESDprotectivefootwearwornonbothfeet?是否所有人两只脚都穿有静电鞋(不能只穿一支脚)?5_ArenonessentialandpersonalitemskeptoffoftheESDprotectiveworksurfaces?静电防护工作桌面上是否没有不必要的东西或私人用品?6_Arethestaticvoltagesgeneratedbyessentialmaterials/itemslessthan+/-200volts(top100V)withintwelve(12)inchesofunprotectedESDSdevices?在接近ESDS产品(即IC材料)12英吋范围内是否没有会产品大于+/-200V(TCP100V)静电压的任何物品?7_WhenESDprotectivesmocksareused,dothesmockscoverallpersonalgarmentsabovethewaistexceptattheneckarea?静电服是否能盖到由腰部以上(颈部除外)的部位?8_WhereunprotectedESDSdevicesarehandled,aregroundedstaticdissipativeworksurfacesused?处理ESDS产品(即IC材料)时,是否在接地良好的静电防护工作桌面上处理?,48,9_AreESDcautionsignspostedateachESDprotectedworkstationand/orattheentrancesofdefinedESDprotectedareas?是否在静电防护区域的入口或工作桌区域有一静电防护的”警式广告牌”?10_Arethedailywriststrapchecksbeingperformedandrecordedtheresults?静电手环是否每班做检查及记录检查结果呢?11_Doesthewriststrapresistancemeasurementpathgofromthewearershand,throughtheusersbody,thebody-to-strapcontact,theintegralresistor,thestrapwire,tothestrapgroundconnector?静电手环检测是否由穿戴者的手,使用者的身体,静电环内阻,一直到静电接地做一回路电阻值量测.12_ArethedailyESDprotectivefootwearchecksbeingperformedandrecordedtheresults?静电鞋是否每班做量测与记录呢?13_AretheESDgroundconnectionvisualchecksbeingperformedweekly?所有静电接地,如静电手环,桌垫.,静电地板的接地联接是否每周目检一次?14_ArethemonthlyESDprotectivesmockstaticvoltagechecksbeingperformedandkeptrecord?静电衣的静电压是否每个月侦测一次并记录其电压值?15_AretheESDprotectedareaandworkstationstaticvoltagesurveysbeingperformed&recordmonthly?生产线上ESD保护区域和工作桌区域的静电压是否每个月检检测一次.并记录其电压值?16_AretheESDprotectivestaticdissipativeworksurfacetoESDgroundresistancechecksbeingperformed&recordedquarterly?ESD防护工作桌面(静电消散桌面)到其接地的电阻是否每季检测一次并记录,CheckList检查表(2),49,17_AretheESDprotectivefloortoESDgroundresistancechecksbeingperformedper&recordedquarterly?ESD防护地板到其接地的电阻是否每季检测一次并记录其电阻值?18_AretheESDgroundcontinuitychecksbeingperformed&recordedquarterly?静电接地,如静电手环,工作桌面,地板等的接地线是否每季量测一次并记录其电阻值?19_Aretheionizebalancechecksbeingperformedper&recordedsemi-annual?离子风扇的balance电压和DecayTime是否每半年校正一次并有记录?20_Whenused,aretheairionizesaimedatthedevicesandoperatorshandsratherthanattheoperator?离子风扇是否朝向处理材料的双手,而非朝向operator?21_IsanannualESDsystemcompliancechecktotherequirementsofthisstandardbeingperformed?每一工作区域是否每年做一次检查,看是否符合此静电管制规格的要求?22_Whencompliancetothedaily,weekly,quarterly,semiannual,and/orannualchecksisnotcontinuouslymaintained,arethechecksperformedadoublefrequency?如果任何定期的测量不通过其量测频率是否增加一倍呢?23_ArerecordsoftheESDitemchecksmaintainedatleast2yearsminimumrequirement.所有ESD量测的记录皆必须保存至少二年的要求?24_DoeseachESDprotectivepackagehaveacontrastingESDcautionlabel?是否每一静电防护包装都有一明显的静电警告标示25_AretheESDcautionlabelslegibletonormalvisionatadistanceofthreefeet?是否此静电警告标示(签)在3英呎的距离即可看得清楚?26_WhenmorethanoneESDworksurfaceisusedataworkstation,iseachsurfaceindividuallyconnectedtotheESDground?是否每一工作桌面或桌垫都有其个别的静电接地?,CheckList检查表(3),50,27_Whenconductive/highlyconductiveESDprotectiveworksurfacesareused(e.g.,stainlesssteel),aretheyconnecteddirectlytoESDgroundwithoutaseriesresistortoinsuretheyarecontinuouslyatgroundpotential?不锈钢工作桌面是否直接接地,即不需连接一1Mega欧姆的电阻?28_Whenafloorgroundingdevice(e.g.,dragchain,dragwire,conductivecastor)isusedtogroundmobileESDprotectedworkstations,isanESDprotectivefloorormatused?当移动性工作桌,车子被用来当成处理材料的工作桌时,它们是否有静电接地?及在有静电地板的工作环境?29_AreallESDSdevicespackedinESDprotectivepackaging,whennotatanESDprotectedareaorworkstation?当ESDS产品(即IC材料)不在静电防护区域时它们是否有在静电防护包装之内?30_ArethepackingmaterialdonotGeneratestaticvoltagemorethan+/-200voltswhenoperation?所有包装用的材料,在使用时是否不会产生大于+/-200v(TCP100V)的静电压?31_Isapplyingorremovingstaticgeneratingtapesandlabelstoantistatictubes,magazinesandcarrierswithESDSdevicesinside,performed?当有IC材料在管子或盘子内时