用透过率测试曲线确定半导体薄膜的光学常数和厚度_图文

1、 340 半 导 体 学 报 第 26 卷 Determination of Optical Constants and Thickness of Semiconductor Thin Films by Transmission Measurement 3 Shen Weidong , Liu Xu , Zhu Yong , Zou Tong , Ye Hui , and Gu Peif u ( S tate Key L aboratory of Modern Optical I nst ru mentation , Zhejiang U niversity , Hangz hou 31002

2、7 , Chi na Abstract : A simple and accurate met hod is presented for determination of t he optical constants and p hysical t hickness of semiconduc2 tor films. The met hod consists in fitting t he experimental transmission curve wit h t he help of t he p hysical model proposed by Forouhi and Bloomer

3、. The fit is made using t he modifieddownhillsimplex met hod to determine of t he film t hickness and t he model parame2 ters. This met hod is applied for amorp hous Si deposited by RF sputtering and amorp hous ZnO deposited by reactive sputtering on glass substrate. The calculated transmission curv

4、es fit t he experimental ones well. And t he results agree wit h t hose reported in t he literature and from step profiler , t he errors are less t han 4 %. The met hod is suitable for amor p hous and crystalline semiconductor films ,and t hose wit h t hinner t hickness as well. Key words : t hin fi

5、lm materials ; optical constants ; transmission curve ; Forouhi2Bloomer model ; “downhill”simplex met hod PACC : 7360 F ; 7865 ; 6860 Article ID : 025324177 ( 2005 0220335206 3 Project supported by National Natural Science Foundation of China (No. 60078001 Shen Weidong male ,was born in 1977 ,PhD candidate. His research is mainly focused on MO EMS technology as well as optical and optoelectronic films. Email :adongszju hot mail. com Received 26 February 200