奈米定位与量测技术

1、南台科技大學100學年度第1學期課程資訊課程名稱奈米定位與量測技術課程編碼10M09001系所代碼01開課班級碩研機械一甲 碩研能源一甲 碩研奈米一甲開課教師朱志良學分3.0時數3上課節次地點二 1 2 3 教室 E0410必選修選修課程概述本課程介紹各種奈米定位與量測技術，應用於機械、電子、材料、生物、醫 學等平台定位與量測方法。課程目標使學生瞭解各種奈米定位平台設計與分析、奈米材料物理性質、機械性質、 光、電性、微觀結構等量測技術及原理。課程大綱一、致動元件：線性馬達、音圈馬達、積層式壓電致動器二、奈米定位平台之設計與分析：彈性變形式三、長行程奈米定位平台之設計與分析：滯滑摩擦式、 尺蠖蟲

2、式、衝擊式、壓電陶瓷線性馬達四、量測技術簡介1量測學簡介、量測的相關準則、量測數據處理方法2.基礎聲、光、電、磁原理與聲、光、電、磁元件特性3微奈米量測技術簡介五、光學顯微術原理與應用1共焦顯微鏡2. 自動聚焦顯微鏡3. 立體顯微術Stereo Microscopy等六、干预儀原理與應用1. 干预學2. 雷射干预儀3. 輪廓干预儀七、掃描探針顯微鏡原理與應用1. 原子力顯微儀AFM 2. 掃瞄式穿隧電流顯微儀STM3. 近場光學顯微鏡等八、電子顯微鏡原理與應用1. 掃描電子顯微鏡SEM2. 穿透式電子顯微鏡TEM九、微奈米量測設備的研製方法1.奈米二次兀量測儀2奈米量測探頭等 十、微奈米材料檢

3、測技術1. 微奈米材料之機械性質檢測2. 微奈米材料之磁性、光、電性檢測3. 微奈米材料檢測所需試片之加工技術英文大綱1. Actuator: VCM, Voice Coil Moto r, PZT etc.2. Piezodriven Nanopositioning Stage: Elastic deformation3. Long-Travel Piezoelectric-Driven Nanopositioning Stage: Stick-slip friction, Clamp-release In chworm, Impact-drive, Piezoelectric cerami

4、c lin ear motor4. I ntroductio n of measureme nt tech niq uesIntroduction of metrology、Measurement criterions Data analysis and measurement procedures Characteristic of acoustic, optics, electric and magnetism componen、Design principle of the measurement instrumentsSensor and transducers Introductio

5、n of micro / nano measurement techniques5. Optical microscope principle and applicationCon focal microscopy、Auto-focus microscope Stereo Microscopyetc.6. Interferometer principle and applicationLaser principle、Interferenee principle、Laser interferomete、profileIn terferometeretc.7. Scanning Probe Mic

6、roscopeAtomic Force Microscope (AFM)、Scanning Tunneling Microscope (STM)、Sca nning Near-Field Optical Microscope (SNOM)etc.8. Electr on MicroscopeScanning electron microscope (SEM) Transmission Electron Microscopy (TEM)etc.9. Development techniques for Electro-Optical measurement EquipmentsNano opti

7、cal scale Nano optical measureme nt probe nano coord in ate measuri ng machi ne (CMM) .etc.10. Characterization measurement techniques for micro / nano materials Measurement of mechanical properties for micro / nano materials Measurement of magnetism, light、and electric properties for micro / nano materials- etc.教學方式課堂教授，分組討論，口頭報告，實務操作