干涉测试由静态到动态

1、n静态干涉图的处理静态干涉图的处理 n移相干涉术移相干涉术n环境对干涉测量的影响环境对干涉测量的影响n干涉图高速采集法干涉图高速采集法n共光路干涉仪共光路干涉仪n自适应主动抗震干涉仪自适应主动抗震干涉仪n动态移相干涉仪动态移相干涉仪照相物镜的干涉图照相物镜的干涉图 用样板看光圈用样板看光圈手动给定起始条纹极值点手动给定起始条纹极值点位置，然后由程序追踪。位置，然后由程序追踪。条纹追踪的判据为：条纹追踪的判据为：(1) (1) 中心像素的邻域光强中心像素的邻域光强之和最大（或最小）之和最大（或最小）(2) (2) 光强梯度最小（或最光强梯度最小（或最大）大）12345678910yfxfiyxc

2、yfxfiyxcyxayxiyxyx2exp),(*2exp),(),(),(FFT频域滤波频域滤波FFT-1)exp(21),(ibyxc),(22cos(),(),(),(21yxyfxfyxbyxayxi)(),(cos),(),(),(tyxyxIyxItyxIadiadiIIIcosI0 = a+ bcos( ) = a+ bcos I1 = a+ bcos( + /2) = a - bsin I2 = a+ bcos( + ) = a - bcos I3 = a+ bcos( +3 /2) = a+ bsin 2013atanIIII/2， 2013tanIIIIaI0 = a+

3、bcos()= a+ bcos I1 = a+ bcos(+/2)= a - bsin I2 = a+ bcos(+)= a - bcos I3 = a+ bcos(+3/2)= a+ bsin I0I1I2I3xI已经实用化，如：IntelliWave半透明区针孔J.Millerd, et al. Instantaneous phase-shift, point-diffractionJ.Millerd, et al. Instantaneous phase-shift, point-diffraction interferometer. Proc. SPIE, Vol.5531:264-2

4、72interferometer. Proc. SPIE, Vol.5531:264-272 Hot spotBackgroundJ. C. Wyant. Advances in Interferometric Metrology. Proc. SPIE,v.4927, 2002.10J. C. Wyant. Advances in Interferometric Metrology. Proc. SPIE,v.4927, 2002.10n震动补偿的主要思想震动补偿的主要思想n光强光强- -相位法相位法n电光调制法电光调制法n声光调制法声光调制法n声光外差测震法声光外差测震法n半导体激光器光反

5、馈法半导体激光器光反馈法n同步检波锁相干涉仪同步检波锁相干涉仪Single Mode LaserBSControllerPupil Image PlaneReferenceMirror“Point” Phase SensorPZTDRIVERLensVibrationVibration SignalAnti-Vibration SignalPZT(Limited bandwidth)位相延迟器检偏器波片EOSingle Mode LaserEO ModulatorPBSQWPDivergerOpticsHWPPSController& DriverPupil Image PlaneRe

6、ferenceMirrorTestMirrorPoint Phase SensorPolSenarmontSenarmont法法ESDI公司的公司的Intellium H2000 干涉仪干涉仪p光s光CCDFour Phase Shifted Interferograms on DetectorPhase Mask, Polarizer & Sensor ArrayHolographic ElementTest MirrorOptical Transfer & HOEPBSLaserDivergerQWPCCD Bradlley T.kimbrough,James Miller

7、d,et al. Bradlley T.kimbrough,James Millerd,et al.Low-coherence vibration insensitive Fizeau interferometer. SPIE,2006,6292:1-11 Low-coherence vibration insensitive Fizeau interferometer. SPIE,2006,6292:1-11 Fizcam 2000http:/ mirror, 408 Hz同步移相干涉图被测波面动态位相测量Once a person works with a simultaneous phase-shifting Interferometer, it is hard to go bac