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微专业---半导体制造技术课程:半导体工程专业英语ContentsSemiconductorProperties半导体特性01SemiconductorMaterials半导体材料02SemiconductorDeviceandHowTheyareUsed半导体器件及其使用03ProcessTechnology工艺技术04FabricationProcesses制造工艺05SemiconductorMaterialsandProcessCharacterization半导体材料与工艺表征06SemiconductorMaterials2.1CrystalStructureofSolids2.2ElementsofSemiconductorMaterialSystem2.3InorganicSemiconductors2.4MaterialsSelectionCriteria2.5OrganicSemiconductors2.6BulkSingle-CrystalFormation2.7Thin-FilmSingleCrystalFormation2.8Substrates2.9Thin-FilmInsulators2.10Thin-FilmConductors0214Introduction

Inthischaptersemiconductorsareconsideredintermsof

theirchemicalcompositiondistinguishingbetweeninorganicsemiconductors

andorganicsemiconductors.Amongtheformer,elementalsemiconductors

andcompoundsemiconductorsareconsideredasthedistinctclasses.First,

weconsiderinorganicsemiconductorsunderstoodhereasthesolidswhich

donotcontaincarbon-hydrogen(C-H)bondsintheirstructure.Inorganic

semiconductorsrepresentadominantclassofsemiconductormaterialsupon

whichbroadlyunderstoodsemiconductortechnologywasdevelopedoverthe

years.2

SemiconductorMaterials

2.3InorganicSemiconductors/dɪˈstɪŋɡwɪʃɪŋ/有区别的/ˌɪnɔːrˈɡænɪk/无机/dɪˈstɪŋkt/不同的/ˈhaɪdrədʒən/氢/ˈdɑːmɪnənt/占主导的15

ElementsformthegroupIVoftheperiodictable

featurefour

valenceelectronsandincludecarbon(C),silicon(Si),germanium(Ge),and

tin(Sn).2

SemiconductorMaterials

2.3InorganicSemiconductors/əˈrɪdʒɪneɪt/来源2.3.1

ElementalsemiconductorsText/dʒɜːrˈmeɪniəm/锗/ˌpɪriˈɑːdɪk/周期性的(a)PeriodicTableofElementsand(b)partofitreferredtoas“semiconductorperiodictable”fromwhichelementalandcompoundsemiconductormaterialsoriginate./tɪn/锡162

SemiconductorMaterials

2.3InorganicSemiconductors2.3.1

Elementalsemiconductors【Silicon,Si】Siisthemostimportantandthemostwidelyusedsemiconductor

material.

Whatmakessilicon

sospecialisacombinationofabundance(afteroxygen,siliconisthesecondmostcommonelementintheEarth’scrust),lowcostofobtaininghighqualitycrystalsascomparedtootherkeysemiconductors,andoverallcharacteristicsmakingithighlycompatiblewiththeneedsofmasscommercialmanufactureofsemiconductordevices./əˈbʌndəns/大量/krʌst/地壳172

SemiconductorMaterials

2.3InorganicSemiconductors2.3.1

Elementalsemiconductors【Germanium,Ge】

Beforesilicontookoverasaleadsemiconductormaterial,germaniumwassemiconductorofchoiceinearlydeviceapplications.Thekeydeficiencyofgermaniumascomparedtosiliconisthefactthatitsnativeoxide,germaniumdioxideGeO2,

isunstableanddecomposesunderthenormalconditionsincludingexposure

towater./ˌdiːkəmˈpoʊzɪz/分解/dɪˈfɪʃnsi/缺点/dʒɜːrˈmeɪniəm/锗

Innature,carbonmostcommonlyappearsintheformofgraphite.Inthethree-dimensionalsingle-crystalconfigurationcarboncrystallizesintheformofadiamond.【Carbon,C】/ˈɡræfaɪt/石墨/ˈdaɪəmənd/金刚石18

TheIV-IVclassofsemiconductorcompounds

isrepresentedbysiliconcompoundswithcarbon(siliconcarbide,

SiC)andwithgermanium(silicongermanium,SiGe).2

SemiconductorMaterials

2.3InorganicSemiconductors2.3.2

CompoundsemiconductorsText/ˈkɑːbaɪd/碳化物【IV-IVCompounds】/dʒɜːrˈmeɪniəm/锗【III-VCompounds】

TheIII-Vcompoundsaretypicallyclassifiedbasedon

thegroupVelementformingacompound

intonitrides,phosphides,

arsenidesandantimonides./ˈnaɪtraɪdz/碳化物/ˈfɑsˌfaɪz/磷化物/ˈɑːrsəˌnaɪz/砷化物/ˈæntəməˌnaɪz/锑化物19

Intermsoftheuseinsemiconductor

devicesthemostcommon2Dstructuresarementionedearlierinthischapter

quantumwellscomprisedofultra-thinlayersofsemiconductorwhichistypicallysandwichedbetweentwoothersemiconductorsfeaturingwiderenergy

gap.2

SemiconductorMaterials

2.3InorganicSemiconductors2.3.3

NanoscaleinorganicsemiconductorsText量子阱【Two-dimensional(2D)materials】(a)Single-atomthickgrapheneisrolledupinto(b)single-walledcarbon

nanotube,CNT.202

SemiconductorMaterials

2.3InorganicSemiconductors2.3.3

Nanoscaleinorganicsemiconductors【One-dimensional(1D)materials】

Theone-dimensionalnanostructures

arerepresentedbynanotubes,mostcommonlycarbonnanotubesreferredto

asCNT,andnanowiresinwhichcasesiliconnanowiresreferred

toasSiNWarethebestdeveloped./nænoʊtuːbz/纳米管/nænəˈwaɪərz/纳米线Schematicrepr

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