Ocean-Optics-光纤光谱仪课件

OceanOpticsSpectrometersSimplesolutionsforIntricateproblemsSpectroscopyis…

Spectroscopyisthescienceandmeasurementofemission&absorptionspectraoflightandotherformsofelectromagneticradiationandhowmaterials(matter)interactswithradiantenergySpectrumisaviewofradiantenergydispersedintoitswavelengthconstituentsLightandMatterAbsorbanceTransmission

ReflectionRefractionLightenterstheopticalfiberandisefficientlytransmittedtothespectrometer.Onceinthespectrometer,thedivergentlightemergingfromtheopticalfiberiscollimatedbyasphericalmirror.Thecollimatedlightisdiffractedbyaplanegrating,andtheresultingdiffractedlightisfocusedbyasecondsphericalmirror.Animageofthespectrumisprojectedontoa1-dimensionallinearCCDarray,andthedataistransferredtoacomputerthroughanA/Dconverter.OpticalBenchFeaturesGratingDetectorCrossedCzerny-TurneropticalpathDetectorCoatingCollectionLensSlitBlockingfilterModeStripperOrderSortingFilterTheFundamentalBalanceofSpectrometerConfigurationResolutionSensitivitySpectralRange

Everythingbeginshere…Spectrometersareselected...BydetectortypeByopticalbenchtypeByconfigurationtypeByapplication/functionDetectorTypesSilinearCCDarrayBack-thinnedareaCCDSilinearphotodiodearrayInGaAslineararrayCMOS(OEMonly)Sony2048-elementToshiba3648-elementQE/MAYAback-thinnedDetector

WhatisaCCD?

CCDstandsforcharge-coupleddevice.

ACCDisadetectormadeonasiliconwafer.

Duetothephysicalnatureofsilicon,photonsoflightthathititgenerateelectronsinthesilicon.

ThejoboftheCCDistocollecttheseelectronsinits"lightbuckets"(calledpixels)duringthelengthoftheexposuretolight.Themorelightfallingonaparticular"lightbucket"orpixel,themoreelectronsthatpixelwillcontain.

Thebucketsthentransfertheir

electrons(think'waterbucketbrigade')outtotheCCDcontroller(whichcontainstheelectronicstocontroltheCCD)andontothecomputer.

Thecomputerregeneratestheimageandwenowseethespectra…CCDPIXEL…BUCKETSLightEnergyPHOTONSCCDOperationPhotonsstrikingPixelscauseChargetoleaktoGroundDarkcurrentChargeleaksalittleanywayExposurelastsfordurationofintegrationperiodQuantumefficiencyPixelWellsPHOTONChargePixelsGroundAtendofintegrationperiod,remainingchargeindicateshowmanyphotonsweredetectedA/DconvertschargetoCountsSaturated!Nochargeleft,so…noresponsetofurtherphotonsCountsPixelsSaturated!

Quantumefficiency

(QE)

isameasureofhowwellaspecificsensorrespondstodifferentwavelengthsoflight.ThehighertheQE,themoresensitiveaCCDwillbeataparticularwavelength.Thequantumefficiency(QE)offront-illuminatedCCDisaround40%.

Thismeans… 40outof100incidentphotonsweredetected.

Back-illuminatedCCDshaveapeakquantumefficiencyupwardsof90%-- 90outof100photonsofacertainwavelength aredetected!

Ontheotherhand,photographicfilmandthehumaneyehaveapeakQEofabout10%.

Infront-illuminatedCCDs,lightmustpassthroughthepolysilicongatestructurelocatedabovethephotosensitivesiliconlayercalledthe“depletionlayer.”Inback-thinneddevices,alsoknownasback-illuminatedCCDs,theincidentphotonfluxdoesnothavetopenetratethepolysilicongatesandisabsorbeddirectlyintothesiliconpixels.FrontIlluminatedBackIlluminatedBackThinning–TheetchingawayofsiliconfromthebacksideofaCCD.

Thinningisdoneinalargebathofacid...Thedeviceismountedonasupportandisthenagitated.

Waxisusedtomountthedevicetoitssupport,sincetheaciddoesnotattackwax.

Whentheacidhaseatenawayacertainamountofsilicon,theCCDthatwasonce0.010"thickbecomes0.0005"thick!Whatisthedifference?OpticalBenchFeaturesGratingDetectorCrossedCzerny-TurneropticalpathDetectorCoatingCollectionLensSlitBlockingfilterModeStripperOrderSortingFilterSpectrometerPerformanceCriteriaSignal-to-NoiseRatio (Detector)SensitivityResolutionSmallestdetectablesignalchangeisafunctionoftheS:NforthespectrometerWecanaccuratelydetectasignalthatis2xtheS:NTheS:NdependsonlyonthedetectorchoiceTheS:NdoesnotdependonopticalbenchconfigurationSpectrometerSensitivity

EntranceOpticsandResolutionFixedSlits

NomovingpartstoalignorcomelooseFixedopticalresolutionvalueCanuselargerfiberstocollectmorelightNoSlits(usingthefiber)SlitwidtheasilychangedAllthelightfromthefiberisusedFiberdiameterdeterminesopticalresolutionOpticalResolutionwavelengthrealFWHMperfectFull-heightHalf-heightFWHMSpectrometerResolutionMeasuredasfull-widthathalf-maximum

(FWHM)

forapeakWavelengthIntensitynmTheFundamentalBalanceofSpectrometerConfigurationResolutionSensitivitySpectralRange

Everythingbeginshere…SpectrometerResolutionDependson:OpticalBenchdesignBigger=betterresolution–(worsespectralrange)SizeofdetectorpixelBigger=worseresolution-(worsesensitivity)WidthofslitBigger=worseresolution–(worsesensitivity)GratingchoiceMorelines=betterresolution, (butsmallerspectralrangeandworsesensitivity)SensitivityversusResolutionHowcanweincreaseSensitivityandmaintainResolution?FIBERwithKeyedConnectorsOPTICS–CollectionLensOpticalBenchFeaturesGratingDetectorCrossedCzerny-TurneropticalpathDetectorCoatingCollectionLensSlitBlockingfilterModeStripperOrderSortingFilterL2andL4DetectorCollectionLens1000uFiber200uPixelL2/4LensDetectorPackageWindowPixelLightfromFiberintoSlitLightfromFiberintoSlitL2/4LensDetectorPackageWindowPixelLightfromFiberintoSlitLightfromFiberintoSlitBlockingFiltersMiniatureblockingfiltersinentranceopticsBlockinterference/overlapfrom2ndor3rdorderfromthegrating(highpassfilters),makesdatainterpretationeasierReducelightintensity(neutraldensity),balancessignalsonsampleandreferencelegs,lessexpensivethaninlinefilters.Order-sortingfilteron

detectorExtendsrangeofsystembeyondasingleoctaveUnique2ndorderrejectiondesignimprovestransmissionefficiency,biggersignalsFiltersInstalledinSpectrometerHigh-passcoloredglassfilterswith50%Tλat:305,375,395,475,515,550,590nmColormodifyingfiltersNeutraldensityfiltersOFLVdetectorfilter(200-850nm)

2003004005004006008001000OrderSortingFilterExtendsrangeofsystembeyondasingleoctaveUnique2ndorderrejectiondesignimprovestransmissionefficiency,biggersignalsLowerStrayLightS100CompactSpectrometerMercuryemissionspectrarecordedwiththeS100-3648spectrometer.The253nmspectral

gaslineisevidentagainat506nm.

Thegreencursoris

highlightingthe491.87nmmercuryline.

(Theclosestlineto506nm).Thereisnospectrallineat506nmduethefilteringofsecond-orderlightproducedbythe253nmmercurygasemissionline.Thisfilteringwasdonewithanorder-sortingfilter.HC-1andOFLV200-1100DetectorCoatingsTurnsordinaryimagingdetectorintoahigh-performancespectroscopydetectorEliminatesinterferencepatterncausedbySiO2thinfilmetalonimprovesdynamicrangeProvidesUVresponseonUVresistantdetectorspermitssingledetectoroperationoverUV/VISandSWNIRrange(165-1300nm)Gratingsaglassplateormetalmirrorengravedwithalargenumberofparallellinesorgrooves,whichproducesaspectrumwhenlightpassesthroughitorreflectsChoosingaGratingWhatisthewavelengthregionofinterest(UV/VIS/NIR)?Whatisthedesiredwavelengthrange?Opticalresolutionisthekeyingredient

TheGrooveDensity(lines/mm)ofagratingdeterminesitsdispersionofwavelengths.Thegreaterthegroovedensity,thebettertheopticalresolutionpossible, butthelessthespectralrangeandsensitivity.GrooveDensityGratings3600l/pmmnotavailableforHR4000USB4000/2000+andS1024DWGratingRange*ThespectralrangeforGrating#6,#7,#9,#10,#11and#12variesaccordingtothestartingwavelengthrange.H-benchvs.S-bench

DetectorGratingSbenchHbenchLongerpath=ShorterspectralrangeHR4000

GratingRange#IntendedUseGrooveDensitySpectralRangeBlazeWavelengthBestEfficiency(>30%)HC-1UV-NIR300200-1100nmvariable200-1100nmH1UV600425-445nm300nm200-575nmH2UV/VIS600415-445nm400nm250-800nmH3VIS/Color600410-440nm500nm350-850nmH4NIR600410-430nm750nm530-1100nmH5UV/VIS1200205-220nmHolographic/UV200-400nmH6NIR1200140-195nm750nm500-1100nmH7UV/VIS240072-102nmHolographic/UV200-500nmH9VIS/NIR1200165-205nmHolographic/VIS400-800nmH10UV/VIS180095-140nmHolographic/UV200-635nmH11UV/VIS180075-135nmHolographic/VIS320-800nmH12UV/VIS240060-100nmHolographic/VIS250-575nmH13UV-NIR300900nm500nm300-1100nmH14NIR600410-420nm1000nm650-1100nmResolutionvs.SlitSize

5micron

Slit10micron

Slit25micron

Slit50micron

Slit100micron

Slit200micron

SlitUSB2000Spectrometer~3.0pixels~3.2pixels~4.2pixels~6.5pixels~12.0pixels~24.0pixelsUSB4000Spectrometer~5.3pixels~5.7pixels~7.5pixels~11.6pixels~21.0pixels~42.0pixelsHR2000Spectrometer~1.5pixels~2.0pixels~2.5pixels~4.2pixels~8.0pixels~15.3pixelsHR2000+Spectrometer~1.5pixels~2.0pixels~2.5pixels~4.2pixels~8.0pixels~15.3pixelsHR4000Spectrometer~2.0pixels~3.7pixels~4.4pixels~7.4pixels~14.0pixels~26.8pixelsNIR256-2.1SpectrometerN/A~1.2pixels~1.2pixels~1.5pixels~2.2pixels~4.0pixelsNIR256-2.5SpectrometerN/A~1.2pixels~1.2pixels~1.5pixels~2.2pixels~4.0pixelsNIR512SpectrometerN/A~2.4pixels~2.4pixels~2.9pixels~4.4pixels~7.9pixelsQE65000Spectrometer~2.0pixels~2.2pixels~2.6pixels~3.3pixels~4.7pixels~8.9pixelsUSB2000+USB4000+JAZandTORUS

Highresolution–HR4000+and2000+

HighsensitivityandDeepUVQE65000ANDMAYANearInfrared–NIRQuestOceanOpticsSpectrometersOpticalBenchTypesS:General-purpose

benchforabsorbance,irradiance,reflectance,fluorescenceZ-bench,

thenewforabsorbance,irradiance,reflectance,fluorescenceOpticalBenchTypesHR:High-resolutionbench

forlasercharacterization,atomicemissionlineanalysisQ-bench,MAYAbenchForfluorescence,Raman,UV,VUVandlow-lightapplicationsOpticalBenchTypes

NEOFOXopticalbench:

Fluorimeterformeasurementoffluorescencelifetime,phaseandintensityPhotoDiodeDetectors(notaCCD)NIR-bench

NIRapplications,900-2500nmTorus

ConcaveGratingSpectrometerOceanOpticsInc.ConfidentialInformation26

LowstraylightHigherthroughputImprovedthermalsensitivityModularityTorusOpto/Electro/MechanicalLayoutToroidalconcaveholographicgrating

SonyILX511Bdetector

Separateopticalandelectricalcompartments-ReducesStraylight-Improvedthermalsensitivitymanagement

Customizedopticaldesign/assemblyto-maximizeopticalefficiency-minimizestraylight-minimizethermalsensitivityOceanOpticsInc.ConfidentialInformation28TorusSpecificationsPhysicalDimensions 150mmx120mmx64mmWeight 954grams(2.1lbs)DetectorDetector SonyILX511BDetectorRange 200–1100nmPixels 2048PixelSize 14x200umPixelwelldepth 62,500e-Sensitivity 75photons/countat400nm,41photons/countat600nmOpticalBenchGrating AberrationcorrectedholographictoroidalconcavegratingDesign f/3,FlatfieldWavelengthRange 465nmFocallength 85mmEntranceaperture 5,10,25,50,100or200umslitorfiberwith userselectableaperture(testedatF3andF4).OpticalInputInterface SMA905fiberconnectorandC-mountlensadapterWhatisdifferentaboutJAZ?SeparateopticsandelectronicsOnboardcomputerOnboarddataprocessinganddataloggingOLEDdisplayOpticalbenchwithnewslitdesignforuserchangeableslitsExpansionconnectorstoenableconnectiontoavarietyofaccessoriesandlargerspectrometersystem(highlevelsofCONNECTIVITY)Stackableaccessories(spectrometers,lamps,etc)CPUEthernetmoduleSensorSensorLampmoduleBatterypackSpectrometerSpectrometerCPUandOLEDdisplaymoduleZ-benchspectrometermoduleCONNECTIVITYQE65000TheQE65000isagreatoptionforlow-light

levelapplicationsincluding:Fluorescence,Ramanspectroscopy,DNAsequencing,astronomy,thin-filmreflectivity…Youcansettheintegrationtimeofthespectrometerfrom7millisecondsto15minutes,withvirtuallynospectraldistortionQE65000ApplicationStrengthsLongIntegrationTimeForstationarysignals/samplesUse

QE65000>20secForShortIntegrationTimes<20secUseUSB2000USB4000HR4000HR2000+MAYAandMAYA-PRO

ConstrainedapplicationsUseQE65000ifyoucannotaveragemoretoincreaseS/N(minimizebaselineinterference)Ifthesampleismovingandyouonlyhave1shotQE65000SensitivityExcellentUVresponse!Upto90%QESonyandToshiba

40%QuantumEfficiencyQE65000HighlightsSlits5,10,25,50,100,200GratingsH1-H14HC1costsextraFilterOnlyOFLV-200-1100

NoL2lensneeded (detectoris1.4mmtall)DetectorLownoiseS7031-1006Back-thinned-90%QE2-DstructuredarrayTECooledSpectrometerUSB2.0interface16bitADCLownoiseelectronicsOtherfeaturesMayaSpectrometers

UV,highQE,noTECMayaPro2000S10420Maya2000S9840MayaHighlightsSlitsStandardSelectionAvailableGratingsH1-H14HC1costsOrderSortingFiltersOFLV-MAYA-200andOFLV-MAYAPRO-200OnlywithHC-1L2Lens–(MAYA2000only)Detectors2D2048elementCCD’sBackthinned-90%QE2-DstructuredarrayUncooledSpectrometerUSB2.0interface16bitADCLownoiseelectronicsOtherfeaturesOpticalRange&ResolutionshouldbesameasactualHR2000+performanceMayaCommonFeaturesUSB2.0InterfaceTransferscan=minIntegrationtimeExternalpowercouldberequiredforfastreadouttimes(<5mS)CurrentDraw:<500mAA/D:16bit500KHzTriggering:Onlysoftware&QuasiRealtimeNoExternalHardwareTriggerorExternalSynch

StrobeSignals(fullyprogrammable)SingleStrobeContinuousStrobeGPIO:10ElectronicFeaturesJustlikeQEbutnoTEcoolerMayaCCDComparisonParameterMaya2000Maya2000ProQE65000HR2000+DetectorHamamatsuS9840HamamatsuS10420HamamatsuS7031-1006SonyILX511ArchitectureBack-thinned,2DBack-thinned,2DBack-thinned,Cooled,2DLumogen1D#ofPixelsAll:2080x20Active:2048x14All:2068x70Active:2048x64All:1044x64Active:1024x58All:2069x1Active:2048x1PixelSize14umsquare14umsquare25umsquare14umx200umColumnHeight196mm896mm1392mm196mmWellDepth130Ke-200Ke-1000Ke-65Ke-PeakQEQE@300nm92%40%75%65%92%40%~30%~5%CCDEffectiveNumberofbits~12bit~14bit~15bit~10bitMayaSpectrometerComparisonParameterMaya2000Maya2000ProQE65000HR2000+IntegrationTime5ms–20s8ms–10sShootingfor5mS8ms–1500s1ms–20sA/DConverter16bit,500KHz16bit,250KHz+16bit,150KHz14bit,2MHzDynamicRangeSpec5000:1Typical8000:1+Spec10000:1Typical12:000:1+25000:11300:1S/N350:1450:11000:1250:1Non-Linearity(uncorrected)~4%~10%~1%~4%Linearity(corrected)<1%<1%<1%<1%Est.ColumnSensitivity.45Counts/e-.32Counts/e-.065Counts/e-3.9Counts/e-.99Counts/e-(14bit)MAYA–

UncooledandBackthinnedMaya2000(S9840)2048x14array,14mmpixels,28.6x0.196mmChipdynamicrange(5200:1)WeshouldsellwithL2Maya2000Pro(S10420)2048x64array,14mmpixels,28.6x0.896mmHigherchipdynamicrange(33000:1)HigherUVQuantumEfficiencyFocusinglensoptional(helpsreduceetaloning)Maxintegrationtime~10secondsNewMirror22XtheNIRsignalwithHC-1gratingMaya2000ProNIRQuest

TheGoldStandardfor

NIRSpectroscopyTypeofSpectrometers-NIRSpectrometerswiththeInGasdetectorCCDNIRQuest512NIRQuest256-2.1NIRQuest256-2.5NIRQuest512-2.2

NewBenchDesign…TECOpticalBenchDesign…

fromtheQEmodelGOLD

internaloptics

ForGreaterSpectralResponseintheNIR>20%betterthroughput

above1100nm

NewBenchDesign…

QETECCoolingdesign(2-stage)3xnoiseimprovementat10sintegrationtimeNoisePerformanceSpecification:<=12countsRMSnoise,SNR:>=4000NIR512NIRQuest512IntTimeAvgSDPeakSD

AvgSDPeakSD1ms6.710

2.93.4100ms6.79.9

2.73.21000ms7.111.3

3.33.83000ms7.324.3

3.34.010000ms9.257.5

3.35.01000ms(HG)12.3144.68.814.560000ms24.0A81.2A

29.936.0250scansateachintegrationtime,SDcalculatedforeachpixel.(A56scansonly)NIRQuestConfigurationsGratingl/mmNIRQuest512NIRQ256-2.1NIRQ256-2.5NIR175900-2500nmNIR2100900-2100nmEx.1300-2500nmNIR3~800nmrange150900-1700nmForexample:1200-2000nmor1300-2100nmForexample:1550-2350nmor1700-2500nmChoosestartingwavelengthandtheapprox.rangewouldbe:NIR10*300SpectralRange:350-380nmNIR11*400SpectralRange:240-290nmNIR12*500SpectralRange:160-220nmNIR13*600SpectralRange:100-180nmNIR14*1000SpectralRange:50–90nmNIRQuest512-2.2>20%betterthroughput atwavelengths>1100nm

2-3ximprovementinnoiseperformanceBetterperformanceatlongintegrationtimes

“True”externaltriggeringmodeFastertemperaturestabilizationNIRQuest–PerformanceAdvantages

512CooledInGaAsarraydetectorAcquiresdataasfastas1msCustomizewithhundredsofaccessoriesHamamatsuG9204-512;InGaAslineararraydetectorwith0%defectivepixelsDetectorrange:900-1700nmComputerinterfaces:USB2.0@12Mbps;RS-232(2-wire)@115.2KbaudGratingEfficiency–NIR#1SpecificationsSpecificationsNIRQuest512NIRQuest256-2.1NIRQuest256-2.5Detector:HamamatsuG9204-512InGaAslineararrayHamamatsuG9206-256InGaAslineararrayHamamatsuG9208-256InGaAslineararrayDetectorrange:850-1700nm900-2100nm900-2500nmPixelsize:25µmx500µm50µmx250µm50µmx250µmDefectivepixels:None(maximumdarkcurrent=60pA@20°C)2%(maximumdarkcurrent=120pA@-15°C)5%(maximumdarkcurrent=2000pA@-15°C)GratingsSeeGratingOptionsTableEntranceaperture:10,25,50,100or200µmwideslitsorfiber(noslit)Integrationtime:1ms–3seconds*1ms-1second*1ms–30secondsCorrectedlinearity:>99.8%>99.8%>99.8%Operatingtemp(min):-10.3°C-15°C-15°CTemperaturestability:+/-0.1°C+/-0.1°C+/-0.1°CDatatransferspeed:Fullspectrumtomemoryevery10mswithUSBportFullspectrumtomemoryevery10mswithUSBportFullspectrumtomemoryevery10mswithUSBportComputerinterfaces:USB2.0@480Mbps;RS-232(2-wire)@115.2kbaudUSB2.0@480Mbps;RS-232(2-wire)@115.2k