微热电发电机

Ahigh-output-voltagemicro-thermoelectricgeneratorhavinghigh-aspect-ratiostructure

具有高深宽比结构的高输出电压的微热电发电机Contents1.Introduction2.Design3.Fabrication4.Experimentaldetails5.Conclusion1.IntroductionMicro-thermoelectricgenerators(μTEGs):AdvantagesProvidecontinuousreal-timefeedbackandmonitoringofhumansconditions.Longlifetime,lowacousticnoiseandnomovingparts.ChallengesTheoutputvoltagesarecurrentlysolowthattheycannotoperateintegratedelectronicdeviceswithouttheassistanceofdc-to-dcconverters.Thereisabigenergylosswhenanup-conversioniscarriedoutfromanultralowvoltageoflessthan700mV,whichisrequiredforoperatingbipolarjunctiontransistors.High-aspect-ratio(HAR)thermocouples:IncreasetheoutputvoltageTemperatureHighthermalresistanceHighintegrationdensityDifficultyThermoelectricmaterialsaredifficulttodepositasthickfilmsandtopatterntohaveanHAR目的：制造出深宽比为3.5，集成度为620TCs/cm2的热电偶AμTEGchiphaving56thermocouples（TCs）withhighthermoelectricpropertiesof0.16VK–1cm–2andathermalresistanceof17.1KW–1,whichissuitableforenergyharvestingfromalow-levelheatsourcesuchasahumanbody.方法：Aerosoldeposition（ASD）气相淀积，Hotisostaticpressing(HIP)热等静压2.Design3.Fabrication紫外线照射（20mW/cm2,150s）热处理(2,N2,500℃1h,590℃，2h,增强刻蚀)用稀释的HF(4:1)溶液刻蚀至完全形成4.对齐，固定，气相淀积（ASD）Bi2Te3纳米粉(n型)5.换掩膜版，Bi0.3Sb1.7Te3（p）6.热等静压（HIP）电极：Pt/Cu/Pt/Cr两部分：气相室和淀积室通过管道连接气相室：气体引入，振动500Hz(避免凝聚)，加热100℃淀积室：喷嘴，粒子束，模具基底固定在平台基底上4.Experimentaldetails测试：铜片用热胶固定温差（0-30K）用加热器和波尔铁制冷器控制用56个热电偶植入9mm2区域结果：通孔直径50μm,高度350μm，间距150μm展弦比7，需要每平方厘米4400个通孔，通孔直径30μmThethermoelectricpropertiesthattheASDfilmachievesareasgoodasthoseofthehot-pressedbulkmaterialsbecauseoftheassistanceofthepostannealingprocess.在热处理后，底部会有空洞在热等静压处理后，空洞会减少填充和掩盖交替进行直径100，间距240，集成度620集成度受调整精度影响4.使用光学调整设备，会使集成度更高，1000-11005.ConclusionWesuccessfullyfabricatedmicro-thermocoupleshavingaHARof3.5andahighintegrationdensityof620TCscm–2withhighmechanicaltoughness.Method：Combinedaphotosensitiveglassmold,ASDandHIP.ItisexpectedthattheproposedfabricationmethodwillachieveaμTEGhavinganaspectratioof7thatwillobtainanopencircuitvoltageeff