【《微型压电加速度计及力学传感器概述》1600字】

微型压电加速度计及力学传感器概述压电材料也可以集成到微机械结构并配置用于精确的惯性测量。利用正压电效应，这些器件可以用作敏感的加速度计，特别是用于振动水平的传感和监测加速度的时间变化。加速度计常常具有这样一种结构：通过体加工技术在硅微基底框架加工出一个通过弯曲结构与基底相联系的质量块，并在弯曲的结构上集成一层压电材料用作敏感元件。YugandharGADDINEN.CITE<EndNote><Cite><Author>Yugandhar</Author><Year>2015</Year><RecNum>236</RecNum><DisplayText><styleface="superscript">[67]</style></DisplayText><record><rec-number>236</rec-number><foreign-keys><keyapp="EN"db-id="s9ex25exrf2923ef9pb5dve9swewd9rzp2r2">236</key></foreign-keys><ref-typename="JournalArticle">17</ref-type><contributors><authors><author>Yugandhar,G</author><author>Rao,GVenkateswara</author><author>Rao,KSrinivasa</author></authors></contributors><titles><title>ModelingandsimulationofpiezoelectricMEMSsensor</title><secondary-title>MaterialsToday:Proceedings</secondary-title></titles><periodical><full-title>MaterialsToday:Proceedings</full-title></periodical><pages>1595-1602</pages><volume>2</volume><number>4-5</number><dates><year>2015</year></dates><isbn>2214-7853</isbn><urls></urls></record></Cite></EndNote>[\o"Yugandhar,2015#236"67]等提出了一种基于PZT-5H材料的环形膜结构压电加速度计，如REF_Ref65755551\h图1-6所示，并通过仿真分析论证了加速度计的高灵敏度和较宽的工作频率范围，且该加速度计具有良好的温度稳定性。图1-SEQ图1-\*ARABIC6环形膜结构压电加速度计ADDINEN.CITE<EndNote><Cite><Author>Yugandhar</Author><Year>2015</Year><RecNum>236</RecNum><DisplayText><styleface="superscript">[67]</style></DisplayText><record><rec-number>236</rec-number><foreign-keys><keyapp="EN"db-id="s9ex25exrf2923ef9pb5dve9swewd9rzp2r2">236</key></foreign-keys><ref-typename="JournalArticle">17</ref-type><contributors><authors><author>Yugandhar,G</author><author>Rao,GVenkateswara</author><author>Rao,KSrinivasa</author></authors></contributors><titles><title>ModelingandsimulationofpiezoelectricMEMSsensor</title><secondary-title>MaterialsToday:Proceedings</secondary-title></titles><periodical><full-title>MaterialsToday:Proceedings</full-title></periodical><pages>1595-1602</pages><volume>2</volume><number>4-5</number><dates><year>2015</year></dates><isbn>2214-7853</isbn><urls></urls></record></Cite></EndNote>[\o"Yugandhar,2015#236"67]Fig.1-SEQFig.1-\*ARABIC6Annulardiaphragm-typepiezoelectricaccelerometerADDINEN.CITE<EndNote><Cite><Author>Yugandhar</Author><Year>2015</Year><RecNum>236</RecNum><DisplayText><styleface="superscript">[67]</style></DisplayText><record><rec-number>236</rec-number><foreign-keys><keyapp="EN"db-id="s9ex25exrf2923ef9pb5dve9swewd9rzp2r2">236</key></foreign-keys><ref-typename="JournalArticle">17</ref-type><contributors><authors><author>Yugandhar,G</author><author>Rao,GVenkateswara</author><author>Rao,KSrinivasa</author></authors></contributors><titles><title>ModelingandsimulationofpiezoelectricMEMSsensor</title><secondary-title>MaterialsToday:Proceedings</secondary-title></titles><periodical><full-title>MaterialsToday:Proceedings</full-title></periodical><pages>1595-1602</pages><volume>2</volume><number>4-5</number><dates><year>2015</year></dates><isbn>2214-7853</isbn><urls></urls></record></Cite></EndNote>[\o"Yugandhar,2015#236"67]HongADDINEN.CITE<EndNote><Cite><Author>Hong</Author><Year>2009</Year><RecNum>237</RecNum><DisplayText><styleface="superscript">[68]</style></DisplayText><record><rec-number>237</rec-number><foreign-keys><keyapp="EN"db-id="s9ex25exrf2923ef9pb5dve9swewd9rzp2r2">237</key></foreign-keys><ref-typename="ConferenceProceedings">10</ref-type><contributors><authors><author>Hong,Lian-jin</author><author>Fang,Er-zheng</author><author>Wu,Tian-tian</author></authors></contributors><titles><title>Studyonminiaturizationoflow-frequency,co-vibratingvectorhydrohonesbasedonpiezoelectricaccelerometers</title><secondary-title>2009SymposiumonPiezoelectricity,AcousticWaves,andDeviceApplications(SPAWDA2009)</secondary-title></titles><pages>7-7</pages><dates><year>2009</year></dates><publisher>IEEE</publisher><isbn>1424449502</isbn><urls></urls></record></Cite></EndNote>[\o"Hong,2009#237"68]等设计了一种在低频下具有高灵敏度的加速度计。他们利用PZT作为敏感材料，将绝缘衬底硅晶片加工出一种类似蟹腿的结构，如REF_Ref65762149\h图1-7所示。他们对该装置进行了分析建模和有限元分析，得出了该装置的优化设计方案。并对优化参数了的加速度计采用了不同的加工方式进行比较，如热氧化、溅射和溶胶-凝胶沉积法。之后使用激振器对器件进行了相同条件下的测试。测得的电荷灵敏度为2.472pC/g，电压灵敏度为18mV/g，共振频率为140Hz。图1-SEQ图1-\*ARABIC7绝缘衬底硅微压电加速度计的有限元分析ADDINEN.CITE<EndNote><Cite><Author>Hong</Author><Year>2009</Year><RecNum>237</RecNum><DisplayText><styleface="superscript">[68]</style></DisplayText><record><rec-number>237</rec-number><foreign-keys><keyapp="EN"db-id="s9ex25exrf2923ef9pb5dve9swewd9rzp2r2">237</key></foreign-keys><ref-typename="ConferenceProceedings">10</ref-type><contributors><authors><author>Hong,Lian-jin</author><author>Fang,Er-zheng</author><author>Wu,Tian-tian</author></authors></contributors><titles><title>Studyonminiaturizationoflow-frequency,co-vibratingvectorhydrohonesbasedonpiezoelectricaccelerometers</title><secondary-title>2009SymposiumonPiezoelectricity,AcousticWaves,andDeviceApplications(SPAWDA2009)</secondary-title></titles><pages>7-7</pages><dates><year>2009</year></dates><publisher>IEEE</publisher><isbn>1424449502</isbn><urls></urls></record></Cite></EndNote>[\o"Hong,2009#237"68]Fig.1-SEQFig.1-\*ARABIC7FiniteelementanalysisofaSOI-MEMSpiezoelectricaccelerometerADDINEN.CITE<EndNote><Cite><Author>Hong</Author><Year>2009</Year><RecNum>237</RecNum><DisplayText><styleface="superscript">[68]</style></DisplayText><record><rec-number>237</rec-number><foreign-keys><keyapp="EN"db-id="s9ex25exrf2923ef9pb5dve9swewd9rzp2r2">237</key></foreign-keys><ref-typename="ConferenceProceedings">10</ref-type><contributors><authors><author>Hong,Lian-jin</author><author>Fang,Er-zheng</author><author>Wu,Tian-tian</author></authors></contributors><titles><title>Studyonminiaturizationoflow-frequency,co-vibratingvectorhydrohonesbasedonpiezoelectricaccelerometers</title><secondary-title>2009SymposiumonPiezoelectricity,AcousticWaves,andDeviceApplications(SPAWDA2009)</secondary-title></titles><pages>7-7</pages><dates><year>2009</year></dates><publisher>IEEE</publisher><isbn>1424449502</isbn><urls></urls></record></Cite></EndNote>[\o"Hong,2009#237"68]ShenADDINEN.CITE<EndNote><Cite><Author>Shen</Author><Year>2016</Year><RecNum>399</RecNum><DisplayText><styleface="superscript">[69]</style></DisplayText><record><rec-number>399</rec-number><foreign-keys><keyapp="EN"db-id="s9ex25exrf2923ef9pb5dve9swewd9rzp2r2">399</key></foreign-keys><ref-typename="JournalArticle">17</ref-type><contributors><authors><author>Shen,Zhiyuan</author><author>Tan,ChinYaw</author><author>Yao,Kui</author><author>Zhang,Lei</author><author>Chen,YiFan</author></authors></contributors><titles><title>Aminiaturizedwirelessaccelerometerwithmicromachinedpiezoelectricsensingelement</title><secondary-title>Sensors&ActuatorsAPhysical</secondary-title></titles><periodical><full-title>Sensors&ActuatorsAPhysical</full-title></periodical><pages>113-119</pages><volume>241</volume><dates><year>2016</year></dates><urls></urls></record></Cite></EndNote>[\o"Shen,2016#399"69]等设计了一种采用压电微传感元件的小型化无线加速度计，并对其进行了理论分析，并通过对远程机械振动的监测来进行了验证。微传感元件包括微机械单片硅质量块和涂有面内极化PZT薄膜的多个硅梁，如REF_Ref65763151\h图1-8所示。通过把所有微型传感元件、电荷放大器和信号处理电路、射频模块和电池容纳在一起进行封装，获得了一种低剖面紧凑封装。与振动加速度成线性比例的电压输出信号被放大、数字化并通过射频通信传输到远程基本单元。并研究了器件封装对包含环境干扰屏蔽的无线压电加速度计动态响应的影响。加速度计具有接近30mV/g的较高灵敏度。图1-SEQ图1-\*ARABIC8小型化无线加速度计示意图ADDINEN.CITE<EndNote><Cite><Author>Shen</Author><Year>2016</Year><RecNum>399</RecNum><DisplayText><styleface="superscript">[69]</style></DisplayText><record><rec-number>399</rec-number><foreign-keys><keyapp="EN"db-id="s9ex25exrf2923ef9pb5dve9swewd9rzp2r2">399</key></foreign-keys><ref-typename="JournalArticle">17</ref-type><contributors><authors><author>Shen,Zhiyuan</author><author>Tan,ChinYaw</author><author>Yao,Kui</author><author>Zhang,Lei</author><author>Chen,YiFan</author></authors></contributors><titles><title>Aminiaturizedwirelessaccelerometerwithmicromachinedpiezoelectricsensingelement</title><secondary-title>Sensors&ActuatorsAPhysical</secondary-title></titles><periodical><full-title>Sensors&ActuatorsAPhysical</full-title></periodical><pages>113-119</pages><volume>241</volume><dates><year>2016</year></dates><urls></urls></record></Cite></EndNote>[\o"Shen,2016#399"69]Fig.1-SEQFig.1-\*ARABIC8SchematicaminiaturizedwirelessaccelerometerADDINEN.CITE<EndNote><Cite><Author>Shen</Author><Year>2016</Year><RecNum>399</RecNum><DisplayText><styleface="superscript">[69]</style></DisplayText><record><rec-number>399</rec-number><foreign-keys><keyapp="EN"db-id="s9ex25exrf2923ef9pb5dve9swewd9rzp2r2">399</key></foreign-keys><ref-typename="JournalArticle">17</ref-type><contributors><authors><author>Shen,Zhiyuan</author><author>Tan,ChinYaw</author><author>Yao,Kui</author><author>Zhang,Lei</author><author>Chen,YiFan</author></authors></contributors><titles><title>Aminiaturizedwirelessaccelerometerwithmicromachinedpiezoelectricsensingelement</title><secondary-title>Sensors&ActuatorsAPhysical</secondary-title></titles><periodical><full-title>Sensors&ActuatorsAPhysical</full-title></periodical><pages>113-119</pages><volume>241</volume><dates><year>2016</year></dates><urls></urls></record></Cite></EndNote>[\o"Shen,2016#399"69]ZhouADDINEN.CITE<EndNote><Cite><Author>Zhou</Author><Year>2016</Year><RecNum>239</RecNum><DisplayText><styleface="superscript">[70]</style></DisplayText><record><rec-number>239</rec-number><foreign-keys><keyapp="EN"db-id="s9ex25exrf2923ef9pb5dve9swewd9rzp2r2">239</key></foreign-keys><ref-typename="ConferenceProceedings">10</ref-type><contributors><authors><author>Zhou,Hui</author><author>Han,Rui-hua</author><author>Xu,Ma-hui</author><author>Guo,Hang</author></authors></contributors><titles><title>Studyofapiezoelectricaccelerometerbasedond33mode</title><secondary-title>2016SymposiumonPiezoelectricity,AcousticWaves,andDeviceApplications(SPAWDA)</secondary-title></titles><pages>61-65</pages><dates><year>2016</year></dates><publisher>IEEE</publisher><isbn>1509011897</isbn><urls></urls></record></Cite></EndNote>[\o"Zhou,2016#239"70]等研究了一种基于d33模式的压电加速度计。它由多个悬臂梁支撑一个中心质量块构成主要结构。PZT薄膜和叉指电极被设计成沉积在梁的表面上，如REF_Ref65763775\h图1-9所示。PZT薄膜为面内极化。采用有限元法对加速度计进行了基本分析。结果表明，所提出的加速度计能够比在d31模式下提供更高的电压输出，在不降低带宽的情况下显著提高灵敏度。图1-SEQ图1-\*ARABIC9微型压电加速度计在d33模式下的结构ADDINEN.CITE<EndNote><Cite><Author>Zhou</Author><Year>2016</Year><RecNum>239</RecNum><DisplayText><styleface="superscript">[70]</style></DisplayText><record><rec-number>239</rec-number><foreign-keys><keyapp="EN"db-id="s9ex25exrf2923ef9pb5dve9swewd9rzp2r2">239</key></foreign-keys><ref-typename="ConferenceProceedings">10</ref-type><contributors><authors><author>Zhou,Hui</author><author>Han,Rui-hua</author><author>Xu,Ma-hui</author><author>Guo,Hang</author></authors></contributors><titles><title>Studyofapiezoelectricaccelerometerbasedond33mode</title><secondary-title>2016SymposiumonPiezoelectricity,AcousticWaves,andDeviceApplications(SPAWDA)</secondary-title></titles><pages>61-65</pages><dates><year>2016</year></dates><publisher>IEEE</publisher><isbn>1509011897</isbn><urls></urls></record></Cite></EndNote>[\o"Zhou,2016#239"70]Fig.1-SEQFig.1-\*ARABIC9Structureofaminiaturizedpiezoelectricaccelerometerbasedond33modeADDINEN.CITE<EndNote><Cite><Author>Zhou</Author><Year>2016</Year><RecNum>239</RecNum><DisplayText><styleface="superscript">[70]</style></DisplayText><record><rec-number>239</rec-number><foreign-keys><keyapp="EN"db-id="s9ex25exrf2923ef9pb5dve9swewd9rzp2r2">239</key></foreign-keys><ref-typename="ConferenceProceedings">10</ref-type><contributors><authors><author>Zhou,Hui</author><author>Han,Rui-hua</author><author>Xu,Ma-hui</author><author>Guo,Hang</author></authors></contributors><titles><title>Studyofapiezoelectricaccelerometerbasedond33mode</title><secondary-title>2016SymposiumonPiezoelectricity,AcousticWaves,andDeviceApplications(SPAWDA)</secondary-title></titles><pages>61-65</pages><dates><year>2016</year></dates><publisher>IEEE</publisher><isbn>1509011897</isbn><urls></urls></record></Cite></EndNote>[\o"Zhou,2016#239"70]压电复合梁结构也常常应用在压电MEMS力传感器的设计中。孟汉柏ADDINEN.CITE<EndNote><Cite><Author>孟汉柏</Author><Year>2007</Year><RecNum>240</RecNum><DisplayText><styleface="superscript">[71]</style></DisplayText><record><rec-number>240</rec-number><foreign-keys><keyapp="EN"db-id="s9ex25exrf2923ef9pb5dve9swewd9rzp2r2">240</key></foreign-keys><ref-typename="Thesis">32</ref-type><contributors><authors><author>孟汉柏</author></authors></contributors><titles><title>PT/PZT/PT薄膜微力传感器的研究</title></titles><dates><year>2007</year></dates><publisher>大连理工大学</publisher><urls></urls></record></Cite></EndNote>[\o"孟汉柏,2007#240"71]等提出一种Pt/PZT/Pt薄膜作压电层的微力传感器，传感器的结构为一悬臂梁，其加工过程如REF_Ref65763978\h图1-10所示。他们采用一个微小的探针来给悬臂梁的自由端施加力的作用，对传感器的静态性能和动态性能分别进行了测试。该传感器的灵敏度为0.007mV/μN。图1-SEQ图1-\*ARABIC10微悬臂梁的加工流程图ADDINEN.CITE<EndNote><Cite><Author>孟汉柏</Author><Year>2007</Year><RecNum>240</RecNum><DisplayText><styleface="superscript">[71]</style></DisplayText><record><rec-number>240</rec-number><foreign-keys><keyapp="EN"db-id="s9ex25exrf2923ef9pb5dve9swewd9rzp2r2">240</key></foreign-keys><ref-typename="Thesis">32</ref-type><contributors><authors><author>孟汉柏</author></authors></contributors><titles><title>PT/PZT/PT薄膜微力传感器的研究</title></titles><dates><year>2007</year></dates><publisher>大连理工大学</publisher><urls></urls></record></Cite></EndNote>[\o"孟汉柏,2007#240"71]Fig.1-SEQFig.1-\*ARABIC10SchematicoffabricationprocessflowofMEMScantileverbeamADDINEN.CITE<EndNote><Cite><Author>孟汉柏</Author><Year>2007</Year><RecNum>240</RecNum><DisplayText><styleface="superscript">[71]</style></DisplayText><record><rec-number>240</rec-number><foreign-keys><keyapp="EN"db-id="s9ex25exrf2923ef9pb5dve9swewd9rzp2r2">240</key></foreign-keys><ref-typename="Thesis">32</ref-type><contributors><authors><author>孟汉柏</author></authors></contributors><titles><title>PT/PZT/PT薄膜微力传感器的研究</title></titles><dates><year>2007</year></dates><publisher>大连理工大学</publisher><urls></urls></record></Cite></EndNote>[\o"孟汉柏,2007#240"71]卢晓光ADDINEN.CITE<EndNote><Cite><Author>卢晓光</Author><Year>2006</Year><RecNum>241</RecNum><DisplayText><styleface="superscript">[72]</style></DisplayText><record><rec-number>241</rec-number><foreign-keys><keyapp="EN"db-id="s9ex25exrf2923ef9pb5dve9swewd9rzp2r2">241</key></foreign-keys><ref-typename="Thesis">32</ref-type><contributors><authors><author>卢晓光</author></authors></contributors><titles><title>压电薄膜微力传感器特性研究</title></titles><dates><year>2006</year></dates><publisher>大连理工大学</publisher><urls></urls></record></Cite></EndNote>[\o"卢晓光,2006#241"72]等提出了一种压电双晶微悬臂梁结构，用来进行微小力的测量，其结构如REF_Ref65764242\h图1-11所示。他们将微型悬臂梁安装于隔振台上，通过一个微小探针给悬臂梁的自由端施加力来进行传感器的性能测试，测量结果为该传感器的灵敏度为9.47μV/N。图1-SEQ图1-\*ARABIC11基于双晶PZT的压电悬臂梁示意图ADDINEN.CITE<EndNote><Cite><Author>卢晓光</Author><Year>2006</Year><RecNum>241</RecNum><DisplayText><styleface="superscript">[72]</style></DisplayText><record><rec-number>241</rec-number><foreign-keys><keyapp="EN"db-id="s9ex25exrf2923ef9pb5dve9swewd9rzp2r2">241</key></foreign-keys><ref-typename="Thesis">32</ref-type><contributors><authors><author>卢晓光</author></authors></contributors><titles><title>压电薄膜微力传感器特性研究</title></titles><dates><year>2006</year></dates><publisher>大连理工大学</publisher><urls></urls></record></Cite></EndNote>[\o"卢晓光,2006#241"72]Fig.1-SEQFig.1-\*ARABIC11SchematicofPZTbimorphcantileverADDINEN.CITE<EndNote><Cite><Author>卢晓光</Author><Year>2006</Year><RecNum>241</RecNum><DisplayText><styleface="superscript">[72]</style></DisplayText><record><rec-number>241</rec-number><foreign-keys><keyapp="EN"db-id="s9ex25exrf2923ef9pb5dve9swewd9rzp2r2">241</key></foreign-keys><ref-typename="Thesis">32</ref-type><contributors><authors><author>卢晓光</author></authors></contributors><titles><title>压电薄膜微力传感器特性研究</title></titles><dates><year>2006</year></dates><publisher>大连理工大学</publisher><urls></urls></record></Cite></EndNote>[\o"卢晓光,2006#241"72]除了悬臂梁结构之外，圆形、方形膜片结构也常见于压电MEMS力传感器的设计中。LiangADDINEN.CITE<EndNote><Cite><Author>Liang</Author><Year>2015</Year><RecNum>242</RecNum><DisplayText><styleface="superscript">[73]</style></DisplayText><record><rec-number>242</rec-number><foreign-keys><keyapp="EN"db-id="s9ex25exrf2923ef9pb5dve9swewd9rzp2r2">242</key></foreign-keys><ref-typename="JournalArticle">17</ref-type><contributors><authors><author>Liang,Rongjie</author><author>Wang,Qing-Ming</author></authors></contributors><titles><title>HighsensitivitypiezoelectricsensorsusingflexiblePZTthick-filmforshocktubepressuretesting</title><secondary-title>SensorsandActuatorsA:Physical</secondary-title></titles><periodical><full-title>SensorsandActuatorsA:Physical</full-title></periodical><pages>317-327</pages><volume>235</volume><dates><year>2015</year></dates><isbn>0924-4247</isbn><urls></urls></record></Cite></EndNote>[\o"Liang,2015#242"73]等提出了一种用于冲击管道压力测量的PZT厚膜压力传感器，其结构如REF_Ref65764811\h图1-12所示。他们从理论上分析了产生的电压信号与模型受到压力之间的关系。利用冲击管装置进行冲击波压力测试，测试传感器在压力载荷下的传感能力，并在实验条件下对不同尺寸的传感器进行测试。测试的传感器样品的电压灵敏度比机械压力传感器高出数倍。图1-SEQ图1-\*ARABIC12圆形PZT厚膜压力传感器ADDINEN.CITE<EndNote><Cite><Author>Liang</Author><Year>2015</Year><RecNum>242</RecNum><DisplayText><styleface="superscript">[73]</style></DisplayText><record><rec-number>242</rec-number><foreign-keys><keyapp="EN"db-id="s9ex25exrf2923ef9pb5dve9swewd9rzp2r2">242</key></foreign-keys><ref-typename="JournalArticle">17</ref-type><contributors><authors><author>Liang,Rongjie</author><author>Wang,Qing-Ming</author></authors></contributors><titles><title>HighsensitivitypiezoelectricsensorsusingflexiblePZTthick-filmforshocktubepressuretesting</title><secondary-title>SensorsandActuatorsA:Physical</secondary-title></titles><periodical><full-title>SensorsandActuatorsA:Physical</full-title></periodical><pages>317-327</pages><volume>235</volume><dates><year>2015</year></dates><isbn>0924-4247</isbn><urls></urls></record></Cite></EndNote>[\o"Liang,2015#242"73]Fig.1-SEQFig.1-\*ARABIC12PiezoelectricsensorsusingflexiblePZTthickfilmADDINEN.CITE<EndNote><Cite><Author>Liang</Author><Year>2015</Year><RecNum>242</RecNum><DisplayText><styleface="superscript">[73]</style></DisplayText><record><rec-number>242</rec-number><foreign-keys><keyapp="EN"db-id="s9ex25exrf2923ef9pb5dve9swewd9rzp2r2">242</key></foreign-keys><ref-typename="JournalArticle">17</ref-type><contributors><authors><author>Liang,Rongjie</author><author>Wang,Qing-Ming</author></authors></contributors><titles><title>HighsensitivitypiezoelectricsensorsusingflexiblePZTthick-filmforshocktubepressuretesting</title><secondary-title>SensorsandActuatorsA:Physical</secondary-title></titles><periodical><full-title>SensorsandActuatorsA:Physical</full-title></periodical><pages>317-327</pages><volume>235</volume><dates><year>2015</year></dates><isbn>0924-4247</isbn><urls></urls></record></Cite></EndNote>[\o"Liang,2015#242"73]MoshenADDINEN.CITE<EndNote><Cite><Author>Asadnia</Author><Year>2013</Year><RecNum>334</RecNum><DisplayText><styleface="superscript">[74,75]</style></DisplayText><record><rec-number>334</rec-number><foreign-keys><keyapp="EN"db-id="s9ex25exrf2923ef9pb5dve9swewd9rzp2r2">334</key></foreign-keys><ref-typename="JournalArticle">17</ref-type><contributors><authors><author>Asadnia,Mohsen</author><author>Kottapalli,AjayGiriPrakash</author><author>Shen,Zhiyuan</author><author>Miao,Jianmin</author><author>Triantafyllou,Michael</author></authors></contributors><titles><title>Flexibleandsurface-mountablepiezoelectricsensorarraysforunderwatersensinginmarinevehicles</title><secondary-title>IEEESensorsJournal</secondary-title></titles><periodical><full-title>IEEESensorsJournal</full-title></periodical><pages>3918-3925</pages><volume>13</volume><number>10</number><dates><year>2013</year></dates><isbn>1530-437X</isbn><urls></urls></record></Cite><Cite><Author>Asadnia</Author><Year>2013</Year><RecNum>245</RecNum><record><rec-number>245</rec-number><foreign-keys><keyapp="EN"db-id="s9ex25exrf2923ef9pb5dve9swewd9rzp2r2">245</key></foreign-keys><ref-typename="JournalArticle">17</ref-type><contributors><authors><author>Asadnia,M</author><author>Kottapalli,AGP</author><author>Miao,JM</author><author>Randles,AB</author><author>Sabbagh,A</author><author>Kropelnicki,P</author><author>Tsai,JM</author></authors></contributors><titles><title>HightemperaturecharacterizationofPZT(0.52/0.48)thin-filmpressuresensors</title><secondary-title>JournalofMicromechanicsandMicroengineering</secondary-title></titles><periodical><full-title>JournalofMicromechanicsandMicroengineering</full-title></periodical><pages>015017</pages><volume>24</volume><number>1</number><dates><year>2013</year></dates><isbn>0960-1317</isbn><urls></urls></record></Cite></EndNote>[\o"Asadnia,2013#334"74,\o"Asadnia,2013#245"75]等设计了一种圆形压电薄膜压力传感器，并在压电薄膜表面设计了圆环状的图案化电极，用以实现传感器在低频下较高的信号输出。其结构如REF_Ref65765159