爱德华scrubber高处理量

1、The content of this presentation is confidential and should not be distributed to a third party without prior authorization from Edwards. Edwards Limited 2007,ATLAS,Product range overview,2,The content of this presentation is confidential and should not be distributed to a third party without prior

2、authorization from Edwards. Edwards Limited 2007,ATLAS range,Combustion abatement combined with wet scrubbing stages Suitable for Etch applications Low CoO, user friendly solution Excellent reliability on harshest processes PFC gas abatement capability,The content of this presentation is confidentia

3、l and should not be distributed to a third party without prior authorization from Edwards. Edwards Limited 2007,ATLAS,Construction,4,The content of this presentation is confidential and should not be distributed to a third party without prior authorization from Edwards. Edwards Limited 2007,ATLAS La

4、yout,All utility connections at top,All electrics housed in front-accessible section,Touch-sensitive colour screen,Inlet pipework design avoids powder & liquid trapping,Hydro-cyclone: self-cleaning water filtering device,Easily accessible heat exchanger and water pumps,Use of CPVC components, large

5、diameters minimise risk of blockage,Everything housed in a single cabinet,Integral drip-tray,CPVC is a FM-approved flame-retardant plastic,5,The content of this presentation is confidential and should not be distributed to a third party without prior authorization from Edwards. Edwards Limited 2007,

6、Gas path,Water,Untreated process gas,Combustion by-products,Detoxified gas,Fuel + Air,The content of this presentation is confidential and should not be distributed to a third party without prior authorization from Edwards. Edwards Limited 2007,ATLAS,Combustion section,7,The content of this presenta

7、tion is confidential and should not be distributed to a third party without prior authorization from Edwards. Edwards Limited 2007,Inlets,L-shaped pipe work Avoid blockage by solid/liquid by-products Up to 6 inlets TMS option available Inlet temperature control Avoid by-products condensation,8,The c

8、ontent of this presentation is confidential and should not be distributed to a third party without prior authorization from Edwards. Edwards Limited 2007,Combustion section,Initial gas treatment: combustion Oxidation of deposition gases SiH4 + O2 SiO2 + 2H2O Reduction of clean gases (NF3, F2) 2F2 +

9、CH4 + O2 4HF + CO2 Anti-clogging inlet head Inward fired combustor Porous ceramic construction Excellent corrosion resistance Proven powder handling Safe (leak-proof, cold outer wall),ATLAS Inlets,Pneumatic actuators,Springs,Inlet Head Self Cleaning Mechanism,Inlet nozzle,10,The content of this pres

10、entation is confidential and should not be distributed to a third party without prior authorization from Edwards. Edwards Limited 2007,Combustor,150mm,150mm,11,The content of this presentation is confidential and should not be distributed to a third party without prior authorization from Edwards. Ed

11、wards Limited 2007,Combustor: Inward fired combustion,Fuel gas + Air,Process gas,Flame-less, low temperature combustion,800oC,12,The content of this presentation is confidential and should not be distributed to a third party without prior authorization from Edwards. Edwards Limited 2007,Benefits 1:

12、Uniform temperature,Flame-less combustion Combustion at the wall Heat radiation to the center Low temperature 800oC Low NOx emissions (10ppm) Uniform Temperature No hot spot, No cold spot Combustor length of 300mm = Long residence time in a hot environment at 800C High DRE,800oC,13,The content of th

13、is presentation is confidential and should not be distributed to a third party without prior authorization from Edwards. Edwards Limited 2007,Benefit 2: Powder handling - No blockages,Constant flow of gas (Fuel+Air) across ceramic liner prevent powder deposition. Burner stays clean No blockages,14,T

14、he content of this presentation is confidential and should not be distributed to a third party without prior authorization from Edwards. Edwards Limited 2007,Benefit 3: No corrosion,Only ceramic material in contact with hot gases No corrosion Greater safety Greater uptime,800oC,Ceramic gasket,Porous

15、 Ceramic liner,Ceramic pad,15,The content of this presentation is confidential and should not be distributed to a third party without prior authorization from Edwards. Edwards Limited 2007,Benefit 4: Safety,Outer wall of burner is cold ( 40oC) Safe to touch, no burn injury O-rings are used in cold a

16、rea only No metal part in contact with hot gas Viton can resist HF and HCl below 200oC Burner is leak-proof, Burner stay leak-proof No risk of hot gas leakage,The content of this presentation is confidential and should not be distributed to a third party without prior authorization from Edwards. Edw

17、ards Limited 2007,ATLAS,Wet scrubbing section,17,The content of this presentation is confidential and should not be distributed to a third party without prior authorization from Edwards. Edwards Limited 2007,Wet scrubbing section,C-PVC construction Flame retardant plastic Corrosion-resistant High ef

18、ficiency scrubbing performance Water soluble by-products (HF, HCletc.) Insoluble particles (SiO2),18,The content of this presentation is confidential and should not be distributed to a third party without prior authorization from Edwards. Edwards Limited 2007,Wet scrubbing section,Cyclonic de-mistin

19、g,Packed Tower,Water tank,Heat exchanger,Cyclonic water filtering,Water pumps,Quench,Weir,19,The content of this presentation is confidential and should not be distributed to a third party without prior authorization from Edwards. Edwards Limited 2007,Wet stage Cooling section,Quench section,Weir se

20、ction,800oC,50oC,20,The content of this presentation is confidential and should not be distributed to a third party without prior authorization from Edwards. Edwards Limited 2007,Wet stage Drain tank and packed tower,Drain tank CPVC construction,Large diameter,Counter-current packed tower (CPVC cons

21、truction),21,The content of this presentation is confidential and should not be distributed to a third party without prior authorization from Edwards. Edwards Limited 2007,Drain tank,C-PVC construction Turbulent water flow Circulation rate: 1 volume per min. No sedimentation of powders Control by le

22、vel detectors Filter plate to prevent drain clogging Easy access for quick servicing,22,The content of this presentation is confidential and should not be distributed to a third party without prior authorization from Edwards. Edwards Limited 2007,Controls,PLC control Color touch screen display Ease

23、of service History log Ethernet communication Compatible with all CMS systems Pump interface Tool interface,23,The content of this presentation is confidential and should not be distributed to a third party without prior authorization from Edwards. Edwards Limited 2007,Two levels of Control,Master P

24、LC with colour touch screen display Requests FMS to start flame. PLC can independently isolate gas supply Flame Management System (FMS) Legal requirement to comply with US fire codes. FMS assembly is approved by FM Hardwired interlock.,24,The content of this presentation is confidential and should n

25、ot be distributed to a third party without prior authorization from Edwards. Edwards Limited 2007,ATLAS safety interlocks,HEAD TEMP. 180 C,GAS TEMP. 1150oC,QUENCH TEMP. 80oC,DRAIN LEVEL HIGH,FUEL/AIR PRESS. +3”wg,FUEL/AIR TEMP. 150 C,N2 pressure 3 bar (no start allowed in this condition),INLET PRESS

26、URE 2” wg,SYSTEM ALARM immediate system shutdown,FLAME DETECTOR,QUENCH WATER Flow 4.5 slm,O2 pressure 12 psi (TPU and Kronis versions only),FUEL PRESSURE. 7.5 mbar,WATER LEAK DETECTOR (inside cabinet),DRAIN TANK TEMP. 60 C,COMBUSTOR PRESSURE,Cabinet extraction pressure +0.4”wg,INLET TEMPERATURE 170C

27、,WEIR TEMP. 80oC,COMBUSTOR WALL TEMP. 70oC,PACKED TOWER WATER Flow 8 slm,WATER PRESSURE 2 bar gauge,The content of this presentation is confidential and should not be distributed to a third party without prior authorization from Edwards. Edwards Limited 2007,ATLAS installed base,Since 1994,26,The co

28、ntent of this presentation is confidential and should not be distributed to a third party without prior authorization from Edwards. Edwards Limited 2007,Inward-fired combustor installed base,ATLAS use the Inward-fired combustion technology Expertise gained with the TPU range Used in semiconductor fabs since 1994 Over 3000 systems installed worldwide M