(英文)溅射原理和应用

1、Advanced Magnetron Sputtering Techniques: Principles and Applications,D. G. Teer Teer Coatings Ltd, UK,slide 2,Movchan & Demchisin,Coating Requirements,slide 3,Balzers 1980,First Successful Applications,TiN on cutting tools,slide 4,Original Ion Plating,Ion bombardment can replace the effect of tempe

2、rature and provide enhanced diffusion (Mattox, 1963) Adhesion Throwing Power Densification,Ion bombardment can replace the effect of temperature and provide enhanced diffusion (Mattox, 1963) Adhesion Throwing Power Densification,slide 5,Requirements,Ion Energy-about 40 eV Ion Current-high 1mA/cm2,_

3、High Ion Energy and Low Ion Current will not produce good coatings.,slide 6,Ion Plating Characteristics,slide 7,Arc Ion Plating,Hollow Cathode EB(i) Gun,Low Voltage EB(i) Gun,Practical Ion Plating Systems,slide 8,Closed Field Unbalanced Magnetron,Conventional Magnetron,Unbalanced Magnetron,Evolution

4、 ofMagnetron Sputtering Techniques,slide 9,Increased Ion Current,slide 10,Ion Current Characteristics,slide 11,Flexibility Compounds Alloys Graded Coatings Multi-Layer Coatings,Stability Repeatability Uniformity Low Temperature,Flexibility Compounds Alloys Graded Coatings Multi-Layer Coatings,Main A

5、dvantages of CFUBMSIP,Stability Repeatability Uniformity Low Temperature,slide 12,CFUBMSIP,Conventional Magnetron,Bright,Finger print,Dense structure,Columnar structure,Comparison of TiN Coating Properties,Good Adhesion,Poor adhesion,slide 13,CrTiAlN Dymon-iC (DLC-C:H) Graphit-iC (C/Cr) MoSTTM (MoS2

6、/Ti),CrTiAlN Dymon-iC (DLC-C:H) Graphit-iC (C/Cr) MoSTTM (MoS2/Ti),New CFUBMSIP-Derived Coatings,slide 14,Coating Deposition CFUBMSIP 1 Ti, 1 Al, 2 Cr Ar N2 OEM control loop,CrTiAlN Deposition Process,Coating Deposition CFUBMSIP 1 Ti, 1 Al, 2 Cr Ar N2 OEM control loop,slide 15,CrTiAlN Coating Sequen

7、ce,Substrate (AISI M42 grade HSS, 1200 grit finish) 0.2 m Cr bonding layer 0.3 m CrTiAlN graded layer 4 m nanoscale CrTiAlN multilayer, 10nm 15nm, individual CrN layers 6.0nm,slide 16,CrTiAlN Properties,Hardness 30 GPa Good Adhesion Lc 60 N, HF 1 Good Wear Resistance No detectable wear after 1 hr pi

8、n-on-disc test 5mm WC/Co ball, 40 N applied load, 200 mm/s Drilling Tests Uncoated drill0 holes TiN coated drill100 holes CrTiAlN coated drill225 holes,Hardness 30 GPa Good Adhesion Lc 60 N, HF 1 Good Wear Resistance No detectable wear after 1 hr pin-on-disc test 5mm WC/Co ball, 40 N applied load, 2

9、00 mm/s Drilling Tests Uncoated drill0 holes TiN coated drill100 holes CrTiAlN coated drill225 holes,slide 17,Dymon-iC & Graphit-iC Coating Sequence,A-C:H,CrC:H,C (up to 4% Cr),CrC,slide 18,Hardness 15 GPa - 25 GPa Good Adhesion Lc 60 N Good Wear Resistance Pin-on-disc Test (1 hr, 5 mm WC/Co ball, 4

10、0 N applied load, 200 mm/s) Wear Rate Dry 10-17 m3/Nm Graphit-iC Wear Rate Under Water 10-18 m3/Nm,Dymon-iC & Graphit-iC Properties,Hardness 15 GPa - 25 GPa Good Adhesion Lc 60 N Good Wear Resistance Pin-on-disc Test (1 hr, 5 mm WC/Co ball, 40 N applied load, 200 mm/s) Wear Rate Dry 10-17 m3/Nm Grap

11、hit-iC Wear Rate Under Water 10-18 m3/Nm,slide 19,Wear resistance,Endurance,Low Friction coefficient,High load bearing capacity dry, under oil and under water,Graphit-iCTM - Performance,0.1,1,10,100,0,20,40,60,80,100,Applied Load (N),Specific Wear Rate (10-16 m3/Nm),Wear resistance,Endurance,Low Fri

12、ction coefficient,High load bearing capacity dry, under oil and under water,slide 20,Dymon-iCTM & Graphit-iCTM Adhesion Properties,slide 21,Reciprocating wear test (10,000 cycles), ball 5mm WC-Co under 100N load (Contact pressure dry of 4GPa),Dymon-iCTM & Graphit-iCTM Wear Properties,slide 22,Dense,

13、 coherent Non-columnar structure Adherent (Lc 80 N) Good properties at high loads,Only bottom layer is effective Good for space applications Limited in humid atmospheres Limited at high loads,MoS2 (DC sputtered in CFUBMSIP system),Initial MoS2 (RF sputtering),MoS2 Coatings,Initial MoS2 (RF sputterin

14、g),(Spalvins, Hintermann),MoS2 (DC sputtered in CFUBMSIP system),Only bottom layer is effective Good for space applications Limited in humid atmospheres Limited at high loads,Dense, coherent Non-columnar structure Adherent (Lc 80 N) Good properties at high loads,slide 23,Development of MoS2 - MoSTTM

15、,0,2,000,4,000,6,000,8,000,10,000,12,000,0,2,4,6,8,10,12,Friction force (N),No. of cycles,ST-3001 Reciprocating Wear Test 100 N applied load 40 %RH,slide 24,Adherence High load bearing capacity (4 GPa) Thickness (1.2m) Wear Resistance Humidity resistance Very low coefficients of friction 1000 - 2000

16、 HV Friction when load ( = 0.02 at 100 N) Low specific wear rate (4.0 x 10-17 m3/Nm),Adherence High load bearing capacity (4 GPa) Thickness (1.2m) Wear Resistance Humidity resistance Very low coefficients of friction 1000 - 2000 HV Friction when load ( = 0.02 at 100 N) Low specific wear rate (4.0 x

17、10-17 m3/Nm),Process 3 MoS2 and 1 Ti Ar,MoSTTM Coating Properties,slide 25,Industrial Applications High speed machining Cutting Forming Components,EU Patent MoS2/metal composite coatings (0842306) MoSTTM,MoSTTM Applications,EU Patent MoS2/metal composite coatings (0842306) MoSTTM,Industrial Applicat

18、ions High speed machining Cutting Forming Components,slide 26,Elimination of lubrication Improve tool performance and elimination of lubricant Increase tool life (with-without lubricant) = Reduced downtime and big cost saving,Goal: Improve tool performance and elimination of lubricant,Tapping Stainl

19、ess Steel Using MoSTTM,slide 27,Piercing of Stainless Steel Using MoSTTM,MoSTTM improved performance over uncoated and hard coating alone.,slide 28,Drawing of Stainless Steel Using MoSTTM,MoSTTM improved performance 400 X (compared with uncoated),slide 29,Drilling Performance,slide 30,Workpiece Mate

20、rial: Plain Carbon Steel (EN9) 147-160 HV Tool: High Speed Steel (1/4” drills),CrTiAlN,Holes: Through (19 mm deep) 3008rpm (60m/min) & 0.25mm/rev & 752mm/min lubrication: 7.5% oil concentrated water based coolant,CoatingNumber of Holes CrTiAlN 298 Uncoated 0,Drilling Performance,slide 31,CrTiAlN,Wor

21、kpiece Material: Alloy Steel EN24 363HV Tool: High Speed Steel (1/4” drills),Holes: Through (12.6 mm deep),2440rpm (48.7m/min) & 0.11mm/rev & 268mm/min lubrication: 7.5% oil concentrated water based coolant,CoatingNumber of Holes CrTiAlN232 Uncoated 0,Drilling Performance,slide 32,CrTiAlN + MoSTTM,W

22、orkpiece Material: Alloy Steel EN24 363HV Tool: High Speed Steel (1/4” drills),Holes: Through (19 mm deep),3185rpm (63.5m/min) & 0.30mm/rev & 945mm/min (lubricated: 7.5% oil concentrated water based coolant),CoatingNumber of Holes CrTiAlN170 CrTiAlN+MoST410 Uncoated 0,Drilling Performance,slide 33,C

23、rTiAlN,Workpiece Material: Plain Carbon Steel (EN9) 190 HV,Tool: Tungsten Carbide Drills (6.4 mm ),CoatingNumber of Holes CrTiAlN328 Uncoated 7,3185rpm (64m/min) & 0.30mm/rev (lubricated: 7.5% oil concentrated water based coolant),Holes: Through (19mm deep),Drilling Performance,slide 34,Graphit-iCTM

24、 (No lubrication),Workpiece Material: Aluminium Silicon Alloy 319 series Al 6% Si 3.5% Cu Tool: High Speed Steel (1/4” drills),CoatingNumber of Holes Graphit-iCTM867 Uncoated127 3055rpm (60.94m/min), 0.127mm/rev & 388mm/min Graphit-iCTM110 Uncoated40 3055rpm (60.94m/min), 0.191mm/rev & 583mm/min,Dri

25、lling Performance,Holes: Blind (3/4” mm deep),slide 35,TiN and TiCN,Workpiece Material: Alloy Steel EN24 363HV Tool: High Speed Steel (1/4” drills),CoatingNumber of Holes TiN290 TiCN380 Uncoated 7,3000rpm (59.85m/min) & 0.15mm/rev & 450mm/min (lubricated: 7.5% oil concentrated water based coolant),H

26、oles: Through (12.6 mm deep),Drilling Performance,slide 36,Workpiece mat.:Inconel 706, Cutting velocity 30 m/min Depth of cut 2.5 mm, Feed 0.15 mm, ISO code:CNMA 120408 Tool: WC-Co,Teer CrTiAlN vs. competitors TiAlN in External Cylindrical Turning of Inconel 706 (No lubrication),slide 37,Teer CrTiAl

27、N vs. competitors TiAlN in External Cylindrical Turning of Protasul TiAl6Nb7 (No lubrication),Work piece material: Protasul (TiAl6Nb7) Speed 30m/min, feed 0.15mm, cutting depth 1mm Tool: WC-Co,slide 38,Workpiece material: Hardened D2 steel (HRC62) Tool: WC-Co Lubrication: 5% emulsion, Speed 25m/min,

28、 depth 0.3mm, feed 0.08mm,Teer CrTiAlN vs. competitors TiAlN in Interrupted Cutting of Hardened Steel D2 (HRC62),slide 39,Workpiece material: Alloy steel 26 CrNiMoV 145 Lubrication: 5% emulsion, Speed 125m/min, depth 2.5mm, feed 0.25mm,Teer CrTiAlN vs. competitors TiAlN in Interrupted Cutting of All

29、oy Steel 26 CrNiMoV 145,slide 40,Graphit-iCTM Coating Applications,Electrical Applications - Bipolar Plates for Fuel Cells,Most fuel cell stacks contain high numbers of graphite plates.,The high cost of machining bulk graphite is a great financial obstacle to the widespread commercialization of this

30、 environmentally friendly technology.,Graphit-iCTM coated steel plates have passed tests carried out by a fuel cell consortium including a major European automotive manufacturer.,Artists impression of a fuel cell stack taken from ,slide 41,Graphit-iCTM Coating Applications,Medical Applications - Hip

31、 implants,Graphit-iC coated CoCrMo Hip joint prostheses,Wear rates in deionised water 40N load, 5mm diam. Pin on plate Graphit-iC / Graphit-iC 5 x 10-18 m3/ Nm ( CoCrMo / CoCrMo 1 x 10-15 m3/ Nm ),Pendulum tests in serum at 500N,Estimated coated implant lifetime 50 Years,slide 42,Graphit-iCTM Coatin

32、g Applications,Medical Applications - Stents,Graphit-iCTM and Dymon-iCTM show good biocompatibility in comparison to uncoated stainless steel,In-vitro tests have shown reduced inflammatory response response and reduced smooth muscle cell proliferation.,In-vivo tests of coated stents are currently un

33、derway.,Artistss impression of a stent in an artery,Stents are tiny mesh cylinders that are inserted into arteries to prevent arterial narrowing,slide 43,Graphit-iCTM Coating Applications,Other applications at various stages from industrial testing through to large scale production,Flywheel bearingc

34、up/centrifuge cup for nuclear application,K-cam and stylus (diesel fuel pump parts ),Hair trimmer parts,Razor blades,Razor foils,Dental Instrument points,Copper electrodes -water level sensors for hydrospas,Probes,Standard / blind bush assemblies (Door hinges),Gudgeon Pins,Taps,Compressor vanes,Carb

35、ide drills,Bone cutting saws,slide 44,Dymon-iCTM Coating Applications,Forming tools for integrated circuit connector pins (Anti-sticking of soft counterface and wear resistance),Taps for aerospace aluminium copper alloy (Anti-sticking of soft counterface and wear resistance),CD stamper blocks (Wear resistance),Anti-reflective touch screens (Optical transparency),slide 45,Dymon-iCTM Coating Applications,Pick and place nozzles for the electronics industry (Anti-glare and wear resistance),Fishing rod rings (Black finish and wear resistance),Titanium an