CT扩散炉培训教材(设备中英文版).ppt

1、centrotherm扩散炉设备培训 equipment training of centrotherm Diffusion furnace,Centrotherm扩散炉的组成,ALoading box 推舟部分 B. TGA 有毒气体排放 C. Heating furnace 加热部分 D. Gas cabinet 气柜,设备 平面结构Equipment plane structure,1、CMI电脑 2、Loading box上料箱 3、Toxic gases 有毒气体排放 4、Furnace 炉体 5、Gas box 气源柜,Loading box上料箱,Baddle head 舟头,L

2、oading wafer 加栽的硅片,Loading box上料箱,Mechanical arm 机械臂,Loading box 上料箱,Storage rack 1，2 存储位1、2,Paddle bearing, adjustable paddle position 碳化硅桨支座，调节桨位置,TGA有毒气体排放,quartz door 石英门,Door cylinder炉门气缸,Heating furnace炉膛,1、CMS module 3、Power connection cover 2、Thermocouple connection 4、Temperature sensor modu

3、le,Gas cabinet气源柜,1、 Flow meter 气体流量计 2、 Pneumatic valve 气动阀,1,2,Cooling water inlet and water system冷却水系统,Cooling to the top of the furnace body and furnace 对炉膛顶部和炉体进行冷却,Thermostatic bath恒温槽,On the POCL3 constant temperature process, normal temperature 20 degrees 对POCL3进行恒温作用，正常工艺温度20度,Silicon carb

4、ide paddle碳化硅桨,Bearing quartz and silicon, and out of the carrier ship 承载石英舟和硅片 石英舟进出的载体,Range detection alarm范围检测报警器,Detection of a range of whether object, avoid hit boat phenomenon, this range can be adjusted 检测某个范围内是否有物体，避免出现撞舟现象，些范围可进行调节,Communication Network Overview通信网络总览,Heating system加热系统,C

5、ooling system冷却系统,1、Heat exchanger 2、Cooling 3、Shutoff valve,1、Cooling 4、Heat exchanger 2、The main fan 5、Electronic devices 3、Cooling the air passage,Alarm lamp information,Operation panel操作面板,operation panel 4 keyboard Touch screen 5 touch screen button USB socket,Operation panel操作面板,The equipment

6、has the following button Stop action -All the mechanical action of loading box are stop Loading box lighting-openclose the lamp of the loading box Autohand manual switch-Loading and unloading of the operating system can manual operation in an open feeding box 4 Allows to unlock- Press this button ,t

7、o unlock the car,Operation panel操作面板,1 pushbutton ABC keyboard call 4 pushbutton right mouse button Pushbutton task change 5 pushbutton shift Pushbutton brightness ABC keyboard call-calls upclosses the keyboard on the touchscreen, keyboard entries can be carried out directly on the touchsceen. Pushb

8、utton task change-changes a task windows Pushbutton brightness-press this button together with the shife button to increase the brightness of the touchscress. Pushbutton right mouse buttonopens right mouse button context menu,press this button together with the shift button to reduce the touchscreen

9、. Pushbutton shiftcalls up the second keyboard level,push this bushbutton together with the required function button.,CMI interface CMI桌面信息,System name 7 alarm close Date time 8 notes Centrotherm logo and system 9 additional information Information button Current display area in the 10 system mode I

10、nformation field 11 connection state with CECGEM System status Loginlogout button,CMI interface CMI桌面信息,Jobs 4 setup System 5 alarms Datslog 6 help(online help),The CMI user interfaceCMI使用者桌面,Title bar 3 navigation bar Command bar 4 information field with variable field areas,简单介绍CESAR界面A brief intr

11、oduction to CESAR interface,上图是CESAR的界面：1.系统工艺状态 2.工艺时间状态 3.时间日期 4.气体流量状态 5.系统准备状态 6. 温度检测显示 This is a CESAR interface： 1. System process 2. Process time 3. Time and date 4. Gas flow state 5. System readiness 6. Temperature detection and display,CT操作注意事项CT operation matters needing attention,1.SLS处于

12、“UP”位置时，管内有舟时不可手动进桨 SLS in the UP position, the inner tube has a boat can not be manually into the paddle. 2.SLS处于“DOWN”位置时，桨上有舟时不得手动进舟。 SLS in the DOWN position, the paddle is not manually into the boat boat. 3.桨上有舟时，舟不在正确位置，不准切换到自动运行模式。 Oars on a boat, the boat is not in the correct position, are

13、not allowed to switch to automatic running mode.,CT操作注意事项CT operation matters needing attention,4.进舟、退舟失败报警时，一定要检查舟的位置 是否在合理的位置，才可以对报警进行复位，自动/手动的切换要谨慎，若舟不在正确位置，请手动移至正确位置后再对报警进行复位（炉门以桨的位置作为开闭标准） Into the boat, boat back failure alarm, be sure to check the boat position is in a reasonable position, ca

14、n alarm reset, automatic / manual switch must be careful, if the ship is not in the correct position, please manually moved to the correct position after the alarm reset ( door to paddle position as opening and closing standard ),5.舟位于存储架（storage2,3）时，一定要确认存储架上 的感应器有没有感应到，否则有可能导致撞舟。 When the boat is

15、 located on the storage rack (storage2, 3),make sure that the storage rack sensor is sensed, otherwise may cause the bumped boat. 6.从手动切换自动时，Grip一定要在Middle位置， 否则机械臂可能因无法正常运行而报警。 From manual automatic, Grip must be in the Middle position, or mechanical arm may be due to normal operation and alarm.,7.

16、进舟后，工艺无法运行，先确认舟在桨上的位置，以及 Tube=ready SLS=UP TGA=YES 然后进行操作。 In the boat, technology cannot run, make sure the boat on the oar position, as well as Tube = ready SLS = UP TGA = YES then operation.,8.机械臂运动时不要上料，以免上料时抖动机械臂撞到舟。,As mechanical arm movement not feeding,in order to avoid feeding time jitter m

17、echanical arm hit the boat。,9.单一炉管有故障时，应该及时琐闭并降温，以节约能源。,Single tube has fault, should be timely and closed and cooling, in order to save energy.,常见故障,1. Process recipe has terminated with error state AC 进行中的工艺以错误状态结 束警报确认 To store 储存 To store enable unload 储存并缷下 Restart recipe重新开始工艺 A用于选错工艺号，手动结束工艺，

18、 重新开始新的其他工艺时进行选择 B多数情况下选择此项 C工艺中断需要重新进行时选择，但不建议使用， 建议选择（B） Process recipe has terminated with error state AC Ongoingprocess toendthe error status Alarmconfirmation To store To store enable unload Restart recipe A Usedthe wrongprocessnumber ， Handend of theprocess ， Start a newchoicewhenotherprocesse

19、s B In most cases,choice this one C Interruptsneed to re-processthe selection,butnot recommended,recommended to choose(B) 。,Boat already in tube- Select:Process=0. Unload=1(.) 选择0或1 说明：当管内有舟存在时，异常排除 后手动运行工艺时会出现此提示 Boat already in tube- Select:Process=0. Unload=1(.) Description: When thetubehasa boat

20、there, the exceptionrule outrunningprocessmanually afterthis promptwill appear.,Lost homing check poti 失去引导，检 查位置（一般此警报会自动解除） 说明：此警报会自动解除，但需要 检查一下桨是否在原点位置即可 Lost homing check poti Check thelocation(usuallythealarmwill be automatically lifted) Description: Thisalarmwill be automatically lifted,but ne

21、ed Checkwhether theoriginlocationtopaddle,4. Recipe abort 2-process abort to continue : enter AB 工艺退出运行终止！继续，请输入AB 说明：对工艺异常结束的手动确认，然后就会出现报警 Recipe abort 2-process abort to continue : enter AB Description: Themanualconfirmationprocessends, 5. Recipe couldnt be started please check protocol for reason

22、! 工艺不能运行，请检查原因 Recipe couldnt be started please check protocol for reason!,. 6. Boat sensor of grad has changed without permission 机械手上的传感器被非允许的改动 说明：机械臂在上下移动的时候，前后不能移动， 若前后位置发生移动机械将被锁定，出现报警， 此报警需设备人员的密码登陆在Handing 对话框中的Tech模式下进行复位 Boat sensor of grad has changed without permission Description: Thero

23、botic arm tomove up and downwhenyou can notmovearound,ifthe locationis movedaround themachinewill be locked,an alarm, thealarmequipment,personnelneed tolog ina passworddialog boxin theTechHandingresetmode,7.There is already an active recipe 工艺名 from local tisting 已有工艺在此管的工艺列表中 说明：这两个报警经常出现，若能够确认此管未有 工艺在运行，就必须将此管重新启动， 如果有工艺运行，可以将工艺手动停止， 或者等待工艺结束。 There is already an active recipe from local tisting De