GB 51037-2014 微组装生产线工艺设备安装工程施工及验收规范.pdf
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51037-2014
微组装生产线工艺设备安装工程施工及验收规范
GB51037-2014微组装生产线工艺设备安装工程施工及验收规范
安装及验收规范
GB51037-2014
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GB51037-2014微组装生产线工艺设备安装工程施工及验收规范.rar,51037-2014,微组装生产线工艺设备安装工程施工及验收规范,GB51037-2014微组装生产线工艺设备安装工程施工及验收规范,安装及验收规范,GB51037-2014
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UDC p GB 51037 - 2014 Code for conshuction and acceptance of micro-assemhling production line process equipment installation engineering 2014 - 08 - 27 2015 - 05 -01 i:t:i $ A :tt ll 00 11 m ll # i :g:B JJ*.g. i:t:i $A :tt ll 00 00 .m fl 1. , 5j 1l j I!:* I fM JfJI I Ji t& J m Code for construction and acceptance of micro-assembling production line process equipment installation engineering GB 51037 -2014 $fl : 9=1 $ A ;fO 00 I ;fO f , 1t $ ttt1t$ n = rr$A %il oo tm -t11JJJt5 19=$ JltfrBAA:2 o 1 5 5 J=J 1 B 2014 :it * $ A :tt-;fU lJiJ 00 *ti li fillrtiI zi.QfiI I&i&J!$B GB 51037-2014 Jil: www. jhpress. com :ttf!J1L :It Crf1 Itli * t1Ut!U t Jt!Jf=I 1 1 tj l-N * 7: JJl C 3 FzI rur !& ii1?7 = i o o o 3 s iti = co i o ) 6 3 9 o 613 3 c fdtrD jffr * J,t; J t J?: 1-1 m jj:_ 1 J: = iiJ M $ ffJ ,ttIJ -& i i1 f p ,ffilJ 850mm x l l 68mm 1/32 2. 875 fp stE 71 -1* 2 o 1 s 1f 3 fJ 1 Ji& 2 o l s 1f. 3 Fl 1 ix f/J ,ffilJ * Jt-=K : 1580242 54 7 5E1fr: 18.00jC Jt& *Jl pfi *Jl . 1 f )( 1& Et! iti : ( () 1 0 ) 6 3 9 () 61 0 4 o :ff fp f91 it 1J=tJ lMi . ifi * * U th J $ l* m s33 15-1 !% 5 Jtia: $ * T JX 00 fJJ il 1 ii F I la: !f;i: If 1ifJI I J 1l1 ) 8J 01ff millTZTTm 7JOO*tJJ1i, %7JGB 51037-2014, R 201s 5 J3 1 S JiTh:0 Jti=t 4. 2. 1 (4)-. 4. 5. 2 (1)-. 5. 4. 1 (3)-. 5. 6. 1 (3)-. 5. 7.1 C5)-. 7. 7. 2 C3) JP: C) 7-151EmUtt.JP:x, &Ft-*1A1-To * t! tl1 EE ft$ tJJ if JE WI 1iff .?fr fl J rp 00 it 1J t H Jt& tt flJ Jt& Jj:_ 1-T o $A Atu 1il%ll1P!3/ lli.$ 2014 8 27 B *n!JCLRdt1m1i m iJJt 3/ Jti-9:$( * T Ep B1 Ji ) c t c 2 o 1 o J 4 3 % ) B1 *,ffiIfQffig$-=fI$1iJf-=fIm;E M,OO-=f#tt0m=1i1fffr*-& 5G JJX: 0 *WI tE itJLl Ji fllI 9=1 , ffl!J gil tE iJJ 1iJf BJ ili _t , Jg, 00 pq , Ji i& :ill: ! * B f 411Jf nt * , ff 1:-t ft 00 00 8J 00 )rr JIG :itt , # ) iil* T 00 pq =kit, tz: ,1iJF-1iI 81 _fil, ill iffJEmo *M!.Wift s afn 1 ffl, 1!* r*1 ?ff.M: Jf!I,910, *i#, *) frHJkrJ.:f& ffIJ.T. -Z:iSi1-$:. iJa:jj,Jk ii 1-T, fiMt:f& ff11JI. !: *!fl:., i iiJk -J;A fr, g_ it I.!:. * $:. , imJ ii Jk ii 1-T , I. !: t iJl * , i,m ii Jk ti fr , I. !Jill: 4 0 * J!. -m it1 w * B JR x 7l 5In tiJ ti JR x , 16 ff! 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( 4 9 ) 11 ffl if IF Ii !6 * c so ) m = x i52. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . c s 1 ) 3 Contents 1 General prov1s1ons ( 1 ) 2 Terms ( 2 ) 3 Basic requirements ( 4 3. 1 Construction conditions ( 4 3. 2 Equipment unpacking ( 5 ) 3. 3 Equipment moving 5 ) 3. 4 Equipment installation ( 6 ) 3. 5 Equipment debugging and commissioning ( 7 ) 4 Installation, debugging and comm1ss1onmg of low temperature co-fined ceramic and thick film substrate production process equipment ( 9 ) 4. 1 General requirements ( 9 ) 4. 2 Tape caster 9 ) 4. 3 Blanker ( 10 ) 4. 4 Green tape puncher ( 10 ) 4. 5 l.,aser puncher ( 11 ) 4. 6 Via filling machine ( 12 ) 4. 7 Screen printer ( 13 ) 4. 8 Stacking n1achinc ( 13 ) 4. 9 Isostatic lamina tor ( 15 ) 4. 10 Hot cutter ( 15 ) 4. 11 Low temperature co-fined ceramic box furnace ( 16 ) 4. 12 4. 13 4 Thickfilm belt furnace Laser resistor trimmer ( 1 7 ) ( 1 7 ) 3 Installation, debugging and commissioning of thin film substrate production process equipment ( 18) 5. 1 General requirements ( 18 ) 5. 2 Magnetic sputtering deposition system ( 18) 5 . 3 Vacuum e v a po rat ion cop pc r-coat e d machine ( 1 9 ) 5. 4 Chemical v:por deposition system ( 21 ) S. 5 Spin coating and hot plate system ( 22 ) 5. 6 s. 7 Exposure machine Developing system ( 23 ) ( 2 1 ) 5. 8 Reactive ion etching machine ( 25 ) 5. 9 Chemical mechanical polishing machine ( 26 ) 6 Installation, debugging and commissioning of assembling and packaging process equipment C 28 ) 6. 1 6. 2 Gcnera I rcq u i rem en ts Die at tching machine ( 28 ) ( 28 ) 6. 3 Die eutectic bonder ( 29 ) 6 . 4 Eu t cc tic () v e r1 C 2 9 ) 6. 5 Wire lJondcr ( 30 ) 6. 6 6. 7 Flip chip bonder Plasma cleaner ( 31 ) ( 31 ) 6. 8 Selective spray coating machine ( 32 ) 6. 9 Parallel scam welder . 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