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本科生毕业设计（论文）翻译资料中文题目： 以微型机器人为基础的自动化 显微操作装置为微系统装配 英文题目： A microbot-based automated micromanipulation station for assembly of microsystemsA microrobot-based automated micromanipulation station forassembly of microsystemsSergej Fatikow Mirko BenzAbstract：The development of new types of miniaturized and microrobots with human-like capabilities play an important role in different application tasks. One of the main problem of present-day research is, for example, to assemble a whole microsystem from different microcomponents.This paper presents an automated micromanipulation desktop station including a piezoelectrically driven microrobot placed on the highly-precise xy stage of a light microscope, a CCD-camera as a local sensor subsystem, a laser sensor unit as a global sensor subsystem, and a Pentium PC equipped additionally with an optical grabber. The microrobot has three piezoelectrically driven legs and two autonomous manipulators as endeffectors; it can perform highly-precise manipulations （with an accuracy of up to 10 nm） and a nondestructive transport （at a speed of several mm/s） of very small objects under a microscope. To perform manipulations automatically, a control system, including a task planning level and a real-time execution level, is being developed. （C）1998 Elsevier Science B.V. All rights reserved.Keywords： Microrobots; Microassembly; Automated desktop station; Assembly planning; Piezoactuators1.Introduction：There is a growing need for miniaturized and microrobots worldwide. Due to the enormous breakthroughs in conventional robotics and in the microsystem technology (MST),everyone is convinced that the development of remote-controlled or autonomous microrobots will lead to improvements in many areas. Above all, positive results are expected in medicine (microsurgery),manufacturing (microassembly, inspection and maintenance), biology (manipulation of cells) and testing/measuring technique (VLSI) . Medicine is one of the application fields which would profit by the microrobotics the most. The attention lies on artificial organs (prosthetics) , laparoscopy, implantable drug delivery systems (diagnosis and therapy systems) , telemicrosurgery, etc. The minimal-invasive surgery developed into an important field of medicine during the last years.Smaller and more flexible active endoscopes are needed in order to replace human hands, respond to outer incidents, penetrate into a body or a vessel through natural bodily orifice or a small incision by remote control, where they perform complex in-situ measurements and manipulations. In order to meet these requirements, microprocessors, several sensors and actuators, a light source and possibly an image processing unit should be integrated into an intelligentendoscope. Biotechnology requires special microstructured active tools which are able to perform micromanipulations like the sorting or reunion of cells or the injection of a foreign body into a cell under a microscope. In the gene research and the environment technique （cells as indicators for harmful substances）, precise and gentle manipulation of single cells are also required. Industry and especially manufacturing and measuring techniques need highly sensitive testing methods in the m-range. An important task represents, for example, the inspection of wafers, where several check points have to be contacted by a temperature or voltage probe. The same is valid for inspection robots which are used in inaccessible or dangerous terrain in order to detect leaks or flaws and make repairs （e.g., in pipelines）。The adoption of MST-related developments by the industry has already demonstrated which kind of problems occur with the mass production of microsystems. These systems usually consist of microcomponents of different materials which are produced with various microtechniques; this leads to one or several very precise assembly step （s）of theindividual components. The assembly of microsystems, i.e., the non-destructible transport, precise manipulation or exact positioning of microcomponents is becoming one of the most important applications in microrobotics.2. Manipulation of microobjects：The availability of highly precise assembly processes will make it easier to economically realize operable microsystems. In order to efficiently produce microsystems and components in lot sizes or by mass-production techniques, it is absolutely necessary to introduce flexible, automated, precise and fast microassembly stations. Different concepts are being followed to do micromanipulation for particularclasses of application.Purely manual micromanipulation is the most often used method today. In medicine and biological research, it is used exclusively. Even in industry, microassembly tasks are very often carried out by specially trained technicians, who, for example, preposition assembly parts using screws and springs, then position the parts with tiny hammers and tweezers, and finally fasten them in the desired position. However, with increasing component miniaturization, the tolerances become smaller and smaller, and the capabilities of the human hand are no longer adequate.The application of partially automatic micromanipulation systems of conventional size, which are teleoperated; thereby, the hand motions of the human operator are translated into finer 3D motions for the manipulators of the manipulation system by means of a joystick or mouse. Here, the dexterity of the human hand is supported by sophisticated techniques. However, the fundamental problem of the resolution of the fine motion and of the speed remain, since the motion of the tool is a direct imitation of that of the operators hand.The use of automated multifunctional micromanipulation desktop stations supported by miniaturized flexible robots which employ MST-specific direct- drive principles. These robots could be mobile and are able perform manipulations in different work areas. The transport and micromanipulation units performing the assembly may be integrated onto one chip. As opposed to the aforementioned micromanipulation technique, there is no direct connection between the operators hands and the robot. The assembly steps may be carried out with the help of closedloop control algorithms. The human assigns all tasks to miniaturized assembly mechanisms and, by doing so, tries to compensate for his limited micromanipulationcapabilities. Many microrobots can be active at the same time in a desktop station.The use of many flexible nanorobot systems which solve the manipulation tasks in close cooperation. Here, the robot size is comparable to that of the manipulated object. This concept could be based on the human behavior, but its realization lies in the distant future. In general, manipulations vary from an application to another. However, approximately the same operation sequences are used in every case. They are: grip, transport, position, release, adjust, fix in place and processing steps like cutting, soldering, gluing, removal of impurities, etc. In order to be able to carry out these operations, corresponding tools are needed, such as microknives, microneedles to affix objects, microdosing jets for gluing, microlaser devices for soldering, welding or cutting, different types of microgrippers, microscrapers, adjustment tools, etc. Microgrippers play a special role, since they considerably influence the manipulation capabilities of a robot. Microgrippers can clamp, make a frictional connection or adhere to the material, depending on the physical and geometrical properties of an object. Adapting a gripper to the shape of the object to be gripped is often the best solution in the microworld, even at the cost of flexibility. This allows handling of a workpiece having a complex shape, such as a gear. Thereby, the gripper securely attaches to the contour of the part. For small, smooth parts, a suction pipette might be a practical tool. If the upper surface of a workpiece must not be touched or gripped due to technological reasons, it can be protected by a corresponding form-fit of the pipette hole. For contour clamping and frictional connections in manipulations involving fragile parts, elastic grippers made of soft plastics are preferred over metal grippers. Due to the variety of task-specific gripping tools in automated micromanipulation systems, a suitable gripper exchanger system might be necessary.It should be mentioned that it is not always possible to adapt conventional manipulation methods to the demands of the microworld. A major problem is the effect of various forces which is completely different from the macroworld. Gravitation only plays a minor role in the microworld, but attractive forces,such as electrostatic forces or Van-der-Waals forces, are significant. Liquid surface tension can also act as an attractive force in micromanipulations if humidity is high or if a manipulator is wet. This unusual sensitivity to forces can be very irritating in a micromanipulation station. For example, it can be easier for the robot to grip and manipulate an object than to release it afterwards. On the other hand, such an adhesion force can be used to develop new gripping methods which can fundamentally differ from the familiar mechanical and pneumatic methods. In Ref. 【1】 , several interesting ideas were shown for adhesive gripping, such as electrically charging a manipulator or wetting a gripper surface by special micromachined orifices.The performance and degree of intelligence of a micromanipulation station is low for a manual operation; it improves by going to a teleoperation and further to an automation; this is similar with conventional robots. Most micromanipulation investigations today focus on the improvement obtained by going from a purely manual to a teleoperated system【24】. As previously mentioned, attempts are being made to make the transmission of effects from the microworld to the operator as realistic as possible. It is important that the operator has the entire scene in his field of view and that he can see the workspace from different angles. Besides visual information, the operator should also be able to receive acoustic and force signals if possible; this may increase the accuracy of his movements and avoid destroying the microobjects. For this, force sensors are needed which are implemented into the microtools (e.g., a microgripper) . Suitable solutions are now being sought after to realize such sensors【5】.3. Development of a flexible micromanipulation Station： Typically, in a conventional automatic or semiautomatic assembly station, standardized mechanical parts are assembled in well-defined work positions. The robots performing the work are usually of multi-axis arm design or they are gantry systems,usually driven by DC motors. Today, it is being attempted to use these type of familiar systems for handling and assembling of miniaturized components with dimensions in the millimeter range. For example, a modular microassembly system with four degrees of freedom is currently being developed【6】.With increasing workpiece miniaturization, however,it becomes more and more difficult to use conventional manipulation robots for assembling microsystems.The manipulation accuracy is mechanically limited for conventional robots, since disturbing influences which can be neglected in the microworld, such as small fabrication defects, friction, thermal expansion or computational errors, play a large role in the microscale. Due to the mechanical drives for the actuators motions, these robot systems must undergo regular maintenance and are subject to mechanical wear, which makes them expensive. The assembly process in the microworld is influenced by the mass-related dynamics of the objects being handled. Different processing conditions exist for manipulating microscopically small components. The positioning accuracy and the tolerances of the micro-components lie in the nanometer range, a few orders of magnitude lower than in conventional assembly. These accuracy requirements can only be obtained with manipulators which have highly accurately drives utilizing the MST and advanced closed-loop control. Therefore, a microrobot-based flexible desktop station is of particular interest. A new concept for an automated micromanipulation desktop station is now being investigated 【7】. The main part of the station are the piezoelectric microrobots which were presented in Refs.【8,9】.Each robot has a micromanipulating unit integrated in a mobile platform, which makes it capable of moving and manipulating. Tools can be easily exchanged. These robot properties are good preconditions for the complete sensor supported automation of manipulation processes in the microassembly station. Owing to the flexibility of the microrobot, this multifunctional desktop station can also be used for other things, such as handling biological cells or actively testing microelectronic chips with temperatureor or voltage probes. This flexibility can also be used to accommodate several robots in the station, which can cooperate and carry out manipulations. The schematic design of the micromanipulation desktop station is shown in Fig. 1. The operations of the microassembly station may be described as follows.The parts are first separated and placed into magazines in order to have them correctly positioned for automated assembly. This is necessary, since microcomponents are often delivered as bulk material. This step can also be automated in a powerful microassembly station, to avoid the expensive manual handling.A microrobot removes a micromechanical component from the magazine and transfers it to a processing cell where the component can then be prepared for microassembly by other microrobots. In this step, adhesives or solder can be applied, adjustment marks taken, or other simple operations carried out.After the part has been processed, it is gripped by a robot and brought to a microassembly cell.If necessary, the same operations are repeated many times in order to fetch the other necessary components from a supply container and prepare them for assembly.All components are positioned correctly, affixed to each other and adjusted. Thereafter, they are joined together by various interconnection techniques, e.g., laser spot welding, gluing, insertion, wire bonding, etc.After assembly, a robot brings the finished component either to another work station or a microassembly cell for further processing or to an inspection cell, where all functions of the microsystem are being tested. Finally, the finished system is transported to a storage. The entire assembly process occurs in the desktop station under an automated light-optical microscope which is equipped with a RS232-standard interface. The sphere of operation includes a highly precise positioning table with two translational degrees of freedom （xy plane ）and a glass plate fixed on top of it. By controlling the movements of the table, each individual working cell on the glass plate can be brought under the microscope. The station has a central computer （Pentium PC） which is used for task-specific assembly planning. The necessary operational steps are defined and carried out successively. The commands of the central computer are then further processed on a lower control level, using a parallel computer system with the C167 microcontrollers. This system was reported in Ref.【10】. The central computer is coupled with the parallel computer system over serial and parallel interfaces. These commands are resolved into command sequences for all active system components （robots, microscope and positioning table） by an execution planning system, and finally performed. Thanks to the parallel computer system, the generated commands can be executed in parallel, which makes the microassembly station capable of real-time behavior. The movements of the positioning table, different microscope functions （objective changing, focusing, lighting） and every piezoactuator are controlled. In order to automatically control the manipulation processes in the microassembly station, there must be sensor feedback. Therefore, the light-optical microscope is equipped with a CCD camera. The camera and the microscope form the local sensor system with the help of which the position of the microobjects and the robot tools must be determined. For this it supplies visual information on the robot tools and the microobjects to the central computer. The gross position of the robots on the glass plate is detected by a global sensor system which includes a laser measuring unit and another CCD camera. The visual sensor information from both the local and the global sensor systems is used by the control algorithms to generate new commands for the robots, microscope and the positioning table. Vision is supported by a frame grabber in connection with fast real-time image recognition and processing systems. The vision parameters are passed on to the parallel computer system. They are used as a set point for the control loop.4. Planning of the microassembly：The above description of microassembly station activities is very general and perhaps makes the assembly process sound too simple, but many problems must first be solved. After a microsystem has been designed, all tools and techniques necessary for its automated assembly should be determined, so that the microassembly station can be set up for a taskspecific operation sequence. The specified techniques and tools must take the geometry of the components of the microsystem into consideration, as well as their physical properties, such as rigidity, texture and temperature stability. Therefore, the planning phase of an automated microassembly requires a high degree of competence. Pure top-down planning in a microassembly station seems to be impossible since the selected robots and their tools determine the flexibility and the degree of automation of the station, and therefore, also determine its performance limits. One possible planning strategy is the meet-in-the-middle strategy; thereby, this intermediate interface can be on the tool level. Indeed, the main functions of assembly planning are the determination of the task-specific sequences of the elementary operations and the selection of necessary tools for carrying out the work (top-down planning) . On the other hand, the tools and the elementary operations needed for the assembly of a microsystem also require that the microrobots have specific functional properties, which may influence the robot design (bottom-up planning) . As mentioned, for more complex assembly tasks several robots must be used together in the desktop station. Individual robots can, for example, be specializedto take care of one or more certain assembly operations. In this case, the robots carry out their manipulation tasks in a sequence which is defined during the planning phase. For more complex operations, robots can be pooled together to do simultaneous actions with the help of several different tools (e.g., transferring or gripping of objects) . In this case, the operators commands are no longer transmitted one-by-one to the manipulator arms, but are applied to the entire multirobot system, e.g., by means of the one-by-multiple method 【11】. Here, one microrobot acts as the leader of the group, it gets micromanipulation assignments from the operator and then coordinates the other microrobots to complete the task using an automatic process for communicating with the robots and then giving them the corresponding commands. If the cooperating robots are equipped with sensors, new object manipulation methods can be developed, which are based on the distributed observation of the objects. The object could be observed from two view points, for example, which would supply exact data concerning the objects movements. The main problems of the practical realization of the micromanipulation desktop station employing several microrobots are caused by the assembly planning on the uppermost control level, the task-specific distribution of the necessary robots and tools, as well as their movements and forces, which should allow the assembly process to run error and collision-free. The planning system of the station, which is being developed 【12】, consists of three main module: system interface, assembly task planner and assembly execution planner (Fig. 2) . The modules are supported by a knowledge base which includes knowledge on the task specification, an assembly model of the microsystem, the specification of existing microrobots and their tools, a world model (micro and macro) and the current station state obtained by the sensor system. The planning process of the assembly task planner is successively performed in three planning levels. In the first step, an assembly graph is generated. Each node of the graph represents one particular assembly operation and the edges represent the relations between two operations. At the next level, a sequence of executable assembly operations( like operations for pick and place, push, turn, etc). is planned. Thereby the order restrictions of the assembly graph have to be considered. The geometry of the working area and the resources available such as microrobots and their tools must be taken into account during this planning step. After obtaining the action sequence, a task decomposition has to be done. The action sequence is decomposed into subplans for microrobots based on their operational capabilities. The actions generated by the assembly task planner are then particularized to the specific conditions in the working area by the assembly execution planner. The execution planner generates a motion sequence of the platform and the endeffectors for each microrobot which is necessary to execute the planned actions. The motion planning for each microrobot is performed by its own execution subplanner. At this planning level, three types of collision-free motion are distinguished: gross motions of the robot platform to transport workpieces from one place to another, fine motions of the robot endeffectors to graps or release a workpiece, and fine motions of the whole robot( platform+endeffectors) to manipulate the microobjects. The execution planning done by all microrobots subplanners must be supervised to ensure the consistency of the plans. The main function of the sensor subplanner is to manage the gross motion and fine motion sensor systems in regard to the actual action.5. Conclusions and future works：Coming to a conclusion, it can be stated that presently, no easy solutions exists for assembling microparts, especially when taking into consideration the hardware and software and the costs involved. It can be clearly seen, however, that the availability of versatile automated microassembly stations will greatly contribute to the long-awaited industrial breakthrough of MST. A current industrial success that encourages the development of MST is the rapid progress of microelectronics, where automated production methods led to the birth of an entire new industry. This development is a motivating example for MST researchers, who are the innovators in the interdisciplinary field of microassembly. Such microassembly stations need an adaptable and hierarchically distributed control system, which make it possible to quickly initiate a cooperation to an immediate request between the operator and a robot or between different robots. It is nearly impossible to explicitly program every possible scenario that can happen in the complex operation surrounding. In a flexible system, the individual robots should be able to adapt their behavior to the surrounding and react flexibly to new situations. Decentralizing of a control system is also of advantage to facilitate the robots ability to learn. Machine learning of single robots has been investigated for a long time, but the learning process of a group of robots is not known. An important concept in multirobot systems seems to be learning by observation. Different simulation tools can be helpful in assembly planning. In order to be able to evaluate the assembly task and choose the best strategy, various operating sequences can be tried out by using CAD models of the microrobots and workpieces. Evaluation criteria could be freedom of collision, best use of resources, duration of assembly, compliance with technological parameters, etc. However, it is not always possible to get help from a simulation module. As long as there is only path planning involved, there are many ways of finding a solution. When no trajectory restrictions are given other than that a goal has to be reached, collision avoidance methods based on fuzzy-logic seem to be suitable. But it is very difficult to simulate the force distribution between several robots which cooperate in a manipulation task. Another unsolved problem is simulating the task-specific manipulation of microobjects, for example, for the purpose of testing the assembly task of a given robot and a tool, or to determine how much time the process will take. To do this, it is necessary to know the forces occurring in the microworld and the dynamic behavior of microobjects. For neither of these problems, there are models available so that dynamic assembly planning cannot be carried out today.Acknowledgements：This research work was performed at the Institute for Real-Time Computer Systems and Robotics （Headed by Prof. Dr. U. Rembold, Prof. Dr. H. Worn, and Prof. Dr. R. Dillmann） , Faculty for Computer Science, University of Karlsruhe, 76128 Karlsruhe, Germany.References：【1】F. Arai, D. Ando, T. Fukuda, Y. Nonoda, T. Oota, Micro manipulation based on micro physics, Proc. of IEEErRSJ Int. Conf. on Intelligent Robots and Systems IROS , Pittsburgh, PA, 1995, pp. 236241.【2】M. Mitsuishi, K. Kobayashi, T. Nagao, Y. Hatamura, T. Sato, B. Kramer, Development of tele-operated micro-handlingrmachining system based on information transformation, Proc. of the IEEErRSJ Int. Conf. on Intelligent Robotsand Systems IROS , Yokohama, 1993, pp. 14731478.【3】H. Morishita, Y. Hatamura, Development of ultra precise manipulator system for future nanotechnology, Proc. of Int. IARP Workshop on Micro Robotics and Systems, Karlsruhe, 1993, pp. 3442.【4】T. Sato, T. Kameya, H. Miyazaki, Y. Hatamura, Handeye system in nano manipulation world, Proc. of Int. Conf. on Robotics and Automation, Nagoya, 1995, pp. 5966.【5】M. Horie, H. Funabashi, K. Ikegami, A study on micro force sensors for microhandling systems, Microsyst. Technol. 1 3 1995 105110.【6】U. Gengenbach, Automatic assembly of microoptical components, Proc. of SPIE International Symposium on Intelligent Systems and Advanced Manufacturing, Boston, MA, Vol. 2906, 1996, pp. 141150.【7】S. Fatikow, A microrobot-based automatic desk-station for assembly of micromachines, Proc. of the 12th Int. Conf. on CADrCAM Robotics and Factories of the Future, London, 1996, pp. 174179.【8】B. Magnussen, S. Fatikow, U. Rembold, Micro actuators: principles and applications, in: M. Glesner Ed. , Aufgaben der Informatik in der Mikrosystemtechnik, Schlo Dagstuhl, 1994.【9】S. Fatikow, B. Magnussen, U. Rembold, A piezoelectric mobile robot for handling of microobjects, Proc. of the International Symposium on Microsystems, Intelligent Materials and Robots, Sendai, 1995, pp. 189192.【10】B. Magnussen, A parallel control computer structure for complex high speed applications, Proc. of the 1st IEEE Int. Conf. on Engineering of Complex Computer Systems, FL, 1995, pp. 385388.【11】S. Hirai, S. Sakane, K. Takase, Cooperative task execution technology for multiple micro robot systems, Proc. of the IARP Workshop on Micromachine Technologies and Systems, Tokyo, 1993, pp. 3237.【12】S. Fatikow, R. Munassypov, An intelligent micromanipulation cell for industrial and biomedical applications based on a piezoelectric microrobot, Proc. of the 5th Int. Conference on Micro Electro, Opto, Mechanical Systems and Components MST , Berlin, 1996, pp. 826828.Sergej Fatikow, born on March 5, 1960 in Ufa, Russia, studied computer science and electrical engineering at the Ufa Aviation Technical University in Russia, where he received his doctoral degree in 1988 with work on intelligent control of complex nonlinear systems. Then he moved to the Institute for Real-Time Computer Systems and Robotics at the University of Karlsruhe in Germany where he is working as an assistant professor.Since 1994, he is a leader of theresearch group Miniature and Micro Robots. His research interestsinclude different aspects of microrobotics, microassembly, intelligent planning and control in microassembly cells, and neuro-fuzzy-based information processing.Mirko Benz was born in Offenburg, Germany in 1969. He studied computer science at the University of Karlsruhe, Germany from 19901996 where hespecialized in CIM Computer Integrated Manufacturing and AI ArtificialIntelligence and took part in a traineeshipsity of South Australia, Australia. As a student member of up Miniature and MicroRobots at the Institute of Real-TimeComputer Systems and Robotics, he has contributed to the investigation ofmicrosystem technology and microrobotics and is co-author of several publications. Currently,he is working for the IT group of the Hewlett-Packard in Boeblingen, Germany.以微型机器人为基础的自动化显微操作装置为微系统装配摘要：小型化的新类型的发展和智能型微型机器人在不同的应用程序任务中扮演着重要角色。现在研究的主要问题之一是,例如，装配来自不同的微成份的一个整个的微系统。这篇论文说明一个包括放在精密x-y坐标的光学显微镜上的一个压电驱动机器人的自动化显微操作桌面装置，一部电压耦合元件照相机作为一个局部的感知器次系统，一个激光感知器单位作为一个整体的感知器次系统，额外配置一台带有光学抓帧器的奔腾电脑。这个微型机器人有三压电驱动支架和两个活动自如的机械手作为终结者。它能在显微镜下对很小物体执行精密的处理（准确度10nm以下）和非破坏性的运输（以若干nm/s的速度）。为了自动地执行操纵，一个控制系统,包括一个任务计划标准和一个即时实施标准, 正在被发展。关键词：微型机器人 显微装配 自动化桌面装置 装配计划 压力致动器1 介绍：全世界对小型化和微型机器人的需求在增加。由于巨大的断缺，在传统的迹器人学和微系统工艺学中，每个人都相信遥控的发展或者自主的机器人将在许多领域引导进步。最重要者，积极的结果在药 (显微外科) 被期望,制作 (微型装配，检查和养护), 生物 (细胞的操纵) 和测试的/测定的技巧 (VLSI)。药是一种得益于微型机器人学最多的应用领域之一。关注多在人工的器官 (义肢学) ，腹腔镜，可深植的药物输出系统 (诊断和治疗体系) ，可视显微手术,等等。在过去的几年间，极小探入式手术在药学领域获得极大的发展。更小和更多易曲的有效内视镜被需要去替代人类的手，回应外部的事件, 经过自然的身体孔刺入一个车体或者一个船舶或者远距控制的一个小切口,在这些地方他们执行复杂的现场测量和操纵。妥善符合这些需求，微处理机, 一些感知器和引动器, 一个光源和可能地一个图像处理单元应该被整合进入一智能的内视镜。生物技术需要特别的有微细构造的有效工具,这种工具能够执行如在显微镜下细胞的分类或重聚或异物的细胞注入的显微操作。在基因研究和环境技术（细胞作为有害物质的指示剂），单一细胞的精密的和温和操纵也被需要。工业和特别的制作和度量技术在微米范围内需要高度敏感的测试方法。一个重要的任务表现,例如，晶圆的检查,一些核对点必须被一个温度或电压探针连络。同样适用于应用在难接近的或者危险的地形为检测缺陷和漏洞并修理的检测机器人（例如，在输送渠道）。工业上微系统相关技术发展的采用已经证明了哪一类的问题在微系统的大量产品中发生。这些系统通常有与各种不同的微技术一起生产的材料的微成份;这就引发了一个或一些个别组件的精密装配步骤。微系统的总成,也就是，无可破坏的运输, 精密的操纵或微成份的正确定位正成为微型机器人学中最重要的应用之一。2 微物质的操作：高度精密的总成程序的可行性将会在经济上比较容易地实现可实施的微系统。为了有效地生产大尺寸的微系统和组件或者藉着大量生产技巧，了解有柔性的，自动化的，精密的和快速微装配的装置是完全必要的。不同的观念正在被接受去为应用程序的类别做显微操作。纯粹手动的显微操作是当今最常用的方法. 在药和生物的研究中，它独有地被利用。尤其在工业，微型装配任务时常由特别训练的技术员运行，他们总成零件使用螺丝和弹簧，然后用极小的锤子和镊子放置零件, 而且最后在被需要的位置中夹紧它们。然而，藉由递增组件的小型化，公差变得越来越小，而且人类手的能力不再精确。传统尺度的部份自动显微操作系统的应用程序, 是可视的; 藉此，人类操作者的手动作被为操纵系统的操纵者藉由一个摇杆或鼠标转变为较相似的3D立体动作。在这里，人类手的技巧由复杂技术支持。然而，相似动作和速度保持是需要解决的基本问题,因为工具的动作是操作者的手的直接模仿。自动化的多功能的显微操作桌面装置的使用被应用特别微型操作技术的直接传动原则的小型化的柔性机械手支持。这些机器人应该是移动的和能在不同的工作区域中执行操纵。运输和执行总成的显微操作单位可能在一个晶片之上被整合。相反上述的显微操作技巧, 没有操作者的手和机器人之间的直接连结。总成步骤可能与闭环控制运算法则的辅助一起运行。人类为小型化总成机构分配所有的任务，并且藉由如此执行，试着为他的有限显微操作能力作差补。许多微型机器人在一个桌面装置中能同时有效。解决在紧密合作中的操纵任务的许多柔性的纳米机器人系统的使用。在这里，机器人尺度对被操纵的物件是可比较的。这一项观念应该以人类行为学为基础, 但是在遥远的将来它必将实现。大体上，操纵从一个应用程序执行到另外一个。然而，大约相同的运作顺序在每个情形都可以被用。 他们是: 手柄, 运输,放置,放松,调节, 适当地固定，和加工步骤像切削, 锡焊, 黏合, 杂质的排除, 等等。为了能够运行这些运作, 对应的工具像微小刀具，微小滚针附黏物件，微小剂量喷射,微激光方法对于软焊，熔接或者切削，微小抓爪器，微小刮刀的不同类型，调整用工具,等等被需要。微小抓爪器扮演一个特别的角色,因为他们很影响机械手的操纵能力。微小抓爪器能夹紧, 作磨擦力联接或者黏附在材料之上,依赖物件的物理学和几何学性质。使一个夹子配合物件的形状跟踪抓紧是在显微世界中最好的解决方法, 甚至以韧性为代价。这允许一个有复杂形状的工作区的处理，如一个齿轮。藉此，夹子安全地附上零件的等高线。 对于很小，光滑的零件，一个吸取移液器可能是一个实际的工具。如果工作件的上表面由于技术的原因不能被接触或者抓紧, 它能被一个移液器孔对应模型进行保护。 对于包括易碎零件的等高线定位和磨擦力联接的操纵，用软式塑料做成的柔性夹子替代金属夹子被偏爱。由于在自动化的显微操作系统中采用特别任务抓紧工具的种类,一个适当的夹子交换器系统可能是必需的。应该提及一点，它不总是可能使传统的操纵方法适应显微世界的需量。 一个主要的问题是完全地不同于显微世界的各种不同力的效应。万有引力只在显微世界扮演一个较小的角色,但是，诸如静电力和范德华力之类的引力的作用是不容忽视的。 如果湿度是高的或者一个操纵者是潮湿的，液体表面拉力也能在显微操作中担任一个吸引力。这个不寻常的对力的灵敏度在一个显微操作装置中可能是非常影响的。例如, 对机器人来说，抓紧而且操纵一个物件要比后来释放物件容易些。另一方面, 如此的一个黏附力能被用来开发能基本上不同于普通的机械和空气的方法的新的抓紧方法。在叁考文献【1】中,为附着的抓紧提供了一些有趣的想法,像是电荷在一个操纵者或湿的特别微型机械孔的一个夹子表面上。显微操作装置的性能和智力度作为一个手动式是低的; 它通过介入可视操作和进一步的针对一个自动化得到改良; 这和传统的机械手相似。今天大多数的显微操作调查焦点集中在从从纯粹手动到可视操作系统获得的改进【2-4】。如先前提到的,人们正在尽可能现实的将结果从显微世界向操作者进行传输。很重要的是，操作者在他的视域中有整个的现场而且他能见到来自不同角度的工作空间。此外视觉的信息,可能的话 操作者也应该能够接受到声学和力信号; 这可能增加他操作的精确度而且避免破坏微观物质。因为这些，被执行进入微观工具之内的力感知器被需要(举例来说,显微抓爪器)。现在适当的解决方法正在被寻找以实现这种类型的感知器【5】。3. 柔性显微操作装置的发展：典型地，在一个传统的自动机械或半自动式的总成装置中，标准化机械的零件在定义明确的工作位置被装配。通常执行工作的机械手是多桥线臂设计，或者他们是吊架系统,通常被直流电动机驱动。今天，它正在被尝试以毫米范围使用这些型态的熟悉系统作为操纵装置和小型化的组件的装配。例如,有四个自由度的一个模组显微装配系统现在正在被发展【6】。随着工作件小型化递增，然而，用传统的操纵机械手装配微系统变得越来越困难。对传统的机械手操纵精确度被机械地限定, 因为在微观世界干扰的影响可以忽略,像小的制造毛病，磨擦, 热膨胀或者计算的错误，这些干扰在微尺度起很大作用。由于机械的驱动引动器的操作，这些机械手系统一定承受一般的养护和受制于机械磨耗,这使他们价格昂贵。在微观世界的总成方法为与质量相关动力学处理的物件所影响。不同的加工条件存在于操纵显微镜小的组件。位置准确度和微小组件的公差在纳米范围内, 一些大小等级型低得超过了传统的总成。这些精确度需求只能从利用微系统技术和高阶闭环控制进行高精度驱动的操纵者处获得。因此，一个以微型机器人为基础的柔性桌面装置是特别有意思的。现在关于自动化的显微操作桌面装置的一项新的观念正在被调查【7】。 在文献【8,9】中的主要部分是压电的机械手。每个机械手有一个带整合的移动平台的显微操作单元，使机械手有能力易于移动而且操纵。 工具能容易地兑换。这些机械手性质在微型装配装置中是支持操纵程序自动化的完全感知器的优秀先决条件。由于微型机器人的韧性，这一个多功能的桌面装置也能为其他的事物所
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