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中期检查表系别学号学生姓名班级专业指导教师毕业设计（论文）题目弯管接头注射模具设计毕业设计（论文）进展情况与已完成的工作：说明书已基本完成。已完成的工作：2D零件图 三维图 装配图 外文翻译下一步拟进行的工作计划：完善说明书，修改图纸，准备答辩。学生签名： 年 月 日 指导教师评语：指导教师签名： 年 月 日 Microsyst Technol (2008) 14:15071514 DOI 10.1007/s00542-007-0533-8TECHNICAL PAPERMicro injection molding for mass production using LIGA mold insertsTakanori Katoh Ryuichi Tokuno Yanping Zhang Masahiro Abe Katsumi Akita Masaharu AkamatsuReceived: 13 July 2007 / Accepted: 16 December 2007 / Published online: 8 January 2008。 Springer-Verlag 20071 3Abstract Micro molding is one of key technologies for mass production of polymer micro parts and structures with high aspect ratios. The authors developed a commercially available micro injection molding technology for high aspect ratio microstructures (HARMs) with LIGA-made mold inserts and pressurized CO2 gasses. The test insertsmade of nickel with the smallest surface details of 5 lmwith structural height of 15 lm were fabricated by using LIGA technology. High surface quality in terms of low surface roughness of the mold inserts allowed using for injection molding. Compared to standard inserts no draft, which is required to provide a proper demolding, was formed in the inserts. To meet higher economic efficiency and cost reduction, a fully electrical injection molding machine of higher accuracy has been applied with dissolv- ing CO2 gasses into molten resin. The gasses acts as plasticizer and improves the flowability of the resin. Simultaneously, pressurizing the cavity with the gasses allows high replication to be obtained. Micro injectionmolding, using polycarbonate as polymer resins, with the aspect ratio of two was achieved in the area of 28 9 55 mm2 at the cycle time of 40 s with CO2 gasses, in contrast to the case of the aspect ratio of 0.1 without the gasses.1 IntroductionFor recent growing interests in polymer micro parts and structures with high aspect ratios for microsystems andT. Katoh (&) R. Tokuno Y. Zhang M. Abe K. Akita M. AkamatsuSumitomo Heavy Industries Ltd., 2-1-1 Yatocho,Nishitokyo, Tokyo 188-8585, Japan e-mail: tkn_katoshi.co.jpmicroelectronics, the economic production technologies have been desired. There are also a lot of applications in cellular mobile-phone system, automotive industries, medical engineering, just to mention a few field. Micro molding as a key technology for mass production of such polymeric micro parts and structures have been made efforts to overcome difficulties of good replication with shorter cycle time for improving productivity (Michaeli and Rogalla 1996; Piotter et al. 1999). Hot embossing including nanoimprinting and reaction injection molding have been developing for higher transcription of micro/ nano structures, in spite of longer cycle time (Heckele et al. 1998; Morton et al. 2006; Datta and Goettert 2007). On the other hand, the critical minimal dimensions which can be replicated in good transcription are mainly determined by the aspect ratio. However, injection molding is the most cost effective technologies for mass production, micro parts molded by the technology are limited that the aspect ratio is small, because of lower flowability of resins for plastic products. For aspect ratio less than one, the minimal structural details go down to the submicron scale as the case of mass production for CD and DVD by injection molding.In high-aspect-ratio microfabrication technologies, the best-known technique certainly is LIGA (Lithographie, Galvanoformung, Abformung) process (Becher et al. 1986). By means of deep-etch X-ray lithography and electroforming, tools with minute structural details in micron range, largest tool heights of up to several mm, and lateral wall roughness in the nm range (Ra = 70 nm typi- cally) can be produced (Guckel 1996). Plastic molding of high aspect ratio micro structures (HARMs) using LIGA made mold inserts has been investigated for past decade (Ruprecht 1995; Despa 1999; Piotter 2002; Yorita 2004). Some work lead to the commercial application of certain1508Microsyst Technol (2008) 14:15071514Fig. 1 Compact SR-ring, AURORA-2S installed in SHIs Tanashi worksparts by dedicated micro molding machine with special equipment different from the industrial-based plastic molding technologies (Haverkamp et al. 1999; Wallabe et al. 2001).This paper provides the results of high aspect ratio micro injection molding combined with the commercially avail- able our injection molding machine with pressurized CO2 gasses into molten resin which can be improved the flow- ability of the resin and LIGA-made mold inserts fabricated by our compact synchrotron radiation (SR) source, AUR- ORA-2S (Fig. 1).2 Fabrication of LIGA mold insertsWe fabricated LIGA mold inserts with high aspect ratios using X-ray from a compact (footprints: 5 9 10 m2) SR source AURORA-2S built by Sumitomo Heavy Industries, Ltd. (SHI). This is one of SHIs home-made compactelectron storage rings, optimized for micro- and nano- fabrication (Hori and Takayama 1995; Zhang and Katoh 1996). The source is installed at SHIs facility and operates with electron energy of 700 MeV and a routine stored current of 500 mA (a lifetime of 15 h). Several compact beamlines (e.g., BL11 and BL13) less than 5 m long for micro-fabrication already developed were adop- ted to carry out the X-ray deep lithography. Detailed descriptions for BL11 have been written elsewhere (Hi- rose 2000). The BL13 consists of (a) a front end connected to the SR source, an ultrahigh vacuum part(base pressure of 2 9 10-9 Torr), (b) an intermediate partwith some filters (50 lm of beryllium, 100 9 10 mm2), also an ultrahigh vacuum part, and (c) an exposure chamber separated by a beryllium window (300 lm, 100 9 10 mm2). The spectrum of this beamline has a critical wavelength of 0.4 nm in the wavelength rangebelow 0.7 nm (i.e., between 2 and 5 keV of X-ray energy). The photon flux per electron beam current on the resist surface was about 3.2 9 1010 photons/s mA mm2.The size of the SR X-ray at the resist surface was 100 9 7 mm2. The exposure chamber was purged with helium gas at 1 atm during lithography in order to prevent attenuation of the X-ray by N2 or O2 gases and to preventdamaging either the mask, which consists of several micron-thick gold absorber and a certain membrane (e.g., polyimide, SiC, and SiN), or the resist by heat load. We used commercially available sheets of PMMA as a resist, which thickness were 2.0 mm. The PMMA was exposed with the mask for mold inserts at an optimum dose of X- ray by vertically scanning at a speed of 1 mm/s. The exposed PMMA was developed with a GG developer (60 vol% 2-(2-butoxy-ethoxy) ethanol, 20% tetra-hydro-1, 4- oxazine, 5 vol% 2-amino-ethanol-1 and 15 vol% water) at36。C. Successively, stopper liquid (80 vol% 2-(2-butoxy-ethoxy) ethanol, and 20 vol% water) was used at the same temperature for 10 min, followed by DI-water rinsing at 36。C for another 10 min. After fabricating the PMMA as templates for electroforming, high-strength and low-stressnickel electroforming was performed to produce LIGA mold inserts. The insert made of nickel had the size of 42 9 75 mm2 and the thickness of 0.5 mm (Fig. 2). Thesmallest surface details of the mold inserts was 5 lm with structural height of 15 lm, that is, aspect ratio of three.Many kinds of patterns were included in the inserts (e.g., line and space, dot, grid, cross, fluid channel, grating, optical waveguide and so on). Both convex and concave micro patterns were designed at line symmetry (a broken line in Fig. 2). It was demonstrated by SEM that the surface quality of the mold inserts was extremely fine and also demonstrated in a functional test of molded products that wear of the LIGA mold inserts did not occur even after more than 2,000 molding processes. As described later, in contrast to mold inserts used in conventionalprocess with oblique side wall (typically 15。) for an easydemolding, the walls of the LIGA molds are without any inclination. Due to the extremely small roughness of the side walls (less than Ra = 70 nm), the demolding from mold inserts was very smooth as unexpected.3 Experimental setup and procedure for injection moldingFigure 3 shows a schematic of our injection molding sys- tem with commercially available AMOTEC (Asahi Molding Technology with CO2) equipments which consists of the dedicated injection molding machine with a heating cylinder, CO2 supplying system to the barrel (AMOTEC-1) and the cavity (AMOTEC-2) and the gaseous-sealing mold.Microsyst Technol (2008) 14:150715141509Fig. 2 LIGA mold insert including various kinds of patterns (left) and SEM images (right). A broken line shows the position of a line of symmetryAMOTEC is a novel high-added technology involves dis- solving CO2 into molten resin (Yamaki et al. 2001; Shimoide et al. 2002; Akamatsu et al. 2003). Asahi Kasei Corporation holds the patents and we (SHI) have a license agreement on that. The CO2 dissolved into the spaces between the molecules of molten resin inside the barrel with a heating cylinder and acts as a plasticizer that improves the flowability of the resin. Using this property of CO2 gasses, good transcription can be achieved when molding products require ultra-fine replication, thin-walled replication and resin that are difficult to mold. Simulta- neously, pressurizing the cavity with CO2 allows high replication to be obtained, due to the flowability of the dissolved CO2 layer which does not form the solidified layer around the flow front of the melted resin. After molding, the CO2 whose contents is less than several per- cent of the total amount of the resin, evaporates and dose not change the properties of the resin. Last but not least, since the glass transition temperature (Tg) of the resin decreases as the CO2 pressure increases, molding can be performed with both the mold and the resin at lower tem- peratures. Less time is required for cooling so that the cycle time can be greatly shortened.Injection molding experiments were performed using a fully electric injection molding machine (SumitomoSE75DU, clamping force: 75 tons, maximum injection speed: 400 mm/s, injection unit: C160S, screw diameter: 22 mm) equipped with CO2 supply devices (MAC-100, Asahikasei Engineering Co., Ltd.). The mold platens were designed to hold two LIGA inserts, two cavities (size:28 9 55 mm2, thickness: 1 mm) and cold runners withfan gates at the end. The material used for mold products was polycarbonate (PC) (AD5503, Teijin Chemicals) thermoplastic resin. The weight of the resin per shot was5.7 g and the weight of the product (PC-plates of 25 9 55 mm2, 1 mmt) was 1.8 g. The polymer was injected into mold cavities at a pressure ranging from 150 to 200 MPa. The inside the mold and the heating cylinderwere pressurized with CO2 at 26 MPa. The melt tem- perature in the feeding zone was maintained at 300。C.Temperature of the mold and the sprue were controlled by heaters and maintained at 130 and 80。C, respectively. The cycle time of the molding process was 40 s, which wasincluded the cooling time for 24 s after filling stage of the resin into the cavity.The products molded during continuous production were used as evaluation samples. For evaluation of tran- scription, the replicated heights of the fine patterns of the samples were measured with laser microscope (VK8150, Keyence). The method and patterns for measurements areFig. 3 Experimental setup for micro injection molding using AMOTEC with CO21510Microsyst Technol (2008) 14:15071514illustrated in Fig. 4. There were five convex test-cross patterns (see Fig. 4a) and five concave test-cross patterns in each sample along the flow direction of the resin. The test-cross patterns had the minimum features of 5 lm near thecenter. Since it is more difficult to fill the resin into the concave patterns of inserts normally, the convex test-cross patterns were mainly used for evaluation of replicated heights.4 Results and discussionFigure 5 shows the typical results of the molding with CO2 (AMOTEC) and without CO2 (conventional). The LIGA inserts are also presented in the Fig. 5c. In the case of AMOTEC, good transcription with sharp and defined edges of like SHI characters with the micro mold-cavities at the corners can be clearly seen. The shape of molded products is almost the same as reverse images of the LIGA inserts. On the other hand, the result of the conventional molding shows poor transcription with round edges of the characters which dimensions are several tens of microns. These results actually show that the improved flow ability of the resin is effective to achieve good replication of fine patterns.The differences of the replicated height at the different CO2 conditions during molding were investigated (Fig. 6). For the conventional case, the replicated height of the convex test-cross pattern of minimum width of 5 lm wasFig. 5 SEM images of the molded parts by the molding with CO2 (a) and conventional molding (b), respectively. (c) is a part of the insert formed by LIGA technologyonly 1 lm. For the CO2 case, two conditions were tested.One is the case that inside the mold and the heating cyl-inder were pressurized with CO2 at 2 and 4 MPa. The other one is the case that the mold and the heating cylinder were pressurized with CO2 at 4 and 6 MPa. Replicated heights could be improved drastically with CO2. Correspondingly, these results show that the replicated height increases as increasing the pressure inside the mold and the cylinder. Following results were corrected with the same condition of Fig. 6c. This condition was basic one in our experiments.The replicated height-to-width ratios of molded micro- structures were used to measure the quality of molding results. The measured results for the test-cross patterns,which have a minimum width of 5 lm, are shown in Fig. 7.The figure shows the comparison of replicated height and shape between molding with CO2 gasses and conventional molding during the mass production, respectively. Hori- zontal and vertical axis of the Fig. 7 shows the lateral scan range and replicated height measured by the laser micro- scope. The microscopic images of the molded products are shown in the same figure as insets. In the case of CO2 gases, the replicated height of the test-cross pattern wentFig. 4 Evaluation methods for replicated height; test-cross (a), dots(b) and L/S (c), respectivelyover 10 lm as described above. In the transcription, aspectratio more than two could be achieved for the mass-Microsyst Technol (2008) 14:150715141511Fig. 8 Position dependence of replicated height of the test-cross pattern at the flow-end, center and gate side of the cavity, respectivelyFig. 6 Differences of replicated height at different conditions. Conventional without CO2 (a), inside the mold and the heating cylinder were pressurized with CO2 at 2 and 4 MPa (b), 4 and 6 MPa (c), respectivelyFig. 7 Comparison of replicated height between molding with CO2 gasses (a) and conventional molding (b), respectively. Insets show the microscopic images of (a) and (b), respectivelyproduction molding. The shapes of the side walls of the molded test-cross pattern were almost perpendicular. The shape of the top of this pattern was somehow rough since the filling of the resin into the cavity with the test-crosspattern of 15 lm depth might not be sufficient. On theother hand, the replicated height of the conventional molding without CO2 gasses was less than 1 lm (0.4 lm, typically). The shape of the replicated pattern looked like a pancake without clear edges. Correspondingly, in the microscopic image of the molded result of the conventionalmolding, the replicated edges of the test-cross pattern could not be clearly seen.Moreover the effects of the pressurized CO2 for the molding process were studied. First of all, the position dependence of the replicated height whole transcription area of the insert was investigated. The replicated heightsof the test-cross pattern at near side of the gate, center of the cavity and near side of the flow-end of the resin were measured both the CO2 case and the conventional case. These results are shown in Fig. 8. In the case of conven- tional molding, the replicated height at the near side of the gate was relatively higher than that of the height at the near side of the flow-end. That might be understand the solidi- fied layer of the resin could be easily grown at the flow-end of the resin far from the gate at where the resin was still maintained at higher temperature. In the case of AMOTEC, good replication whole cavity from the gate side to the flow-end can be achieved due to the improved flow ability of the resin even on the flow-end by the pressurized CO2. The replicated heights are almost the same at the all rep- lication area in the cavity. That is also one of advantages of pressurized CO2.Secondly, we checked flow direction dependence ofreplicated height of the test-cross patterns (Fig. 9). An, Bn and Cn (n; 1,2) denote the measured positions of the rep- licated height in the test-cross pattern, corresponding to the position indicated in the inset of the test-cross pattern in this figure. Flow direction of the resin is from C2 to A2, asalso shown in the inset. Figure 9a shows the results of around the center position with about 5 lm width of test- cross pattern both conventional and AMOTEC cases. Fig-ure 9b shows the results of outside position with about 20 lm width of the test-cross pattern. The effectiveness of AMOTEC is obvious at a glance. The transcription forconventional molding became better as broadening pattern width. Moreover, replicated heights at the position (A1 and A2) against the resin-flow were a little bit higher than that at the position (C1 and C2) along the flow direction. On the other hand, the transcription for AMOTEC was almost uniform over the test-cross pattern. There were not noticeable differences of replicated height for flow direc- tion between center and out side position.Furthermore, we investigated effects of pressurized CO2 for the replication of fine patterns on the 5100 lm size of1512Microsyst Technol (2008) 14:15071514Fig. 9 Flow direction dependence of replicated height of test-cross pattern, around center with the width of about5 lm (a) and out side with thewidth of about 20 lm (b). The position and direction of theresin-flow are denoted in the inset, respectivelyround, square and striped pattern (lines and spaces). While there were no differences of replicated height more than 50 lm patterns between conventional and AMOTEC, there were great differences for less than 10 lm patterns. Forexample, the replicated heights for 10 lm square-pattern were less than 1 lm by conventional molding and about 5 lm by AMOTEC molding, respectively (Fig. 10). In thecase of striped pattern, the replicated heights were less than 5 lm by conventional molding and more than 10 lm by AMOTEC molding, respectively. These results show that advantageous effects of pressurized CO2 appear when themolded patterns go down 10 lm of scale.However we have achieved high-aspect-ratio micro injection molding on the basis of mass production and found the advantages of AMOTEC, some defects which might be concerned with the process of filling or demold- ing could be observed during our experiments. Figure 10shows the SEM images of replicated patterns for 10 lmsquare mold at both conventional (a) and AMOTEC (b), respectively. It is clear that the replicated height of AMOTEC case in Fig. 10 is much higher than that of conventional case as described above. By checking over these images more carefully, it can be confirmed that there are bubble-like structures with the size of sub-microns around the each molded parts. Since we did not apply any evacuation in the cavity before the injection of the resin into the cavity, residual air existed in the cavity and micro patterns inside the LIGA mold inserts. This caged air might struggle to get away from the micro patterns just before the solidification of the resin filling into the patterns started. As the results, this bubble-like formation could take place near the edge of the micro patterns. Indeed, these bubble-like structures could not be observed for the stripe and test- cross patterns which were not relatively hemmed by the side walls.Fig. 10 SEM images of replicated patterns for 10 lm-square-mold at both conventional (a) and AMOTEC (b), respectivelyMoreover, some wrinkled structures were observed at a corner of a part of a molded micro-channel pattern for flu- idics with a trench of 10 lm width and 15 lm depthMicrosyst Technol (2008) 14:150715141513Fig. 11 SEM images of replicated patterns for a part of micro- channel with the trench of 10 lm-width and 15 lm-depth. Inset shows a drawing of the micro-channel(Fig. 11). This micro-channel pattern had the narrow down structure from the 50 lm width to 10 lm width as shown in the drawings of the inset. The LIGA mold inserts had pat- terns of convex type of this molded part. Very finereplication could be clearly seen on the right side edge. On the contrary, some wrinkled structures arose along the left side edge on the opposite-side. The reason for the formation of the wrinkle structures might be concerned with the de- molding process at relatively higher temperature by pushing the molded products using ejector pins. Our LIGA mold inserts had very smooth surfaces of the almost perpendic- ular wall as already mentioned above. Therefore the resin filling into the micro patterns might stick more strongly with the walls at higher temperature before the solidification of the resin. Releasing of the solidified resin from the micro patterns walls might proceed at lower temperature just before ejection of the products. The deformation at the certain parts of the molded product might be happen due to the stress strain effects if the molded parts would be forced for the ejection at the relatively higher temperature under the sticking of the resin. At the situation, releasing of the resin from the walls in the micro patterns of the inserts might not proceed sufficiently. Further investigation into details would be required what would be happen at de- molding process in our injection molding.5 ConclusionsMicro injection molding, using polycarbonate as polymer resins, with the aspect ratio of two was achieved in the area of 28 9 55 mm2 at the cycle time of 40 s with pressurizedCO2 gasses, in contrast to the case of the aspect ratio of 0.1 without the gasses. We combined all Sumitomo technolo- gies concerned with injection molding, that is, a stable fully electric injection molding machine equipped with CO2 supply devices (AMOTEC system) and LIGA-made mold inserts fabricated using a compact SR source (AURORA- 2 S). The role of the pressurized CO2 for the fine replica- tion and advantageous LIGA mold inserts for micro injection molding were demonstrated. Micro injection molding technologies with commercially available systems for mass production presented here would be very prom- ising to produce HARMs and would fill a growing demand of customers in the near feature.Acknowledgments The authors thank all staffs of our SR facility for the operation of the source and Mr. H. Hayasaki and Mr. Y. Satou for stimulating discussions concerning polymer injection molding and polymer chemistry in the molding experiments.ReferencesAkamatsu M, Mayama T (2003) AMOTEC injection molding technology using CO2 and injection compression molding for fine pattern replication. Plast Age (Japanease) 49(2):101103Becher EW, Ehrfeld W, Hagmann P, Maner A, Muenchmeyer D (1986) Fabrication of microstructures with high aspect ratio and great structural heights by synchrotron radiation lithography, electroforming and plastic molding (LIGA process). Microelec- tron Eng 4:3556Datta P, Goettert J (2007) Method for polymer hot embossing process development. 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Jpn J Appl Phys 35:L186L188使用 LIGA 模具镶件进行批产的微注塑成型技术摘要微注塑成型技术是大高宽比高分子聚合物微型构件和结构批产的关键技术。 本文研究了一种使用 LIGA 工艺制造的模具镶件和加压 CO2 气体批产大高宽比微 结构（HAMPs）的商用微注塑成型技术。表面最小细部 5m 结构高度 15m 的 实验镍镶件是用 LIGA 工艺制造的。表面质量高表面粗糙度低的模具镶件可用于 注塑成型。对比需要恰当脱模的一般镶件，加工中没有气体。为了满足更高的经 济效益和更低的成本，用高精度全电动注塑机将 CO2 气体溶入熔融树脂。气体 作为增塑剂，改良树脂的流动性。同时，对充气的孔洞加压能获得更多产物。用 聚碳酸酯作为高分子聚合物树脂，高宽比 2，面积 2855mm2，周期时间 40s， 使用 CO2 气体，与高宽比 0.1，没用气体条件下进行对比。1 引言由于微系统和微电子方面对聚合物微型构件和结构的需求，需要经济的生产 技术。简单说几个方面，它们在蜂窝移动电话系统，汽车工业，医学工程中有大 量应用。微注塑作为这类聚合物微部件和结构批产的关键技术已经努力克服困难 改善生产率，用更短的周期生产出良好的产品。(Michaeli 和 Rogalla 1996; Piotter 等人 1999)。包括纳米压印和反应注塑成型在内的热模压技术已经发展用于微/ 纳米结构的更高效转录，无需更长周期时间(Heckele 等人 1998; Morton 等人 2006; Datta 和 Goettert 2007)。另一方面，能被良好转录复制的临界最小尺寸主要 是由高宽比决定。不过，注塑成型是批产中性价比最高的技术，该技术注塑成型 的微型构件仅限于高宽比很小的，因为塑料制品的树脂流动性较小。例如用注塑 成型技术批产的 CD 和 DVD 中，高宽比小于 1，亚微米级的最小结构细部。 在大高宽比微加工技术中，最众所周知的技术当然是 LIGA（Lithographie 光刻, Galvanoformung 电镀, Abformung 注塑）工艺（Becher 等人 1986）。用深蚀刻 X 射线光刻技术和电铸手段，可以生产最大工具高度高至数毫米，侧壁厚度纳米级（通常 Ra = 70 nm），有着微米级极小结构细节的工具（Guckel 1996）。用 LIGA 工艺制造模具镶件的大高宽比微结构（HAMPs）的塑料成型已经被研究了近十 年（Ruprecht 1995; Despa 1999; Piotter 2002; Yorita 2004）。一些研究引领了不同 于 工 业 基 础 塑 料 成 型 技 术 的 带 特 殊 设 备 专 用 微 注 塑 机 的 部 分 商 业 应 用（Haverkamp 等人 1999; Wallabe 等人 2001）。 本文提供了我们购买的注塑成型机生产的大高宽比微注塑成型结果，该机器使用加压 CO2 气体进入熔融树脂增加树脂流动性，使用我们的小型同步辐射（SR） 光源 AURORA-2S（图 1）焊接 LIGA 工艺制造的模具镶件。2 制造 LIGA 模具镶件我们用住友重工（SHI）制造的 AURORA-2S 内的小型 SR 光源（覆盖区域： 510m2）的 X 射线制造大高宽比 LIGA 模具镶件。这是 SHI 的“国产”小型电子 贮存环之一，最适合微纳米制造（Hori 和 Takayama 1995; Zhang 和 Katoh 1996）。 该光源内置于 SHI 设备中，在 700 MeV 电子能和常规存储电流 500mA 下运行（使 用周期 15h）。多种用于微加工的小于 5m 小型光束线（例如 BL11 和 BL13）已 经被研发用于 X 射线深层光刻。对 BL11 的详细描述已经有人写过（Hirose 2000）。BL13 包含：(a)一个连接到 SR 光源的前端，一个超高真空部件（基准压力 210-9 Torr），(b)一个带滤光器的中间部件（50m 铍，10010 mm2），同时也是个超高 真空部件，以及(c)一个用铍窗隔开的曝光室（300m, 10010 mm2）。波长范围 0.7nm 以下（即 2 至 5keV 的 X 射线能量），这种光束线的光谱临界波长 0.4nm。 光刻胶表层每电子束电流的光子通量大约 3.21010 photons/s mA mm2。SR X 射线 在光刻胶表面的面积为 1007mm2。为了防止 X 射线被 N2 或 O2 弱化，也为了防 止热负荷损坏遮罩，或者破坏抗蚀剂，光刻中曝光室在 1 个大气压强下用氦气净 化。遮罩包含多种微米厚度金吸收体和某种特定隔膜（例如聚酰亚胺，碳化硅和 氮化硅）。我们是用购买的 PMMA 片材作为抗蚀剂，厚度为 2.0mm。PMMA 和 模具镶件的遮罩暴露在最适合剂量的 X 射线下速度 1 mm/s 垂直扫描。暴露的 PMMA 用 GG 显影剂（60 vol%2-(2-丁氧基-乙氧基)乙醇,20% 四氢化-1, 4- 氧嗪, 5 vol% 2-乙醇胺乙醇-1 和 15 vol% 水）在 36下显影。然后在同样温度下用阻 聚剂溶液（80 vol% 2-(2-丁氧基-乙氧基)乙醇和 20 vol%水）处理 10min，接着在 36用去离子水漂洗 10min。加工后的 PMMA 作为电铸模板，高强度和低应力 镍电铸被用来制造 LIGA 模具镶件。镍制镶件尺寸为 4275 mm2，厚度 0.5mm（图 2）。镶件最小表面细节 5 m，结构高度 15 m，即高宽比 3。镶件中包含多种图 样（例如线和空白、点、网格、十字、波浪线、光栅、光波导管等等）。凸出和 凹下的微图样都设计为轴对称（图 2 虚线）。已用 SEM 证明模具镶件表面质量 极佳，也在模压制品功能测试中证明 LIGA 模具镶件在 2000 次注塑工艺后没有 磨损。如下文所述，对比常规工艺中的模具镶件，侧壁倾斜（通常为 15）容 易脱模，LIGA 模具无倾斜。由于侧壁粗糙度极小（小于 Ra = 70 nm），出人意料 地，模具镶件脱模非常顺滑。3 实验装置和注塑成型步骤图 3 表示我们购买的 AMOTEC（用 CO2 的朝日注塑技术）设备注塑成型系 统原理图，设备包含带加热气缸，桶中（AMOTEC-1）和空腔中（AMOTEC-2） 的 CO2 供应系统和气密模具的专用注塑成型机。AMOTEC 是一种新奇的高附加 值技术，涉及将 CO2 溶入熔融树脂中（Yamaki 等人 2001; Shimoide 等人 2002; Akamatsu 等人. 2003）。旭化成株式会社持有该专利，我们（SHI）拥有授权合约。 CO2 溶入加热气缸桶内熔融树脂的分子间，充当塑化剂，改善树脂流动性。利用 CO2 气体的这种性质，当注塑产品需要超微细复制，薄壁复制和难塑形树脂时， 可以良好刻录。同时，由于熔融树脂流体前端不会凝固的溶入 CO2 层流动性， 对充入 CO2 的孔洞加压可以实现高精度复制。模塑后，含量比树脂总量低数个 百分点的 CO2 消失，且不会改变