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英文翻译外文文献翻译228利用曲臂3个自由度的相同并列式微型机械结构的实验设计.doc
英文翻译外文文献翻译228利用曲臂3个自由度的相同并列式微型机械结构的实验设计
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英文翻译外文文献翻译228利用曲臂3个自由度的相同并列式微型机械结构的实验设计,机械毕业设计英文翻译
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外文资料翻译 1 Crankshaft three degrees of freedom use the same parallel micro-mechanical structure of the experimental design 利用曲臂 3 个自由度的相同并列式微型机械结构的实验设计 Abstract: Crankshaft in mechanical structure design of the small general has been replaced mechanical connection and extensive use. However, the wrong model will be reduced Crankshaft precision mechanical structure. In this paper, in order to get the correct model Crankshaft and design of a 3-DOF planar the same type of micro-mechanical structure. To that end, an initial analysis of kinematics including inverse kinematics, internal kinematics and coordination of the work of a fixed model has been raised. First of all, take into account a freedom Crankshaft cycle type, but FEM based on the simulation results is inconsistent with the analysis of the results. This is because small axial direction along the connecting rod extended to hinder the accuracy of the mechanical connection. To address this problem, including an additional sports bodies such as the prism connecting the two degree of freedom model Crankshaft has already begun to use some. According to this model, ensure the accuracy of the mechanical structure. Through simulation and test showed that the accuracy of this model is effective. This work emphasized the model Crankshaft Crankshaft guarantee the accuracy of the micro-mechanical structure tied to the use of great significance. 摘要 ：曲臂在机械的微小结构设计中已经代替普通机械连接而广泛地使用。然而，错误的曲臂模型会降低机械结构的精密度。在这篇论文中，为了得到正确的曲臂模型而设计了一种平面 3 个自由度相同型式的微型机械结构。为此，一种初步的运动学分析包括逆运动学，内部运动学以及有关工作协调的分析固定 模型已经被提出来了。首先，考虑到了 1 个自由度曲臂的循环类型，但是基于 FEM的模拟结果却与分析的结果不一致。这是因为小轴沿着连杆方向延伸从而阻碍了机械的准确连接。为了解决这个问题，一种包括这种额外的运动机构作为三棱镜连接的 2 个自由度的曲臂模型已经开始部分地使用了。根据这种模型，确保了机械结构的精确性。通过模拟和试验显示了这种准确模型的有效性。这项工作强调了曲臂模型的准确性对保证曲臂在并列微型机械结构中的使用具有重要意义。 nts外文资料翻译 2 、 Introduction 、介绍 Micro-mechanical devices in many areas is a key and essential techniques, such as scanning electron microscopy, X-ray lithography, mask alignment and micro-machinery. Recently, a lot of Crankshaft on the use of micro-mechanical structure of the analysis and experimental research. The majority of previous studies (Moriyama 1, 2, such as Taniguchi, Tomita, etc. 3, 4, such as Ryu, Chang, etc. 5, 6 Peng, etc., etc. 10 - 13 ) is the freedom to use an arm for recycling Crankshaft, three degrees of freedom for Crankshaft spherical arm, and thus the production model. However, sometimes even a small total, will do Crankshaft linear motion. Some researchers believe that there is a Crankshaft additional degree of freedom. However, they ignored the model in the process of easy mobility, but also not to micro-mechanical structure in the correct use of the fixed model. This led to the failure of the implementation of micro-systems. Therefore, the focus of this work will be easy mobility is based on the analysis of the accuracy of model Crankshaft. 微型机械装置在许多领域是一项关键且必不可少的技术，例如电子显微扫描， X 射线石版印刷术， mask alignment 和微型机械。最近，出现了很多有关利用曲臂的微型机械结构的分析和实验研究。以前的大多数研究（ Moriyama 等1,Taniguchi 等 2,Tomita 等 3,Ryu 等 4,Chang 等 5,Peng 等 6，等等 10-13）是使用 1 个自由度的曲臂作循环臂， 3 个自由度的曲臂作球形臂，并以此制作模型。然而，有时就算总量很小，曲臂也会做直线运动 。一些研究者认为曲臂有一种额外的自由度。但是，他们忽略了模型程序中的易动性分析，而且也没有提出在微型机械结构中使用正确的固定模型。这就导致了微系统执行的失败。因此，这项工作的焦点将会是基于易动性分析的曲臂模型的准确性。 Introduction of the campaign because of the number of independent variables were constrained, and these independent variables, in order to find the relevant links between objects must be clearly defined. Above formula can be adopted (1) to describe the type of M, N, L, respectively Fi j and that movement, freedom of space operations, the number of links, as well as linking of the number of mobile connections i freedom. Exercise also shows that the minimum functioning of the system. When M N bigger than the sport become redundant system. nts外文资料翻译 3 运动性因独立变量的数目而被限制，而这些独立的变量为了寻找物体之间的相关联系必须明确说明。以上可以通过公式（ 1）来进行描述，式中 M、 N、 L、j 和 Fi 分别表示运动性，操作空间自由度，连杆数目，连接物数目以及第 i 个连接物移动的自由度。运动性也表明了系统运转的最小值。当 M 比 N 大时，就成为冗余运动系统。 Figure 1 shows a Crankshaft have freedom of the three micro-mechanical structure. Usually, these systems can be Crankshaft rotary connector of the model. Outlined in Figure 2 of the model Crankshaft. If all Crankshaft have a degree of freedom, then the movement of the system are three degrees of freedom. However, in the past, based on such assumptions are the result of the failure of this model because of the inaccuracy of Crankshaft. On the other hand, if all are Crankshaft model of the rotary connector and prism of connections, then the campaign structure reached 12 degrees of freedom. Even if the limit of program analysis and theoretical analysis will enable the two degree of freedom model Crankshaft than one degree of freedom model Crankshaft more accurate results, but need 12 to control the operation of three degrees of freedom rather expensive. Therefore, not only the design of Crankshaft to campaign structure to a minimum, but also to ensure that the structure of precision machinery and sufficient working space. 图 1 显示了一个拥有曲臂的 3 个自由度的微型机械结构。通常，在这些系统中曲臂可以作旋转连接物的模型。在图 2 中描画了曲臂的模型。如果所有的曲臂都有 1 个自由度，那么系统的运动性就有 3 个自由度。然而，以前一些基于这种假设的结果都是失败的，这是因为曲臂模型的不准确性。另一方面，如果所有的曲臂模型都有旋转连接物和三棱镜连接物，那么系统的运动结构就达到 12 个自由度。即使限定结构程序分析和理论分析能够使 2 个自由度的曲臂模型比 1 个自由度的曲臂模型有更准确的结果，但需 12 个运转结构来控制 3 个自由度比较昂贵。因此，曲臂的设计不仅要 将运动结构减至最少，而且还要确保机械结构的精密度及充分的工作空间。 In this paper, we designed two types of Crankshaft. The first type used only a relative degree of freedom to produce thicker neck parts, as shown in Figure 2, this shows that the thickness of the hinge. The second type is used to produce two-DOF relatively thin neck parts. Therefore, the second Crankshaft is a freedom with the nts外文资料翻译 4 rotary connector and a freedom connected to the prism production model. If the system of each chain are two degrees of freedom by a hinge and a two degree of freedom of the hinge, then the campaign structure is 6. Therefore, this Crankshaft through six operating structure to operate. 在这篇论文中，我们设计了两种类型的曲臂。第一种类型只用了 1 个自由度来制作相对较厚的颈下部分，如图 2 所示，这部分显示了铰链的厚度。第二种类型是用了 2 个自由度来制作相对较薄的颈下部分。因此，第二种曲臂是以拥有 1个自由度的旋转连接和 1 个自由度的三棱镜连接来制作模型的。如果系统的每一个链条都是由一个 2 个自由度的铰链和两个 1 个自由度的铰链组成，那么系统的运动结构就是 6。所以说，这种曲臂可以通过 6 个运转结构来操作。 Papers content in the next there will be further development. The second part describes the structure of the system. Kinematic analysis and three campaigns campaign structure and six fixed structural system analysis model respectively in the third and fourth part of a demonstration. Part V describes the two comparative freedom and freedom of a Crankshaft precision simulation results, but also embodies the six recommended by the movement of the systems benefits. Correct the effectiveness of this model can be reflected through experiments. 论文中接下来的内容将有进一步的发展。第二部分描述了系统的构造。运动学分析和 3个运动结构及 6个运动结构系统的分析固定模型分别在第三和第四部分进行演示。第五部分描述了比较 2 个自由度和 1 个自由度的曲臂精密性模拟结果，同时也体现了所推荐的 6 个运动结构系统的优点。这种正确模型的有效性通过实验可以体现。 、 the system structure 、系统构造 The text of the proposed three-DOF tied in the same mechanical structure is a working platform and composed of three chains, each chain has three Crankshaft, as shown in Figure 1. This mechanical link in the use of all the Crankshaft, and all are connected through the pressure of the movement and operation factors. February 2 chain of three intervals between 120 . This symmetrical structure reduced due to temperature differences and the impact of temperature imbalance. Each chain connecting the first and the third are at the bottom with the machines connected to a nts外文资料翻译 5 pressure campaign structure to operate the contrary. All the movement to promote structural connections of each round good sliding surface and rotation. 文中所建议的 3 个自由度的相同并列机械结构是由一个工作平台和三个链条所组成的，每个链条有三个曲臂，如图 1 所示。这种机械在所有连接处使用了曲臂，而且所有的连接物都是通过压力运动因素而运转。三个链条之间两两间隔120。这种对称结构减少了因温度差异和 温度失调带来的影响。每个链条第一和第三个连接处都是通过与机器底部相连的一对压力运动结构而相反地进行运转。所有的运动结构推动每个连接物的圆形表面进行良好的滑动和旋转。 In the example in Figure 2 a type Crankshaft. This rotational movement Crankshaft equivalent to the displacement of I2 and h () and. In the X direction of the linear motion distance of A (). 在图 2 中示例了一种曲臂类型。这种曲臂旋转运动的位移等于 I2 和 h( ) 之和 .在 X 方向上的直线运动的距离为 A( )。 , three campaign kinematic structure of the system 、 3 个运动结构的系统运动学分析 In order to demonstrate a degree of freedom model of the movement of Crankshaft, we will be presented in Figure 3 of this three movement kinematics model of the system. All the previous model Crankshaft only one degree of freedom, and this system has three campaign structure. Passed the map can clearly understand this kinematic analysis. 为了演示 1 个自由度曲臂模型的运动状况，我们将在图 3 中介绍这种 3 个运动结构的系统运动学模型。以前所有的曲臂模型只有 1 个自由度，而这种系统拥有 3 个运动结构。通过下图可以清楚地了解这种运动学分析。 A first kinematics A、第一运动学 First kinematics connected to the output rate vector and vector rate independent of the connection. Below, G said Jacobian, the lower left-hand corner of G machinery that tied the hands of the chain of consecutive numbers. G top right hand corner and lower right corner of the symbols that were related or independent parameters. Gu (, j) and Gu (i, ) were expressed that a cylindrical j and i Pai Gu . Gu (i, j) Gu (i, j) element. i, j expressed that the first i-chain chain j nts外文资料翻译 6 consecutive rate perspective. The rate for each chain relations through the formula (4) to describe the formula (4) in the output rate vector and i consecutive rate vector angle chain were defined as u and i . Three in a row because of the chain have the same rate in the platform, there will be a formula (5) and the formula (6). If the three foundations of a connecting link of an independent, as far as this case, the selection of three each in the chain of Jacobian contrary to the first row constitutes a separate connections to the output vector and the velocity vector of relations, and this rate relations constitute a body, the text following formula (7) indicated, a = 112131 T iG u = iGu -1. 第一运动学连接了输出速率向量和独立连接物速率向量。在下文中， G表示 Jacobian，左下角的 G 表示并列机械手中连续的链条数目。 G 右上角和右下角的符号分别表示相关或独立的参数。 Gu （， j） 和 Gu （ i，） 分别表示第 j 个圆柱和第 i 排的 Gu 。 Gu （ i,j） 表示 Gu 的第（ i,j）个要素。 i,j 表示第 i 个链条的第 j 个连续链条的角度速率。每个连续链条的速率关系通过公式（ 4）来描述，公式（ 4）中输出速率向量 和第 i 个连续链条的角度速率向量分别定义为 u 和 i 。因为三条连续链条在平台中拥有相同速率，就有了公式（ 5）和公式（ 6）。如果把三个基础连接物作为独立连接物，照这个情形来说，挑选三个链条中每个相反的 Jacobian 中的第一排构成了输出向量和独立连接物向量的速率关系，而这种速率关系又构成了一个本体，如下文公式（ 7）所示，其中 a= 11 21 31T，iG u=iGu -1。 Now, reverse the formula (7) in the relationship between the output of the first order for the kinematics of the system linked by formula (8) can understand that these Gua = Gau -1. 现在，颠倒一下公式（ 7）中的生产量关系， 第一顺序促进了系统的运动学联系，通过公式（ 8）可以了解，其中 Gua=Gau-1。 B, a fixed model B、固定模型 Assumptions used in Figure 1 Crankshaft only in the Z axis, a rotary movement, while neglecting the other direction on the transfer. Crankshaft can connect all being used as a spring, in the strength of the needs or the needs of start or bending moment (or compressed). Therefore, in order to calculate input to the operation of machinery, nts外文资料翻译 7 we must use the same output as a reference to obtain the analysis of the fixed model. 假设图 1 中使用的曲臂只在 Z 轴上有旋转移动，而忽视了其他方向上的转移。曲臂可以在所有的连接处被当作弹簧使用，在需要的力量下或需要的时刻弯曲或者展开（或压缩）。因此，为了计算输入量以便操作机器，我们必须利用同等的输出量作为参考来获得分析的固定模型。 Be fixed ontology of the i-chain can be written (9), including iKj said that the first paragraph i j-linked connections of fixed structure. In a state of equilibrium, the machinery of the potential energy storage can be used (10), which iG u said that contrary Jacobian and u make a fine replacement, can inversus iG u access. Kuu that fixed by the bulk of the operational space. Formula (10), we can see that the output can be fixed Ontology (11) said. According to the formula (11), an effective vector output attributed to the transfer of u, is defined as (12), which we should pay attention to is that when the system is symmetrical structure and the same location of the three chains have the same fixed link of the , Kuu is a diagonal. with six movable structure kinematic analysis system。 分析固定本体得到第 i 个链条可以写成（ 9），其中， iKj 表示第 i 个链上第 j个连接物的固定结构。在平衡状态下，机械中贮藏的潜在能量可以用（ 10）来表示，其中 iG u表示相反的 Jacobian 使得 和 u 发生细微置换，可以通过逆位 iGu获得。 Kuu表示固定本体所划分的可操作空间。公式（ 10）中可以看出，输出的固定本体可以用（ 11）来表示。根据公式（ 11），一个有效的输出量向量归因于 u 的转移，被定义为（ 12），其中要注意的是当系统处于对称结构而且三个链条相同位置的连接物拥有相同固定性的时候， Kuu是一条对角线。 with six movable structure kinematic analysis system 、拥有 6 个可动结构系统的运动学分析 When each of the link was considered Crankshaft Figure 3 (b) shown with two degrees of freedom, the movable structure is six. Records of each chain according to the first axis direction Crankshaft has extended an additional three-vector form of connectivity. Will be described below in the kinematic analysis of this situation 当每个连接处的曲臂被认为如图 3（ b）所示拥有 2 个自由度的话，系统的可动结构是 6 个。记录每个链条的第一个曲臂根据轴方向延伸拥有一个额外的三棱形连接体。在下文中将叙述这个情况的运动学分析。 nts外文资料翻译 8 A first kinematics A、第一运动学 Each of the chain, the center position (x, y) and the operating platform of the position were expressed as (13), (14), (15). Figure 3 of the length of the actual connectivity for Li1 said, the i-hi2 said that the chain of three-vector form of the transfer link, that link Iij of fixed length. Distinguish between the chain on each row between the first time kinematic output equation can be used (16) said. Because of three consecutive platform in the center of the chain have the same rate of the output vector, we have the formula (17), (18). Here, we think that every first and third chain of connections is independent of the connection. Therefore, a total of six separate connections. If rearranging (17), (18), then independent of the connection ( a) and the associated connectivity of ( p) by the relationship between the (19) was. To (19) Insert (16) in (20). Finally, the output of separate connections and the relationship between the rate adopted (21) available. 对每个链条来说，中心位置（ x,y）和操作平台上的方位分别表示为（ 13）、（ 14）、（ 15）。图 3 中实际连接物的长度表示为 Li1，其中 hi2 表示第 i 个链条上三棱形连接物的转移， Iij 表示连接物的固定长度。区分上述关于每个连续链条的第一运动学关系的时间生产量等式可以用（ 16）来表示。因为这三个连续的链条在平台中心拥有相同的输出速率向量，所以我们有公式（ 17）、（ 18）。这里，我们认为每个链条第一和第三个连接物是独立连接物。因此，一共有 6 个独立连接物。若重新排列（ 17）、（ 18），那么独立连接物（ a）和相关连接物（ p ）之间的关系可通过（ 19）获得。把（ 19）插入（ 16）可得（ 20）。最后，输出和独立连接物速率之间的关系通过（ 21）可得。 B, on the contrary kinematics B、相反运动学 The platform is a central location (x, y) position and a point of , all tied location of the chain links are available. But because small and mobile (21) equal relations from (22) available. In the six movable structure system, a u scope than the large scale. Therefore, (22) to the contrary relations from (23) available, which add to the Gua pseudo-opposite decomposition Gua + said. This shows that the potential energy system will be kept to the minimum extent is the best split (22) for the nts外文资料翻译 9 conditions. K aa that an effective fixed ontology and six independent of the connection, see (24), which said that Kpp ontology and related fixed line connecting devices. 给出平台的一个中心位置（ x,y）和一个方位角度，所有并列链条的连接物位置都可以获得。因为细微移动但与（ 21）相等的关系由（ 22）可得。在 6 个可动结构系统中， a 的尺度范围比 u 大。因此，（ 22）的相反关系由（ 23）可得，其中 Gua加重的伪相反分解用 Gua+表示。这表明将系统潜在能量减至最低程度的最佳分裂是以（ 22）为条件的。 K aa表示一个有效的固定本体与 6 个独立连接物有关，参看（ 24），其中 Kpp表示固定本体与相关连接装置相一致。 Finally, the independent connectivity products and the transfer of related links from (25), (26) was. 最后，独立连接物和相关连接物的转移由（ 25）、（ 26）获得。 C, a fixed model C、固定模型 And connecting independent subsidiary of the fixed link of the respective body languages (27), (28), which iKj expressed that the first i-j chain of fixed connections. 独立连接物和附属连接物的固定本体分别写成（ 27）、（ 28），其中 iKj 表示第i 个链条的第 j 个连接物的固定性 Ontology compliance with the output (24) equal to the fixed body, expressed as (29), which Caa = K aa -1. 输出遵守本体与（ 24）所给的固定本体相等，表示为（ 29），其中 Caa=Kaa-1。 Therefore, the effective output vector attributable to the u, defined as (30), = Kuu Cuu -1. 因此，有效的输出量向量归因于 u，定义为（ 30），其中 Kuu=Cuu-1。 .Simulation Test .模 拟试验 FEM analysis can be used to prove the feasibility of a fixed model. Given the inherent minimal transfer platform for the operation of power systems transfer vector formula can be adopted (12) or formula (30) calculated. In FEM environment, the force applied to real vector model. Eventually, by comparison, from the initial nts外文资料翻译 10 analysis model is the transfer of FEM model output displacement vector can be tested based on dynamic analysis of the feasibility of a fixed model. FEM 可以用来证明系统分析固定模型的可行性。给出平台的内在极小转移，要求 转移系统的操作力量向量可以通过公式（ 12）或者公式（ 30）计算得出。而在 FEM 环境中，力量向量适用于实质模型。最终，通过比较，由分析模型给出最初转移的 FEM 模型的输出位移向量可以检验出基于可动性分析的固定模型的可行性。 Working space in the x and y direction is 0 100 um, in the direction of 0 0.1 . FEM simulation test results in Figure 4 to can be seen in Figure 6. 系统工作空间在 x 和 y 方向上是 0100um，在方向上是 00.1。 FEM 模拟试验结果在图 4 至图 6 中可以看出。 Variable structure has three micro-mechanical devices in order and all other direction have shown a serious mistake. On the other hand, with six of the variable structure in order micro-mechanical devices showed 5 to 10 per cent of the small mistakes, and in other aspects of performance are only some small mistakes negligible, therefore, have six variable structure System than three variable structure of the system of higher precision. 拥 有 3 个可变结构的微型机械装置在命令和其他所有方向都表现出严重的错误。另一方面，拥有 6 个可变结构的微型机械装置在命令方面表现出 510的微小错误，而在其他方面表现的则只是一些微不足道的小错误，因此，拥有 6个可变结构的系统比 3 个可变结构的系统有更高的精密性。 . fixed-analysis test .固定分析试验 Crankshaft from nine developed a mechanical hand can produce a metal Machine. Six contrary piezo-actuator launched and put into use. Piezo-actuato diameter is 17.4 um. Machines in the x and y directions to the extent permitted by the 0 100 um, in the direction of 0 0.1 . In this part, we have done a number of simulation experiments to prove the validity of test results. These trials are designed to simulate and forecast through fixed, the machine proved developed operational trends and the development of fixed value. Figure 8 shows the experimental operation. In Figure 9 describes in more detail. Ex
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