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毕业设计 (论文 )外文资料翻译 系 别： 机电信息系 专 业： 机械设计制造及其自动化专业 班 级： 姓 名： 学 号： 外文出处： 行星齿轮减速器设计方法研究 2008（ 09） 附 件： 1. 原文 ； 2. 译文 2013 年 3 月 采用表面微加工技术制造微型行星齿轮减速器 nts摘要： 本文提出一个微型行星齿轮机构具有较高的齿轮减速比紧凑的尺寸。首脑会议采用 V 是被淘汰的制造方法，使组装部件的冗余。其中的设计规则也被检查。为了充分利用表面微机械加工的好处，行星式减速齿轮的设计，对使用的片上微引擎。计算预期的齿轮减速比，并与以往的链齿轮机构相比。本文介绍的微型行星齿轮机构，预计将有 162:1 的减速比利用更小的空间消耗。这是一个数量级高于先前报道的设计在一个单一的减速齿轮系。 关键词： MEMS，行星齿轮，减速齿轮表面微机械，首脑会议的 V 过程。 1 什么是减速器 减速器是一种动力传达机构，利用齿轮的速度转换器，将马达的回转数减速到所要的回转数，并得到较大转矩的机构。 1.1减速器的作用 降速同时提高输出扭矩，扭矩输出比例按电机输出乘减速比，但要注意不能超出减速器额定扭矩。减速同時降低了负载的惯量，惯量的减少为减速比的平方。大家可以看一下一般电机都有一个惯量数值。 1.2减速器的种类 一般的减速器有斜齿轮减速器 (包括平行轴斜齿轮减速器、蜗轮减速器、锥齿轮减速器等等 )、行星齿轮减速器、摆线针轮减速器、蜗轮蜗杆减速器、行星 摩擦式机械无级变速机等等。 1.3常见减速器 1.3.1 蜗轮蜗杆减速器 主要特点是具有反向自锁功能，可以有较大的减速比，输入轴和输出轴不在同一轴线上，也不在同一平面上。但是一般体积较大，传动效率不高，精度不高。 1.3.2 谐波减速器 谐波传动是利用柔性元件可控的弹性变形来传递运动和动力的，体积不大、精度很高，但缺点是柔轮寿命有限、不耐冲击，刚性与金属件相比较差。输入转速不能太高。 1.3.3 行星减速器 nts 其优点是结构比较紧凑，回程间隙小、精度较高，使用寿命很长，额定输出扭矩可以做的很大 。但价格略贵一、对装配前零件的要求：滚动轴承用汽油清洗，其他零件用煤油清洗。所有零件和箱体内不许有任何杂质存在。箱体内壁和齿轮（蜗轮）等未加工表面先后涂两次不被机油侵蚀的耐油漆，箱体外表面先后涂底漆和颜色油漆（按主机要求配色）；零件配合面洗净后涂以润滑油。 2 安装和调整的要求 2.1滚动轴承的安装 滚动轴承安装时轴承内圈应紧贴轴肩，要求缝隙不得通过 0.05mm 厚的塞尺。 2.2轴承轴向游隙 对游隙不可调整的轴承（如深沟球轴承），其轴向游隙为 0.250.4mm；对游隙可调整 的轴承轴向游隙数值见表。点击查看圆锥滚子轴承轴向游隙；角接触球轴承轴向游隙。 2.3齿轮（蜗轮）啮合的齿侧间隙 可用塞尺或压铅法。即将铅丝放在齿槽上，然后转动齿轮而压扁铅丝，测量两齿侧被压扁铅丝厚度之和即为齿侧的大小。 2.4齿面接触斑点 圆柱齿轮齿面接触斑点 2-10-4；圆锥齿轮齿面接触斑 2-11-4；蜗杆传动接触斑点 2-12-4。 3 密封要求 箱体剖分面之间不允许填任何垫片，但可以涂密封胶或水玻璃以保证密封；装配时，在拧紧箱体螺栓前，应使用 0.05mm 的塞尺检查箱盖和箱座 结合面之间的密封性；轴伸密封处应涂以润滑脂。各密封装置应严格按要求安装。 4 润滑要求 nts 合理确定润滑油和润滑脂类型和牌号；轴承脂润滑时，润滑脂的填充量一般为可加脂空间的 1/2-2/3；润滑油应定期更换，新减速器第一次使用时，运转 714天后换油，以后可以根据情况每隔 3到 6个月换一次油。 5 试验要求 在额定转速下正、反运转 1-2小时；在额定转速、额定负荷下运转，至油温平衡为止；对齿轮减速器，要求油池温升不超过 35oC,轴承温升不超过 40oC；对蜗杆减速器，要求油池温升不超过 60oC,轴承温升 不超过 50oC；全部试验过程中，要求运转平稳，噪声小，联接固定处不松动，各密封、结合处不松动。 6 包装和运输要求 外伸轴及其附件应涂油包装；搬运、起吊时不得使用吊环螺钉及吊耳以上技术要求不一定全部列出，有时还需另增项目，主要由设计的具体要求而定。 7 技术要求 装配前，所有零件用煤油清洗，滚动轴承用汽油清洗，不许有任何杂物存在。内壁涂上不被机油腐蚀的涂料两次；啮合侧隙用铅丝检验不小于 0.16mm，铅丝不得大于最小侧隙的 4倍；用涂色法检验斑点。按齿高接触点不小于 40%；按齿长接触斑点 不小于 50%。必要时可用研磨或刮后研磨以便改善接触情况；应调整轴承轴向间隙： 40为 0.05-0.1mm, 55为 0.08-0.15mm；检验减速器剖分面、各接触面及密封处，均不许漏油。剖分面允许涂以密封油漆或水玻璃，不允许使用任何填料；机座内装 N100润滑油至规定高度。 8 下面介绍 减速器的发展现状 减速器多以齿轮传动、蜗杆传动为主，但普遍存在着功率与重量比小，或者传动比大而机械效率过低的问题。另外，材料品质和工艺水平上还有许多弱点，特别是大型的减速器问题更突出，使用寿命不长。国内使用的大型减速 器（ 500kw以上），多从国外（如丹麦、德国等）进口。 60年代开始生产的少齿差传动、摆线针轮传动、谐波传动等减速器具有传动比大，体积小、机械效率高等优点 ?。但受其传动的理论的限制，不能传递过大的功率，功率一般都要小于 40kw。由nts于在传动的理论上、工艺水平和材料品质方面没有突破，因此，没能从根本上解决传递功率大、传动比大、体积小、重量轻、机械效率高等这些基本要求。 90年代初期，国内出现的三环（齿轮）减速器，是一种外平动齿轮传动的减速器，它可实现较大的传动比，传递载荷的能力也大。它的体积和重量都比定轴齿轮减速器 轻，结构简单，效率亦高。由于该减速器的三轴平行结构，故使功率 /体积（或重量）比值仍小。且其输入轴与输出轴不在同一轴线上，这在使用上有许多不便。北京理工大学研制成功的 内平动齿轮减速器 不仅具有三环减速器的优点外，还有着大的功率 /重量（或体积）比值，以及输入轴和输出轴在同一轴线上的优点，处于国内领先地位。国内有少数高等学校和厂矿企业对平动齿轮传动中的某些原理做些研究工作，发表过一些研究论文，在利用摆线齿轮作平动减速器开展了一些工作。 平动齿轮减速器工作原理简介 ,平动齿轮减速器是指一对齿轮传动中，一个齿 轮在平动发生器的驱动下作平面平行运动，通过齿廓间的啮合，驱动另一个齿轮作定轴减速转动，实现减速传动的作用。平动发生器可采用平行四边形机构，或正弦机构或十字滑块机构。本成果采用平行四边形机构作为平动发生器。平动发生器可以是虚拟的采用平行四边形机构，也可以是实体的采用平行四边形机构。有实用价值的平动齿轮机构为内啮合齿轮机构，因此又可以分为内齿轮作平动运动和外齿轮作平动运动两种情况。外平动齿轮减速器构，其内齿轮作平动运动，驱动外齿轮并作减速转动输出。该机构亦称三环（齿轮）减速器。由于内齿轮作平动，两曲柄中心设置在 内齿轮的齿圈外部，故其尺寸不紧凑，不能解决体积较大的问题。内平动齿轮减速，其外齿轮作平动运动，驱动内齿轮作减速转动输出。由于外齿轮作平动，两曲柄中心能设置在外齿轮的齿圈内部，大大减少了机构整体尺寸。由于内平动齿轮机构传动效率高、体积小、输入输出同轴线，故由广泛的应用前景。 本项目的技术特点 ,本新型的 内平动齿轮减速器 与国内外已有的齿轮减速器相比较，有如下特点： （ 1） 传动比范围大，自 I=10起，最大可达几千。若制作成大传动比的减速器，则更显示出本减速器的优点。 （ 2） 传递功率范围大：并可与电动机联成一体制造。 （ 3） 结构简单、体积小、重量轻。比现有的齿轮减速器减少 1/3左右。 （ 4） 机械效率高。啮合效率大于 95%，整机效率在 85%以上，且减速器的效率将不随传动比的增大而降低，这是别的许多减速器所不及的。 （ 5） 本减速器的输入轴和输出轴是在同一轴线上。本减速器与其它减速器的性能比较见表 1。因缺少数据，表中所列的各减速器的功率 /重量比是最优越的。nts各类减速器比较 型号 功率（ kw） 减速比 质量（ kg） QI-450 93 31.5 1820 ZSY-250 95 31.5 540 NGW-92 88.1 31.5 577 SEW(德国 ) 90 28.61 1300 NP-100? 100 30 400 注： NP-100为内平动齿轮减速器， SEW减速器的质量含电机。 2.本项目的关键技术。由图 2可知， 内平动齿轮减速器 是由内齿轮 Z2、外齿轮 Z1和平行四边形机构组合而成的。它的传动原理是：电机输入旋转运动，外齿轮作平行移动，其圆心的运动轨迹是一个圆，与之啮合的内齿轮则作定轴转动。因为外齿轮作平行移动，所以称谓平动齿轮机构。齿轮的平行移动需要有辅助机构帮助实现的，可采用（ 612副）销轴、滚子作为 虚拟辅助平动机构，也可以采用偏心轴作为实体辅助平动机构。内平动齿轮减速器的关键技术和关键工艺是组成平行四边形构件的尺寸计算及其要求的加工精度、轮齿主要参数的选择。这些因数都将影响传动的能力和传动的质量。总的说，组成本减速器的各零部件都要求有较高的精度，它们将决定着减速器的整体传动质量。 3.本项目的概况本项目已获得中国实用新型专利，专利号： ZL95227767.0。 本项目自 1995 年试制出第一台样机（功率 2.5kW，传动比 I=32）后，陆续与一些厂矿合作，设计了下面几种不同功率、不同传动比的减速器： （ 1） 电动推拉门用减速器，功率 550W，传动比 I=26，与电机连成一体。 （ 2） 搅拌机用减速器，功率 370W，传动比 I=17。 （ 3） 某军品用的两种减速器，一种功率 370W，传动比 I=23.5；另一种功率 370W，传动比 I=103的二级传动减速器。 （ 4） 钢厂大包回转台减速器，功率 7.5kw，传动比 I=64。 （ 5）钢厂辊道减速器，功率 7.5kw，传动 I=11。在本专利的基础上，已研制出一种新型超大型减速器，功率可达 1000kw，目前正在研制超小型（外型尺寸为毫米级）的微型减速器。 在微机电系统中的齿轮结构通常希望用来 在微小的体积内产生较大的扭矩。但是没有较大重量的减速器，往往是很难达到这样的目的。研究发现拥有微行星齿轮的减速机构能够在狭小的空间内增加扭矩，这好像有点自相矛盾。这是因为微行星齿轮系统能在每单位体积内产生更大的传动比。然而它的结构是如此的复杂，以至于我们很少尝试将齿轮系统微型化。 Suzumori以及他的小组成员曾经用类似的行星齿轮结构来驱动一个机器人，并使它在直径为一寸的钢管里前后移动。他们利用一个马达来驱动高传动比的齿轮机构，通过微电线的放电加工技术能够实现这种齿轮机构的精确加工。但是这些部件应该在装配驱 动马达之前安装在齿轮箱上。 Takeuchi 等人也用这种技术制造了微行星齿轮。他们建议用特殊的含陶合金和高碳钢作为最佳选择材料。当这种齿轮系统的传动比达到 200的时候，才可以安装马达并使之驱动。为了实现用芯片的方法来实现行星齿轮的驱动，nts在研究中我们采用 SUMMiT V方法来加工微行星齿轮。 SUMMiT V过程是唯一可以实现对于总数为五层 (其中一层为地平面 )的硅中释放四层的铸造过程由于这个原因，它经常被用来通过安装在芯片上的电子执行器来驱动复杂的齿轮机构。然而 , 在许多情形 ,微电机不可能提供充足的转力矩来驱动 机械负荷 ,因为它们的静电梳的典型驱动只产生几十微牛顿的力。幸运的是 ,这些引擎能容易地达到每分钟几万转的速度。这就使将转矩转化为速度变成是可行的。罗杰等人设计了二个传动比为 12： 1的双重的水平齿轮。如此六个这样的模组的传输集合在以占据极大的空间为代价的前提下可以达到 2,985,984:1 的传动比。为了达到结构紧凑，同时达到高传动比的目的少比 , 行星齿轮系统将被作为研究对象。根据作者的认识，它将会是第一个使用表面微加工原理设计的行星齿轮结构。我们还将阐述行星齿轮的操作规则，加工过程和希望达到的行星齿轮系统的性能 。 使用齿轮传输转矩的其它可行的方法是将一个或者多个的齿轮 ,也就是 , 行星齿轮 ,在另一个齿轮的外面旋转 ,也就是太阳轮。按照传统的尺寸设计的行星齿轮减速器是使整体结构紧凑的常用的传输系统。图 1是上述的行星齿轮的示意图。自从用 AutoCAD 设计 SUMMiT V以来 ,图（ 1）可以通过软件自动产生 (附 1)。一个完整的行星齿轮系统是由六个齿轮组成的 : 一个太阳齿轮 a，三个行星齿轮 b，一个固定的内齿圈 c,一个旋转的内齿圈 d,和一个输出齿轮 e。除了行星齿轮之外 ,每个齿轮的齿数都不相同。太阳齿轮 a是 输入齿轮，由与微引擎连接的机械手驱动。内齿圈 d,被视为输出齿轮。举例来说 ,如果机械手驱动太阳轮按照顺时针方向方向旋转 , 那么行星轮 b, 将绕着它们自己的轴按照逆时针方向宣战，同时也将绕着太阳轮按照顺时针方向的方向旋转，这样就形成了行星运动。 由于多个行星齿轮 b和固定内齿圈 c之间的运动相似，所以旋转的内齿圈 d将按照逆时针方向旋转。这也被叫做 3K行星齿轮。 加工过程和结构测试 SUMMiT V程序的特征体现了硅层结构、电解聚乙烯 , 以及传统的集成电路处理等技术水平的四个层次。 SUMMiT V技术尤其适 应于齿轮机构。行星齿轮机构由芯片上的微引擎驱动，而且这也是采用 SUMMiT V 技术的另一个理由。因为桑迪亚程序是一款众所周知的程序 ,所以我们只简要的作些解释。图 2是图 1的截面视图 ,也是由 AutoCAD 按照附录 1设计产生的，其中截面中的不连续的部分是为了钻孔而设置的。聚乙烯 1(灰色 )用来制造轮毂以及固定的内齿圈 c,太阳齿轮 a,旋转的内齿圈 c,而输出齿轮是由聚乙烯 2制造的。图 1.是由 SUMMiT V设计软件产生的行星齿轮机构的视图附录 2是描述测试结构的图形。因为这篇文章的主旨是介绍一种齿轮减速 机构 ,所以我们将整个行星齿轮系统分解成各个组成部分，以检测它的性能。第一个测试结构是驱动太阳齿轮的机械手 ,如前述，这个机械手是由芯片上的引擎驱动的，所以机械手的角速度nts是由引擎的输出速度决定的。 第二个测试结构描述的是太阳轮和行星轮与固定的内齿圈啮合的点。因为事实上内齿圈是固定的 , 所以行星轮将太阳轮输入的转矩传到固定的内齿圈，因此这个过程并没有经过行星运动。也就是说，行星轮只绕它自己的轴转动，而没有绕太阳轮转动。第三个测试结构是旋转的内齿圈，它安装在固定的内齿圈的顶端上，行星轮开始绕太阳轮旋转，这样就可以实 现行星传动。因此 ,一但输出齿轮被安装到旋转的内齿圈，也就是最后一个测试结构，整个减速系统完成。将行星齿轮成拆解成三个测试结构的过程中允许齿轮系统存在极微小的误差 。 ntsMICRO PLANETARY REDUCTION GEAR USING SURFACE-MICROMACHINING Abstract: A micro planetary gear mechanism featuring a high gear reduction ratio with compactness in size is presented in this paper. SUMMiT V is employed for the fabrication method so that the redundancy of assembling parts is eliminated. The design rules of which has also been checked. To make full use of the benefits of the surface-micro-machining, the planetary reduction gear is designed toward using the on-chip micro-engine. The expected gear reduction ratio is calculated and compared with the conventional chain gear mechanism. The micro planetary gear mechanism presented in this paper is expected to have 162:1 reduction ratio utilizing less space consumption. This is an order of magnitude higher than the previously reported design in a single reduction gear train. Keywords: MEMS, planetary gear, reduction gear surface-micromachining, SUMMiT V process First, what is reducer? Reducer is dynamic communication agencies, the use of gear speed converters, and motor rotational speed reducer to the Rotary to be few, and have greater torque institutions. The reducer role 1) velocity at the same time increase the output torque, torque output ratio by motor output by slowdown, but the attention should be paid to exceed the rated torque reducer. 2) the speed at the same time reduce the inertia load, the inertia of deceleration than reduced to the square. We can look at the General Motors has a value of inertia. The type of reducer General helical gear reducer has reducer (including parallel shaft helical gear reducer, a worm reducer, bevel gear reducer, etc.), planetary gear reducer, Cycloid reducer, a worm reducer, a planetary friction CVT mechanical machines. Common reducer 1) worm reducer is the main characteristics of a reverse self-locking function, can be larger than a slowdown, input shaft and output shaft axis is not the same, nor in the same plane. But generally larger, transmission efficiency is not high, the accuracy is not high. 2) Harmonic Harmonic Drive reducer is controllable using flexible components to transfer elastic deformation and dynamic movement, not volume, high precision, but the disadvantage is that flexible wheel limited life, impatient shocks, rigidity and ntspieces of metal relatively poor. Not too high speed input. 3) planetary reducer its comparative advantage is compact structure, the return gap small, high precision, and have a long life span rated output torque can be done great. However, a price slightly expensive, the requirements of parts before assembly 1. Rolling cleaning with gasoline, kerosene other parts cleaning. All parts and Xiangbenna not allowed to have any impurities exist. Gear box and the inner wall (Worm), unprocessed surface has not been coated twice erosion-resistant oil paint, box has the outer surface coated primer and paint color (color requested by host). 2. Parts coated with a face wash after lubricants. Second, the requirements of installation and adjustment 1. Rolling installation Rolling bearing inner ring should be installed at the shaft shoulder close to gap must not pass 0.05 mm thick Cypriot feet. 2. Bearing axial clearance of the clearance can not be adjusted bearings (such as deep groove ball bearings), axial clearance of0.25 to 0.4 mm; the clearance adjustable bearing axial clearance numerical table. Click Tapered Roller Bearings axial clearance; angular contact ball bearing axial clearance 3. Gear (Worm) meshing tooth space available Cypriot side foot of lead or pressure. Will be lead wire on the alveolar, and then turning gear and squash lead wire, measuring two teeth side was crushed lead wire thickness and the size of which is adjacent teeth. 4. Tooth contact dot cylinder gear tooth contact Dot 2-10-4; bevel gear tooth contact Dot 2-11-4; Gearing contact Dot 2-12-4 Third, seal requirements 1. Box partition between the surface does not allow any pads filled, but can be coated or water glass sealant to ensure that the seal; 2. Assembly, the bolt tightening box, before using 0.05 mm Cypriot-foot inspection Covers Block with me and between the sealing surface; 3. Shaft seal should stretch to smear grease. The seal should be installed in strict accordance with the requirements. Forth, lubrication requirements 1. Rationally determine the types of lubricants and greases and grades 2. Bearing lubrication fat, grease filled in the general Fatliquor space can be 1 / 2 to 2 / 3. 3. Lubricants should be regularly replaced, the new reducer used for the first time, the ntsoperation of oil-7 14 days, according to the situation can be after every 3 to 6 months for first oil. Fifth, the test requirements 1. Empty operation: at rated speed is, anti-running 1 to 2 hours; 2. Load test: at rated speed, rated load operation, the oil temperature balance to date. On the gear reducer, requested the pool temperature is not more than 35 oC, bearing temperature rise no more than 40 oC; the worm reducer, requested the pool temperature not more than 60 oC, bearing temperature of not more than 50 oC; 3. Entire testing process for the smooth operation, noise, not loosening the fixed link, sealed, not with the Sixth, packaging and transportation requirements 1. Protruding shaft and its annex should Oiler packaging; 2. Handling, lifting may not use screw rings and lug all of the above technical requirements are not necessarily listed, and sometimes also by other projects, mainly by the specific design requirements. Seventh,technical requirements 1. Assembly, all parts cleaning with kerosene, gasoline Rolling cleansing, while the existence of any debris. Oil is not painted wall corrosion coatings twice; 2. Backlash with lead wire mesh test of not less than 0.16 mm, lead wire Backlash may not exceed the smallest of the four times; 3. Used Tu-color dot test. Tooth high point of contact by not less than 40% of contact spots on teeth not less than 50 per cent. Can be used when necessary, grinding or scraping after grinding to improve contacts; 4. Bearing axial clearance should be adjusted: 40 0.05 - 0.1 mm, 55 0.08 - 0.15 mm; 5. Test reducer subdivision surface, the contact surface and seal, oil spills are not allowed. Split-Tu allowed to paint or water glass seal and allow the use of any filler; 6. Engine lubricants to the contents N100 provisions height; Below I introduce our country reduction gear the development present situation: First, the domestic reduction gear many by the gear drive, the worm drive primarily, but has the power and the load ratio generally is small, or velocity ratio great and mechanical efficiency excessively low question.Moreover, in the material quality and the technological level also has many weakness, the largescale reduction gear question is specially more prominent, the service l ntsife is not long.The domestic use large-scale reduction gear (above 500kw), many from overseas (for example Denmark, Germany and so on) imports The 60s start few tooth reduction gears and so on difference transmission, cycloid pin gear transmission, overtone transmission which produces has the velocity ratio to be big, volume small, mechanical efficiency higher merit? .But its transmission theory limit, cannot transmit the oversized power, the power all must be smaller than generally 40kw. Because in the transmission theoretically, the technological level and the material quality aspect has not broken through, therefore, has not been able fundamentally to solve the transmission power in a big way, the velocity ratio big, the volume small, the weight light, mechanical efficiency higher these requests basically.The 90s initial period, the home appears three links (gear) the reduction gear, is one kind of outside stable motion gear drive reduction gear, it may realize the great velocity ratio, transmission load ability is also big. Its volume and the weight are all lighter than the dead axle speed reducer gear, the structure is simple, the efficiency is also high.Because this reduction gear three axle parallel structure, therefore caused the power/volume (or weight) the ratio is still small.Also its input axis and the output shaft on the identical spool thread, this do not have in the use many inconveniently. Not only Beijing Institute of Technology develops in successful stable motion speed reducer gear to have outside three link reduction gear merit, but also has the big power/weight (or volume) the ratio, as well as the input axis and the output shaft on identical spool thread merit, is at the domestic leading position. The home has the minority college and the factory and mining enterprise does the research work to in stable motion gear drive certain principles, has published some research paper, in has done some work using the cycloidal tooth crop rotation stable motion reduction gear. Second the stable motion speed reducer gear principle of work synopsis, the stable motion speed reducer gear is refers to in a counter gear transmission, a gear in the stable motion generatoractuation mean plane parallel motion, meshing through tooth profile between, actuates another tooth crop rotation dead axle to decelerate the rotation, the realization reduction gear function. The stable motion generator may use the parallelogram organization, either sine organization or cross slide organization. This achievement uses the parallelogram organization to take the stable motion generator. The stable motion generator may be the hypothesized use parallelogram organization, also may be the entity use parallelogram organization. Has the practical value stable motion gear mechanism for in counter gear organization, therefore may ntsdivide into the internal tooth crop rotation stable motion movement and the external tooth crop rotation stable motion movement two kind of situations. Outside the stable motion gear reduction organization, its internal tooth crop rotation stable motion movement, actuates the external gear and makes the deceleration rotation output. This organization also calls three links (gear) the reduction gear. As a result of the internal tooth crop rotation stable motion, two crank centers establish outside the annular gear tooth ring, therefore its size is not compact, cannot solve the volume major problem. In stable motion gear reduction, its external tooth crop rotation stable motion movement, actuation internal tooth crop rotation deceleration rotation output. As a result of the external tooth crop rotation stable motion, two crank centers can establish in the external gear tooth ring, reduced the organization overall size greatly. Because in stable motion gear mechanism transmission efficiency high, volume small, input output coaxial line, therefore by widespread application prospect. Third, this project technical characteristic and key technologies?1. this project technical characteristics, in this new stable motion speed reducer gear and domestic and foreign had the speed reducer gear compares, has the following characteristic: (1) velocity ratio scope is big, gets up from I=10, may reach most greatly several thousand. If manufactures the great velocity ratio the reduction gear, then demonstrates this reduction gear the merit.(2) transmission power scope is big: And may connect a body manufacture with the electric motor. (3) structure simple, the volume small, the weight is light. Reduces about 1/3 compared to the existing speed reducer gear.(4) mechanical efficiency is high.95 .(5) this reduction gear input axis and the output shaft are on the identical spool thread. This reduction gear see Table 1 with other reduction gear performance comparison. Because lacks the data, various reduction gears power/load ratio which in the table arranges in order is most superior. Table Each kind of reduction gear comparison model power (kw) reduction gear ratio quality stable motion speed reducer gear, the SEW reduction gear quality contains the electrical machinery.2. this project key technologies? May know by Figure 2, in“stable motion speed reducer gear is by annular gear Z2, external gear Z1 and the parallelogram organization combination. Becomes its transmission principle is: The electrical machinery input rotary motion, the external tooth crop rotation parallel migration, its center of circle path is a circle, makes the dead axle rotation with it meshing annular gear. Because external tooth crop rotation parallel migration, therefore name stable motion gear mechanism. The gear parallel migration needs to ntshave the auxiliary body help realization, may use (612) to sell the axis, the roller takes the hypothesized auxiliary stable motion organization, also may use the eccentric shaft to take the entity auxiliary stable motion organization. In the stable motion speed reducer gear key technologies and the essential craft are the composition parallelogram component size computation and the request processing precision, the gear teeth main parameter choice. These factors will all affect the transmission ability and the transmission quality. Overall speaking, the group cost reduction gear various spare parts all request to have the high precision, they will be deciding the reduction gear overall transmis3. this project survey this project has obtained the Chinese practical new patent, the patent number: This project trial produced the first prototype from 1995 (power 2.5kW, after velocity ratio I=32), with some factory and mine cooperation, has one after another designed following several kind of different powers, the different velocity ratio reduction gear.(1) electrically operated on rollers gate uses the reduction gear, power 550W, velocity ratio I=26, is united as one body with the electrical machinery. sion quality. (2) mixer uses the reduction gear, power 370W, velocity ratio I=17.(3) some military goods use two kind of reduction gears, one kind of power 370W, velocity ratio I=23.5; Another kind of power 370W, velocity ratio I=103 two level of transmission reduction gear.(4) steel mill large package rotary abutment reduction gear, power 7.5kw, velocity ratio I=64.(5) steel mill table reduction gear, power 7.5kw, transmission I=11. In this patent foundation, has developed one kind of new ultralarge reduction gear, the power may reach 1000kw, at present is developing subminiature (outlook size for a millimeter level) miniature reduction gear. The gear mechanisms in microelectro mechanical systems(MEMS) are commonly expected to generate high torque in the confined micro-size systems. However, it is generally difficult for the micro-scale systems to have such a high torque without having multiple reduction systems. The design of the reduction gear drive based on a planetary paradox gear mechanism can increase the torque within a compact area, since the micro planetary gear system has an advantage of high reduction ratio per unit volume 1. However its mechanism is so complicated that relatively few attempts have been made to miniaturize the gear systems 2-3. Size more et al. 2 used the mechanical paradox planetary gear mechanism to drive a robot for 1-in pipes forward or backward. They employed a single motor to drive the gear mechanisms with high reduction ratio. Precise gear fabrication was enabled by micro wire electrical discharge machining nts(micro-EDM). These parts, however, should be assembled before the drive motor is attached to the gearbox. Takeuchi ET. al. 3 also used micro-EDM to fabricate the micro planetary gears. They suggested special cermets or High Carbon Steel for possible materials. While the design can achieve a reduction ratio of 200, the gears should also be assembled and motor driven. To enable the driving of the planetary gear by onchip means, Sandia Ultra- planar Multi-level MEMS Technology (SUMMiT-V) process 4 for planetary gear fabrication is adopted in this study. The SUMMiT-V process is the only foundry process available which utilizes four layers of releasable polysilicon, for a total of five layers (including a ground plane) 5. Due to this fact, it is frequently used in complicated gear mechanisms being driven by on-chip electrostatic actuators 5.However, in many cases, the microengines may not produce enough torque to drive the desired mechanical load, since their electrostatic comb drives typically only generate a few tens of micronewtons of force. Fortunately, these engines can easily be driven at tens of thousands of revolutions per minutes. This makes it very feasible to trade speed for torque 7.Rodgers et al. 7 proposed two dual level gears with an overall gear reduction ratio of 12:1. Thus six of these modular transmission assemblies can have a 2,985,984:1 reduction ratio at the cost of the huge space. With the desire for size compactness and at the same time, high reduction ratios, the planetary gear system is presented in this paper. It will be the first planetary gear mechanism using surface micromachining, to the authors knowledge. The principles of operations of the planetary gear mechanism, fabrication, and the expected performance of the planetary gear systems are described in this paper. Principles of operation An alternative way of using gears to transmit torque is to make one or more gears, i.e., planetary gears,
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