氮化铟粉末在N2气中的热稳定性（稀有金属材料与工程论文）

氮化铟粉末在氮化铟粉末在N2N2气中的热稳定性 稀有金属材料与工程论气中的热稳定性 稀有金属材料与工程论 文 文 第36卷xx增刊39月稀有金属材料与工程RARE METAL MATERIALSAND ENGINEERINGVo1 36 Supp1 3SeptemberxxTherm alStability of InN Powdersin N2W angFuxue Xue Chengshan Zhuang Huizhao Zhang Xiaokai Ai Yujie Sun Lili Yang Zhaozhu The FunctionalMaterials Laboratory Institute ofSemiconductors Shandong NormalUniversity Ji nan250014 China Abstract sThermal behaviors of InN powders in N2 purity 99 999 were investigatedby XRDand FTIR A fewindium nitride InN powders wereoxygenated whenthe thermaltemperature exceeded600 When the temperature wasincreased to800 Part of InN powders were dissociatedIn and N2and turned into In203 Key wordsTher m al behaviors N2 InN powders dissociated In203CLC numberTN304Document codeAArticle ID1002 185X xx s3 188 03l introductionindium nitrideis oneof thehi v nitridesemiconductors witha directband gapof0 7 1 0ev 钔 it hasthe small effectivemass of12m which lcadsto highmobility andhigh saturationvelocity and alarge drift velocityat room temperature 6 91 due to these propertiesof inn it haspotential applicationsin optoelectronic devices such aslds andhigh ef iciency solarcells as wellas highf requency high power electronicdevices because inn is easyoxygenated athigh temperat ure it mustbe cooled downed in n2gas whenit issynthesized byammoniated in203 however there are few investigationsof thestabilization of inn in n2gas in thisletter we investigateof thestabilization of inn powdersat various temperat uresin n2gas purity99 999 by analysisincluding x ray diffraction xr9 rigaku d max rb cuka and fouriertransform inf rared ftir tensor27 2experim entaldetails0 1g inn powders taken in a quartz boat were placedinaquar tzreaction tubeequipped in the resistanceheated horizontaltube furnaceinn2gas atvar ioustemperatures the qua zboat was putinto the f ur naceat presettemperature and1l min of n2under atmospheric pressure for15quar tzboatwascooled downgas min after annealed the to roomtemperature inn2the sampleswere investigatedby usingx ray diffraction the room infraredtransmission spectrawere investigatedby usinga ftirspectrometer 3resuits anddiseussion3 1xrd analysisfig 1shows xrdparer n sofsamples ofnon annealed inn powders and inn powdersannealed in the purity of n2gas at varioustemperat ures a non annealed b 600 c 700 d 800 c as shownin fig 1 a only the inn peaks are observed from in fig 1 b and c the in203peaks beestronger andstronger and the inn peaks beeweaker andweaker this indicatesthat innhas beenreactive withlittle o2of n2 purity 99 999 so wheninn powders are synthesized they mustbe quicklycooled downto roomtemperaturein the purity of n2 from in fig 1 d the in andin203peaksarevery strongand theinnpeaksbee very weak it showsthat inn powders are separated into inandn2at800 in the purity ofn2 the chemicalreaction is as follows2inn一 2in n2 in o2一 in2o3the xrdpa ternsshow thata fewinn powderscall receiveddatexx一l2 28foundat ionitemssuppor tedby thenational natural science foundationof china 9020l025 and nationalnaturalsciencefou ndationof china 9030l002 biographywang fuxue m aster corresp onding authorxuechengshan the functionalm aterialslaborator y institute ofsemiconduct um shandong normaluniversity no 88east culture road ji nail2500l4 p r china tel0086 531 86l82624 0086 53l一86l82622 e mailxuechengshan sdnu edu wangfuxuel976 yahoo 增刊3w ang fuxueet althermalstability of inn powdersinn2 189 be turnedinto in2o3powders above600 in thepurity ofn2gas as thetemperature isincreased to800 inn powdersbegin todissociate so innpowdersaresynthesized below800 and mustbe quicklycooled downto roomtemperaturein thepurityofn2gas 盘口0口201 Fig 1XRD patternsofthe samplesofnon annealed InNpowders and InNpowdersannealed at various temperatures a non annealed b 600 c 700 and d 800 3 2FTIR analysisFig 2shows theFTIR transmissionspectra of InNpowders andInNpowders inthepurityofN2atvarioustemperatures for15min a non annealed b 600 c 700 d 800 As shownin Fig 2a it showsthat absorptionpeak hadbroadened obviously W esuppose009590858075700O9896949290W avenumber cm一腑venumber cm thatthe size effect andthe surfaceeffect resultin obviousbrel adnessofthe absorptionpeak 10 11 In Fig 2a one prominentIR absor ption at488 24cm ispresent which isa18 24cm blue shif tcorresponding toEl TO mode ofInNl引 Another IR absorption around464 22cm which correspondstothemode A1 TO ofInNisa21 22cm一blue shiftt W esuppose thatthe quantumsizeeffectthat existsin micro structure resultsintheblue shif t 10 11 As showninFig 2b and c three absorp tionpeaks locatedat600 07 564 95 537 91cm一 which co respond totheIn O bondl From inFig 2b and2c another prominentpeak isshif tedto464 87cm Fig 2b and454 33cm Fig 2c which isattributed tothe overlapof the IR absor ption ofIn203at426cm andtheIRabsorp tionofInNat470and443cm l2 This showsthat In2O3areformed from600 to700 Compared totheIRabsorptionofIn powders purity 99 99 Fig 2e three IRabsorptionpeaks at668 98 653 20and875 62cm corespond toInbond inFig 2d The peaksaround602 77 567 13 539 81cm are presentinFig 2d which corespondtoIn O bond This indicatedthat partdeposed and turnedintoofN2for15min00959085807570ofInNpowderswereIn2O3at 800 inthepurity Wavenumber cm f venumber cm0099989796959493Wavenumber cm一Fig 2FTIR spectraofInNpowdersandInNpowders inthepurityofN2atvarioustemperatures for15min a non annealed b 600 c 700 c d 800 and e inpowdersu igll旨 i窭u i暑旨a l9o 稀有金属材料与工程第36卷4conclusions insummary a fewinnpowdersare turnedinto in203powdersintheflow ofn2at rateof1l min underatmosphericpressurebelow800 w henthetempera ture isincreased to800 a majorityofinnareseparatedinto inandn2andturnedinto in203 so wheninnissynthesized throughthe thermal nitridation inn mustbe quicklycooleddowntoroomtemperature references 1 davydov vklochikhin aa emtsev vv et a1 phys statussolidi bm xx 230r4 2 johnson mc lee cj borret courchesne ed et a1 applphys left j xx 855670 3 wu j walukiewicz w yu km eta1 appl ehysleft j xx 803967 4 matsuoka t okamoto h nakao meta1 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