利用晶体生长模拟软件FEMAG进行蓝宝石晶体生长模拟的方法ppt课件

.,CONFIDENTIAL,晶体生长模拟FEMAG蓝宝石生长模拟方法,FEMAGSoftS.A.,BelgiumASPIN-OFFcompanyfromUniversitecatholiquedeLouvainBelgiumProfessorF.Dupret,.,CONFIDENTIAL,GeneralintroductionSapphireGrowth,Content,.,CONFIDENTIAL,Introduction,Formorethan25years,FEMAGSoftdevelopssimulationsoftwarededicatedtotheresearchanddevelopmentofoptimalcrystalgrowthprocesses.1984FirstresearchonGermaniumgrowthinUniversityofLouvain.Prof.FranoisDupret1989FirstresearchonSilicongrowthinUniversityofLouvain.1992FirstcollaborationswithmajorICcompanies.Developmentofdefect-freesiliconwaferproduction.Today,morethan35patentsarereferencingFEMAGSoftware2003FEMAGSoftS.A.,spin-offfromUniversityofLouvain.2006CollaboratrionwithmajorSolarcompanies.Developmentoflow-costandlow-oxygencontentprocesses.2009Largeinvestmentforanewsoftwareframework2010ReleaseofSoftwareapplicationforSapphireingotproduction.,.,CONFIDENTIAL,Czochralskiprocess,.,CONFIDENTIAL,DirectionalSolidificationSystem,.,CONFIDENTIAL,FloatingZoneProcess,.,CONFIDENTIAL,SapphireGrowthbyCZandkyropoulos,.,CONFIDENTIAL,SapphiregrowthbyHEM,.,CONFIDENTIAL,WhatareFEMAGsoftware?,Process-dedicatedsimulationtools,adaptedtoyourownprocessesandabletosolveyourproblems.GlobalAllthefurnacecomponentsareconsidered.Alltheheattransfermodeareconsidered(radiationtransfer,heatconduction,meltandgasconvection)InductionandohmicheatingTimeDependent,.,CONFIDENTIAL,Process-dedicatedtools,FEMAG-CZ:CzochralskiFEMAG-FZ:FloatingZoneFEMAG-VB:VerticalBridgmanFEMAG-CZ/OX:CzochralskiforSapphireFEMAG-KY:KyropoulosFEMAG-DS:DirectionalSolidificationFEMAG-HEM:HeatExchangeMethod,Gainoftime.ProcessmasteringAccurateandrighttothepoint,.,CONFIDENTIAL,Platformoriented,FRAMEWORK:FEMAG3,RADIATION,CONVECTION,MESH,GEOMETRY,CONDUCTION,FEMAG-CZ,FEMAG-HEM,FEMAG-DS,FEMAG-KYROPOULOS,FEMAG3NEW2011Veryaccurate:FiniteElementandSpectralmethodsVeryefficient:3Dsimulationsinless1dayVeryflexible:Veryfastdevelopmentofnewdemand,.,CONFIDENTIAL,Globalsimulations,CzochralskiFurnaceforSilicon,HEMFurnaceforSapphire,Nosimplificationoftheprocessconditions,.,CONFIDENTIAL,Dynamicsimulations,AdynamicsimulationtoolCompleteprocesssimulationDynamiceffectofinterfacedeformationVaryingprocessingconditions,.,CONFIDENTIAL,SapphireCrystalGrowthSimulation,.,CONFIDENTIAL,SapphireSimulationObjective,ThemarketofSapphireisexperiencingaveryfastgrowthrateandbecomeverycompetitiveManycompaniesinvestinsimulationsoftwareinordertoreinforcetheirpositionsHEM,CzochralskiandKyropoulosprocessrequireoptimizationandagoodunderstandingStrongneedforefficientnumericaltools.Radiationeffectsintheparticipatingcrystalandmeltisacomplexproblem.,.,CONFIDENTIAL,SapphireSimulationObjective,Ourgoalistoprovideaccuratesimulationtool,abletotakealltheprocessfeaturesintoaccountandtooptimizethegrowthprocessintermsoftheresultingcrystalquality.,.,CONFIDENTIAL,SapphireSimulationObjective,KYROPULOS,CZOCHRALSKI,HEM,.,CONFIDENTIAL,FEMAG-CZ/OX,FEMAG-CZ/OXSoftwaretosimulateSapphireGrowthbyCZandKyropoulosSpecifications:Temperatureinthesapphireandinallfurnacecomponentsbysolvingtheglobalheattransferinthefurnace(radiation,conduction,convection).Flowvelocityinthesapphireliquidphase.CrystallizationfrontshapeOhmicandInductionHeatingAdvancedradiationheattransferinthesapphireGasconvectionAnisotropicthermalstressesinthecrystal,.,CONFIDENTIAL,TemperatureintheHotZone,FEMAG-CZ/OX,CZprocesswithInductionHeatingsystem,InductionHeatingsystem,.,CONFIDENTIAL,Temperatureinthecrystalandinthemelt,FEMAG-CZ/OX,CZprocesswithInductionHeatingsystem,.,CONFIDENTIAL,Meltvelocityamplitude,FEMAG-CZ/OX,CZprocesswithInductionHeatingsystem,Theinterfaceshapeandpositionisaresultofthesimulation,.,FEMAGSoft2012,Temperaturefieldinthemelt,Streamfunction,FEMAG-CZ/OX/CZandKYROPOULOSprocess,.,FEMAGSoft2012,Meltmeshes,BLM(boundarylayermesh),Coarsemesh,BLMmeshisveryimportanttosimulatetheinterface,.,FEMAGSoft2012,Localtemperaturefield,Resultusingcoarsemesh,ResultusingBLMmesh,BLMmeshenablesabetterpredictionofthecrystalisationinterface,.,FEMAGSoft2012,Velocityfield,Resultusingcoarsemesh,ResultusingBLMmesh,.,CONFIDENTIAL,FEMAG-HEM,FEMAG-HEMSoftwaretosimulateSapphireGrowthbyHeatExchangeMethodSpecifications:Temperatureinthesapphireandinallfurnacecomponentsbysolvingtheglobalheattransferinthefurnace(radiation,conduction,convection).Flowvelocityinthesapphireliquidphase.CrystallizationfrontshapeAdvancedradiationheattransferinthesapphireGasconvectionAnisotropicthermalstressesinthecrystal,.,CONFIDENTIAL,FEMAG-HEM,FEMAGSoftCADtooltointroducethegeometry,.,CONFIDENTIAL,FEMAG-HEM,GlobalTemperatureinthefurnace,.,CONFIDENTIAL,FEMAG-HEM,Meltconvection,Detailofmeltconvection,.,CONFIDENTIAL,FEMAG-HEM,Temperaturedistributioninthecrystalandmeltfordifferenttimes,Velocityamplitudedistributioninthemeltfordifferenttimes,.,CONFIDENTIAL,AnisotropicThermalStress(HEMSapphireA-axis),FEMAG-HEMquasi-steadysimulationofthegrowthofaSapphirecrystal:3DvonMisesinvariantisovalues(Pa),FEMAG-HEMExample,.,CONFIDENTIAL,AnisotropicThermalStress(HEMSapphireC-axis),FEMAG-HEMquasi-steadysimulationofthegrowthofaSapphirecrystal:3DvonMisesinvariantisovalues(Pa),FEMAG-HEMExample,.,CONFIDENTIAL,FEMAG-OXtosimulateCZandKyropoulosisavailableFEMAG-HEMtosimulateHEMprocessisavailableAdvancedradiationmodelVeryefficient(ParallelSoftware)Efficientmeltflowcalculation(laminarsimulation)ThermalStresses(A-axis,C-axis),SapphireGrowthSimulation-Conclusion,.,CONFIDENTIAL,Veryfast