利用晶体生长计算软件FEMAG进行蓝宝石晶体生长的仿真方法

CONFIDENTIAL,晶体生长计算软件FEMAG蓝宝石晶体生长模拟方法,FEMAGSoftS.A.,BelgiumASPIN-OFFcompanyfromUniversitecatholiquedeLouvainBelgiumProfessorF.Dupret,CONFIDENTIAL,GeneralintroductionSapphireGrowth,Content,CONFIDENTIAL,Introduction,Formorethan25years,FEMAGSoftdevelopssimulationsoftwarededicatedtotheresearchanddevelopmentofoptimalcrystalgrowthprocesses.1984FirstresearchonGermaniumgrowthinUniversityofLouvain.Prof.FranoisDupret1989FirstresearchonSilicongrowthinUniversityofLouvain.1992FirstcollaborationswithmajorICcompanies.Developmentofdefect-freesiliconwaferproduction.Today,morethan35patentsarereferencingFEMAGSoftware2003FEMAGSoftS.A.,spin-offfromUniversityofLouvain.2006CollaboratrionwithmajorSolarcompanies.Developmentoflow-costandlow-oxygencontentprocesses.2009Largeinvestmentforanewsoftwareframework2010ReleaseofSoftwareapplicationforSapphireingotproduction.,CONFIDENTIAL,Czochralskiprocess,CONFIDENTIAL,DirectionalSolidificationSystem,CONFIDENTIAL,FloatingZoneProcess,CONFIDENTIAL,SapphireGrowthbyCZandkyropoulos,CONFIDENTIAL,SapphiregrowthbyHEM,CONFIDENTIAL,WhatareFEMAGsoftware?,Process-dedicatedsimulationtools,adaptedtoyourownprocessesandabletosolveyourproblems.GlobalAllthefurnacecomponentsareconsidered.Alltheheattransfermodeareconsidered(radiationtransfer,heatconduction,meltandgasconvection)InductionandohmicheatingTimeDependent,CONFIDENTIAL,Process-dedicatedtools,FEMAG-CZ:CzochralskiFEMAG-FZ:FloatingZoneFEMAG-VB:VerticalBridgmanFEMAG-CZ/OX:CzochralskiforSapphireFEMAG-KY:KyropoulosFEMAG-DS:DirectionalSolidificationFEMAG-HEM:HeatExchangeMethod,Gainoftime.ProcessmasteringAccurateandrighttothepoint,CONFIDENTIAL,Platformoriented,FRAMEWORK:FEMAG3,RADIATION,CONVECTION,MESH,GEOMETRY,CONDUCTION,FEMAG-CZ,FEMAG-HEM,FEMAG-DS,FEMAG-KYROPOULOS,FEMAG3NEW2011Veryaccurate:FiniteElementandSpectralmethodsVeryefficient:3Dsimulationsinless1dayVeryflexible:Veryfastdevelopmentofnewdemand,CONFIDENTIAL,Globalsimulations,CzochralskiFurnaceforSilicon,HEMFurnaceforSapphire,Nosimplificationoftheprocessconditions,CONFIDENTIAL,Dynamicsimulations,AdynamicsimulationtoolCompleteprocesssimulationDynamiceffectofinterfacedeformationVaryingprocessingconditions,CONFIDENTIAL,SapphireCrystalGrowthSimulation,CONFIDENTIAL,SapphireSimulationObjective,ThemarketofSapphireisexperiencingaveryfastgrowthrateandbecomeverycompetitiveManycompaniesinvestinsimulationsoftwareinordertoreinforcetheirpositionsHEM,CzochralskiandKyropoulosprocessrequireoptimizationandagoodunderstandingStrongneedforefficientnumericaltools.Radiationeffectsintheparticipatingcrystalandmeltisacomplexproblem.,CONFIDENTIAL,SapphireSimulationObjective,Ourgoalistoprovideaccuratesimulationtool,abletotakealltheprocessfeaturesintoaccountandtooptimizethegrowthprocessintermsoftheresultingcrystalquality.,CONFIDENTIAL,SapphireSimulationObjective,KYROPULOS,CZOCHRALSKI,HEM,CONFIDENTIAL,FEMAG-CZ/OX,FEMAG-CZ/OXSoftwaretosimulateSapphireGrowthbyCZandKyropoulosSpecifications:Temperatureinthesapphireandinallfurnacecomponentsbysolvingtheglobalheattransferinthefurnace(radiation,conduction,convection).Flowvelocityinthesapphireliquidphase.CrystallizationfrontshapeOhmicandInductionHeatingAdvancedradiationheattransferinthesapphireGasconvectionAnisotropicthermalstressesinthecrystal,CONFIDENTIAL,TemperatureintheHotZone,FEMAG-CZ/OX,CZprocesswithInductionHeatingsystem,InductionHeatingsystem,CONFIDENTIAL,Temperatureinthecrystalandinthemelt,FEMAG-CZ/OX,CZprocesswithInductionHeatingsystem,CONFIDENTIAL,Meltvelocityamplitude,FEMAG-CZ/OX,CZprocesswithInductionHeatingsystem,Theinterfaceshapeandpositionisaresultofthesimulation,FEMAGSoft2012,Temperaturefieldinthemelt,Streamfunction,FEMAG-CZ/OX/CZandKYROPOULOSprocess,FEMAGSoft2012,Meltmeshes,BLM(boundarylayermesh),Coarsemesh,BLMmeshisveryimportanttosimulatetheinterface,FEMAGSoft2012,Localtemperaturefield,Resultusingcoarsemesh,ResultusingBLMmesh,BLMmeshenablesabetterpredictionofthecrystalisationinterface,FEMAGSoft2012,Velocityfield,Resultusingcoarsemesh,ResultusingBLMmesh,CONFIDENTIAL,FEMAG-HEM,FEMAG-HEMSoftwaretosimulateSapphireGrowthbyHeatExchangeMethodSpecifications:Temperatureinthesapphireandinallfurnacecomponentsbysolvingtheglobalheattransferinthefurnace(radiation,conduction,convection).Flowvelocityinthesapphireliquidphase.CrystallizationfrontshapeAdvancedradiationheattransferinthesapphireGasconvectionAnisotropicthermalstressesinthecrystal,CONFIDENTIAL,FEMAG-HEM,FEMAGSoftCADtooltointroducethegeometry,CONFIDENTIAL,FEMAG-HEM,GlobalTemperatureinthefurnace,CONFIDENTIAL,FEMAG-HEM,Meltconvection,Detailofmeltconvection,CONFIDENTIAL,FEMAG-HEM,Temperaturedistributioninthecrystalandmeltfordifferenttimes,Velocityamplitudedistributioninthemeltfordifferenttimes,CONFIDENTIAL,AnisotropicThermalStress(HEMSapphireA-axis),FEMAG-HEMquasi-steadysimulationofthegrowthofaSapphirecrystal:3DvonMisesinvariantisovalues(Pa),FEMAG-HEMExample,CONFIDENTIAL,AnisotropicThermalStress(HEMSapphireC-axis),FEMAG-HEMquasi-steadysimulationofthegrowthofaSapphirecrystal:3DvonMisesinvariantisovalues(Pa),FEMAG-HEMExample,CONFIDENTIAL,FEMAG-OXtosimulateCZandKyropoulosisavailableFEMAG-HEMtosimulateHEMprocessisavailableAdvancedradiationmodelVeryefficient(ParallelSoftware)Efficientmeltflowcalculation(laminarsimulation)ThermalStresses(A-axis,C-axis),SapphireGrowthSimulation-Conclusion,CONFIDENTIAL,Veryfastsol