TFT制程简介PPT课件

.,1,TFT制程简介说明,For:NBLCMF.A.TeamAuthor:Jessica_LinDate:2009/1/8,.,2,目录:,TFT制作流程图TFT制作过程说明TFT五层制程说明TFT的制作类型TFT的工作原理补充说明:1.实际显微镜下的比对2.TFT-LCD的工作说明其它,.,3,TFT制作流程图:,.,4,TFT制程区域划分:,薄膜区-各层之薄膜成长黄光区-曝光.显影蚀刻区-图案成形及去光阻测试区-array及外部电路之检查,Equipment:PlasmaCVD,Sputter-薄膜Nikonstepper,Canonscaner-黄光Dry,WetEtching-蚀刻,.,5,TFT制作流程说明:,黄光前洗净,PRCoating,曝光,显影,蚀刻,去除光阻,检查,薄膜沉积,循环制程,只有单一层次说明:,.,6,TFTSubstrate,1)GateMetal(AlNdMoN)镀上MoN(氮化钼),Al+3%Nd(GATE)2)GIN(SiNxa-Sin+a-Si)G:GateSiNx(氮硅化合物,绝缘层)I:a-Si(非结晶硅,通道层)N:N+(高浓度磷(PH3)的硅)降低界面电位差,使成为奥姆接触(Omiccontact)3)S/DMetal(MoAlMo)镀上镀上MoN(氮化钼),pureAl(source,drain)4)Passivation(SiNx)镀上保护层(把金属部份盖住)5)ITO(Indium-Tin-Oxide)镀上ITO(铟锑氧化物,画素电极),.,7,TFTLayers五层结构图,Gate,GlassSubstrate,a-Si,GatemetalLayer-1,Insulator(G-SiNx)Layer-2,n+a-Si,S/DmetalLayer-3,S/DmetalLayer-3,PassivationLayer-4,ITOLayer-5,PassivationLayer-4,Source,Drain,.,8,TFT制作流程图:,Initialclean初始清洗,Metal1DepositionGate薄膜沈积,Pre-Depclean沈积前清洗,Pre-Photoclean光阻被覆/曝光/显影,Metal1photoLayer1黄光制程,WetetchLayer1蚀刻,PRstrip去除光阻,Pre-depclean沈积前预洗,G-I-NDepositionG-I-N薄膜沈积,ADICD显影后CD量测,CDLoss蚀刻后CDLoss量测,MarcoInspection强光检查,INphotoIN黄光制程,ADICD显影后CD量测,INetchIN蚀刻,MarcoInspection强光检查,Layer-1,Layer-2,.,9,TFT制作流程图:,PRstrip去除光阻,MarcoInspection强光检查,Pre-Depclean沈积前预洗,S/DsputterS/D薄膜沈积,MarcoInspection强光检查,S/DphotoS/D黄光,ADICD显影后CD量测,S/DetchS/D蚀刻,BAKE蚀刻前烘烤,N+etchchannel蚀刻,PRstrip去除光阻,SurfaceconditionS/DCDLoss量测,Pass.CVD护层沈积,MarcoInspection强光检查,Pass.photo护层黄光,ADICD显影后CD量测,Layer-2,Layer-3,Layer-4,.,10,TFT制作流程图:,Pass.etch护层蚀刻,PRstrip去除光阻,ITOSputterITO薄膜沈积,MarcoInspection强光检查,ITO.photoITO黄光,ADICD显影后CD量测,ITO.etchITO蚀刻,PRstrip去除光阻,ITOspaceCDLossITOCDLoss量测,FinalAnneal回火,TEG电性量测,ArraytestArray测试,LaserRepair雷射修护,Layer-4,Layer-5,Test,.,11,说明Csongate,A.R.=65%,显微镜下的DOT,等效电路图:,.,12,说明Csoncommon,A.R.=61%,等效电路图:,显微镜下的DOT,.,13,TFTDevice原件动作原理,.,14,TFT-LCD剖面图,.,15,整块Panel的动作说明:,ITO透明导电极,CS储存电容,Gate-Bus-Line,Data-Bus-Line,.,16,Panel外观说明:,PCBA-X,PCBA-Y,S-TAB,G-TAB,SDataLine,GScanLine,DOT显示区域,Fornt-RepairLine,Back-RepairLine,.,17,Panel显微镜下比对:上半部,S-TAB,S-OLB-Lead,S-Data-Line,.,18,Panel显微镜下