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本科生毕业设计(论文)翻译资料中文题目:以微型机器人为基础的自动化显微操作装置为微系统装配英文题目:Amicrobot-basedautomatedmicromanipulationstationforassemblyofmicrosystems1Amicrorobot-basedautomatedmicromanipulationstationforassemblyofmicrosystemsSergejFatikowMirkoBenzAbstract:Thedevelopmentofnewtypesofminiaturizedandmicrorobotswithhuman-likecapabilitiesplayanimportantroleindifferentapplicationtasks.Oneofthemainproblemofpresent-dayresearchis,forexample,toassembleawholemicrosystemfromdifferentmicrocomponents.Thispaperpresentsanautomatedmicromanipulationdesktopstationincludingapiezoelectricallydrivenmicrorobotplacedonthehighly-precisexystageofalightmicroscope,aCCD-cameraasalocalsensorsubsystem,alasersensorunitasaglobalsensorsubsystem,andaPentiumPCequippedadditionallywithanopticalgrabber.Themicrorobothasthreepiezoelectricallydrivenlegsandtwoautonomousmanipulatorsasendeffectors;itcanperformhighly-precisemanipulations(withanaccuracyofupto10nm)andanondestructivetransport(ataspeedofseveralmm/s)ofverysmallobjectsunderamicroscope.Toperformmanipulationsautomatically,acontrolsystem,includingataskplanninglevelandareal-timeexecutionlevel,isbeingdeveloped.(C)1998ElsevierScienceB.V.Allrightsreserved.Keywords:Microrobots;Microassembly;Automateddesktopstation;Assemblyplanning;Piezoactuators1.Introduction:Thereisagrowingneedforminiaturizedandmicrorobotsworldwide.Duetotheenormousbreakthroughsinconventionalroboticsandinthemicrosystemtechnology(MST),everyoneisconvincedthatthedevelopmentofremote-controlledorautonomousmicrorobotswillleadtoimprovementsinmanyareas.Aboveall,positiveresultsareexpectedinmedicine(microsurgery),manufacturing(microassembly,inspectionandmaintenance),biology(manipulationofcells)andtesting/measuringtechnique(VLSI).Medicineisoneoftheapplicationfieldswhichwouldprofitbythemicroroboticsthemost.Theattentionliesonartificialorgans(prosthetics),laparoscopy,implantabledrugdeliverysystems(diagnosisandtherapysystems),telemicrosurgery,etc.Theminimal-invasivesurgerydevelopedintoanimportantfieldofmedicineduringthelastyears.Smallerandmoreflexibleactiveendoscopesareneededinordertoreplacehumanhands,respondtoouterincidents,penetrateintoabodyoravesselthroughnaturalbodilyorificeorasmallincisionby2remotecontrol,wheretheyperformcomplexin-situmeasurementsandmanipulations.Inordertomeettheserequirements,microprocessors,severalsensorsandactuators,alightsourceandpossiblyanimageprocessingunitshouldbeintegratedintoanintelligentendoscope.Biotechnologyrequiresspecialmicrostructuredactivetoolswhichareabletoperformmicromanipulationslikethesortingorreunionofcellsortheinjectionofaforeignbodyintoacellunderamicroscope.Inthegeneresearchandtheenvironmenttechnique(cellsasindicatorsforharmfulsubstances),preciseandgentlemanipulationofsinglecellsarealsorequired.Industryandespeciallymanufacturingandmeasuringtechniquesneedhighlysensitivetestingmethodsinthem-range.Animportanttaskrepresents,forexample,theinspectionofwafers,whereseveralcheckpointshavetobecontactedbyatemperatureorvoltageprobe.Thesameisvalidforinspectionrobotswhichareusedininaccessibleordangerousterraininordertodetectleaksorflawsandmakerepairs(e.g.,inpipelines)。TheadoptionofMST-relateddevelopmentsbytheindustryhasalreadydemonstratedwhichkindofproblemsoccurwiththemassproductionofmicrosystems.Thesesystemsusuallyconsistofmicrocomponentsofdifferentmaterialswhichareproducedwithvariousmicrotechniques;thisleadstooneorseveralverypreciseassemblystep(s)oftheindividualcomponents.Theassemblyofmicrosystems,i.e.,thenon-destructibletransport,precisemanipulationorexactpositioningofmicrocomponentsisbecomingoneofthemostimportantapplicationsinmicrorobotics.2.Manipulationofmicroobjects:Theavailabilityofhighlypreciseassemblyprocesseswillmakeiteasiertoeconomicallyrealizeoperablemicrosystems.Inordertoefficientlyproducemicrosystemsandcomponentsinlotsizesorbymass-productiontechniques,itisabsolutelynecessarytointroduceflexible,automated,preciseandfastmicroassemblystations.Differentconceptsarebeingfollowedtodomicromanipulationforparticularclassesofapplication.Purelymanualmicromanipulationisthemostoftenusedmethodtoday.Inmedicineandbiologicalresearch,itisusedexclusively.Eveninindustry,microassemblytasksareveryoftencarriedoutbyspeciallytrainedtechnicians,who,forexample,prepositionassemblypartsusingscrewsandsprings,thenpositionthepartswithtinyhammersandtweezers,andfinallyfastentheminthedesiredposition.However,withincreasingcomponentminiaturization,thetolerancesbecomesmallerandsmaller,andthecapabilitiesofthehumanhandarenolongeradequate.3Theapplicationofpartiallyautomaticmicromanipulationsystemsofconventionalsize,whichareteleoperated;thereby,thehandmotionsofthehumanoperatoraretranslatedintofiner3Dmotionsforthemanipulatorsofthemanipulationsystembymeansofajoystickormouse.Here,thedexterityofthehumanhandissupportedbysophisticatedtechniques.However,thefundamentalproblemoftheresolutionofthefinemotionandofthespeedremain,sincethemotionofthetoolisadirectimitationofthatoftheoperatorshand.TheuseofautomatedmultifunctionalmicromanipulationdesktopstationssupportedbyminiaturizedflexiblerobotswhichemployMST-specificdirect-driveprinciples.Theserobotscouldbemobileandareableperformmanipulationsindifferentworkareas.Thetransportandmicromanipulationunitsperformingtheassemblymaybeintegratedontoonechip.Asopposedtotheaforementionedmicromanipulationtechnique,thereisnodirectconnectionbetweentheoperatorshandsandtherobot.Theassemblystepsmaybecarriedoutwiththehelpofclosedloopcontrolalgorithms.Thehumanassignsalltaskstominiaturizedassemblymechanismsand,bydoingso,triestocompensateforhislimitedmicromanipulationcapabilities.Manymicrorobotscanbeactiveatthesametimeinadesktopstation.Theuseofmanyflexiblenanorobotsystemswhichsolvethemanipulationtasksinclosecooperation.Here,therobotsizeiscomparabletothatofthemanipulatedobject.Thisconceptcouldbebasedonthehumanbehavior,butitsrealizationliesinthedistantfuture.Ingeneral,manipulationsvaryfromanapplicationtoanother.However,approximatelythesameoperationsequencesareusedineverycase.Theyare:grip,transport,position,release,adjust,fixinplaceandprocessingstepslikecutting,soldering,gluing,removalofimpurities,etc.Inordertobeabletocarryouttheseoperations,correspondingtoolsareneeded,suchasmicroknives,microneedlestoaffixobjects,microdosingjetsforgluing,microlaserdevicesforsoldering,weldingorcutting,differ
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