一种精密电容测量薄膜平面扩张的第三部分：导体和半导体材料 圆弧型柔性铰链刚度特性分析 柔性铰链 相关外文翻译

外文翻译毕业设计题目柔性铰链微运动的测量与控制方法原文1APRECISIONCAPACITANCECELLFORMEASUREMENTOFTHINFILMOUTOFPLANEEXPANSIONPARTIIICONDUCTINGANDSEMICONDUCTINGMATERIALS译文1一种精密电容测量薄膜平面扩张的第三部分导体和半导体材料原文2CIRCULARAREFLEXIBLEHINGESTIFFNESSCHARACTERANALYSIS译文2圆弧型柔性铰链刚度特性分析APRECISIONCAPACITANCECELLFORMEASUREMENTOFTHINFILMOUTOFPLANEEXPANSIONPARTIIICONDUCTINGANDSEMICONDUCTINGMATERIALSABSTRACTTHISPAPERDESCRIBESTHECONSTRUCTION,CALIBRATION,ANDUSEOFAPRECISIONCAPACITANCEBASEDMETROLOGYFORTHEMEASUREMENTOFTHETHERMALANDHYGROTHERMALSWELLINGEXPANSIONOFTHINFILMSITISDEMONSTRATEDTHATWITHTHISVERSIONOFOURCAPACITANCECELL,MATERIALSRANGINGINELECTRICALPROPERTIESFROMINSULATORSTOCONDUCTORSCANBEMEASUREDTHERESULTSOFOURMEASUREMENTSONPTYPEORIENTEDSINGLECRYSTALSILICONARECOMPAREDTOTHERECOMMENDEDSTANDARDREFERENCEVALUESFROMTHELITERATUREANDARESHOWNTOBEINEXCELLENTAGREEMENTINDEXTERMSCAPACITANCECELL,COEFFICIENTOFTHERMALEXPANSIONCTE,GUARDEDELECTRODE,HIGHSENSITIVITYDISPLACEMENT,INNERLAYERDIELECTRICS,POLYMERS,THINFILMSIINTRODUCTIONTHECOEFFICIENTOFTHERMALEXPANSIONCTEISAKEYDESIGNPARAMETERINMANYAPPLICATIONSITISUSEDFORESTIMATINGDIMENSIONALTOLERANCESANDTHERMALSTRESSMISMATCHESTHELATTERISOFGREATIMPORTANCETOTHEELECTRONICSINDUSTRY,WHERETHERMALSTRESSESCANLEADTODEVICEFAILUREFORACCURATEMODELINGOFTHESESYSTEMS,RELIABLEVALUESARENEEDEDFORTHECTETRADITIONALLY,DISPLACEMENTGAUGETECHNIQUESSUCHASTHERMOMECHANICALANALYSISTMAHAVEBEENUTILIZEDFORDETERMININGTHECTEHOWEVER,STANDARDTESTMETHODSBASEDONTHESETECHNIQUESARELIMITEDTODIMENSIONSGREATERTHAN100MM12THISISPROBLEMATICFORMATERIALSWHICHCANBEFORMEDONLYASTHINLAYERSSUCHASCOATINGSANDCERTAININNERLAYERDIELECTRICSADDITIONALLY,THEREISSOMEQUESTIONASTOWHETHERVALUESOBTAINEDONLARGERSAMPLESBULKMATERIALARETHESAMEASTHOSEOBTAINEDFORTHINFILMS,EVENWHENTHEEFFECTSOFLATERALCONSTRAINTSAREINCLUDEDINTHECALCULATIONSITHASLONGBEENRECOGNIZEDTHATCAPACITANCEBASEDMEASUREMENTS,INPRINCIPLE,CANOFFERTHENECESSARYRESOLUTIONFORTHESEFILMSFORAPAIROFPLANEPARALLELPLATECAPACITORS,IFTHESAMPLEISUSEDTOSETTHESPACINGOFTHEPLATESDWHILEBEINGOUTSIDEOFTHEMEASUREMENTPATH,THENFORACONSTANTEFFECTIVEAREAOFTHEPLATESA,THECAPACITANCEINAVACUUMVACCISGIVENBYTHEWELLKNOWNEQUATIONDACVAC01WHERE0ISTHEPERMITTIVITYOFFREESPACEMPF85480WITHTHESAMPLEOUTSIDEOFTHEMEASUREMENTPATHANDONLYAIRETWEENTHEELECTRODES,THEVACUUMCAPACITANCEISOBTAINEDROMTHEMEASUREDCAPACITANCECBYAIRVACCC2WHEREAIRISTHEDIELECTRICCONSTANTOFAIRINTHREEPREVIOUSPAPERS,THEDESIGNANDDATAREDUCTIONTECHNIQUESWEREPRESENTEDFOROURTHREETERMINALCAPACITANCEBASEDMETROLOGYFORTHINPOLYMERFILMMEASUREMENTSTHEFIRSTPAPERIDESCRIBEDTHEINITIALDESIGNBASEDONGOLDCOATEDZERODURHOWEVER,SEVERALPROBLEMSWEREENCOUNTEREDITWASDISCOVEREDTHATZERODURDISPLAYSFERROELECTRICBEHAVIOR,WITHANAPPARENTCURIETEMPERATUREOF206A2ASDETERMINEDBYFITTINGWITHACURIEWEISSLAWTHERAPIDCHANGEINTHEDIELECTRICCONSTANTOFTHEZERODURALONGWITHACOUPLINGFROMTHECENTRALCONTACTTHROUGHTHEGUARDGAPTOTHEHIGHELECTRODECREATEDANAPPARENTNEGATIVETHERMALEXPANSIONTHESECONDPROBLEMWITHTHEINITIALDESIGNWASWITHTHEGOLDCOATINGTHISCOATINGHADTHETENDENCYTO“SNOWPLOW”WHENSCRATCHESFORMEDINTHESURFACECREATINGRAISEDAREASWHICHWOULDRESULTINSHORTSWHENMEASUREMENTSWEREPERFORMEDONTHINSAMPLESTHESECONDPROBLEMWITHTHEGOLDWASTHATITUNDERWENTMECHANICALCREEPUNDERLOADINGTORESOLVETHESEPROBLEMS,ANEWELECTRODEWASDESIGNEDFROMFUSEDQUARTZCOATEDWITHNICHROMEAGROOVEFILLEDWITHCONDUCTIVESILVERPAINTWASADDEDTOTHEBACKSIDEOFTHEBOTTOMELECTRODEAROUNDTHECENTRALCONTACTTOINTERCEPTANYFIELDLINESBETWEENTHECENTRALWIRECONTACTTHROUGHTHEGUARDGAPTOTHEHIGHELECTRODETHENEWDESIGNWASDESCRIBEDINTHESECONDPAPERIIALONGWITHTHERMALEXPANSIONMEASUREMENTSONORIENTEDSINGLECRYSTALSAPPHIRE32OALANDA14MTHICKINNERLAYERDIELECTRICMATERIAL10ITWASRECOGNIZEDINIITHATTHEDATAREDUCTIONWASSIMPLEASLONGASTHEAIRFILLINGTHEGAPBETWEENTHECAPACITORPLATESWASDRYHOWEVER,TOEXPANDTHEUTILITYOFTHECAPACITANCECELLTOHYGROTHERMALEXPANSIONIE,SWELLINGINAHUMIDENVIRONMENT,THETHIRDPAPERIIIDESCRIBEDTHEDATAREDUCTIONTECHNIQUESNECESSARYFORUSEOFTHECAPACITANCECELLUNDERHUMIDCONDITIONSFIG1SCHEMATICOFTHEELECTRODESNOTETHATTHESHADEDAREASCORRESPONDTOTHENICHROMECOATINGTHERESOLUTIONOFTHEINSTRUMENTWASDETERMINEDINIIANDIIIFORDRY,ISOTHERMALCONDITIONS,THECAPACITANCECELLCANMEASURERELATIVECHANGESINTHICKNESSONTHEORDEROF710,FORA05MMTHICKSAMPLETHISCORRESPONDSTOARESOLUTIONONTHEORDEROFM11105UNDERDRYCONDITIONSINWHICHTHETEMPERATUREISCHANGED,THEREPRODUCIBILITYOFARELATIVETHICKNESSCHANGEEG,FORCTEMEASUREMENTISONTHEORDEROF610FINALLY,UNDERHUMIDCONDITIONS,THEULTIMATERESOLUTIONISPRIMARILYAFUNCTIONOFTEMPERATURETHEACTUALVALUESOFWHICHAREGIVENINIIIINII,ADEFICIENCYWASRECOGNIZEDINTHEDESIGNNEITHERSEMICONDUCTINGORCONDUCTINGMATERIALSCOULDBEUSEDASTHEMATERIALFORTESTINGTHISWASESPECIALLYTHECASEFORSILICON,WHICHFORMSASCHOTTKYBARRIERWITHNICHROMEANDACTSASAVOLTAGERECTIFIERADDITIONALLY,BECAUSEOFTHENATUREOFTHEINTERFACE,THE1KHZMEASUREMENTFREQUENCYGENERATESULTRASOUNDWHICHRESULTSINTHEEPOXYCONTACTSBEINGSHAKENLOOSEWEMENTIONEDBRIEFLYINIITHATIFTHETOPELECTRODEHADAGUARDRINGADDED,THESAMPLECOULDBEHELDATZEROPOTENTIALANDTHISWOULDNOLONGERBEAPROBLEMTODEMONSTRATETHIS,WECONSTRUCTEDSUCHACAPACITANCECELLTHEDESIGNANDTESTINGOFWHICHAREDESCRIBEDINTHISPAPERIICAPACITANCECELLDESIGNAELECTRODEDESIGNBECAUSETHECONSTRUCTIONOFTHEELECTRODESWASTHOROUGHLYDESCRIBEDINII,ALESSDETAILEDDESCRIPTIONWILLBEGIVENWITHEMPHASISONTHECHANGESINTHEDESIGNTHEELECTRODESWERECONSTRUCTED,ASBEFORE,INTHEFOLLOWINGMANNERSEEFIG1CMCM210CYLINDRICALBLANKSOFFUSEDQUARTZWEREGROUNDANDPOLISHEDTOOPTICALFLATNESSSMALLHOLESWEREDRILLEDTHROUGHTHECENTEROFEACHBLANKSOTHAT16GAUGEWIRECOULDBEINSERTEDINTOTHEMTHEWIRESWERETHENCEMENTEDWITHACONDUCTINGEPOXYRESISTIVITYOFCM4104AT2A3A0ASECONDHOLEANDWIREWERETHENADDEDTOEACHBLANKAPPROXIMATELY075CMFROMTHEEDGEOFTHEBLANKSACOATINGOFNICHROMEWASTHENADDEDSUCHTHATITCOVEREDALLSURFACESEXCEPTFORASMALLAREAAROUNDTHEBACKOFTHEBLANKSAGUARDGAPWASSCRIBEDONBOTHTHETOPANDBOTTOMELECTRODESSUCHTHATNOMATERIALWASRAISEDWHICHCOULDCAUSEASHORTONTHEBOTTOMELECTRODE,THEGUARDGAPWASSCRIBEDONA3CMDIAMETER,ANDONTHETOPELECTRODEITWASSCRIBEDONA6CMDIAMETERINTHEBOTTOMELECTRODE,A1CMDIAMETERWELLWASCUTINTOTHEBACKOFTHEBLANKWHICHEXTENDEDTOWITHIN5MMOFTHEFRONTSURFACETHISWELLWASTHENFILLEDWITHATHINCONDUCTIVESILVERPAINTTHEPAINTCONNECTEDTHEOUTERGUARDRINGSMETALLIZATIONTOTHEEDGEOFTHEWELLFIG2SCHEMATICOFTHEASSEMBLEDCAPACITANCECELLBCELLASSEMBLYANDCAPACITANCEMEASUREMENTSTHEHOLDERDESCRIBEDINIIWASEMPLOYEDFORTHEMODIFIEDCELLINTHISVERSIONOFTHECAPACITANCECELL,BOTHCONDUCTORSOFTHESEMIRIGIDCOAXIALLINEWERECONNECTEDTOTHETOPELECTRODETHECENTERCONNECTORANDBRAIDWERECONNECTEDTOTHECENTERAREAANDOUTERGUARDRING,RESPECTIVELY,BYFINE30GAUGEWIRECOILSTHECOILSWERETERMINATEDWITHCENTERFEMALECONTACTSFROM50BNCCONNECTORS,WHICHCOULDBEEASILYCONNECTED/DISCONNECTEDTOTHE16GAUGETINNEDCOPPERWIRETHATWASEPOXIEDINTOTHEELECTRODESASCHEMATICOFTHEASSEMBLEDCELLISSHOWNINFIG2THEFEMALEBNCCONNECTORONTHEBRASSHOLDERBOTTOMELECTRODEWASCONNECTEDTOTHELOWTERMINAL,ANDTHEFEMALEBNCCONNECTORONTHESEMIRIGIDCOAXIALLINEWASCONNECTEDTOTHEHIGHTERMINALALLCONNECTIONSFROMTHECAPACITANCECELLTOTHEBRIDGEWEREPERFORMEDUSINGTEFLONINSULATEDLOWNOISECABLESTHECAPACITANCEMEASUREMENTSWEREOBTAINEDUSINGACOMMERCIALAUTOMATEDTHREETERMINALCAPACITANCEBRIDGEWHICHUSESANOVENSTABILIZEDQUARTZCAPACITORANDHASACITEDGUARANTEEDRELATIVERESOLUTIONOFBETTERTHAN7105PF/PFFORTHERANGEOFCAPACITANCESUSEDWITHTHISCELLANDEENHAGERLING2500A1KHZULTRAPRECISIONCAPACITANCEBRIDGEWITHOPTIONENOTETHATTHE“USEFUL”RELATIVERESOLUTIONISSUGGESTEDBYTHEMANUFACTURERTOBETYPICALLYAFACTOROF10ORMOREBETTERTHATTHECITEDRELATIVERESOLUTIONTHECAPACITANCEBRIDGESCALIBRATIONWASVERIFIEDAGAINSTANATIONALINSTITUTEOFSTANDARDSANDTECHNOLOGYNISTCALIBRATEDSTANDARDREFERENCECAPACITORTHEDIFFERENCEBETWEENTHETWOWASWITHINTHECAPACITORSUNCERTAINTYALLMEASUREMENTSWEREPERFORMEDINATEMPERATURE/HUMIDITYCHAMBEREQUIPPEDWITHA90A1DEWPOINTAIRPURGETHECELLWASEQUILIBRATEDATEACHTEMPERATUREUNTILTHERELATIVEFLUCTUATIONSINTHEVACUUMCORRECTEDCAPACITANCEWERENOMORETHAN71010PF/PFBAROMETRICPRESSUREWASMONITOREDUSINGADIGITALPRESSURESENSORWITHAMANUFACTURERSSTATEDUNCERTAINTYOF01MMHG13PAASSTATEDPREVIOUSLYINII,THETEMPERATUREOFTHECELLWASCALIBRATEDINTERMSOFTHECHAMBERTEMPERATUREWITHARESISTANCETEMPERATUREDEVICERTDMOUNTEDTOTHECELLWITHTHERMALLYCONDUCTINGPASTETHERTDWASCALIBRATEDAGAINSTANISTCERTIFIEDITS90STANDARDREFERENCETHERMOMETERASINII,BECAUSEWEAREUSINGADRYAIRPURGE,WECANUSETHEIDEALGASLAWCORRECTIONTODETERMINETHEMOLARVOLUMEOFTHEAIRAIRVTOCALCULATEVACCPRTVAIRA43A5WHERETABSOLUTETEMPERATUREPPESSURERGASCONSTANT113145078KMOLKPALR12FROMTHISANDTHEVALUEOFTHEMOLARPOLARIZATIONOFDRYAIROBTAINEDFROMTHELITERATURE,MOLLP31031601413,THEDIELECTRICCONSTANTOFTHEAIRSEPARATINGTHEELECTRODESISAIEAIRAIEAIRAIRVPVP1124IIIMEASUREMENTSACELLCALIBRATIONTOUSE1TOCALCULATETHETHICKNESSOFTHESAMPLE,THEEFFECTIVEAREAMUSTBEKNOWNTODETERMINETHISVALUEASAFUNCTIONOFTEMPERATURE,ASINII,WECALIBRATEDTHEAREAANDAREAEXPANSIONTHROUGHTHEUSEOFZERODURSPACERSWITHTHICKNESSESOFAPPROXIMATELY20MMASINII,THEACTUALDIMENSIONSOFTHEZERODURSPACERSWEREMEASUREDINABALLTOPLANECONFIGURATIONWITHASPECIALLYDESIGNEDCALIPEREQUIPPEDWITHALINEARVOLTAGEDISPLACEMENTTRANSDUCERLVDTTHATHADARESOLUTIONOFMM4101THECELLWASASSEMBLEDWITHTHEZERODURSPACERSUSINGTHESAMPLEPREPARATIONDESCRIBEDINIIMEASUREMENTSWEREPERFORMEDAT0A6,25A6,50A6,75A6,100A6,125C,AND150A6THECELLWASCYCLEDTHROUGHTHISRANGEOFTEMPERATURETHREETIMES,ANDTHEVALUESFORVACCWEREDETERMINEDFOREACHRUNAFTERAVERAGINGALLTHEPROPERTIESOVERAPPROXIMATELY1HUSING10SINCREMENTSATOTALOF360DATAPOINTSAFTEREQUILIBRIUMWASACHIEVEDTHEAREAAWASCALCULATEDUSINGTHEROOMTEMPERATURETHICKNESSMEASUREMENTSANDTHE25A6VALUEFORVACCALLSUBSEQUENTDETERMINATIONSOFA,ATHIGHERANDLOWERTEMPERATURES,WERECORRECTEDFORTHESLIGHTEXPANSIONANDCONTRACTIONOFTHEZERODURASAFUNCTIONOFTEMPERATURE1610050KZERODURTHERESULTSOFTHEEFFECTIVERADIUSOFTHEELECTRODEASAFUNCTIONOFTEMPERATUREAREPLOTTEDINFIG3FIG3EFFECTIVERADIUSOFTHEBOTTOMELECTRODEASAFUNCTIONOFTEMPERATUREOBTAINEDBYMEASUREMENTSUSINGZERODURANDCORRECTINGFORITSSLIGHTEXPANSIONFIG4RELATIVEEXPANSIONOFTHEORIENTEDSINGLECRYSTALSILICONASAFUNCTIONOFTEMPERATURETHELINEISAPLOTOFTHEDATAFROMBPTYPEDOPEDSINGLECRYSTALSILICONTODEMONSTRATETHEABILITYOFTHECELLTOMEASURESILICONANDTOPROVIDEACCURATEVALUESFORTHERMALEXPANSION,A06MMTHICKWAFEROFSINGLESIDEPOLISHED,BACKSIDESTRESSRELIEVED,PTYPE,ORIENTEDSINGLEC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7810G5347G1038AIRVACCC2G5347G1025AIR是G12366G8680介电G5132数G3324G2081G989G12699G16782文，G6563G17860设计和数G6466G17836G2419G6228G7427的G2469G4649G10628G10378，并G6564出了G989G12483G2487电容的聚合物薄膜测量。G12544一G12699G16782文IG6563G17860了基G1122G3835G18341ZERODUR的G2033G8505设计。G9994G13792G17947到了G1972个G19394G20076，G1166们G2469G10628了一个明G7186的G2469G10628了一个明G7186的G4633G18336206G263G9213度的ZERODURG7186G12046G19093电G15904G1038，经拟合求得了G4633G18336G3818斯G4462律。G3324快速变化的ZERODUR介电G5132数随着耦合从G1025央极G7507到高电极的差G17329创造了一个明G7186的负G19766热膨胀。G3324最G2033的设计G1025G12544二个G19394G20076是G18341G9046层。该G9046料具G7389的趋势,“雪犁”G7114G5430G6116的表G19766划伤的地区创造复活G7114,会导致测量短裤G18129由薄G7691品。G12544二个关G1122G9046G18341的G19394G20076是它经历载荷G991的力学蠕变。G1038了解决这G1135G19394G20076，设计了一G12193新的电极由电熔石英G990G9046一层镍铬合G18341。填充用导电银漆加入的沟槽底部背G19766电极围绕G1025心电极，通过门卫拦截差G17329，高电极之G19400的环G15904线接触到任何领域。G12544二G12699G16782文介绍了新的设计，单晶蓝宝石（G989氧化二铝）热膨胀系数的测量和一个14M厚内层介电材料。G3324G16782文G1025，我们G16760G1038G5415电容极G7507G19400填充的G12366G8680是干燥G7114，数G6466分G7524是简单的。G9994G13792，电容G17836G19668测量薄膜的湿热膨胀（例G3926，G3324一个潮湿的环境G1025的膨胀），G16782文G1025G6563G17860了电容G3324高G9213高湿条件G991数G6466分G7524的G5529要G6228G7427。A8A9A10A11A12A13A8A14A15A16A17A18A19A20A21A22A23A24A25A26A27A28A29G3324G16782文、G1025已经G11842G4462仪G3132的分辨率。干燥、等G9213条件G991，电容G4557G1122一个05MM厚的G7691品测量厚度G11468G4557变化G3835G13434是710；分辨率G11468G5415G1122M11105。G3324干燥条件G991改变G9213度，G11468G4557厚度变化（例G3926热膨胀系数）G3835G13434G1038610。最G2530，G3324潮湿的条件G991，最终解决G9213度的G5445G2721这个将G3324G16782文G1025得到G11842G4462。G3324G16782文存G3324公G16760的不足。无G16782半导体或导体材料，G18129可作G1038测量材料。硅尤其G3926G8504，与镍铬合G18341G5430G6116肖特基势垒整流作G1038一个电压整流G3132。G8504G3818，由G1122接G2487的特性，1千赫兹的频率超声测量的环氧接触会产生偏差。G3324G16782文G1025我们G6564到G3926果G3324顶部电极增加一个保护环，G7691品的零电势测量将不是G19394G20076。G1038了说明这点，本文会G6563G17860G7512G5326这G12193电容的设计和测G16809。电容单元设计A电极设计由G1122电极设计得到了G16826G13466G6563G17860，这G18336说明重点将G6930G3324设计的变化G990。该电极的G7512造和以G2081一G7691（G3926G32821）。熔石英G3290G7621的G12366G11345G16280G7696是CMCM210。G4579G4392G19087过G8611个G12366G11345G1025心，使16G2507线可以G6566入。这G1135导线G3278G4462G3324导电环G990（G332425G263的电G19471率G1038CM4104）。G18341G4658G1009G9167加到G12544二个G4392G12366G11345G17805缘G3835G13434075CM。镍铬合G18341G16218G11434G2530G19766一个G4579G14551围的G12366G11345处。顶部和底部电极G19400G19565G1025G3926果G8821G7389材料填充会导致短G17347。底部电极G1025的保护G19400G19565设G13634G33243G2412G12871G11464G5464G3290处，底部电极G1025的保护G19400G19565设G13634G33246G2412G12871G11464G5464G3290处。G3324底部电极G1025，G2011一个G17329表G197665G2412G12871的1G2412G12871G2487G5464的G19400G19565。这个G2487G5464填充一层薄的导电银漆。银漆G17842接到G3818部保护环G18341G4658G2487G5464。A30A31A32A33A34A33A35A36A37A38A39A40A30B电池组装和电容测量G3324G16782文G1025G6563G17860了电池的G2419G10714。这个版本的电容电池，G1016G2528G17736导线G17842接到顶部电极。该G17842接线由30G2507线G3292G13464G6116G17842接到G1025心区域和G3818部保护环。线G3292G4565G1602550BNC（G13466G2528G17736电G13530接G2487）G17842接G3132的触G3848G18336，G1194可以G17743G7143地电极G7507G18336G13466G19120导线的G17842接/G7041G5332。电池G13464G16025G3926G