NeoScope-培训报告

1、NeoScope JCM-5000 培训报告培训时间：200968地点：苏州中翰培训人：NIS刘志受训人：杨卫培训内容：SEM整机安装，transportation lock的拆卸，操作软件的安装，SEM开机后操作和使用，SEM整机拆卸安装环境要求：Installation requirementsIteminstallation requirenrienisitemsJ HDiizcntdl place匚 WAtrf Spill pAE?&$ No ULKiwiikid impPict 方帝中iwai_Nofroni $uilOtiEidixi aceji:、Noliia Eficti fi

2、eld Ggmf No sw&iit ektne field fro in 石“灯机 iddiagRrwan rHupeifllure丄対cUiimi出 lyLess UiAn ?0* ；FotVfi亡山亡li料(Md 迪 nadf + RF 卜pill吐 AC 12ft PQ0VA). 240V(I10CiA) (VAiiltioil10)50 60Hz. Grotiudm (eniuctAl i,Oiie, UKXIch rsFwp i 利WhtiUFiHb (Din systemFCiSuigie pta店肚(27,v& (YaiiklwailQMini ror： itiek pbnsc

3、 AC 10G-240V(20-26VA)(VnnKinilD i ?0 WHz. LViomiduijOn*, lOJft otXhntric fieldLew tluii QJ.fT (siuc ttavp)Flooie lblfLtlOD.Ltvi ihfuj 2 inhT-Fh ivitii ujore Unu iHzlMiie waveTeibltSOOmm x LWOmnn Minim um)主机系统安装:1. 部件：rotary pump，JCM 5000 main unit, PC2. 连接:主机和机械泵用两根抽真空橡胶管连接IEEE1394主机和电脑连接键盘和鼠标连接电源线连

4、接主机和机械泵Conntfcl tvn. t ubbei I小沿 Puin twopansof Uit maii mill h rotftr/ uuitid with quick coup inns.Connect pce-r cab t3 of til main unit. CesMtap PC an display to the AC pcv-or sockt of the roomConntcl 1EEE1394(.r-blt! tFAPHri PC Aiitlrridirh unit puH on htsConnect tlie power sao t erf the rotaTj p

5、Ui- jj H the solthe ii di 1 Unit.操作流程:1操作流程:3. 双击软件界面，进入操作界面，操作界面及其说明如下: g逾D Main MenuClick on this button to show oi liide the menu functions.2 Menu bar switching buttonSwitch on. off main menu.3 Start buttonClick on thi5 l)u(ron(o change rhe OperanoQ.Setrings panel ro 5ran mode.4 Adjust buttonClic

6、k &n this *butron to change the Operauon/Serang panel to Aqust mode View buttonIt is the fast scanning inode with gieen LED on. and slow scannuig mode wiili gieen LED off. Photo buttonClirk cn rhk lnnron ro art phorogrAphv7； Measure buttonDisplays the operation manual PDR8 Filament butt onTim the fi

7、lament on or off. Power oft buttonHim off the power to the- Microscope main unit.10 Image displaySEM image from die specimen is displayed11 Viewing Inlormation DisplayDisplays infoimanon for (he image cunenrly being viewed.11 Main unit Status IndicatorIndicates the status of the applied high voltage

8、, evacuauon system and device connection (link). Comment buttonOpens the window for entering a comment to be displayed on the image.i4 Comment DisplayDwplavs the user-entered commenr.if Image Display buttonDKplay; previously A mi哼eg ui it spraie- window, reduced m 空iraUw A 审 bution ro scroU imagesif

9、 Acceleration Voltage LuuonsCLiLe Uie applied-volued forGray cio:ed. bwwm ciudql be ued.口 Vacuum mode buttonsCttige die vacuum it:。吐e used forvieivitif Gray colored trnttons csildoc be used 再 Full Scre-en buttonClick cm tins button ro mew; the 7jrrent订丘怙-诂壬 Linage Ln fiitl screen mode. ChangeBackgro

10、und Color buttonChmes backiound caloi of rbe operation panfl Choose fioiu fcui colors, light T)lutT light rer, light pmk and hght pUoftf. The defauli toackgrouiid. color of rhe dperidon pjnel 苗 grey.爼 Operation/Settings PanelPerfaini opetacioa and make 匕卜run5 ujjis di m*nu ud bucton on tin# pajwl.操作

11、：开机：1.按下主机上power按键2开PC和显示器3. 打开JCM 5000应用软件打开桌面上的start JCM-5000图标4. SEM会根据标准的recipe显示出SEM扫描样品的图像样品准备工作，specimen holder的安装：使用标准的样品holder（44mm）:1. 样品固定在垫块上，2调整高合适的高度Specimen曲 rner HoiMaFicrewpec：men block2. 如果没有使用标准的holder，可按照如下的标准安装样品用导电胶带粘住样品测量holder至样品的顶端的高度聚焦，任何样品的高度测量Mountthiesn ih hulaerwth do u

12、bl tt.ck tp軽 #tc.M&a sure the spghdr甘葫 heightP.S:注意最高不要超过52mm,以免碰到探头，造成损害更换样品和开始抽真空:1. 按VENT按键换气,拉开样品室门取下holderDra out the sTageTake out holder2.将新的样品固定在holder 上调整样品台的X_Y周，将三角尖端对准C形圈中心3. 按下样品室门，等待VENT开始的时候松开手,4. 开始抽真空，显示 evacuation状态开始recipe操作模式：当真空抽好后，软件界面会显示recipe状态I.brightness调节，点击此按键SEM会自动调节至最佳亮

13、度2自动聚焦：软件会自动先调节focus在调节stigmation至最佳3.调节X轴，Y轴预览图像4调节View按键，可获得更高质量的图像5. 放大倍率调整，通过鼠标滚轮，调整放大倍率10-20000倍获取图片：当按下photo按键时，图像会进行自动扫描一副高质量图像并 保存可选择高分辨率和帧叠加两种模式暂时不使用SEM :可点击filament按键关闭灯丝关闭SEM1. 点击Power OFF按键2. 将主机上power按键按至O 边3. 关闭JCM-5000软件手动设置操作的参数：1点击Adjust按键，手动调节参数srt计 rnntficerion and hjht click for

14、fccui controlAdjust taDAuto C&RManual CSS.Ac d? IfrrfltionVo:对比度&亮度:自动亮度对比度手动亮度对比度，用鼠标调整亮度对比度按钮聚焦调节:根据Height的设置的不同会影像到自动聚焦的效果Height设置如图markfor majtii ficatiorRrijhmflKsHfiighl settirigPhotoFilar伽t Pow&r off cti emaborTum mouse wheel withAi.m id, ir hSpecify a stMomBr Iw-itfkt tfuat w ii -slim 9 底口事ed irMRr 2Heifiht rm图像平移功能:分样品台X轴，和Y轴平移获得移动图像电子束平移功能获得平移图像电子束旋转:点击Rotat