CT扩散炉培训教材(设备中英文版)

1、centrotherm扩散炉设备培训 equipment training of centrotherm Diffusion furnace 12021/8/14ALoading box 推舟部分B. TGA 有毒气体排放C. Heating furnace 加热部分D. Gas cabinet 气柜22021/8/141、CMI电脑2、Loading box上料箱3、Toxic gases 有毒气体排放4、Furnace 炉体 5、Gas box 气源柜32021/8/14Baddle head舟头Loading wafer加栽的硅片42021/8/14Mechanical arm 机械臂5

2、2021/8/14 Storage rack 1，2 存储位1、2 Paddle bearing, adjustable paddle position 碳化硅桨支座，调节桨位置62021/8/14quartz door石英门Door cylinder炉门气缸72021/8/141、CMS module 3、Power connection cover2、Thermocouple connection 4、Temperature sensor module 82021/8/141、 Flow meter 气体流量计2、 Pneumatic valve 气动阀1292021/8/14Coolin

3、g to the top of the furnace body and furnace 对炉膛顶部和炉体进行冷却102021/8/14On the POCL3 constant temperature process, normal temperature 20 degrees对POCL3进行恒温作用，正常工艺温度20度112021/8/14Bearing quartz and silicon, and out of the carrier ship承载石英舟和硅片石英舟进出的载体122021/8/14Detection of a range of whether object, avoid

4、 hit boat phenomenon, this range can be adjusted检测某个范围内是否有物体，避免出现撞舟现象，些范围可进行调节132021/8/14142021/8/14152021/8/141、Heat exchanger2、Cooling3、Shutoff valve 1、Cooling 4、Heat exchanger2、The main fan 5、Electronic devices 3、Cooling the air passage162021/8/14IndicatorIndicator lamp lampcolorcoloractionaction

5、meaningmeaninggreenopenReady to operatetwinklepauseblueopenUser interaction requiredyellowopenwarningredShines hom:offAlarmerror172021/8/141operation panel 4 keyboard2Touch screen 5 touch screen button 3USB socket182021/8/14The equipment has the following button1Stop action -All the mechanical actio

6、n of loading box are stop2Loading box lighting-openclose the lamp of the loading box3Autohand manual switch-Loading and unloading of the operating system can manual operation in an open feeding box4 Allows to unlock- Press this button ,to unlock the car192021/8/141 pushbutton ABC keyboard call 4 pus

7、hbutton right mouse button2Pushbutton task change 5 pushbutton shift3Pushbutton brightnessABC keyboard call-calls upclosses the keyboard on the touchscreen, keyboard entries can be carried out directly on the touchsceen.Pushbutton task change-changes a task windowsPushbutton brightness-press this bu

8、tton together with the shife button to increase the brightness of the touchscress.Pushbutton right mouse buttonopens right mouse button context menu,press this button together with the shift button to reduce the touchscreen.Pushbutton shiftcalls up the second keyboard level,push this bushbutton toge

9、ther with the required function button.202021/8/141System name 7 alarm close 2Date time 8 notes3Centrotherm logo and system 9 additional information Information button4Current display area in the 10 system mode Information field 11 connection state with CECGEM5System status6Loginlogout button212021/

10、8/141 Jobs 4 setup2 System 5 alarms3 Datslog 6 help(online help)222021/8/141Title bar 3 navigation bar2Command bar 4 information field with variable field areas 232021/8/14上图是CESAR的界面：1.系统工艺状态 2.工艺时间状态 3.时间日期 4.气体流量状态 5.系统准备状态 6. 温度检测显示This is a CESAR interface：1. System process 2. Process time 3. T

11、ime and date 4. Gas flow state 5. System readiness 6. Temperature detection and display242021/8/141.SLS1.SLS处处于于“UPUP”位置位置时时，管，管内内有舟有舟时时不可手不可手动进桨动进桨 SLS in the UP position, the inner tube has a boat can not be manually into the paddle.2.SLS2.SLS处处于于“DOWNDOWN”位置位置时时，桨桨上有舟上有舟时时不得手不得手动进动进舟。舟。 SLS in th

12、e DOWN position, the paddle is not manually into the boat boat.3.3.桨桨上有舟上有舟时时，舟不在正确位置，不准切，舟不在正确位置，不准切换换到自到自动运动运行行模式。模式。 Oars on a boat, the boat is not in the correct position, are not allowed to switch to automatic running mode. 252021/8/144.4.进进舟、退舟失舟、退舟失败报败报警警时时，一定要，一定要检查检查舟的位置舟的位置 是否在合理的位置，才可以是否

13、在合理的位置，才可以对报对报警警进进行行复复位，自位，自动动/ /手手动动的切的切换换要要谨慎谨慎，若舟不在正确位置，若舟不在正确位置，请请手手动动移至正确位置后再移至正确位置后再对报对报警警进进行行复复位（位（炉门炉门以以桨桨的位置作的位置作为开闭标为开闭标准）准） Into the boat, boat back failure alarm, be sure to check the boat position is in a reasonable position, can alarm reset, automatic / manual switch must be careful, i

14、f the ship is not in the correct position, please manually moved to the correct position after the alarm reset ( door to paddle position as opening and closing standard )262021/8/145.舟位于存储架（storage2,3）时，一定要确认存储架上 的感应器有没有感应到，否则有可能导致撞舟。 When the boat is located on the storage rack (storage2, 3),make s

15、ure that the storage rack sensor is sensed, otherwise may cause the bumped boat.6.从手动切换自动时，Grip一定要在Middle位置， 否则机械臂可能因无法正常运行而报警。 From manual automatic, Grip must be in the Middle position, or mechanical arm may be due to normal operation and alarm.272021/8/147.进舟后，工艺无法运行，先确认舟在桨上的位置，以及 Tube=ready SLS=

16、UP TGA=YES 然后进行操作。 In the boat, technology cannot run, make sure the boat on the oar position, as well as Tube = ready SLS = UP TGA = YES then operation.8.机械臂运动时不要上料，以免上料时抖动机械臂撞到舟。As mechanical arm movement not feeding,in order to avoid feeding time jitter mechanical arm hit the boat。9.单一炉管有故障时，应该及时

17、琐闭并降温，以节约能源。Single tube has fault, should be timely and closed and cooling, in order to save energy.282021/8/141. Process recipe has terminated with error state AC 进行中的工艺以错误状态结 束警报确认To store 储存To store enable unload 储存并缷下Restart recipe重新开始工艺A用于选错工艺号，手动结束工艺， 重新开始新的其他工艺时进行选择B多数情况下选择此项C工艺中断需要重新进行时选择，但不

18、建议使用， 建议选择（B）Process recipe has terminated with error state AC Ongoing process to end the error status Alarm confirmation To store To store enable unload Restart recipe A Used the wrong process number ， Hand end of the process ， Start a new choice when other processes B In most cases, choice this on

19、e C Interrupts need to re-process the selection, but not recommended, recommended to choose (B) 。292021/8/142. Boat already in tube- Select:Process=0. Unload=1(.) 选择0或1 说明：当管内有舟存在时，异常排除 后手动运行工艺时会出现此提示 Boat already in tube- Select:Process=0. Unload=1(.) Description: When the tube has a boat there, th

20、e exception rule out runningprocess manually after this prompt will appear.302021/8/143.Lost homing check poti 失去引导，检 查位置（一般此警报会自动解除） 说明：此警报会自动解除，但需要 检查一下桨是否在原点位置即可 Lost homing check poti Check the location (usually the alarm will be automatically lifted) Description: This alarm will be automaticall

21、y lifted, but need Check whether the origin location to paddle312021/8/144. Recipe abort 2-process abort to continue : enter AB 工艺退出运行终止！继续，请输入AB 说明：对工艺异常结束的手动确认，然后就会出现报警 Recipe abort 2-process abort to continue : enter AB Description: The manual confirmation process ends, 5. Recipe couldnt be start

22、ed please check protocol for reason! 工艺不能运行，请检查原因 Recipe couldnt be started please check protocol for reason! 322021/8/14. 6. Boat sensor of grad has changed without permission 机械手上的传感器被非允许的改动 说明：机械臂在上下移动的时候，前后不能移动， 若前后位置发生移动机械将被锁定，出现报警， 此报警需设备人员的密码登陆在Handing 对话框中的Tech模式下进行复位Boat sensor of grad has

23、changed without permission Description: The robotic arm to move up and down when you can notmove around,if the location is moved around the machine will be locked, an alarm, the alarmequipment, personnel need to log in a password dialog box in the Tech Handingreset mode332021/8/14 7.There is already an active recipe 工艺名 from local tisting 已有工艺在此管的工艺列表中 说明：这两个报警经常出现，若能够确认此管未有 工艺在运行，就必须将此管重新启动， 如果有工艺运行，可以将工艺手动停止， 或者等待工艺结束。 There is already an active recipe from local tisting Description: This two alarms are frequent, if not ab