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1、 第 11 期 A ,1990 ,A21 A23 :645 张 洵等 : 一种新型的 CMOS 温度传感器 2207 14 Filanovsky I M , Allam A. Mut ual co mpensation of mobilit y and t hreshold voltage temperat ure effect s wit h applications in ,2001 ,48 ( 7 : CMOS circuit s. IEEE Trans Circuit s Syst ( 876 15 Shen Jie ,Jin Dongming ,Li Zhijian. Dual2MO

2、SF ETs equivalent resistor . Journal of Tsinghua Universit y ( Sci & Tech ,1999 , 39 (5 :104 (in Chinese 沈杰 , 靳东明 , 李志坚 . 双 MOS 晶体 9 Tsividis Y P. Operation and modeling of t he MOS t ransistor . New York : Mc Graw2 Hill ,1987 10 Laker K R , Sansen W M C. Design of analog integrated cir2 cuit s

3、and systems. New York : Mc Graw2 Hill ,1994 11 Sze S M. Physics of semiconductor devices. 2nd ed. New York : Wiley ,1981 12 Filanovsky I M. Inp ut2f ree V TP and 2V TN ext ractor circuit s realized on t he same chip . Analog Integrated Circuit s and Sig2 nal Processing ,1999 ,19 :151 13 Szekely V ,M

4、arta C , Kohari Z ,et al . CMOS sensors for on2line t hermal monitoring of VL SI circuit s. IEEE Transactions on Very Large Scale Integration ( VL SI Systems , 1997 , 5 ( 3 : 270 管等效电阻 . 清华大学学报 ,1999 ,39 (5 :104 16 Wang Nailong , Zhang Sheng , Zhou Runde. A novel build2in CMOS temperat ure sensor fo

5、r VL SI circuit s. Chinese Journal of Semiconductors. 2004 ;25 (3 :252 (in Chinese 王乃龙 , 张 盛 ,周润德 . 一种新型的集成电路片上 CMOS 温度传感器 . 半 导体学报 ,2004 ,25 (3 :252 A Ne w Type of CMOS Temperature Sensor Zhang Xun , Wang Peng , and J in Do ngming ( I nstit ute of M icroelect ronics , Tsi ng hua Uni versit y , B ei

6、 j i n g 100884 , Chi na Abstract : Theo ry and design of co mpatible wide range smart temperat ure senso rs in standard CMOS technology is p resented. m mixed2signal CMOS p rocess is - 11 15 A/ (over t he temperat ure The simulated temperat ure sensitivity using a CSMC 01 6 and t he measured is - 0

7、1 99 A/ . The power dissipatio n of t he senso r is 11 5mW at a 5V voltage sup 2 range of - 40125 ply ,and t he chip area is 01 025mm2 . The characteristics of t his senso r make it especially suitable for low2co st high2volume inte2 grated micro systems over a wide range of fields ,such as auto mot

8、ive ,oil p ro specting ,biomedical ,and co nsumer. Key words : integrated circuit s ; temperat ure senso r ; temperat ure coefficient EEACC : 1265A ; 2560 ; 2570D Article ID : 025324177 (2005 1122202206 Zhang Xun male ,was born in 1979 ,PhD candidate. He is working on smart sensors. Wang Peng male ,was born in 1978 ,PhD candidate. He is working on cell neural net works. Jin Dongming male ,was born in 1942 ,professor . His researches focus on f uzzy

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