《半导体工程专业英语》课件-4.6 Process Integration

微专业---半导体制造技术课程：半导体工程专业英语ContentsSemiconductorProperties半导体特性01SemiconductorMaterials半导体材料02SemiconductorDeviceandHowTheyareUsed半导体器件及其使用03ProcessTechnology工艺技术04FabricationProcesses制造工艺05SemiconductorMaterialsandProcessCharacterization半导体材料与工艺表征06ProcessTechnology4.1SubstratesfromtheProcessPerspective4.2Liquid-Phase(Wet)Processes4.3Gas-Phase(Dry)Processes4.4ProcessesinSemiconductorManufacturing4.5ContaminationControl4.6ProcessIntegration0419Introduction

Inthelightofthebenefitsof“clusterization”,itiscertain

thatthetrendtowardincreaseddegreeofprocessintegrationinsemiconductormanufacturingwillcontinue.Withtime,remainingchallengesrelatedto

theexecutionofcertainprocessingstepsintheclusterenvironmentwillbe

workedout,atwhichpointintegrationandautomationoftheentirefabricationsequenceinvolvedinthe

manufactureofintegratedcircuitwillbea

viableoption./

ˈklʌstə(r)/群集4.6ProcessIntegration4ProcessTechnology/ˈvaɪəb(ə)l/可行的/ˌeksɪˈkjuːʃ(ə)n/执行/ˈklʌstər/集群/ˈsiːkwəns/次序/ˌɔːtəˈmeɪʃ(ə)n/自动化20In-classexercisConnecttheEnglishwords/phrasesandChinesemeaningwithlines.

focusedionbeamlocalheating

manufacturingyieldplanarizationRFPlasmaionizedgassputteringdeepUVultravioletclustertool制造成品率射频等离子体电离气体溅射聚焦离子束紫外光深紫外平坦化集群工具局部加热4ProcessTechnology21In-classexercisFillintheblankswithproperwordsorphrases.1.Theconceptofradiantheatingreliesontheuseof

elementsgeneratinglargeamountof

whichisthentransferred

totheprocessedsubstratebyradiation.

2.Plasma,oftenconsideredasa

stateofmatter,isthemostcommon

phaseofmatterintheUniversebothbymassandbyvolume.4ProcessTechnology22单词/短语音标中文含义absorptioncoefficient/əbˈsɔːrpʃ(ə)nˌkoʊɪˈfɪʃ(ə)nt

/吸收系数ACplasma/ˈplæzmə/交流等离子体activationenergy/ˌæktɪˈveɪʃnˈenərdʒi

/活化能ballroomcleanroom/ˈbɔːlruːm

/舞厅式洁净室batchprocess/bætʃˈprɑːses/批量工艺bay/chasecleanroom/beɪ

/tʃeɪs/港湾/通道式洁净室capacitivecoupling/kəˈpæsətɪvˈkʌplɪŋ

/电容耦合Chemical-MechanicalPolishing/Planarization(CMP)/plænəraɪ'zeɪʃn

/化学机械抛光/平坦化cleanroom/ˈkliːnruːm

/洁净室KeyTerms4ProcessTechnology23单词/短语音标中文含义cleanroomclass/klæs/洁净室等级clustertool/ˈklʌstər/集群工具deepUV/diːp/深紫外光deionized(DI)water/diˈaɪəˌnaɪzd/去离子水downstreamplasma/ˌdaʊnˈstriːm/顺流等离子体electronbeam(e-beam)/ɪˈlektrɑːnbiːm/电子束electronbeam(e-beam)heating/ˈhiːtɪŋ/电子束加热ElectronCyclotronPlasma(ECRplasma)/ˈsaɪklətrɑːn/电子回旋等离子体excimerlaser/ˈeksəmərˈleɪzər/准分子激光器4ProcessTechnology24单词/短语音标中文含义extremeUV/ɪkˈstriːm/极紫外光flexibledisplay/ˈfleksəb(ə)ldɪˈspleɪ/柔性显示器flexibleelectroniccircuit/ɪˌlekˈtrɑːnɪkˈsɜːrkɪt/柔性电子电路focusedionbeam(FIB)/ˈfoʊkəstˈaɪənˌ

biːm/聚焦离子束glowdischarge/ɡloʊdɪsˈtʃɑːrdʒ/辉光放电heliconplasma/ˈhelɪˌkɑn/螺旋等离子体HEPA(HighEfficiencyParticulateAir)/pɑːrˈtɪkjələt/高效微粒空气highdensityplasma(HDP)/ˈdensəti/高密度等离子体high-thermalbudgetprocess/ˈbʌdʒɪt/高热预算工艺high-vacuumpump/ˈvækjuːmpʌmp/高真空泵implantation/ˌɪmplænˈteɪʃn/注入4ProcessTechnology25单词/短语音标中文含义inductivecoupling/ɪnˈdʌktɪvˈkʌplɪŋ/电感耦合inductiveheating/ɪnˈdʌktɪvˈhiːtɪŋ/电感加热InductivelyCoupledPlasma(ICP)/ɪnˈdʌktɪvliˈkʌpldˈplæzmə/电感耦合等离子体inelasticcollision/ˌɪnɪˈlæstɪkkəˈlɪʒ(ə)n/非弹性碰撞isopropylalcohol(IPA)drying/ˌaɪsəˈproʊpəlˈælkəhɔːl/异丙醇干燥laminarflow/ˈlæmɪnər/层流laserbeamheating/ˈleɪzərbiːmˈhiːtɪŋ/激光束加热localheating/ˈloʊk(ə)lˈhiːtɪŋ/局部加热low-thermalbudgetprocess/ˈbʌdʒɪt/低热预算工艺manufacturingthroughput/ˌmænjuˈfæktʃərɪŋ

ˈθruːpʊt/制造产量

manufacturingyield/jiːld/制造成品率4ProcessTechnology26单词/短语音标中文含义Marangonidrying/ˈdraɪɪŋ/Marangoni干燥metalliccontaminant/məˈtælɪkkənˈtæmɪnənt

/金属污染microwaveplasma/ˈmaɪkrəweɪv/微波等离子体minienvironment/ˈmɪni/微环境organiccontaminant/ɔːrˈɡænɪkkənˈtæmɪnənt

/有机污染物ozonatedwater/ˈoʊzoʊneɪtɪd/臭氧水parallel-platereactor/ˈpærəlelpleɪtriˈæktər/平行板反应器partiallyionizedgas/ˈpɑːrʃəliˈaɪənaɪzdɡæs/部分电离气体particle/ˈpɑːrtɪk(ə)l/微粒photochemicalreaction/ˌfoʊtoʊˈkemɪklriˈækʃ(ə)n/光化学反应photolithography/ˌfoʊtoʊlɪˈθɑːɡrəfi/光刻4ProcessTechnology27单词/短语音标中文含义photolysis/foʊˈtɑːləsɪs/光解planarization/plænəraɪ'zeɪʃn/平坦化plasma/ˈplæzmə/等离子体plasmaafterglow/ˈæftərɡloʊ/等离子体余辉plasmadensity/ˈdensəti/等离子体密度plasmaenhanced(PE)process/ɪnˈhænst/等离子体增强工艺point-of-usechemicalgenerationpyrolysis/paɪˈrɑːləsɪs/原位(使用点)品生成热解radiantheating/ˈreɪdiənt/辐射加热rapidthermalprocessor(RTP)/ˈræpɪd/快速热处理器remoteplasma/rɪˈmoʊtˈplæzmə/远程等离子体ResidualGasAnalyzer(RGA)/rɪˈzɪdʒuəl/残余气体分析仪4ProcessTechnology28单词/短语音标中文含义resistanceheatedfurnace/ˈfɜːrnɪs/电阻加热炉RFPlasma/ˈplæzmə/射频等离子体roll-to-roll(R2R)process/roʊl/卷对卷工艺secondaryelectron/ˈsekənderi/二次电子showeredionbeam(SIB)/ˈʃaʊərd/簇射离子束singlewaferprocess/ˈweɪfər/单晶圆工艺SMIF(StandardMechanicalInter-face)/məˈkænɪk(ə)l/标准机械接口specialtygases/ˈspeʃəltiˈɡæsɪz

/特种气体spindrying/spɪnˈdraɪɪŋ

/旋转干燥sputtering/ˈspʌtərɪŋ/溅射sub-atmosphericpressure/ˌætməsˈfɪrɪk/亚大气压4ProcessTechnology29单词/短语音标中文含义surfacetension/ˈtenʃ(ə)n/表面张力thermalbudget/ˈθɜːrm(ə)lˈbʌdʒɪt/热预算turbulentflow/ˈtɜːrbjələntfloʊ/湍流ULPA(UltraLowPenetrationAir)/ˌpenəˈtreɪʃ(ə)n/