SECSI_SECSII_HSMS_GEM总结ppt课件.ppt

1、SEMI,Cim部Cell与Module科 徐宝龙,1,SEMI,SEMI: Semiconductor Equipment and Materials International 国际半导体设备与材料产业协会,2,SEMI CONTENTS,Equipment Automation Hardware Equipment Automation Software Facilities Flat Panel Display Gases Materials Microlithography Packaging Process Chemicals Safety Guidelines Silicon M

2、aterials & Process Control Traceability Semiconductor,3,EIS用到标准,SECS:Semiconductor Equipment Communication Standard SECS I (E4) SECS II (E5) GEM (E30) HSMS (E37),4,5,SECS I,该标准定义了半导体工艺设备（晶片制造，加工，检测，组装，打包设备）和主机之间交换消息通信的接口。 该标准包括物理连接器（9-pin or 25-pin），电平信号，传输速率，以及交换消息的逻辑协议。,6,物理传输单位,传输10个bit，0和9是开始和结束

3、信号，1-8bit是数据,7,逻辑传输单位（Block）,Receive EOT,1 byte,Block length,10254 byte,block,2 byte,Checksum,先传输块的长度，在传输块，最后发送校验码,8,Block组成,Define in E5,9,SECS I Header组成,10,Handshake Bytes,ENQ 5 Request to Send EOT 4 Ready to Receive ACK 6 Correct Reception NAK 21 Incorrect Reception,11,HSMS,HIGH-SPEED SECS MESSA

4、GE SERVICES,12,HSMS General Message Format,Length = Header Length + Message Text Length,Format is specified by PType,13,HSMS Header组成,14,Header Byte 2-3,Ptype = 0,Function,Header Byte 2,Header Byte 3,W=1：reply，W=0 No reply,15,PType (Presentation Type),0 SECS-II Encoding 1127 Reserved for subsidiary

5、standards 128255 Reserved, not used,16,SType(Session Type),SType 是一个识别 该消息是HSMS Data Message (value = 0) 或者其他HSMS Control Messages (other).,0 Data Message 1 Select.req 2 Select.rsp 3 Deselect.req 4 Deselect.rsp 5 Linktest.req 6 Linktest.rsp 7 Reject.req 8 (not used) 9 Separate.req 10 (not used) 1112

6、7 Reserved for subsidiary standards 128255 Reserved, not used,17,18,SelectStatus,19,DeselectStatus,20,Reject Reason Code,21,HSMS Connection State Diagram,Not Connection,Not Selected,Selected,Connection,T7 Connection Timeout.,2,3,4,5,1,7,HSMS,TCP/IP,22,Connect Modes,23,SECS II,Data Structures Data It

7、em|Variable Item|ObjectDictionary Message Detail,24,Data Structures,0 = Illegal, data format error 1 = One binary length byte (max = 255) 2 = Two binary length bytes (max = 64k) 3 = Three binary length bytes (max = 7.99M),25,Item Format Codes,000000 LIST (length in elements) 001000 Binary 001001 Boo

8、lean 010000 ASCII1 010001 JIS-8 010010 2-byte character2, 4 011000 8-byte integer (signed)2 011001 1-byte integer (signed) 011010 2-byte integer (signed)2 011100 4-byte integer (signed)2 100000 8-byte floating point3 100100 4-byte floating point3 101000 8-byte integer (unsigned)2 101001 1-byte integ

9、er (unsigned) 101010 2-byte integer (unsigned)2 101100 4-byte integer (unsigned)2,26,example,a. binary 10101010. 00100001 Item, binary, 1 length byte 00000001 1 byte long 10101010 data byte b. “ABC” 01000001 Item ASCII, 1 length byte 00000011 Three bytes long 01000001 ASCII A 01000010 ASCII B 010000

10、11 ASCII C c. An item contains three binary numbers in 2-byte signed integer form. 01101001 Item, 2-byte integers 00000010 2 bytes total (2/2 = 1 integers) xxxxxxxx MSByte number x xxxxxxxx LSByte number x,27,GEM,GENERIC MODEL FOR COMMUNICATIONS AND CONTROL OF MANUFACTURING EQUIPMENT 该标准定义了一套通用的设备的动

11、作以及通信功能的标准。,28,29,Harel Notation,State,OR Substates,AND Substates,30,Transition 状态转换标志,Default entry point 默认进入点,h,History 历史记录,s,Select,c,Conditional selector,31,Communications State Diagram,c,R S1f14,R S1f13,ECID=2,32,Control State Model,Offline EQP cant communication with Host except S1F13,S1F17

12、and S2F42 .and SxFy reply S*F0.,OffLine-OnLine need send S2F17 Date & Time Request If PTST LR or UR report ceid 200 203,ECID=3,33,Processing State Diagram,34,Limit State Model,DISABLED,BELOW LIMIT,NO ZONE,ABOVE LIMIT,C,ENABLED,35,State Diagram for Alarm ALIDn,Alarm Clear,Alarm Set,S5F1 Alarm Report

13、Sent,S5F3 Enable/Disable Alarm Send(EAS),S5F103 Current Alarm Set List Request,36,transaction,Transaction Definition A transaction forms the basis for all information exchanges in SECS-II. A transaction consists of either a primary message for which no reply is requested, or a primary message which

14、requests a reply together with its corresponding secondary message. Secondary messages cannot request a reply. System Bytes T3 TimeOut S*F0,S6F1,S9F* no Reply message,37,conversation,A conversation is a series of one or more related transactions used to complete a specific task. Conversation Timeout(S9F13),38,Session,session a relatio