BT_Imaging公司设备介绍英文.pdf

lis-r1 introduction 1bt imaging pty ltd - confidential information - not for distribution agenda r1 overview r1 features customer base r1 application examples 2bt imaging pty ltd - confidential information - not for distribution lis-r1 overview 3bt imaging pty ltd - confidential information - not for distribution speeds up r&d, characterization and root cause analysis flexible - pl, el, rs, qss-pc, lifetime image in a single tool wafer, cells and blocks (optional) use pl at any process stage correlates with other techniques highest resolution images 1 megapixel fastest data acquisition 1 second for cells capabilities by sample type 4bt imaging pty ltd - confidential information - not for distribution capabilitiessilicon block silicon wafer silicon solar cell photoluminescence image average injection level dependant lifetime (qss-pc) effective minority carrier lifetime image electroluminescence image series resistance image pv supply chain - applications for luminescence imaging si ingot/brick as-cut wafer processed wafer finished cellmodule pl: wafer manufacturingcell manufacturingmodule manufacturing el: bt imaging pty ltd - confidential information - not for distribution - pcd 12 3 4 5 6 s centre: higher life time side : diffusion of transition metals top : segregated transition metals higher content of carbon bottom : higher content of oxygen diffusion of transitions metals background - lifetime in si ingots courtesy of dr armin mueller bt imaging pty ltd - confidential information - not for distribution pl imaging of si bricks pl time:30s res:165mm excellent qualitative agreement with m-pcd scans for a large number of bricks m m-pcd time:900s res: 1mm bt imaging pty ltd - confidential information - not for distribution pl imaging of si bricks southeastnorth west edge brick bt imaging pty ltd - confidential information - not for distribution pl imaging of si bricks northeastsouth west 01800 0100 0100 corner brick bt imaging pty ltd - confidential information - not for distribution pl imaging of si bricks edge wafer corner wafer brick bt imaging pty ltd - confidential information - not for distribution pl imaging of si bricks top wafer bottom wafer brick bt imaging pty ltd - confidential information - not for distribution pl imaging of si bricks pl m-pcd bt imaging pty ltd - confidential information - not for distribution as cut wafer high magnification option bt imaging confidential pl imaging - upgraded metallurgical grade (umg) brick dark line represents doping transition region p-type n-type bt imaging pty ltd - confidential information - not for distribution pl image of umg wafer 15feb 2009bt imaging pty ltd - confidential information - not for distribution slip lines in mono ingots no surface preparation 16feb 2009bt imaging pty ltd - confidential information - not for distribution slip lines on mono wafers no wafer preparation 17feb 2009bt imaging pty ltd - confidential information - not for distribution new method to qualify mono slugs pl imaging used to image the slug no toxic chemical preparation needed faster 18 pl image taken on as cut slug optical image taken after chemical preparation bt imaging pty ltd - confidential information - not for distribution pl imaging of slip lines on mono wafers 19 as cut mono waferpolished mono wafer u-pcd (7 hours) pl (10 s) u-pcd (7 hours) pl (10 s) bt imaging pty ltd - confidential information - not for distribution mono wafer pl images 20bt imaging pty ltd - confidential information - not for distribution mono wafer pl images 21bt imaging pty ltd - confidential information - not for distribution pl images show large variation in todays wafer supply 22 all get processed into cells today with 1% efficiency differences and wafers all purchased at the same price bt imaging pty ltd - confidential information - not for distribution pl imaging detects the limiting defects on as-cut wafers 23feb 2009bt imaging pty ltd - confidential information - not for distribution pl images are automatically analysed defect metrics reported for easy wafer grading 24bt imaging pty ltd - confidential information - not for distribution correlation with cell data trial 1 centre block strong correlation with cell efficiency 8% relative (1.3% absolute) efficiency variation correlating with bti defect metric bt imaging pty ltd - confidential information - not for distribution correlation with cell data trial 2 5000 random incoming wafers impurity defect metric correlation with cell performance 26 process robust against low lifetime edge/corner effects bottom/top wafers with 0.7% absolute efficiency loss. bt imaging pty ltd - confidential information - not for distribution pv supply chain - applications for luminescence imaging si ingot/brick as-cut wafer processed wafer finished cellmodule pl: wafer manufacturingcell manufacturingmodule manufacturing el: bt imaging pty ltd - confidential information - not for distribution pl enables root cause analysis monitor at any process step non contact and non destructive 28bt imaging pty ltd - confidential information - not for distribution surface damage etch emitter diffusionfinished cell confidential29 emitter diffusion high injection level pl image u-pcd pl 1 sun pl 12 suns bt imaging pty ltd - confidential information - not for distribution process issues 30 non uniform diffusioncleaning residues bt imaging pty ltd - confidential information - not for distribution process issues 31 post diffusion backside isolation etch insufficient post backside isolation etch bt imaging pty ltd - confidential information - not for distribution pl count calibrated into lifetime image 32bt imaging pty ltd - confidential information - not for distribution pv supply chain - applications for luminescence imaging si ingot/brick as-cut wafer processed wafer finished cellmodule pl: wafer manufacturingcell manufacturingmodule manufacturing el: bt imaging pty ltd - confidential information - not for distribution cell - high magnification option 34bt imaging pty ltd - confidential information - not for distribution 160um pixels23um pixels el example identify process and material defects - cracks 35bt imaging pty ltd - confidential information - not for distribution multimono pl image of mono si cell 36feb 2009bt imaging pty ltd - confidential information - not for distribution series resistance imaging a current voltage isc 0 voc 37 bt imaging confidential corescan mvpl imaging wcm2 4s30min (destructive) series resistance imaging 38 bt imaging confidential pl rsimaging series resistance imaging mc-si solar cell: ploc image 39 bt imaging confidential pl rsimaging series resistance imaging mc-si solar cell: corescan 40 bt imaging confidential corescanpl imaging rear and front contact problems detected. only front contact problems detected. series resistance imaging 41 bt imaging confidential series resistance correlates with iv test rs data bt imaging pty ltd - confidential 42 faster root cause analysis el confounds lifetime and series resistance pl and rs separate them to find the root cause 43bt imaging pty ltd - confidential information - not for distribution plelrs rs mode detects issues el can not see 44bt imaging pt