《太阳能核心技术》doc版.doc

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Maintenance ManualSINA System Suntech Manufacturer:Roth & Rau Oberflchentechnik AGGewerbering 3+10D-09337 Hohenstein-Ernstthal OT WstenbrandGermanyTel.:0049-3723-49880Fax:0049-3723-498825E-mail:inforoth-rau.dewww.roth-rau.deCopyright 2001 Roth & Rau AG. All rights reserved.The information contained in this document has been compiled according to our best knowledge. Nevertheless, we cannot completely rule out that some of the information contained in this document may deviate from the product. Roth & Rau doesnt make a warranty for any fault or consequential damage resulting therefrom. Neither do we make a warranty for any damage resulting from using the system, applications or faulty devices. Roth & Rau reserves the right to modify, amend or correct this document or the product without prior notice. Neither this document nor any part of it may be reproduced in any form or transferred to another natural or machine-readable language or transferred to data media, whether by electronic, mechanical, optical or any other means, without the authors express permission.TrademarksAll product names referred to in this document may be registered trademarks. All trademarks referred to in this document are used only in order to identify the product concerned.Intended AudienceThis manual is intended for persons who are already familiar with plasma deposition systems.Table of Contents1. Introduction42. Maintenance of Components52.1 Cleaning the Vacuum Gauge52.2 GV 600 Dry Pumps62.3 EH 4200 Roots Pump72.4 Transport System82.5 Coolant Rotary Feed Through102.6 Angle Valves of the Load and Unload Chamber112.6 Rectangular Chamber Valves132.7 Position Detectors143. Maintenance of the Plasma Source163.1 General163.2 Removing and Cleaning the Quartz Tubes173.3 Removing the Deposition Shields of the Plasma Source193.4 Replacing the Quartz Tube Seals203.5 Maintenance of Plasma Source Fans214. Cleaning the Chambers224.1 Chamber 1 Load Lock Chamber224.2 Chamber 2 5: Process Chambers234.2.1 Chamber 2 Heating Chamber234.2.2 Chamber 3 Deposition Chamber244.2.3 Chamber 4 Cooling Chamber264.3 Chamber 6 Unload Lock Chamber271. IntroductionThe SINA has been developed as a system for silicon nitride (Si3N4) PECVD processes as a pilot system for research and operation close to a production process. SINA is a modular in-line system for the deposition of silicon nitride layers on wafers, especially solar cells.The system consists of separate modules for the different process steps.All chambers are mounted on separate stainless steel racks.They are made of chemically resistant stainless steel with a sand bead blasted surface. Chamber walls are welded, their top can be detached for servicing and installation.The system consists of several major components. They include vacuum chambers with valves and pumping units, plasma sources, the transport system, gas system, heating system, cooling system and power supplies. The system is PC controlled.To assure a safe and permanent operation the person running the system is responsible for ensuring that all laws and regulations pertaining to maintenance and tests as well as relevant maintenance and test periods are observed. The manufacturer recommends that the following tests are performed at least once a year in order to ensure the safety of operators:- test of the insulation resistance and the grounding of the system- test of the tightness of the gas system (leakage of dangerous substances)The following test should be performed once a day:- test of microwave leakage -2. Maintenance of ComponentsAttention: Wear breathing masks and protective clothes when handling contaminated parts!2.1 Cleaning the Vacuum GaugeThe contamination of the vacuum gauge by impurities may cause inaccurate and wrong measurements. The procedure for cleaning and fault remedy is explained in the corresponding manual. Periodical zero adjustment is recommended in order to maintain accuracy (see manual).Fig.: Gauge on chamber A look into the gauge2.2 GV 600 Dry PumpsThe maintenance of the dry pumps should be performed according to the instructions in the manual. Check silencers during service intervals as well in order to avoid an obstruction of the exhaust.2.3 EH 4200 Roots PumpThe maintenance of the Roots and turbo pumps should be performed according the instructions in the manual. Check oil colour at least once a week. Perform oil change if oil colour turns dark.2.4 Transport SystemThe transport system is