JX024机油冷却器自动装备线压紧工位装备设计
收藏
资源目录
压缩包内文档预览：(预览前20页/共25页)
编号：25687713
类型：共享资源
大小：3.52MB
格式：ZIP
上传时间：2019-11-19
上传人：遗****
认证信息
个人认证
刘**（实名认证）
湖北
IP属地：湖北
15
积分
- 关 键 词：
-
JX024
机油
冷却器
自动
装备
压紧
设计
- 资源描述：
-
JX024机油冷却器自动装备线压紧工位装备设计,JX024,机油,冷却器,自动,装备,压紧,设计
- 内容简介：
-
外文资料翻译Crankshaft three degrees of freedom use the same parallel micro-mechanical structure of the experimental design利用曲臂3个自由度的相同并列式微型机械结构的实验设计Abstract: Crankshaft in mechanical structure design of the small general has been replaced mechanical connection and extensive use. However, the wrong model will be reduced Crankshaft precision mechanical structure. In this paper, in order to get the correct model Crankshaft and design of a 3-DOF planar the same type of micro-mechanical structure. To that end, an initial analysis of kinematics including inverse kinematics, internal kinematics and coordination of the work of a fixed model has been raised. First of all, take into account a freedom Crankshaft cycle type, but FEM based on the simulation results is inconsistent with the analysis of the results. This is because small axial direction along the connecting rod extended to hinder the accuracy of the mechanical connection. To address this problem, including an additional sports bodies such as the prism connecting the two degree of freedom model Crankshaft has already begun to use some. According to this model, ensure the accuracy of the mechanical structure. Through simulation and test showed that the accuracy of this model is effective. This work emphasized the model Crankshaft Crankshaft guarantee the accuracy of the micro-mechanical structure tied to the use of great significance.摘要：曲臂在机械的微小结构设计中已经代替普通机械连接而广泛地使用。然而，错误的曲臂模型会降低机械结构的精密度。在这篇论文中，为了得到正确的曲臂模型而设计了一种平面 3个自由度相同型式的微型机械结构。为此，一种初步的运动学分析包括逆运动学，内部运动学以及有关工作协调的分析固定模型已经被提出来了。首先，考虑到了1个自由度曲臂的循环类型，但是基于FEM的模拟结果却与分析的结果不一致。这是因为小轴沿着连杆方向延伸从而阻碍了机械的准确连接。为了解决这个问题，一种包括这种额外的运动机构作为三棱镜连接的2个自由度的曲臂模型已经开始部分地使用了。根据这种模型，确保了机械结构的精确性。通过模拟和试验显示了这种准确模型的有效性。这项工作强调了曲臂模型的准确性对保证曲臂在并列微型机械结构中的使用具有重要意义。、Introduction、介绍Micro-mechanical devices in many areas is a key and essential techniques, such as scanning electron microscopy, X-ray lithography, mask alignment and micro-machinery. Recently, a lot of Crankshaft on the use of micro-mechanical structure of the analysis and experimental research. The majority of previous studies (Moriyama 1, 2, such as Taniguchi, Tomita, etc. 3, 4, such as Ryu, Chang, etc. 5, 6 Peng, etc., etc. 10 - 13 ) is the freedom to use an arm for recycling Crankshaft, three degrees of freedom for Crankshaft spherical arm, and thus the production model. However, sometimes even a small total, will do Crankshaft linear motion. Some researchers believe that there is a Crankshaft additional degree of freedom. However, they ignored the model in the process of easy mobility, but also not to micro-mechanical structure in the correct use of the fixed model. This led to the failure of the implementation of micro-systems. Therefore, the focus of this work will be easy mobility is based on the analysis of the accuracy of model Crankshaft.微型机械装置在许多领域是一项关键且必不可少的技术，例如电子显微扫描，X射线石版印刷术，mask alignment和微型机械。最近，出现了很多有关利用曲臂的微型机械结构的分析和实验研究。以前的大多数研究（Moriyama等1,Taniguchi等2,Tomita等3,Ryu等4,Chang等5,Peng等6，等等10-13）是使用1个自由度的曲臂作循环臂，3个自由度的曲臂作球形臂，并以此制作模型。然而，有时就算总量很小，曲臂也会做直线运动。一些研究者认为曲臂有一种额外的自由度。但是，他们忽略了模型程序中的易动性分析，而且也没有提出在微型机械结构中使用正确的固定模型。这就导致了微系统执行的失败。因此，这项工作的焦点将会是基于易动性分析的曲臂模型的准确性。Introduction of the campaign because of the number of independent variables were constrained, and these independent variables, in order to find the relevant links between objects must be clearly defined. Above formula can be adopted (1) to describe the type of M, N, L, respectively Fi j and that movement, freedom of space operations, the number of links, as well as linking of the number of mobile connections i freedom. Exercise also shows that the minimum functioning of the system. When M N bigger than the sport become redundant system.运动性因独立变量的数目而被限制，而这些独立的变量为了寻找物体之间的相关联系必须明确说明。以上可以通过公式（1）来进行描述，式中M、N、L、j和Fi分别表示运动性，操作空间自由度，连杆数目，连接物数目以及第i个连接物移动的自由度。运动性也表明了系统运转的最小值。当M比N大时，就成为冗余运动系统。Figure 1 shows a Crankshaft have freedom of the three micro-mechanical structure. Usually, these systems can be Crankshaft rotary connector of the model. Outlined in Figure 2 of the model Crankshaft. If all Crankshaft have a degree of freedom, then the movement of the system are three degrees of freedom. However, in the past, based on such assumptions are the result of the failure of this model because of the inaccuracy of Crankshaft. On the other hand, if all are Crankshaft model of the rotary connector and prism of connections, then the campaign structure reached 12 degrees of freedom. Even if the limit of program analysis and theoretical analysis will enable the two degree of freedom model Crankshaft than one degree of freedom model Crankshaft more accurate results, but need 12 to control the operation of three degrees of freedom rather expensive. Therefore, not only the design of Crankshaft to campaign structure to a minimum, but also to ensure that the structure of precision machinery and sufficient working space.图1显示了一个拥有曲臂的3个自由度的微型机械结构。通常，在这些系统中曲臂可以作旋转连接物的模型。在图2中描画了曲臂的模型。如果所有的曲臂都有1个自由度，那么系统的运动性就有3个自由度。然而，以前一些基于这种假设的结果都是失败的，这是因为曲臂模型的不准确性。另一方面，如果所有的曲臂模型都有旋转连接物和三棱镜连接物，那么系统的运动结构就达到12个自由度。即使限定结构程序分析和理论分析能够使2个自由度的曲臂模型比1个自由度的曲臂模型有更准确的结果，但需12个运转结构来控制3个自由度比较昂贵。因此，曲臂的设计不仅要将运动结构减至最少，而且还要确保机械结构的精密度及充分的工作空间。In this paper, we designed two types of Crankshaft. The first type used only a relative degree of freedom to produce thicker neck parts, as shown in Figure 2, this shows that the thickness of the hinge. The second type is used to produce two-DOF relatively thin neck parts. Therefore, the second Crankshaft is a freedom with the rotary connector and a freedom connected to the prism production model. If the system of each chain are two degrees of freedom by a hinge and a two degree of freedom of the hinge, then the campaign structure is 6. Therefore, this Crankshaft through six operating structure to operate.在这篇论文中，我们设计了两种类型的曲臂。第一种类型只用了1个自由度来制作相对较厚的颈下部分，如图2所示，这部分显示了铰链的厚度。第二种类型是用了2个自由度来制作相对较薄的颈下部分。因此，第二种曲臂是以拥有1个自由度的旋转连接和1个自由度的三棱镜连接来制作模型的。如果系统的每一个链条都是由一个2个自由度的铰链和两个1个自由度的铰链组成，那么系统的运动结构就是6。所以说，这种曲臂可以通过6个运转结构来操作。Papers content in the next there will be further development. The second part describes the structure of the system. Kinematic analysis and three campaigns campaign structure and six fixed structural system analysis model respectively in the third and fourth part of a demonstration. Part V describes the two comparative freedom and freedom of a Crankshaft precision simulation results, but also embodies the six recommended by the movement of the systems benefits. Correct the effectiveness of this model can be reflected through experiments.论文中接下来的内容将有进一步的发展。第二部分描述了系统的构造。运动学分析和3个运动结构及6个运动结构系统的分析固定模型分别在第三和第四部分进行演示。第五部分描述了比较2个自由度和1个自由度的曲臂精密性模拟结果，同时也体现了所推荐的6个运动结构系统的优点。这种正确模型的有效性通过实验可以体现。、the system structure、系统构造The text of the proposed three-DOF tied in the same mechanical structure is a working platform and composed of three chains, each chain has three Crankshaft, as shown in Figure 1. This mechanical link in the use of all the Crankshaft, and all are connected through the pressure of the movement and operation factors. February 2 chain of three intervals between 120 . This symmetrical structure reduced due to temperature differences and the impact of temperature imbalance. Each chain connecting the first and the third are at the bottom with the machines connected to a pressure campaign structure to operate the contrary. All the movement to promote structural connections of each round good sliding surface and rotation.文中所建议的3个自由度的相同并列机械结构是由一个工作平台和三个链条所组成的，每个链条有三个曲臂，如图1所示。这种机械在所有连接处使用了曲臂，而且所有的连接物都是通过压力运动因素而运转。三个链条之间两两间隔120。这种对称结构减少了因温度差异和温度失调带来的影响。每个链条第一和第三个连接处都是通过与机器底部相连的一对压力运动结构而相反地进行运转。所有的运动结构推动每个连接物的圆形表面进行良好的滑动和旋转。In the example in Figure 2 a type Crankshaft. This rotational movement Crankshaft equivalent to the displacement of I2 and h () and. In the X direction of the linear motion distance of A ().在图2中示例了一种曲臂类型。这种曲臂旋转运动的位移等于I2和h() 之和.在X方向上的直线运动的距离为A()。, three campaign kinematic structure of the system、3个运动结构的系统运动学分析In order to demonstrate a degree of freedom model of the movement of Crankshaft, we will be presented in Figure 3 of this three movement kinematics model of the system. All the previous model Crankshaft only one degree of freedom, and this system has three campaign structure. Passed the map can clearly understand this kinematic analysis.为了演示1个自由度曲臂模型的运动状况，我们将在图3中介绍这种3个运动结构的系统运动学模型。以前所有的曲臂模型只有1个自由度，而这种系统拥有3个运动结构。通过下图可以清楚地了解这种运动学分析。A first kinematicsA、第一运动学First kinematics connected to the output rate vector and vector rate independent of the connection. Below, G said Jacobian, the lower left-hand corner of G machinery that tied the hands of the chain of consecutive numbers. G top right hand corner and lower right corner of the symbols that were related or independent parameters. Gu (, j) and Gu (i, ) were expressed that a cylindrical j and i Pai Gu . Gu (i, j) Gu (i, j) element. i, j expressed that the first i-chain chain j consecutive rate perspective. The rate for each chain relations through the formula (4) to describe the formula (4) in the output rate vector and i consecutive rate vector angle chain were defined as u and i . Three in a row because of the chain have the same rate in the platform, there will be a formula (5) and the formula (6). If the three foundations of a connecting link of an independent, as far as this case, the selection of three each in the chain of Jacobian contrary to the first row constitutes a separate connections to the output vector and the velocity vector of relations, and this rate relations constitute a body, the text following formula (7) indicated, a = 112131 T iG u = iGu -1.第一运动学连接了输出速率向量和独立连接物速率向量。在下文中，G表示Jacobian，左下角的G表示并列机械手中连续的链条数目。G右上角和右下角的符号分别表示相关或独立的参数。Gu（，j）和Gu（i，）分别表示第j个圆柱和第i排的Gu。Gu（i,j）表示Gu的第（i,j）个要素。i,j表示第i个链条的第j个连续链条的角度速率。每个连续链条的速率关系通过公式（4）来描述，公式（4）中输出速率向量和第i个连续链条的角度速率向量分别定义为u 和i。因为三条连续链条在平台中拥有相同速率，就有了公式（5）和公式（6）。如果把三个基础连接物作为独立连接物，照这个情形来说，挑选三个链条中每个相反的Jacobian中的第一排构成了输出向量和独立连接物向量的速率关系，而这种速率关系又构成了一个本体，如下文公式（7）所示，其中a=112131T，iGu=iGu-1。Now, reverse the formula (7) in the relationship between the output of the first order for the kinematics of the system linked by formula (8) can understand that these Gua = Gau -1.现在，颠倒一下公式（7）中的生产量关系， 第一顺序促进了系统的运动学联系，通过公式（8）可以了解，其中Gua=Gau-1。B, a fixed modelB、固定模型Assumptions used in Figure 1 Crankshaft only in the Z axis, a rotary movement, while neglecting the other direction on the transfer. Crankshaft can connect all being used as a spring, in the strength of the needs or the needs of start or bending moment (or compressed). Therefore, in order to calculate input to the operation of machinery, we must use the same output as a reference to obtain the analysis of the fixed model.假设图1中使用的曲臂只在Z轴上有旋转移动，而忽视了其他方向上的转移。曲臂可以在所有的连接处被当作弹簧使用，在需要的力量下或需要的时刻弯曲或者展开（或压缩）。因此，为了计算输入量以便操作机器，我们必须利用同等的输出量作为参考来获得分析的固定模型。Be fixed ontology of the i-chain can be written (9), including iKj said that the first paragraph i j-linked connections of fixed structure. In a state of equilibrium, the machinery of the potential energy storage can be used (10), which iG u said that contrary Jacobian and u make a fine replacement, can inversus iG u access. Kuu that fixed by the bulk of the operational space. Formula (10), we can see that the output can be fixed Ontology (11) said. According to the formula (11), an effective vector output attributed to the transfer of u, is defined as (12), which we should pay attention to is that when the system is symmetrical structure and the same location of the three chains have the same fixed link of the , Kuu is a diagonal. with six movable structure kinematic analysis system。分析固定本体得到第i个链条可以写成（9），其中，iKj表示第i个链上第j个连接物的固定结构。在平衡状态下，机械中贮藏的潜在能量可以用（10）来表示，其中iGu表示相反的Jacobian使得和u 发生细微置换，可以通过逆位iGu获得。Kuu表示固定本体所划分的可操作空间。公式（10）中可以看出，输出的固定本体可以用（11）来表示。根据公式（11），一个有效的输出量向量归因于u的转移，被定义为（12），其中要注意的是当系统处于对称结构而且三个链条相同位置的连接物拥有相同固定性的时候，Kuu是一条对角线。 with six movable structure kinematic analysis system、拥有6个可动结构系统的运动学分析When each of the link was considered Crankshaft Figure 3 (b) shown with two degrees of freedom, the movable structure is six. Records of each chain according to the first axis direction Crankshaft has extended an additional three-vector form of connectivity. Will be described below in the kinematic analysis of this situation当每个连接处的曲臂被认为如图3（b）所示拥有2个自由度的话，系统的可动结构是6个。记录每个链条的第一个曲臂根据轴方向延伸拥有一个额外的三棱形连接体。在下文中将叙述这个情况的运动学分析。A first kinematics A、第一运动学Each of the chain, the center position (x, y) and the operating platform of the position were expressed as (13), (14), (15). Figure 3 of the length of the actual connectivity for Li1 said, the i-hi2 said that the chain of three-vector form of the transfer link, that link Iij of fixed length. Distinguish between the chain on each row between the first time kinematic output equation can be used (16) said. Because of three consecutive platform in the center of the chain have the same rate of the output vector, we have the formula (17), (18). Here, we think that every first and third chain of connections is independent of the connection. Therefore, a total of six separate connections. If rearranging (17), (18), then independent of the connection ( a) and the associated connectivity of ( p) by the relationship between the (19) was. To (19) Insert (16) in (20). Finally, the output of separate connections and the relationship between the rate adopted (21) available.对每个链条来说，中心位置（x,y）和操作平台上的方位分别表示为（13）、（14）、（15）。图3中实际连接物的长度表示为Li1，其中hi2表示第i个链条上三棱形连接物的转移，Iij表示连接物的固定长度。区分上述关于每个连续链条的第一运动学关系的时间生产量等式可以用（16）来表示。因为这三个连续的链条在平台中心拥有相同的输出速率向量，所以我们有公式（17）、（18）。这里，我们认为每个链条第一和第三个连接物是独立连接物。因此，一共有6个独立连接物。若重新排列（17）、（18），那么独立连接物（a）和相关连接物（p ）之间的关系可通过（19）获得。把（19）插入（16）可得（20）。最后，输出和独立连接物速率之间的关系通过（21）可得。B, on the contrary kinematicsB、相反运动学The platform is a central location (x, y) position and a point of , all tied location of the chain links are available. But because small and mobile (21) equal relations from (22) available. In the six movable structure system, a u scope than the large scale. Therefore, (22) to the contrary relations from (23) available, which add to the Gua pseudo-opposite decomposition Gua + said. This shows that the potential energy system will be kept to the minimum extent is the best split (22) for the conditions. K aa that an effective fixed ontology and six independent of the connection, see (24), which said that Kpp ontology and related fixed line connecting devices. 给出平台的一个中心位置（x,y）和一个方位角度，所有并列链条的连接物位置都可以获得。因为细微移动但与（21）相等的关系由（22）可得。在6个可动结构系统中，a的尺度范围比u大。因此，（22）的相反关系由（23）可得，其中Gua加重的伪相反分解用Gua+表示。这表明将系统潜在能量减至最低程度的最佳分裂是以（22）为条件的。Kaa表示一个有效的固定本体与6个独立连接物有关，参看（24），其中Kpp表示固定本体与相关连接装置相一致。Finally, the independent connectivity products and the transfer of related links from (25), (26) was.最后，独立连接物和相关连接物的转移由（25）、（26）获得。C, a fixed modelC、固定模型And connecting independent subsidiary of the fixed link of the respective body languages (27), (28), which iKj expressed that the first i-j chain of fixed connections.独立连接物和附属连接物的固定本体分别写成（27）、（28），其中iKj表示第i个链条的第j个连接物的固定性Ontology compliance with the output (24) equal to the fixed body, expressed as (29), which Caa = K aa -1.输出遵守本体与（24）所给的固定本体相等，表示为（29），其中Caa=Kaa-1。Therefore, the effective output vector attributable to the u, defined as (30), = Kuu Cuu -1.因此，有效的输出量向量归因于u，定义为（30），其中Kuu=Cuu-1。.Simulation Test.模拟试验FEM analysis can be used to prove the feasibility of a fixed model. Given the inherent minimal transfer platform for the operation of power systems transfer vector formula can be adopted (12) or formula (30) calculated. In FEM environment, the force applied to real vector model. Eventually, by comparison, from the initial analysis model is the transfer of FEM model output displacement vector can be tested based on dynamic analysis of the feasibility of a fixed model.FEM可以用来证明系统分析固定模型的可行性。给出平台的内在极小转移，要求转移系统的操作力量向量可以通过公式（12）或者公式（30）计算得出。而在FEM环境中，力量向量适用于实质模型。最终，通过比较，由分析模型给出最初转移的FEM模型的输出位移向量可以检验出基于可动性分析的固定模型的可行性。Working space in the x and y direction is 0 100 um, in the direction of 0 0.1 . FEM simulation test results in Figure 4 to can be seen in Figure 6.系统工作空间在x和y方向上是0100um，在方向上是00.1。FEM模拟试验结果在图4至图6中可以看出。Variable structure has three micro-mechanical devices in order and all other direction have shown a serious mistake. On the other hand, with six of the variable structure in order micro-mechanical devices showed 5 to 10 per cent of the small mistakes, and in other aspects of performance are only some small mistakes negligible, therefore, have six variable structure System than three variable structure of the system of higher precision. 拥有3个可变结构的微型机械装置在命令和其他所有方向都表现出严重的错误。另一方面，拥有6个可变结构的微型机械装置在命令方面表现出510的微小错误，而在其他方面表现的则只是一些微不足道的小错误，因此，拥有6个可变结构的系统比3个可变结构的系统有更高的精密性。. fixed-analysis test.固定分析试验Crankshaft from nine developed a mechanical hand can produce a metal Machine. Six contrary piezo-actuator launched and put into use. Piezo-actuato diameter is 17.4 um. Machines in the x and y directions to the extent permitted by the 0 100 um, in the direction of 0 0.1 . In this part, we have done a number of simulation experiments to prove the validity of test results. These trials are designed to simulate and forecast through fixed, the machine proved developed operational trends and the development of fixed value. Figure 8 shows the experimental operation. In Figure 9 describes in more detail. Experimental estimates will be operational in fixed below. A cylindrical rod link in the system of six sports centre. A level Hengmu links in the top rod, which is used to measure root Hengmu fixed the rotation. Shoring success is a central part of the operation through a PICOMOTOR, terminal operations through LVDT to measure the displacement of. Engine installed in manipulator links at the bottom of the F / T for measurement in the x and y directions can be fixed on the distribution of accurate information to estimate the strength, and this information can be passed force F / T measurement of the reaction to estimate.由9个曲臂构成的发达的机械手可以制作一台金属线切割机。六组相反发动的piezo-actuator投入使用。piezo-actuato的直径是17.4um。机器在x和y方向上允许的范围是0100um，在方向上00.1。在这部分中，我们做了一些实验来证明模拟试验结果的有效性。这些试验的目的是通过与模拟的预测固定性比较，证明发达机器可操作固定性的发展趋势和价值。图8显示了实验的操作。在图9中更详细描述。估量可操作固定性的实验会出现在下文中。一个圆柱形的撑杆连结在6个运动结构系统的中心。一根水平横木连结在撑杆的顶部，这根横木是用来测量旋转固定性的。撑竿的中心部分是通过一个PICOMOTOR运转的，末端运转位移通过LVDT来测量的。发动机设置在连结机械手底部的F/T计测器中，x和y方向上的固定性可通过分配精确的力量信息来估计，而这种力量信息又可以通过F/T计测器的反作用来估计。Through the promotion of standards and measurement Hengmu freedom for the three rotating mechanical devices and the rotation axis to measure rotation fixed. Figure 10 shows the results. Slope of three degrees of freedom in the mechanical device in each direction on fixed. Observation showed that in the x and y directions are identical to the fixed This proves that the previous 9 reported the results of the analysis. From the test and simulation of workable get stuck in Table 1 lists, which kxx, kyy, k that tilt terminology kww.通过推动水平横木和测量因3个自由度的机械装置旋转而产生的旋转轴来测量旋转固定性。图10显示了实验结果。坡度体现了在3个自由度的机械装置中每个方向上的固定性。观察表明，在x和y方向上的固定性是完全相同的，这证明了先前9中所报道的分析结果。从试验和模拟中获得的可操作固定性在表1中列出了，其中kxx，kyy，k表示倾斜术语kww。As shown in Figure 1, simulation and test results between about 30% of the theoretical error rate. It is not perfect, but since the shooting parameters of the micro-system, it is sensitive to the satisfaction of people. The error rate in part because of manufacturing errors, and the other was partly due to measurement errors caused. We believe that these errors can be improved through the design and the actual design of Calibration technology improvements to make up for. 如图1所示，在模拟和试验结果之间大约有30的理论错误率。它并不完美，但自从微型系统对射击参数敏感时它还是让人满意的。这个错误率一部分是因为制造上的错误，另一部分是由于测量上的错误造成的。我们相信这些错误可以通过设计的改善和实际设计中校准刻度技术的改进来弥补。. conclusions.结论Crankshaft inaccurate model can not ensure that the operation of micro-mechanical precision. In this paper, bearing in mind the precise Crankshaft production model, a 3-DOF planar parallel micro-mechanical devices is recommended. We have already pointed out that the article begins with a three movable structure of 3-DOF planar parallel micro-mechanical model can not ensure that the location of system accuracy. On the other hand, with six movable structure of the show had a very good position accuracy. We demonstrate this simulation experiments to confirm the validity of test results. We concluded that the right model can improve the micro-mechanical design of location accuracy. The device is expected in the SEM, X-ray lithography, mask alignment and micro-mechanical technology, as well as other similar effective use.不准确的曲臂模型不能确保微型机械的精确运作。在这篇论文中，考虑到要制作精确的曲臂模型，一个平面3个自由度并列式微型机械装置被推荐使用。文章开头我们已经指出一个拥有3个可动结构的平面3个自由度并列式微型机械模型不能确保系统位置的精确性。另一方面，拥有6个可动结构的设计展现了很好的位置精确性。我们演示这个实验来证实模拟试验结果的有效性。我们推论正确的模型能够提高微型机械设计中位置的精确性。这项装置被期望能在SEM，X射线石版印刷术，mask alignment和微型机械以及其他类似的技术上有效地使用。Crankshaft three degrees of freedom use the same parallel micro-mechanical structure of the experimental designAbstract: Crankshaft in mechanical structure design of the small general has been replaced mechanical connection and extensive use. However, the wrong model will be reduced Crankshaft precision mechanical structure. In this paper, in order to get the correct model Crankshaft and design of a 3-DOF planar the same type of micro-mechanical structure. To that end, an initial analysis of kinematics including inverse kinematics, internal kinematics and coordination of the work of a fixed model has been raised. First of all, take into account a freedom Crankshaft cycle type, but FEM based on the simulation results is inconsistent with the analysis of the results. This is because small axial direction along the connecting rod extended to hinder the accuracy of the mechanical connection. To address this problem, including an additional sports bodies such as the prism connecting the two degree of freedom model Crankshaft has already begun to use some. According to this model, ensure the accuracy of the mechanical structure. Through simulation and test showed that the accuracy of this model is effective. This work emphasized the model Crankshaft Crankshaft guarantee the accuracy of the micro-mechanical structure tied to the use of great significance.IntroductionMicro-mechanical devices in many areas is a key and essential techniques, such as scanning electron microscopy, X-ray lithography, mask alignment and micro-machinery. Recently, a lot of Crankshaft on the use of micro-mechanical structure of the analysis and experimental research. The majority of previous studies (Moriyama 1, 2, such as Taniguchi, Tomita, etc. 3, 4, such as Ryu, Chang, etc. 5, 6 Peng, etc., etc. 10 - 13 ) is the freedom to use an arm for recycling Crankshaft, three degrees of freedom for Crankshaft spherical arm, and thus the production model. However, sometimes even a small total, will do Crankshaft linear motion. Some researchers believe that there is a Crankshaft additional degree of freedom. However, they ignored the model in the process of easy mobility, but also not to micro-mechanical structure in the correct use of the fixed model. This led to the failure of the implementation of micro-systems. Therefore, the focus of this work will be easy mobility is based on the analysis of the accuracy of model Crankshaft.Introduction of the campaign because of the number of independent variables were constrained, and these independent variables, in order to find the relevant links between objects must be clearly defined. Above formula can be adopted (1) to describe the type of M, N, L, respectively Fi j and that movement, freedom of space operations, the number of links, as well as linking of the number of mobile connections i freedom. Exercise also shows that the minimum functioning of the system. When M N bigger than the sport become redundant system.Figure 1 shows a Crankshaft have freedom of the three micro-mechanical structure. Usually, these systems can be Crankshaft rotary connector of the model. Outlined in Figure 2 of the model Crankshaft. If all Crankshaft have a degree of freedom, then the movement of the system are three degrees of freedom. However, in the past, based on such assumptions are the result of the failure of this model because of the inaccuracy of Crankshaft. On the other hand, if all are Crankshaft model of the rotary connector and prism of connections, then the campaign structure reached 12 degrees of freedom. Even if the limit of program analysis and theoretical analysis will enable the two degree of freedom model Crankshaft than one degree of freedom model Crankshaft more accurate results, but need 12 to control the operation of three degrees of freedom rather expensive. Therefore, not only the design of Crankshaft to campaign structure to a minimum, but also to ensure that the structure of precision machinery and sufficient working space.In this paper, we designed two types of Crankshaft. The first type used only a relative degree of freedom to produce thicker neck parts, as shown in Figure 2, this shows that the thickness of the hinge. The second type is used to produce two-DOF relatively thin neck parts. Therefore, the second Crankshaft is a freedom with the rotary connector and a freedom connected to the prism production model. If the system of each chain are two degrees of freedom by a hinge and a two degree of freedom of the hinge, then the campaign structure is 6. Therefore, this Crankshaft through six operating structure to operate.Papers content in the next there will be further development. The second part describes the structure of the system. Kinematic analysis and three campaigns campaign structure and six fixed structural system analysis model respectively in the third and fourth part of a demonstration. Part V describes the two comparative freedom and freedom of a Crankshaft precision simulation results, but also embodies the six recommended by the movement of the systems benefits. Correct the effectiveness of this model can be reflected through experiments. .the system structureThe text of the proposed three-DOF tied in the same mechanical structure is a working platform and composed of three chains, each chain has three Crankshaft, as shown in Figure 1. This mechanical link in the use of all the Crankshaft, and all are connected through the pressure of the movement and operation factors. February 2 chain of three intervals between 120 . This symmetrical structure reduced due to temperature differences and the impact of temperature imbalance. Each chain connecting the first and the third are at the bottom with the machines connected to a pressure campaign structure to operate the contrary. All the movement to promote structural connections of each round good sliding surface and rotation.In the example in Figure 2 a type Crankshaft. This rotational movement Crankshaft equivalent to the displacement of I2 and h () and. In the X direction of the linear motion distance of A (). . three campaign kinematic structure of the system In order to demonstrate a degree of freedom model of the movement of Crankshaft, we will be presented in Figure 3 of this three movement kinematics model of the system. All the previous model Crankshaft only one degree of freedom, and this system has three campaign structure. Passed the map can clearly understand this kinematic analysis.A first kinematics First kinematics connected to the output rate vector and vector rate independent of the connection. Below, G said Jacobian, the lower left-hand corner of G machinery that tied the hands of the chain of consecutive numbers. G top right hand corner and lower right corner of the symbols that were related or independent parameters. Gu (, j) and Gu (i, ) were expressed that a cylindrical j and i Pai Gu . Gu (i, j) Gu (i, j) element. i, j expressed that the first i-chain chain j consecutive rate perspective. The rate for each chain relations through the formula (4) to describe the formula (4) in the output rate vector and i consecutive rate vector angle chain were defined as u and i . Three in a row because of the chain have the same rate in the platform, there will be a formula (5) and the formula (6). If the three foundations of a connecting link of an independent, as far as this case, the selection of three each in the chain of Jacobian contrary to the first row constitutes a separate connections to the output vector and the velocity vector of relations, and this rate relations constitute a body, the text following formula (7) indicated, a = 112131 T iG u = iGu -1. Now, reverse the formula (7) in the relationship between the output of the first order for the kinematics of the system linked by formula (8) can understand that these Gua = Gau -1.B、a fixed model Assumptions used in Figure 1 Crankshaft only in the Z axis, a rotary movement, while neglecting the other direction on the transfer. Crankshaft can connect all being used as a spring, in the strength of the needs or the needs of start or bending moment (or compressed). Therefore, in order to calculate input to the operation of machinery, we must use the same output as a reference to obtain the analysis of the fixed model.Be fixed ontology of the i-chain can be written (9), including iKj said that the first paragraph i j-linked connections of fixed structure. In a state of equilibrium, the machinery of the potential energy storage can be used (10), which iG u said that contrary Jacobian and u make a fine replacement, can inversus iG u access. Kuu that fixed by the bulk of the operational space. Formula (10), we can see that the output can be fixed Ontology (11) said. According to the formula (11), an effective vector output attributed to the transfer of u, is defined as (12), which we should pay attention to is that when the system is symmetrical structure and the same location of the three chains have the same fixed link of the , Kuu is a diagonal. with six movable structure kinematic analysis system。. with six movable structure kinematic analysis systemWhen each of the link was considered Crankshaft Figure 3 (b) shown with two degrees of freedom, the movable structure is six. Records of each chain according to the first axis direction Crankshaft has extended an additional three-vector form of connectivity. Will be described below in the kinematic analysis of this situationA first kinematics Each of the chain, the center position (x, y) and the operating platform of the position were expressed as (13), (14), (15). Figure 3 of the length of the actual connectivity for Li1 said, the i-hi2 said that the chain of three-vector form of the transfer link, that link Iij of fixed length. Distinguish between the chain on each row between the first time kinematic output equation can be used (16) said. Because of three consecutive platform in the center of the chain have the same rate of the output vector, we have the formula (17), (18). Here, we think that every first and third chain of connections is independent of the connection. Therefore, a total of six separate connections. If rearranging (17), (18), then independent of the connection ( a) and the associated connectivity of ( p) by the relationship between the (19) was. To (19) Insert (16) in (20). Finally, the output of separate connections and the relationship between the rate adopted (21) available.B, on the contrary kinematics The platform is a central location (x, y) position and a point of , all tied location of the chain links are available. But because small and mobile (21) equal relations from (22) available. In the six movable structure system, a u scope than the large scale. Therefore, (22) to the contrary relations from (23) available, which add to the Gua pseudo-opposite decomposition Gua + said. This shows that the potential energy system will be kept to the minimum extent is the best split (22) for the conditions. K aa that an effective fixed ontology and six independent of the connection, see (24), which said that Kpp ontology and related fixed line connecting devices. Finally, the independent connectivity products and the transfer of related links from (25), (26) was.C, a fixed model And connecting independent subsidiary of the fixed link of the respective body languages (27), (28), which iKj expressed that the first i-j chain of fixed connections. Ontology compliance with the output (24) equal to the fixed body, expressed as (29), which Caa = K aa -1. Therefore, the effective output vector attributable to the u, defined as (30), = Kuu Cuu -1. .Simulation Test FEM analysis can be used to prove the feasibility of a fixed model. Given the inherent minimal transfer platform for the operation of power systems transfer vector formula can be adopted (12) or formula (30) calculated. In FEM environment, the force applied to real vector model. Eventually, by comparison, from the initial analysis model is the transfer of FEM model output displacement vector can be tested based on dynamic analysis of the feasibility of a fixed model.Working space in the x and y direction is 0 100 um, in the direction of 0 0.1 . FEM simulation test results in Figure 4 to can be seen in Figure 6. Variable structure has three micro-mechanical devices in order and all other direction have shown a serious mistake. On the other hand, with six of the variable structure in order micro-mechanical devices showed 5 to 10 per cent of the small mistakes, and in other aspects of performance are only some small mistakes negligible, therefore, have six variable structure System than three variable structure of the system of higher precision. .fixed-analysis testCrankshaft from nine developed a mechanical hand can produce a metal Machine. Six contrary piezo-actuator launched and put into use. Piezo-actuato diameter is 17.4 um. Machines in the x and y directions to the extent permitted by the 0 100 um, in the direction of 0 0.1 . In this part, we have done a number of simulation experiments to prove the validity of test results. These trials are designed to simulate and forecast through fixed, the machine proved developed operational trends and the development of fixed value. Figure 8 shows the experimental operation. In Figure 9 describes in more detail. Experimental estimates will be operational in fixed below. A cylindrical rod link in the system of six sports centre. A level Hengmu links in the top rod, which is used to measure root Hengmu fixed the rotation. Shoring success is a central part of the operation through a PICOMOTOR, terminal operations through LVDT to measure the displacement of. Engine installed in manipulator links at the bottom of the F / T for measurement in the x and y directions can be fixed on the distribution of accurate information to estimate the strength, and this information can be passed force F / T measurement of the reaction to estimate.Through the promotion of standards and measurement Hengmu freedom for the three rotating mechanical devices and the rotation axis to measure rotation fixed. Figure 10 shows the results. Slope of three degrees of freedom in the mechanical device in each direction on fixed. Observation showed that in the x and y directions are identical to the fixed This proves that the previous 9 reported the results of the analysis. From the test and simulation of workable get stuck in Table 1 lists, which kxx, kyy, k that tilt terminology kww. As shown in Figure 1, simulation and test results between about 30% of the theoretical error rate. It is not perfect, but since the shooting parameters of the micro-system, it is sensitive to the satisfaction of people. The error rate in part because of manufacturing errors, and the other was partly due to measurement errors caused. We believe that these errors can be improved through the design and the actual design of Calibration technology improvements to make up for.conclusions Crankshaft inaccurate model can not ensure that the operation of micro-mechanical precision. In this paper, bearing in mind the precise Crankshaft production model, a 3-DOF planar parallel micro-mechanical devices is recommended. We have already pointed out that the article begins with a three movable structure of 3-DOF planar parallel micro-mechanical model can not ensure that the location of system accuracy. On the other hand, with six movable structure of the show had a very good position accuracy. We demonstrate this simulation experiments to confirm the validity of test results. We concluded that the right model can improve the micro-mechanical design of location accuracy. The device is expected in the SEM, X-ray lithography, mask alignment and micro-mechanical technology, as well as other similar effective use.利用曲臂3个自由度的相同并列式微型机械结构的实验设计摘要：曲臂在机械的微小结构设计中已经代替普通机械连接而广泛地使用。然而，错误的曲臂模型会降低机械结构的精密度。在这篇论文中，为了得到正确的曲臂模型而设计了一种平面 3个自由度相同型式的微型机械结构。为此，一种初步的运动学分析包括逆运动学，内部运动学以及有关工作协调的分析固定模型已经被提出来了。首先，考虑到了1个自由度曲臂的循环类型，但是基于FEM的模拟结果却与分析的结果不一致。这是因为小轴沿着连杆方向延伸从而阻碍了机械的准确连接。为了解决这个问题，一种包括这种额外的运动机构作为三棱镜连接的2个自由度的曲臂模型已经开始部分地使用了。根据这种模型，确保了机械结构的精确性。通过模拟和试验显示了这种准确模型的有效性。这项工作强调了曲臂模型的准确性对保证曲臂在并列微型机械结构中的使用具有重要意义。、介绍 微型机械装置在许多领域是一项关键且必不可少的技术，例如电子显微扫描，X射线石版印刷术，mask alignment和微型机械。最近，出现了很多有关利用曲臂的微型机械结构的分析和实验研究。以前的大多数研究（Moriyama等1,Taniguchi等2,Tomita等3,Ryu等4,Chang等5,Peng等6，等等10-13）是使用1个自由度的曲臂作循环臂，3个自由度的曲臂作球形臂，并以此制作模型。然而，有时就算总量很小，曲臂也会做直线运动。一些研究者认为曲臂有一种额外的自由度。但是，他们忽略了模型程序中的易动性分析，而且也没有提出在微型机械结构中使用正确的固定模型。这就导致了微系统执行的失败。因此，这项工
- 温馨提示:
1: 本站所有资源如无特殊说明，都需要本地电脑安装OFFICE2007和PDF阅读器。图纸软件为CAD,CAXA,PROE,UG,SolidWorks等.压缩文件请下载最新的WinRAR软件解压。
2: 本站的文档不包含任何第三方提供的附件图纸等，如果需要附件，请联系上传者。文件的所有权益归上传用户所有。
3.本站RAR压缩包中若带图纸，网页内容里面会有图纸预览，若没有图纸预览就没有图纸。
4. 未经权益所有人同意不得将文件中的内容挪作商业或盈利用途。
5. 人人文库网仅提供信息存储空间，仅对用户上传内容的表现方式做保护处理，对用户上传分享的文档内容本身不做任何修改或编辑，并不能对任何下载内容负责。
6. 下载文件中如有侵权或不适当内容，请与我们联系，我们立即纠正。
7. 本站不保证下载资源的准确性、安全性和完整性, 同时也不承担用户因使用这些下载资源对自己和他人造成任何形式的伤害或损失。
人人文库网所有资源均是用户自行上传分享，仅供网友学习交流，未经上传用户书面授权，请勿作他用。
川公网安备: 51019002004831号