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电动机座加工自动线卸料机械手设计
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题目名称电动机座加工自动线卸料机械手设计题 目类 别设计类题目性质结合实际专业机械设计制造及其自动化参加本题目学生人数1论文类虚拟题目题目来源、教师准备情况、主要培养学生哪些能力1.题目来源：自拟2.教师准备情况：从事机械设计制造及其自动化领域的教学与研究30年，自1999年起自拟并指导该方向的毕业设计题目整10年，有一定的研究基础。3.主要培养学生的能力：文献查阅与实际调研能力；外文资料翻译能力；基础理论与专业知识的综合应用能力；数据资料的采集、处理与分析能力；计算机应用能力；题 目 内 容 及 要 求1.用途： 在电动机座加工自动线上卸料2规格参数 抓重： 35Kg 定位方式：机械挡块 自由度数：2个 定位精度：0.5mm 坐标形式：类似圆柱坐标 手臂回转范围：90 手臂升降行程：400mm 手指夹持范围：孔径252mm 驱动方式：液压实践环节安排实习去工厂、研究所或上网进行社会调研实验计算机应用计算机绘图中、外文参考资料：1.陆祥生等编.机械手理论与应用.中国铁道出版社，1985 9.冈萨雷斯RC著.机器人学.北京：中国科学技术出本社，19892.天津大学编.工业机械手设计基础.天津：天津人民出版社，1980 10.蔡自兴编著.机器人原理及其应用.长沙中南工业大学出版社，19883.高井宏幸（日）等编著.工业机械人的结构与应用.北京：机械工业出版社，1997 11.冯香峰编著.机器人机构学.北京：机械工业出版社，19914.机部情报所编.国外工业机械手参考资料.重庆：科学技术文献出版社重庆分社，1980 12.徐灏主编.机械设计手册第五卷.北京：机械工业出版社，19925.波波夫著.操作机器人动力学预算法.北京：机械工业出版社，1983 13.Harttey J著.Robots at Work.19836.工业机械手图册编写组编.工业机械手图册.北京：机械工业出版社，1978 14.吴旭朝编.工业机械手设计基础.天津：天津科学技术出版社，19807.张建民编著.工业机器人.北京：北京理工大学出版社，19888.尤列维奇EN著.机器人和机械手控制系统.北京：新时代出版社，1985教研室主任审批签字分 院 院 长 审批签字注：题目类别和题目性质请用符号填在相应栏内。 长春理工大学光电信息学院学生毕业设计（论文）登记表分院机电工程分院专业机械设计制造及其自动化班级0623425学生姓名李国良指导教师陈玲设计（论文）起止日期2010年3月8日6月18日教研室主任题目名称（包括主要技术参数）及要求1. 题目名称：气动通用机械手驱动系统设计2. 要求: 1.用途： 在电动机座加工自动线上卸料2规格参数 抓重： 35Kg 定位方式：机械挡块 自由度数：2个 定位精度：0.5mm 坐标形式：类似圆柱坐标 手臂回转范围：90 手臂升降行程：400mm 手指夹持范围：孔径252mm 驱动方式：液压论文开题报告（设计方案论证）应包括以下几方面的内容：1、 本课题研究的意义；2、调研（社会调查）情况总结；3、查阅文献资料情况（列出主要文献清单）；4、拟采取的研究路线；5、进度安排。 指导教师审阅意见：2010年03 月 15 日记事：指导教师审阅意见：年 月 日 长春理工大学光电信息学院学生毕业设计（论文）登记表分院机电工程分院专业机械设计制造及其自动化班级0623425学生姓名李国良指导教师陈玲设计（论文）起止日期2010年3月8日6月18日教研室主任题目名称（包括主要技术参数）及要求1. 题目名称：气动通用机械手驱动系统设计2. 要求: 1.用途： 在电动机座加工自动线上卸料2规格参数 抓重： 35Kg 定位方式：机械挡块 自由度数：2个 定位精度：0.5mm 坐标形式：类似圆柱坐标 手臂回转范围：90 手臂升降行程：400mm 手指夹持范围：孔径252mm 驱动方式：液压论文开题报告（设计方案论证）1、 应包括以下几方面的内容：本课题研究的意义；2、调研（社会调查）情况总结；3、查阅文献资料情况（列出主要文献清单）；4、拟采取的研究路线；5、进度安排。本课题研究的意义：在机械工业中，应用机械手的意义可以概括如下：工业机械手是近几十年发展起来的一种高科技自动化生产设备。工业机械手的是工业机器人的一个重要分支。它的特 点是可通过编程来完成各种预期的作业任务， 在构造和性能上 兼有人和机器各自的优点， 尤其体现了人的智能和适应性。机 械手作业的准确性和各种环境中完成作业的能力， 在国民经济 各领域有着广阔的发展前景。机械手技术涉及到力学、机械学、 电气液压技术、自动控制技术、传感器技术和计算机技术等科 学领域， 是一门跨学科综合技术。目前已经开发出了多种类型机器人机构， 运动自由度从3自由度到7或8自由度不等，其结构有串联、并联及垂直关节和平面关节多种。目前研究重点是机器人新的结构、功能及可实现性，其目的是使机器功能更强、柔性更大、满足不同目的的需求。另外研究机器人一些新的设计方法， 探索新的高强度轻质材料，进一步提高负载/自重比。同时机器人机构向着模块化、可重构方向发展国内外现状和发展形势：我国机器人学研究起步较晚， 但进步较快， 已经在工业机器人、特种机器人和智能机器人各个方面区的了明显的成就。近年来我国的机器人自动化技术也取得了长足的发展， 但是与世界发达国家相比， 还有一定的差距， 如可靠性低于国外产品；机器人应用工程起步较晚， 应用领域窄， 生产线系统技术与国外比有差距。我国目前从事机器人研发和应用工程的单位相对较少， 工业机器人的拥有量远远不能满足需求量， 长期大量依靠从国外引进。 指导教师审阅意见：2010年03 月 15 日记事：指导教师审阅意见：年 月 日摘 要本论文在对工业机械手总体构思和结构分析的基础上，结合通用机械手的给定要求和功能，对机械手结构进行了系统的分析、设计和计算，并拟定了整体驱动系统和控制系统。 采用机电一体化设计思想，充分考虑机、电、软、硬件各自特点进行互补优化，对机械手整体结构、传动系统、驱动装置和控制系统进行了分析和设计。 在结构设计的过程中结合以往机械设计的经验确定了机械手的详细尺寸。在标准件的应用中，充分考虑实际情况和标准件的应用准则进行了选用。由于该机械手采用液压驱动，在油路的布置和规划中结合机械制造的基础，不但使油路符合制造的可行性，而且将油路布置成空间结构，是机械手的结构更加简洁和紧凑。 在传动系统和驱动装置的设计中，结合各个液压缸的动作，对液压油的流量和压力进行了分析，结合液压原理中各种常用回路的功能和各液压元件的选用原则，制定出了一套完整的液压系统。 在控制系统的设计过程中，采用PLC可编程控制器作为控制主机，行程开关的开合作为中间动作信号，在加上PLC内部延时继电器的使用对该机械手进行了编程，提出了一份有不同功能模块的梯形图。 通过以上各部分的工作，得出了实用化、高可靠性通用机械手的设计方案，对其他类型的数控系统的设计也有一定的借鉴价值。 关键词：通用机械手、结构设计、驱动系统、PLCAbstractThis paper in the overall industrial manipulator design and structural analysis on the basis of Combining manipulator to establish requirements and functions of the manipulator structure of the system analysis, design and calculation and the preparation of the overall drive system and control system . Electrical and Mechanical design integration, and give full consideration to, electronic hardware and software characteristics of their respective complementary optimization, manipulator of the overall structure, transmission, drive and control system for the analysis and design .The structural design of the course with previous experience in mechanical design of the manipulator to determine the detailed size .In the application of standard parts, and give full consideration to the actual situation and the standard parts of the selection criteria . As the hydraulic manipulator drivers in the asphalt layout and planning with machinery manufacturing base not only with asphalt manufacturing feasibility and layout of asphalt into space structure, Manipulator is the structure more simple and compact .Drivers in the transmission system and equipment design,the integration of the various hydraulic cylinder moves the hydraulic oil flow and pressure analysis hydraulic principles used various circuit functions and the use of hydraulic components, draw up a complete set of hydraulic systems .In the control system design process, using PLC as the control host, Switching trip to the Middle cooperating moves signal In addition PLC internal delay relays on the use of manipulator of programming, presented a different function module ladder . Through the above, the part of the process come to practical use, high reliability General manipulator design, for other types of CNC system design has some reference value . Keywords :Definitive manipulator、structural design、drive system、PLC长春理工大学光电信息学院毕业设计（论文）题目申报表院 别 机电工程分院 教 研 室 机械工程教研室 指导教师 陈玲 职称 教授 职称 2009年 12 月 20 日题目名称电动机座加工自动线卸料机械手设计题 目类 别设计类题目性质结合实际专业机械设计制造及其自动化参加本题目学生人数1论文类虚拟题目1.题目来源、教师准备情况、主要培养学生哪些能力2.教师准备情况：从事机械设计制造及其自动化领域的教学与研究30年，自1999年起自拟并指导该方向的毕业设计题目整10年，有一定的研究基础。3.主要培养学生的能力：文献查阅与实际调研能力；外文资料翻译能力；基础理论与专业知识的综合应用能力；数据资料的采集、处理与分析能力；计算机应用能力；题 目 内 容 及 要 求1.用途： 在电动机座加工自动线上卸料2规格参数抓重： 35Kg 定位方式：机械挡块自由度数：2个 定位精度：0.5mm坐标形式：类似圆柱坐标手臂回转范围：90手臂升降行程：400mm手指夹持范围：孔径252mm驱动方式：液压实践环节安排实习2009年12月2010年3月实验2010年3月2010年4月计算机应用2010年4月2010年6月中、外文参考资料：1李允文.工业机械手设计M.北京:机械工业出版社，1997 2工业机械手设计基础M.天津:天津科学技术出版社，1985 3渡边茂.产业机器人技术M.北京:机械工业出版社，1982 4黄净.电气及PLC控制技术M北京:机械工业出版社，2004年 5李建新可编程序控制器及其应用M北京：机械工业出版社，2004年 6藤森洋三.供料过程自动化图册M.北京：机械工业出版社，1985 7张建民.工业机器人M.北京:北京理工大学出版社，1987 8吴振彪.工业机器人M.武汉：华中科技大学出版社，1996 9刘延林.柔性制造自动化概论M.武汉：华中科技大学出版社，2001 10左健民.液压与气压传动M.北京：机械工业出版社，2005 11彭文生.机械设计M.武汉：华中理工大学，2000 12邓星钟.机电传动控制M.武汉：华中科技大学出版社，2001 13任文敏.材料力学M.北京：清华大学出版社，2004 14液压转动设计手册M.上海：上海人民出版社，1976 15瞿大中.可编程控制器应用与实验M.武汉：华中科技大学出版社，2002 16李玉琳.液压元件与系统设计M.北京：北京航空航天大学出版社，1991 17廖常初.可编程控制器的编程方法与工程应用M.重庆：重庆大学出版社，200418Prabhakar R.Pagila,Biao Yu.Adaptive Control of Robotic Surface Finishing Processes. America:Proceedings of the American Control conference,June 25-27,200119J.H. Ahn, Y.F. Shen, H.Y. Kim, H.D. Jeong. Development of a sensor information integrated expert system for optimizing die polishing. American :Robotics and c0mputer Integrated Manufacturing 17 (2001) 269-276教研室主任审批签字分 院 院 长 审批签字注：题目类别和题目性质请用符号填在相应栏内。本科生毕业设计（论文）翻译资料中文题目： 以微型机器人为基础的自动化 显微操作装置为微系统装配 英文题目： A microbot-based automated micromanipulation station for assembly of MicrosystemsA microrobot-based automated micromanipulation station forassembly of microsystemsSergej Fatikow Mirko BenzAbstract：The development of new types of miniaturized and microrobots with human-like capabilities play an important role in different application tasks. One of the main problem of present-day research is, for example, to assemble a whole microsystem from different microcomponents.This paper presents an automated micromanipulation desktop station including a piezoelectrically driven microrobot placed on the highly-precise xy stage of a light microscope, a CCD-camera as a local sensor subsystem, a laser sensor unit as a global sensor subsystem, and a Pentium PC equipped additionally with an optical grabber. The microrobot has three piezoelectrically driven legs and two autonomous manipulators as endeffectors; it can perform highly-precise manipulations （with an accuracy of up to 10 nm） and a nondestructive transport （at a speed of several mm/s） of very small objects under a microscope. To perform manipulations automatically, a control system, including a task planning level and a real-time execution level, is being developed. （C）1998 Elsevier Science B.V. All rights reserved.Keywords： Microrobots; Microassembly; Automated desktop station; Assembly planning; Piezoactuators1.Introduction：There is a growing need for miniaturized and microrobots worldwide. Due to the enormous breakthroughs in conventional robotics and in the microsystem technology (MST),everyone is convinced that the development of remote-controlled or autonomous microrobots will lead to improvements in many areas. Above all, positive results are expected in medicine (microsurgery),manufacturing (microassembly, inspection and maintenance), biology (manipulation of cells) and testing/measuring technique (VLSI) . Medicine is one of the application fields which would profit by the microrobotics the most. The attention lies on artificial organs (prosthetics) , laparoscopy, implantable drug delivery systems (diagnosis and therapy systems) , telemicrosurgery, etc. The minimal-invasive surgery developed into an important field of medicine during the last years.Smaller and more flexible active endoscopes are needed in order to replace human hands, respond to outer incidents, penetrate into a body or a vessel through natural bodily orifice or a small incision by remote control, where they perform complex in-situ measurements and manipulations. In order to meet these requirements, microprocessors, several sensors and actuators, a light source and possibly an image processing unit should be integrated into an intelligentendoscope. Biotechnology requires special microstructured active tools which are able to perform micromanipulations like the sorting or reunion of cells or the injection of a foreign body into a cell under a microscope. In the gene research and the environment technique （cells as indicators for harmful substances）, precise and gentle manipulation of single cells are also required. Industry and especially manufacturing and measuring techniques need highly sensitive testing methods in the m-range. An important task represents, for example, the inspection of wafers, where several check points have to be contacted by a temperature or voltage probe. The same is valid for inspection robots which are used in inaccessible or dangerous terrain in order to detect leaks or flaws and make repairs （e.g., in pipelines）。The adoption of MST-related developments by the industry has already demonstrated which kind of problems occur with the mass production of microsystems. These systems usually consist of microcomponents of different materials which are produced with various microtechniques; this leads to one or several very precise assembly step （s）of theindividual components. The assembly of microsystems, i.e., the non-destructible transport, precise manipulation or exact positioning of microcomponents is becoming one of the most important applications in microrobotics.2. Manipulation of microobjects：The availability of highly precise assembly processes will make it easier to economically realize operable microsystems. In order to efficiently produce microsystems and components in lot sizes or by mass-production techniques, it is absolutely necessary to introduce flexible, automated, precise and fast microassembly stations. Different concepts are being followed to do micromanipulation for particularclasses of application.Purely manual micromanipulation is the most often used method today. In medicine and biological research, it is used exclusively. Even in industry, microassembly tasks are very often carried out by specially trained technicians, who, for example, preposition assembly parts using screws and springs, then position the parts with tiny hammers and tweezers, and finally fasten them in the desired position. However, with increasing component miniaturization, the tolerances become smaller and smaller, and the capabilities of the human hand are no longer adequate.The application of partially automatic micromanipulation systems of conventional size, which are teleoperated; thereby, the hand motions of the human operator are translated into finer 3D motions for the manipulators of the manipulation system by means of a joystick or mouse. Here, the dexterity of the human hand is supported by sophisticated techniques. However, the fundamental problem of the resolution of the fine motion and of the speed remain, since the motion of the tool is a direct imitation of that of the operators hand.The use of automated multifunctional micromanipulation desktop stations supported by miniaturized flexible robots which employ MST-specific direct- drive principles. These robots could be mobile and are able perform manipulations in different work areas. The transport and micromanipulation units performing the assembly may be integrated onto one chip. As opposed to the aforementioned micromanipulation technique, there is no direct connection between the operators hands and the robot. The assembly steps may be carried out with the help of closedloop control algorithms. The human assigns all tasks to miniaturized assembly mechanisms and, by doing so, tries to compensate for his limited micromanipulationcapabilities. Many microrobots can be active at the same time in a desktop station.The use of many flexible nanorobot systems which solve the manipulation tasks in close cooperation. Here, the robot size is comparable to that of the manipulated object. This concept could be based on the human behavior, but its realization lies in the distant future. In general, manipulations vary from an application to another. However, approximately the same operation sequences are used in every case. They are: grip, transport, position, release, adjust, fix in place and processing steps like cutting, soldering, gluing, removal of impurities, etc. In order to be able to carry out these operations, corresponding tools are needed, such as microknives, microneedles to affix objects, microdosing jets for gluing, microlaser devices for soldering, welding or cutting, different types of microgrippers, microscrapers, adjustment tools, etc. Microgrippers play a special role, since they considerably influence the manipulation capabilities of a robot. Microgrippers can clamp, make a frictional connection or adhere to the material, depending on the physical and geometrical properties of an object. Adapting a gripper to the shape of the object to be gripped is often the best solution in the microworld, even at the cost of flexibility. This allows handling of a workpiece having a complex shape, such as a gear. Thereby, the gripper securely attaches to the contour of the part. For small, smooth parts, a suction pipette might be a practical tool. If the upper surface of a workpiece must not be touched or gripped due to technological reasons, it can be protected by a corresponding form-fit of the pipette hole. For contour clamping and frictional connections in manipulations involving fragile parts, elastic grippers made of soft plastics are preferred over metal grippers. Due to the variety of task-specific gripping tools in automated micromanipulation systems, a suitable gripper exchanger system might be necessary.It should be mentioned that it is not always possible to adapt conventional manipulation methods to the demands of the microworld. A major problem is the effect of various forces which is completely different from the macroworld. Gravitation only plays a minor role in the microworld, but attractive forces,such as electrostatic forces or Van-der-Waals forces, are significant. Liquid surface tension can also act as an attractive force in micromanipulations if humidity is high or if a manipulator is wet. This unusual sensitivity to forces can be very irritating in a micromanipulation station. For example, it can be easier for the robot to grip and manipulate an object than to release it afterwards. On the other hand, such an adhesion force can be used to develop new gripping methods which can fundamentally differ from the familiar mechanical and pneumatic methods. In Ref. 【1】 , several interesting ideas were shown for adhesive gripping, such as electrically charging a manipulator or wetting a gripper surface by special micromachined orifices.The performance and degree of intelligence of a micromanipulation station is low for a manual operation; it improves by going to a teleoperation and further to an automation; this is similar with conventional robots. Most micromanipulation investigations today focus on the improvement obtained by going from a purely manual to a teleoperated system【24】. As previously mentioned, attempts are being made to make the transmission of effects from the microworld to the operator as realistic as possible. It is important that the operator has the entire scene in his field of view and that he can see the workspace from different angles. Besides visual information, the operator should also be able to receive acoustic and force signals if possible; this may increase the accuracy of his movements and avoid destroying the microobjects. For this, force sensors are needed which are implemented into the microtools (e.g., a microgripper) . Suitable solutions are now being sought after to realize such sensors【5】.3. Development of a flexible micromanipulation Station： Typically, in a conventional automatic or semiautomatic assembly station, standardized mechanical parts are assembled in well-defined work positions. The robots performing the work are usually of multi-axis arm design or they are gantry systems,usually driven by DC motors. Today, it is being attempted to use these type of familiar systems for handling and assembling of miniaturized components with dimensions in the millimeter range. For example, a modular microassembly system with four degrees of freedom is currently being developed【6】.With increasing workpiece miniaturization, however,it becomes more and more difficult to use conventional manipulation robots for assembling microsystems.The manipulation accuracy is mechanically limited for conventional robots, since disturbing influences which can be neglected in the microworld, such as small fabrication defects, friction, thermal expansion or computational errors, play a large role in the microscale. Due to the mechanical drives for the actuators motions, these robot systems must undergo regular maintenance and are subject to mechanical wear, which makes them expensive. The assembly process in the microworld is influenced by the mass-related dynamics of the objects being handled. Different processing conditions exist for manipulating microscopically small components. The positioning accuracy and the tolerances of the micro-components lie in the nanometer range, a few orders of magnitude lower than in conventional assembly. These accuracy requirements can only be obtained with manipulators which have highly accurately drives utilizing the MST and advanced closed-loop control. Therefore, a microrobot-based flexible desktop station is of particular interest. A new concept for an automated micromanipulation desktop station is now being investigated 【7】. The main part of the station are the piezoelectric microrobots which were presented in Refs.【8,9】.Each robot has a micromanipulating unit integrated in a mobile platform, which makes it capable of moving and manipulating. Tools can be easily exchanged. These robot properties are good preconditions for the complete sensor supported automation of manipulation processes in the microassembly station. Owing to the flexibility of the microrobot, this multifunctional desktop station can also be used for other things, such as handling biological cells or actively testing microelectronic chips with temperatureor or voltage probes. This flexibility can also be used to accommodate several robots in the station, which can cooperate and carry out manipulations. The schematic design of the micromanipulation desktop station is shown in Fig. 1. The operations of the microassembly station may be described as follows.The parts are first separated and placed into magazines in order to have them correctly positioned for automated assembly. This is necessary, since microcomponents are often delivered as bulk material. This step can also be automated in a powerful microassembly station, to avoid the expensive manual handling.A microrobot removes a micromechanical component from the magazine and transfers it to a processing cell where the component can then be prepared for microassembly by other microrobots. In this step, adhesives or solder can be applied, adjustment marks taken, or other simple operations carried out.After the part has been processed, it is gripped by a robot and brought to a microassembly cell.If necessary, the same operations are repeated many times in order to fetch the other necessary components from a supply container and prepare them for assembly.All components are positioned correctly, affixed to each other and adjusted. Thereafter, they are joined together by various interconnection techniques, e.g., laser spot welding, gluing, insertion, wire bonding, etc.After assembly, a robot brings the finished component either to another work station or a microassembly cell for further processing or to an inspection cell, where all functions of the microsystem are being tested. Finally, the finished system is transported to a storage. The entire assembly process occurs in the desktop station under an automated light-optical microscope which is equipped with a RS232-standard interface. The sphere of operation includes a highly precise positioning table with two translational degrees of freedom （xy plane ）and a glass plate fixed on top of it. By controlling the movements of the table, each individual working cell on the glass plate can be brought under the microscope. The station has a central computer （Pentium PC） which is used for task-specific assembly planning. The necessary operational steps are defined and carried out successively. The commands of the central computer are then further processed on a lower control level, using a parallel computer system with the C167 microcontrollers. This system was reported in Ref.【10】. The central computer is coupled with the parallel computer system over serial and parallel interfaces. These commands are resolved into command sequences for all active system components （robots, microscope and positioning table） by an execution planning system, and finally performed. Thanks to the parallel computer system, the generated commands can be executed in parallel, which makes the microassembly station capable of real-time behavior. The movements of the positioning table, different microscope functions （objective changing, focusing, lighting） and every piezoactuator are controlled. In order to automatically control the manipulation processes in the microassembly station, there must be sensor feedback. Therefore, the light-optical microscope is equipped with a CCD camera. The camera and the microscope form the local sensor system with the help of which the position of the microobjects and the robot tools must be determined. For this it supplies visual information on the robot tools and the microobjects to the central computer. The gross position of the robots on the glass plate is detected by a global sensor system which includes a laser measuring unit and another CCD camera. The visual sensor information from both the local and the global sensor systems is used by the control algorithms to generate new commands for the robots, microscope and the positioning table. Vision is supported by a frame grabber in connection with fast real-time image recognition and processing systems. The vision parameters are passed on to the parallel computer system. They are used as a set point for the control loop.4. Planning of the microassembly：The above description of microassembly station activities is very general and perhaps makes the assembly process sound too simple, but many problems must first be solved. After a microsystem has been designed, all tools and techniques necessary for its automated assembly should be determined, so that the microassembly station can be set up for a taskspecific operation sequence. The specified techniques and tools must take the geometry of the components of the microsystem into consideration, as well as their physical properties, such as rigidity, texture and temperature stability. Therefore, the planning phase of an automated microassembly requires a high degree of competence. Pure top-down planning in a microassembly station seems to be impossible since the selected robots and their tools determine the flexibility and the degree of automation of the station, and therefore, also determine its performance limits. One possible planning strategy is the meet-in-the-middle strategy; thereby, this intermediate interface can be on the tool level. Indeed, the main functions of assembly planning are the determination of the task-specific sequences of the elementary operations and the selection of necessary tools for carrying out the work (top-down planning) . On the other hand, the tools and the elementary operations needed for the assembly of a microsystem also require that the microrobots have specific functional properties, which may influence the robot design (bottom-up planning) . As mentioned, for more complex assembly tasks several robots must be used together in the desktop station. Individual robots can, for example, be specializedto take care of one or more certain assembly operations. In this case, the robots carry out their manipulation tasks in a sequence which is defined during the planning phase. For more complex operations, robots can be pooled together to do simultaneous actions with the help of several different tools (e.g., transferring or gripping of objects) . In this case, the operators commands are no longer transmitted one-by-one to the manipulator arms, but are applied to the entire multirobot system, e.g., by means of the one-by-multiple method 【11】. Here, one microrobot acts as the leader of the group, it gets micromanipulation assignments from the operator and then coordinates the other microrobots to complete the task using an automatic process for communicating with the robots and then giving them the corresponding commands. If the cooperating robots are equipped with sensors, new object manipulation methods can be developed, which are based on the distributed observation of the objects. The object could be observed from two view points, for example, which would supply exact data concerning the objects movements. The main problems of the practical realization of the micromanipulation desktop station employing several microrobots are caused by the assembly planning on the uppermost control level, the task-specific distribution of the necessary robots and tools, as well as their movements and forces, which should allow the assembly process to run error and collision-free. The planning system of the station, which is being developed 【12】, consists of three main module: system interface, assembly task planner and assembly execution planner (Fig. 2) . The modules are supported by a knowledge base which includes knowledge on the task specification, an assembly model of the microsystem, the specification of existing microrobots and their tools, a world model (micro and macro) and the current station state obtained by the sensor system. The planning process of the assembly task planner is successively performed in three planning levels. In the first step, an assembly graph is generated. Each node of the graph represents one particular assembly operation and the edges represent the relations between two operations. At the next level, a sequence of executable assembly operations( like operations for pick and place, push, turn, etc). is planned. Thereby the order restrictions of the assembly graph have to be considered. The geometry of the working area and the resources available such as microrobots and their tools must be taken into account during this planning step. After obtaining the action sequence, a task decomposition has to be done. The action sequence is decomposed into subplans for microrobots based on their operational capabilities. The actions generated by the assembly task planner are then particularized to the specific conditions in the working area by the assembly execution planner. The execution planner generates a motion sequence of the platform and the endeffectors for each microrobot which is necessary to execute the planned actions. The motion planning for each microrobot is performed by its own execution subplanner. At this planning level, three types of collision-free motion are distinguished: gross motions of the robot platform to transport workpieces from one place to another, fine motions of the robot endeffectors to graps or release a workpiece, and fine motions of the whole robot( platform+endeffectors) to manipulate the microobjects. The execution planning done by all microrobots subplanners must be supervised to ensure the consistency of the plans. The main function of the sensor subplanner is to manage the gross motion and fine motion sensor systems in regard to the actual action.5. Conclusions and future works：Coming to a conclusion, it can be stated that presently, no easy solutions exists for assembling microparts, especially when taking into consideration the hardware and software and the costs involved. It can be clearly seen, however, that the availability of versatile automated microassembly stations will greatly contribute to the long-awaited industrial breakthrough of MST. A current industrial success that encourages the development of MST is the rapid progress of microelectronics, where automated production methods led to the birth of an entire new industry. This development is a motivating example for MST researchers, who are the innovators in the interdisciplinary field of microassembly. Such microassembly stations need an adaptable and hierarchically distributed control system, which make it possible to quickly initiate a cooperation to an immediate request between the operator and a robot or between different robots. It is nearly impossible to explicitly program every possible scenario that can happen in the complex operation surrounding. In a flexible system, the individual robots should be able to adapt their behavior to the surrounding and react flexibly to new situations. Decentralizing of a control system is also of advantage to facilitate the robots ability to learn. Machine learning of single robots has been investigated for a long time, but the learning process of a group of robots is not known. An important concept in multirobot systems seems to be learning by observation. Different simulation tools can be helpful in assembly planning. In order to be able to evaluate the assembly task and choose the best strategy, various operating sequences can be tried out by using CAD models of the microrobots and workpieces. Evaluation criteria could be freedom of collision, best use of resources, duration of assembly, compliance with technological parameters, etc. However, it is not always possible to get help from a simulation module. As long as there is only path planning involved, there are many ways of finding a solution. When no trajectory restrictions are given other than that a goal has to be reached, collision avoidance methods based on fuzzy-logic seem to be suitable. But it is very difficult to simulate the force distribution between several robots which cooperate in a manipulation task. Another unsolved problem is simulating the task-specific manipulation of microobjects, for example, for the purpose of testing the assembly task of a given robot and a tool, or to determine how much time the process will take. To do this, it is necessary to know the forces occurring in the microworld and the dynamic behavior of microobjects. For neither of these problems, there are models available so that dynamic assembly planning cannot be carried out today.Acknowledgements：This research work was performed at the Institute for Real-Time Computer Systems and Robotics （Headed by Prof. Dr. U. Rembold, Prof. Dr. H. Worn, and Prof. Dr. R. Dillmann） , Faculty for Computer Science, University of Karlsruhe, 76128 Karlsruhe, Germany.References：【1】F. Arai, D. Ando, T. Fukuda, Y. Nonoda, T. Oota, Micro manipulation based on micro physics, Proc. of IEEErRSJ Int. Conf. on Intelligent Robots and Systems IROS , Pittsburgh, PA, 1995, pp. 236241.【2】M. Mitsuishi, K. Kobayashi, T. Nagao, Y. Hatamura, T. Sato, B. Kramer, Development of tele-operated micro-handlingrmachining system based on information transformation, Proc. of the IEEErRSJ Int. Conf. on Intelligent Robotsand Systems IROS , Yokohama, 1993, pp. 14731478.【3】H. Morishita, Y. Hatamura, Development of ultra precise manipulator system for future nanotechnology, Proc. of Int. IARP Workshop on Micro Robotics and Systems, Karlsruhe, 1993, pp. 3442.【4】T. Sato, T. Kameya, H. Miyazaki, Y. Hatamura, Handeye system in nano manipulation world, Proc. of Int. Conf. on Robotics and Automation, Nagoya, 1995, pp. 5966.【5】M. Horie, H. Funabashi, K. Ikegami, A study on micro force sensors for microhandling systems, Microsyst. Technol. 1 3 1995 105110.【6】U. Gengenbach, Automatic assembly of microoptical components, Proc. of SPIE International Symposium on Intelligent Systems and Advanced Manufacturing, Boston, MA, Vol. 2906, 1996, pp. 141150.【7】S. Fatikow, A microrobot-based automatic desk-station for assembly of micromachines, Proc. of the 12th Int. Conf. on CADrCAM Robotics and Factories of the Future, London, 1996, pp. 174179.【8】B. Magnussen, S. Fatikow, U. Rembold, Micro actuators: principles and applications, in: M. Glesner Ed. , Aufgaben der Informatik in der Mikrosystemtechnik, Schlo Dagstuhl, 1994.【9】S. Fatikow, B. Magnussen, U. Rembold, A piezoelectric mobile robot for handling of microobjects, Proc. of the International Symposium on Microsystems, Intelligent Materials and Robots, Sendai, 1995, pp. 189192.【10】B. Magnussen, A parallel control computer structure for complex high speed applications, Proc. of the 1st IEEE Int. Conf. on Engineering of Complex Computer Systems, FL, 1995, pp. 385388.【11】S. Hirai, S. Sakane, K. Takase, Cooperative task execution technology for multiple micro robot systems, Proc. of the IARP Workshop on Micromachine Technologies and Systems, Tokyo, 1993, pp. 3237.【12】S. Fatikow, R. Munassypov, An intelligent micromanipulation cell for industrial and biomedical applications based on a piezoelectric microrobot, Proc. of the 5th Int. Conference on Micro Electro, Opto, Mechanical Systems and Components MST , Berlin, 1996, pp. 826828.Sergej Fatikow, born on March 5, 1960 in Ufa, Russia, studied computer science and electrical engineering at the Ufa Aviation Technical University in Russia, where he received his doctoral degree in 1988 with work on intelligent control of complex nonlinear systems. Then he moved to the Institute for Real-Time Computer Systems and Robotics at the University of Karlsruhe in Germany where he is working as an assistant professor.Since 1994, he is a leader of theresearch group Miniature and Micro Robots. His research interestsinclude different aspects of microrobotics, microassembly, intelligent planning and control in microassembly cells, and neuro-fuzzy-based information processing.Mirko Benz was born in Offenburg, Germany in 1969. He studied computer science at the University of Karlsruhe, Germany from 19901996 where hespecialized in CIM Computer Integrated Manufacturing and AI ArtificialIntelligence and took part in a traineeshipsity of South Australia, Australia. As a student member of up Miniature and MicroRobots at the Institute of Real-TimeComputer Systems and Robotics, he has contributed to the investigation ofmicrosystem technology and microrobotics and is co-author of several publications. Currently,he is working for the IT group of the Hewlett-Packard in Boeblingen, Germany.以微型机器人为基础的自动化显微操作装置为微系统装配摘要：小型化的新类型的发展和智能型微型机器人在不同的应用程序任务中扮演着重要角色。现在研究的主要问题之一是,例如，装配来自不同的微成份的一个整个的微系统。这篇论文说明一个包括放在精密x-y坐标的光学显微镜上的一个压电驱动机器人的自动化显微操作桌面装置，一部电压耦合元件照相机作为一个局部的感知器次系统，一个激光感知器单位作为一个整体的感知器次系统，额外配置一台带有光学抓帧器的奔腾电脑。这个微型机器人有三压电驱动支架和两个活动自如的机械手作为终结者。它能在显微镜下对很小物体执行精密的处理（准确度10nm以下）和非破坏性的运输（以若干nm/s的速度）。为了自动地执行操纵，一个控制系统,包括一个任务计划标准和一个即时实施标准, 正在被发展。关键词：微型机器人 显微装配 自动化桌面装置 装配计划 压力致动器1 介绍：全世界对小型化和微型机器人的需求在增加。由于巨大的断缺，在传统的迹器人学和微系统工艺学中，每个人都相信遥控的发展或者自主的机器人将在许多领域引导进步。最重要者，积极的结果在药 (显微外科) 被期望,制作 (微型装配，检查和养护), 生物 (细胞的操纵) 和测试的/测定的技巧 (VLSI)。药是一种得益于微型机器人学最多的应用领域之一。关注多在人工的器官 (义肢学) ，腹腔镜，可深植的药物输出系统 (诊断和治疗体系) ，可视显微手术,等等。在过去的几年间，极小探入式手术在药学领域获得极大的发展。更小和更多易曲的有效内视镜被需要去替代人类的手，回应外部的事件, 经过自然的身体孔刺入一个车体或者一个船舶或者远距控制的一个小切口,在这些地方他们执行复杂的现场测量和操纵。妥善符合这些需求，微处理机, 一些感知器和引动器, 一个光源和可能地一个图像处理单元应该被整合进入一智能的内视镜。生物技术需要特别的有微细构造的有效工具,这种工具能够执行如在显微镜下细胞的分类或重聚或异物的细胞注入的显微操作。在基因研究和环境技术（细胞作为有害物质的指示剂），单一细胞的精密的和温和操纵也被需要。工业和特别的制作和度量技术在微米范围内需要高度敏感的测试方法。一个重要的任务表现,例如，晶圆的检查,一些核对点必须被一个温度或电压探针连络。同样适用于应用在难接近的或者危险的地形为检测缺陷和漏洞并修理的检测机器人（例如，在输送渠道）。工业上微系统相关技术发展的采用已经证明了哪一类的问题在微系统的大量产品中发生。这些系统通常有与各种不同的微技术一起生产的材料的微成份;这就引发了一个或一些个别组件的精密装配步骤。微系统的总成,也就是，无可破坏的运输, 精密的操纵或微成份的正确定位正成为微型机器人学中最重要的应用之一。2 微物质的操作：高度精密的总成程序的可行性将会在经济上比较容易地实现可实施的微系统。为了有效地生产大尺寸的微系统和组件或者藉着大量生产技巧，了解有柔性的，自动化的，精密的和快速微装配的装置是完全必要的。不同的观念正在被接受去为应用程序的类别做显微操作。纯粹手动的显微操作是当今最常用的方法. 在药和生物的研究中，它独有地被利用。尤其在工业，微型装配任务时常由特别训练的技术员运行，他们总成零件使用螺丝和弹簧，然后用极小的锤子和镊子放置零件, 而且最后在被需要的位置中夹紧它们。然而，藉由递增组件的小型化，公差变得越来越小，而且人类手的能力不再精确。传统尺度的部份自动显微操作系统的应用程序, 是可视的; 藉此，人类操作者的手动作被为操纵系统的操纵者藉由一个摇杆或鼠标转变为较相似的3D立体动作。在这里，人类手的技巧由复杂技术支持。然而，相似动作和速度保持是需要解决的基本问题,因为工具的动作是操作者的手的直接模仿。自动化的多功能的显微操作桌面装置的使用被应用特别微型操作技术的直接传动原则的小型化的柔性机械手支持。这些机器人应该是移动的和能在不同的工作区域中执行操纵。运输和执行总成的显微操作单位可能在一个晶片之上被整合。相反上述的显微操作技巧, 没有操作者的手和机器人之间的直接连结。总成步骤可能与闭环控制运算法则的辅助一起运行。人类为小型化总成机构分配所有的任务，并且藉由如此执行，试着为他的有限显微操作能力作差补。许多微型机器人在一个桌面装置中能同时有效。解决在紧密合作中的操纵任务的许多柔性的纳米机器人系统的使用。在这里，机器人尺度对被操纵的物件是可比较的。这一项观念应该以人类行为学为基础, 但是在遥远的将来它必将实现。大体上，操纵从一个应用程序执行到另外一个。然而，大约相同的运作顺序在每个情形都可以被用。 他们是: 手柄, 运输,放置,放松,调节, 适当地固定，和加工步骤像切削, 锡焊, 黏合, 杂质的排除, 等等。为了能够运行这些运作, 对应的工具像微小刀具，微小滚针附黏物件，微小剂量喷射,微激光方法对于软焊，熔接或者切削，微小抓爪器，微小刮刀的不同类型，调整用工具,等等被需要。微小抓爪器扮演一个特别的角色,因为他们很影响机械手的操纵能力。微小抓爪器能夹紧, 作磨擦力联接或者黏附在材料之上,依赖物件的物理学和几何学性质。使一个夹子配合物件的形状跟踪抓紧是在显微世界中最好的解决方法, 甚至以韧性为代价。这允许一个有复杂形状的工作区的处理，如一个齿轮。藉此，夹子安全地附上零件的等高线。 对于很小，光滑的零件，一个吸取移液器可能是一个实际的工具。如果工作件的上表面由于技术的原因不能被接触或者抓紧, 它能被一个移液器孔对应模型进行保护。 对于包括易碎零件的等高线定位和磨擦力联接的操纵，用软式塑料做成的柔性夹子替代金属夹子被偏爱。由于在自动化的显微操作系统中采用特别任务抓紧工具的种类,一个适当的夹子交换器系统可能是必需的。应该提及一点，它不总是可能使传统的操纵方法适应显微世界的需量。 一个主要的问题是完全地不同于显微世界的各种不同力的效应。万有引力只在显微世界扮演一个较小的角色,但是，诸如静电力和范德华力之类的引力的作用是不容忽视的。 如果湿度是高的或者一个操纵者是潮湿的，液体表面拉力也能在显微操作中担任一个吸引力。这个不寻常的对力的灵敏度在一个显微操作装置中可能是非常影响的。例如, 对机器人来说，抓紧而且操纵一个物件要比后来释放物件容易些。另一方面, 如此的一个黏附力能被用来开发能基本上不同于普通的机械和空气的方法的新的抓紧方法。在叁考文献【1】中,为附着的抓紧提供了一些有趣的想法,像是电荷在一个操纵者或湿的特别微型机械孔的一个夹子表面上。显微操作装置的性能和智力度作为一个手动式是低的; 它通过介入可视操作和进一步的针对一个自动化得到改良; 这和传统的机械手相似。今天大多数的显微操作调查焦点集中在从从纯粹手动到可视操作系统获得的改进【2-4】。如先前提到的,人们正在尽可能现实的将结果从显微世界向操作者进行传输。很重要的是，操作者在他的视域中有整个的现场而且他能见到来自不同角度的工作空间。此外视觉的信息,可能的话 操作者也应该能够接受到声学和力信号; 这可能
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