SRPV Tempress standard traning material(Chinese)

1、Tempress DiffusionSolar Cell industry2011.4.23By Polly培训项目和目的系统介绍系统介绍操作界面操作界面控制系统控制系统装载系统装载系统工艺设定工艺设定维护维护目的目的 一个成功接受过培训的工程师必须能做到如下:独立的分析和判断问题的原因;采取必要合适的动作处理发生的问题;建立合理的维护计划;严格的执行维护计划并将最少化问题的发生User manuals用户说明书用户说明书Operator操作说明Process engineer工艺工程师Maintenance engineer维护工程师Reference manuals参考说明书参考说明书Co

2、ntrollers控制部分Main frame components主架构部分User interface人机界面System specific manuals系统明细书面书系统明细书面书Electrical schematics电气图纸OEM components供应商元件说明培训相关资料晶体硅太阳电池的制备过程清洗制绒扩散刻蚀 去磷硅玻璃减反射膜 电极印刷 烧结固化 测试分选 应用（组件） 系统介绍TS81254Nr of tubes炉管号125cm flatzone125cm恒温区8 inch compatible最高可做8英寸产品Tempress Systems 2 3 4 51 2

3、3 4 51 2 3 4 51 2 3 4 51 2 3 4 5Top tube上管bottom tube底管source zone尾区center zone中间区loading zone输入区Scavenger area净化区Scavenger box净化盒1 2 3 4 51 2 3 4 51 2 3 4 51 2 3 4 5Paddle碳化硅浆DTC DTC DTC DTCtemperature controllers温度控制器Furnace炉管系统Loadstation软着陆系统gas cabinet气体柜DPCDPCDPCDPCpower cabinet电源柜process cont

4、rollers过程控制器touch screens触摸屏SCL head assembly氮化硅浆夹头laminar flow filters净化空气过滤器Emergency ButtonDMCDMCDMCDMCETCMotor controllers马达控制器Overheat protection x2超温保护器 两个Shuttle穿梭机Conveyor tracking system传输轨道系统Head and fingers抓手pusherStocker shelves缓存架Automation screenR2D操作界面Scara robot机械手操作界面Determine opera

5、tional procedure:By TSC2:Recipe create and edit工艺的建立和编辑Temperature edit温度的编辑By touch-screen:Select recipe选择工艺Start recipe开始工艺Change Variable commands快速编辑工艺OrAll by TSC2Recipe create and editTemperature editSelect and start recipeChange variable commandsOrAll by touch-screenRecipe create and editTemp

6、erature editSelect and start recipeChange variable commands触摸屏只能控制单管，TSC2可以最多可以控制16管屏TSC2可以记录数据和工艺编辑屏Menu structure菜单结构4 safety levels1.System menu系统菜单2.Certifications系统设定3.Process recipes生产工艺4.Tube control炉管控制5.Monitor监控界面Daily use日常使用4.Tube control炉管控制6.= Select recipe选择工艺7.= Start/stop recipe开始停止

7、工艺8.= Change variable commands快速工艺编辑1.Easy to change2.No need for process access9.= Graphic process status图像化生产状态Actual only真实状态5.Monitor监控界面1.= Main detail status主要的详细状态Setpoint & actual显示设定值和真实值2.= Graphic process status图像化的生产状态Actual实际状态Monitor1.Main detail status1.Recipe info工艺信息2.Temperatur

8、e info温度信息3.Gasflow info气体流量信息4.Alarm info警告信息Daily use4.Tube control6.= Select recipe7.= Start/stop recipeDaily use4.Tube control炉管控制6.= Select recipe7.= Start/stop recipe8.= Change variable commands1.Short list process settings2.Easy to change parameters3.No need for process access4.Process engine

9、er decidewhich parameters available工艺工程师决定使用哪个参数Graphical structure图像架构3 sections三栏1.Title bar标题栏2.Main content主要内容区域3.Navigation bar功能栏Select tube fromhere or hereSelect action from here从这里选择动作Operations = touchscreen 4 tube control相当于触摸屏主菜单第4项的炉管控制Recipes =touchscreen 3 process recipes相当于触摸屏主菜单第3项

10、的生产工艺System =touchscreen 2 certifications相当于2项设定和1项的系统控制and 1 system controlData =touchscreen 5 monitor相当于5项的监控界面AlarmAlarmWETOXIDWETOXIDAlarmAlarmRecipe select选择工艺Recipe start开始工艺Variable commands快捷工艺Process information生产信息Recipe工艺Step步数Remaining time剩余时间Actual signals实时信号Temperatures温度Gasflows气体流量

11、Valves阀门状态Sensors 感应器Recipe editor工艺编辑Normal recipes for process一般生产工艺Abort recipes for safety安全中断工艺Unlimited recipes in TSC2普通的工艺Max 16 recipes in DPC 最多16个工艺在DPCCreate new recipe建立新工艺Based on existing基于现有的工艺Only from identical hardware !需要硬件相同From scratch从新编辑工艺LoggingHistory of process生产历史记录Approx

12、imately 1-1.5 years backlog大约能存1-1.5年的记录Filter time window using可以用时间过滤器找你想要的记录Time start-stopBatch IDRecipe nameReal timeFilter process parameters using可以根据生产的参数过滤记录dataset2Gb per tube for data loggingdatasetTimeR2D操作界面 (fully automation)R2D操作界面 (lift only)R2D softwarev4.2.1 built 17-08-2009 Operat

13、or modeAdministrator mode温度控制系统Spike TC外热偶Paddle TC内热偶cjb1 2 3 4 5 6 7 8 9 10 11Compensation wire热偶补偿线最好工作在50oC以下0.3高位=0.70.9 低位, 安装调试治具,使镭射光线透过所有目标空洞满载,确认舟取放状况(无异声,无晃动),Paddle底部到抽气管的高度大约是1.52cm.调试要点调试要点R2D系统定位系统定位1.在tempress设备完成硬件安装后,对R2D系统进行定位. 将2 Z轴left固定在loadstation上.Z轴Lift与loadstation之间的距离为423m

14、m. 使用镭射对垂直度进行确认.2.安装Z轴连接杆和Coupling.*在X-axis left安装之前不要锁紧螺丝.3.调整两Z轴滑块之间高度之差为70mm4.安装X-axis Left.5.利用镭射确认X-axis Left level.6.安装SCARA完成后,利用镭射确认Scara shafts在一直线上.,并且与X-axis成90度角.90度确认R2D手臂和paddle的平行度.按照其中一管paddle为基准调整完成后,在确认其他三管paddle和手臂也平行.WTS定位140mm113mm93mm203mm228mm10mm70mm10mm利用塞尺0.35mm和0.45mm对WTS的

15、抓手进行确认.对WTS定位进行确认和微调用镭射穿过下方片盒与wafer中心.确认head在运动过程中镭射线在吸嘴中心无变化.(+-1mm)完成上述确认和level后,在wafer上做上mark,确认lead的前后位置和真空夹位置在slot1和slot25的位置完全一致.(与CTS和WTS pusher位置)在确认lead和pusher位置完成后,讲wafer移动到WTS抓手处,确认在wafer上升后夹紧手的位置.左右应该保持一致,完成上述所有确认和LEVEL后,可以对R2Dsystem进行整体的位置teaching.R2D teachingKeypad按键AUTO/MANU:自动手动模式切换S

16、TOP:停止/取消SELECT:选择操作部位.(WTS-CTS-HEAD-BOAT stk-BUFIN-BUFOUT)Teaching时马达旋转速度切换.START/ENTER:开始/确认/位置选择确认在各个位置时所有的轴的手动动作键以及数字键或者可以利用manual motor菜单进行teaching.Teaching方法1.用Keypad选择所需要的R2D部件运动到所teaching的位置.2.确认位置已经是最佳状态.3.按Keypad上的START按钮,选择所需要保存的轴(如X,Y)4.在输入此时的位置号码.5.一次对所有位置teaching完毕后,进行搬送确认.位置文件完成所有的调整和

17、测试后,对R2D的WTS和CTS进行固定.利用图片中的专用脚架配与膨胀螺丝固定与地板上效果最佳.815C840C840CLoadHeat upPre-purgeDepositionDrive inProcess Recipe containsBlock = Steps0123456789Load unloadLoad inPaddle outHeat upPre-purgeDepositionPost purgeCool downPaddle inLoad out1 step schematic2 step schematicCooldown800CLoad inPaddle outPaddl

18、e inLoad outStep 0 special properties工艺设定工艺设定0123456789Load unloadStep 0 special propertiesDesigned as “standby“ stepNo timeMust receive “start” signalManuallyVia R2DNo “branch on alarm”Final target for “abort” commandNo “abort on alarm”Only place to select other recipeDPC remembers last settingStep

19、 0 program allStep 1-end program changes only0123456789Load unloadAlarm handling3 optionsDo nothingBranch on alarm to step 3 sec response timeSave wafersAbort on alarm30 sec response timeSave machineReturn to step 0abort1Process info-alarm handling0123456789Load unloadStep 0: define allMessage Load/

20、unload Sonalert Yes/NoNormal Temp.700800C Recipe 0 profile table ABoat to 10mm 600mm/min osc. 10mm (Up)Gas (1) N2 5slmGas (3) O2 low )sccmGas (6) *exhaust 5 PaGas (7) N2 low 0sccmGas (8) POCl3 20CDig. Output (916) -0- V12 offAlarm on all analog output 0%Alarm on analog Input (6) N2 exhaust at 15 slm

21、 to 0%Alarm on Dig Input (1-8) 11x111 1=N2pressure, 2=Airpressure, 4=process exhaust, 5=UPSruns, 6=UPSlow, 7=tempSCR, 8=overheatAlarm on Dig Input (9-16) 111111xx 9=fanswitch, 10=pocltemp, 11=POCllevel, 12=custexh, 13=custgas, 14=r2dalarmabort1Process info-recipe commands0123456789Load unloadStep 1:

22、 program changes onlyMessage Boat in Sonalert NoTime 8 minNormal Temp.840C Recipe 1 profile table ABoat to 2550mm 600mm/min osc. 10mm (Up)Gas (1) N2 2slmGas (6) *exhaust -25 PaWait for Boat to reach setpointabort1Load inStep 2:Message Boat out Sonalert NoTime 8 minBoat to 10mm 1000mm/min osc. 0mm (D

23、own)Wait for Boat to reach setpointPaddle outcontinueAlarm and waitProcess info-recipe commands0123456789Load unloadStep 3:Message Heat up Sonalert NoTime 30 minNormal Temp.840C Recipe 1 profile table AGas (1) N2 6slmGas (6) *exhaust 5 PaWait for Temperature to reach setpoint within limitsWait for temperature in load zone to reach 838CA1Load inPaddle outHeat upTemp limitsWait for condition = A BCChange of setpoint leads to:Temp limits0C1CWait for condition = DENormal Temp.850C Recipe 3 profile table AD E0C1CBAA2A3Process i