奈米制造之量测与验证

1、奈米制造之量测与验证奈米制造之量测与验证扫描探针显微镜奈米量测技术与验证奈米的大小1奈米是原子大小的尺度奈米技术(nanotechnology,即毫微技术) 是处理1 奈米(nanometer,即毫微米)的世界.1 公尺的1000分之1 是1 公厘(mm, millimeter),1 公厘的l000分之1 是l 微米(, micron),1 微米的1000分之1 是1 奈米.l000 x 1000 x 1000,也就是10亿分之1 公尺为l 奈米.奈米量测技术与验证奈米的大小以人类为标准奈米量测技术与验证奈米技术NanoTechnology10亿份之1公尺=1奈米.处理这种极小世界的技术(奈米

2、技术),如今相当受到瞩目,因为奈米技术掌握资讯技术,生物技术,医疗,r在这方面的优势更是在生物体观察上开创了不一样局面,也提供了生物学者在实验上有了另一方面的思考方向.奈米量测技术与验证SPM (Scanning Probe Microscopes)STM (Scanning Tunneling Microscope)AFM (Atomic Force Microscope)NSOM (Near-Field Scanning Optical Microscope)MFM (Magnetic force and Resonance Microscope)SthM(Scanning Thermal

3、 Microscope)SCM (Scanning Capacitance Microscope)奈米量测技术与验证SPM (Scanning Probe Microscopes)0.2 nm穿隧电流Scanning TunnelingMicroscope STM10 nm热Scanning Thermal Microscope SThM2 nm侧力Lateral Force MicroscopeLFM20 nm近场光波Scanning Near-Field OpticalMicroscopeSNOM50 nm静电Electrostatic Force MicroscopeEFM0.2 nm磁

4、力Magnetic ForceMicroscope MFM横向解析度侦测物理量SPMs奈米量测技术与验证常用显微术比较清华大学材料系林鹤南教授扫描探针显微镜Scanning Probe Microscopy (SPM) 扫描穿隧式显微镜(STM) ,原子力显微镜(AFM) ,静电力显微镜(Electrostatic Force microscopy, EFM),磁力显微镜(Magnetic Force Microscopy, MFM),侧向力显微镜(Lateral Force Microscopy, LFM),近场光学显微镜(Near-field Scanning Optical Micros

5、copy, NSOM),表面电位显微镜(Surface Kelvin Microscopy, SKM),表面电容显微镜(Surface Capacitance Microscopy, SCM)扫描穿隧式显微镜(STM)奈米量测技术与验证扫描穿隧式显微镜奈米量测技术与验证STM 基本原理在金属探针及导电样品间加上电压,并将两著间距离维持在数 至数nm间,使探针尖端原子团与样品表面的量子穿隧电流保持定值,而测得表面结构形状,本技术可具有原子级之量测解析度.STM在所有SPM技术中具有最佳解析度,但由於无法在非导体上操作,故目前主要应用於基础性学术研究.奈米量测技术与验证穿隧电流(Tunneling

6、 Current)substrateThe gap between the probe and substrate must be less than nanometers.奈米量测技术与验证穿隧电流(Tunneling Current)I-V characteristic and first derivative for a quantum dot Schmidt, Nanoparticles 2004 www.univie.ac.at/./ methoden/rastersonden.htm奈米量测技术与验证穿隧电流(Tunneling Current)奈米量测技术与验证STM 解析度垂直

7、解析度主要局限於tunnel current的量测解析度,以目前技术而言,垂直解析度可以达到10pm (10-12m)面解析度主要局限於探针的直径奈米量测技术与验证扫描探针显微镜(SPM)奈米量测技术与验证扫描探针显微镜(SPM)奈米量测技术与验证探针范例以目前的探针而言,面解析度在理论上可以达到10 nm左右,但实际上会受限於其他因素,例如探针的干涉,而待测物表面必须镀上金属导电膜也会改变实际的物体形貌奈米量测技术与验证垂直段差的面量测解析度奈米量测技术与验证扫描探针显微镜(SPM)奈米量测技术与验证扫描探针显微镜(SPM)量测原理奈米量测技术与验证STM的量测原理奈米量测技术与验证扫描探针

8、显微镜(SPM)量测原理奈米量测技术与验证NullingMeasurementMaintaining the tunneling current at a constant value by adjusting the probe height.奈米量测技术与验证NullingMeasurement/www.nobel.se/physics/educational/microscopes/scanning/奈米量测技术与验证STM 的三维扫描装置使用压电致动器(piezo-electric actuator)作为精密三维扫描之 Monolayer (SAM)Self-assembled mon

9、olayers (SAMs) are ordered molecular structures formed by the adsorption of an active surfactant on a solid surface. For example, alkanethiol monolayer films are assembled in a close-packed structure with a nearest neighbor spacing of 5.0 on Au(111) lattice.奈米量测技术与验证Research Using SPM Self-Assembled

10、 Monolayer (SAM)SAM is formed by soaking a piece of sample into a solution containing molecules. 奈米量测技术与验证Research Using SPM Self-Assembled Monolayer (SAM)A schematic of SAM (alkanethiol molecules in this case) formation on a sample 奈米量测技术与验证Research Using SPM Self-Assembled Monolayer (SAM)An ambien

11、t STM image of a typical alkanethiol(dodecanthiol in this case) SAM on Au(111) . 奈米量测技术与验证Research Using SPM NanolithographySTM probe can be used to make patterns on SAM by applying voltage pulse and therefore removing molecules at the nanometer scale. 奈米量测技术与验证Research Using SPM Nanolithography An

12、STM image of dodecanethiol SAM/Au sample after three consecutive voltage pulses (positive to sample) of 3.0 V for 0.5 seconds. Patterns of approximately 10 nm holes (removing dodecanethiol SAM) were created. The depth of each of the three pits is about 1.4 nm (clearly seen in the reversed topographi

13、c image), which is the length of dodecanethiol SAM. 奈米量测技术与验证Research Using SPM Nanolithography A Nanolithography example under programmed control of the STM tip 奈米量测技术与验证Research Using SPM Nanolithography -ReplacementAfter removing molecules, new kinds of moleclues can be inserted onto missing mole

14、cular positions by applying voltage pulse to STM probe in liquid containg new molecules. 奈米量测技术与验证Research Using SPM Nanolithography - ReplacementSTM image of a dodecanethiol SAM/Au in a liquid containing conjugate molecules (benzenethiol) after consecutive pulsing at three different locations showi

15、ng two peaks of adsorbed benzenethiolmolecules and one pit without adsorption (a). STM image, taken a few minutes later shows adsorption onto the third remaining pit (b). The height of peaks is about 0.7 nm above the background, which is consistent with the known length difference of the benzenethio

16、l (2.2 nm) and dodecanethiol (1.4 nm) molecules, indicating that dodecanethiolmolecules were replaced by benzenethiol molecules. 奈米量测技术与验证Research Using SPM Nanolithography -ReplacementA Nanolithography example under programmed control of the STM tip 原子力显微镜Atomic Force Microscopy(AFM)奈米量测技术与验证原子力显微镜

17、原子力显微镜的操作原理原子力显微镜之分类接触式非接触式间歇接触式原子力显微镜之探针原子力显微镜之解析度奈米量测技术与验证扫描探针显微镜具有三个传统显微镜无法达到的重大突破:扫描探针显微镜具有极高度的解析力扫描探针显微镜具有三维立体的成像能力扫描探针显微镜可以在多种环境下操作原子力显微镜比较奈米量测技术与验证原子力显微镜应用由於原子力显微镜对三维空间有极为出色的显像能力,并且可以在大气环境中直接进行影像视察,所以在很多科学上被受重用.materials science semiconductor physics biology electrochemistry organic chemistry

18、 catalysis micromechanics奈米量测技术与验证原子间作用力有几种典型的力量会造成原子力显微镜悬臂的歪斜,最普遍的是凡得瓦力(van derWaalsforce),其它还有如electrostatic, magnetic force, thermal gradients, and optical intensity, .奈米量测技术与验证原子间凡得瓦力和距离关系奈米量测技术与验证原子力显微镜(Atomic Force Microscope-AFM)原子力奈米量测技术与验证恒定-高度或恒定-力量奈米量测技术与验证原子间凡得瓦力奈米量测技术与验证原子力显微镜(Atomic Fo

19、rce Microscope-AFM)基本原理原子力显微镜(atomic force microscope, AFM)是由Binnig,Quate和Gerber於1986年G.Binnig, C.F.Quate, and Ch. Gerber, Phys. Rev.Lett.,56,930(1986) 所提出的.利用特制的微小探针,来侦测探针与样品表面间的某种交互作用,然后使用一个具有三轴位移的压电陶瓷扫描器,使探针在样品表面来回扫描侦测,并利用此扫描器的垂直微调能力及回馈回路,让探针与样品间的交互作用在扫描过程中保持一定距离(约10-10m),只要纪录扫描面上每一点的垂直微调距离,便可获得样

20、品表面的等交互作用图像,进而推导出样品表面特性.奈米量测技术与验证原子力显微镜(Atomic Force Microscope-AFM)基本原理原子力显微镜(atomic force microscope,AFM)当探针尖端与样品表面接触时,利用探针与样品间凡得瓦尔作用力的关系得知样品表面的起伏高低与几何形状,所使用的探针通常长度只有几微米,直径小於100埃,位於100 200m长的悬臂末端.利用一低功率雷射打在悬臂(cantilever)末端,当探针与样品非常接近时,两者之间产生的作用力会使悬臂弯曲或偏斜,利用一组感光二极体测量低功率雷射反射角度的变化,当探针扫瞄样品表面时随著样品表面的起伏

21、,反射的雷射光会有角度变化,然后由系统测量二极体电流因雷射光角度变化所产生的改变来推算悬臂弯曲的程度,输入电脑计算后就能产生样品表面三度空间的影像.奈米量测技术与验证原子力显微镜(Atomic Force Microscope-AFM)基本原理奈米量测技术与验证原子力显微镜(Atomic Force Microscope-AFM)基本原理AFM的微小探针通常是黏附在悬臂式的弹簧片上,当探针尖端与样品表面接近时,因力场而产生作用力,造成悬臂簧片的微小偏折,此簧片的弹性变形量,可以利用簧片后方的STM探针所测得,也可以利用电容感应法,光学侦测法来感测.在扫描过程中,簧片的偏移讯号可以转换成电流,输

22、入回馈回路,为了让作用力的讯号保持一定,所以需mples of AFM /reedlab/ research/spm/spm.html奈米量测技术与验证Examples of AFM /reedlab/ research/spm/spm.html奈米量测技术与验证Examples of AFM images Data/CD_stamper.htm奈米量测技术与验证Examples of AFM images Data/CD_stamper.htm奈米量测技术与验证Examples of AFM images

23、 Data/CD_stamper.htmChicken brain cell image.Scan obtained under liquid and in intermittent contact mode.奈米量测技术与验证Examples of AFM images Data/CD_stamper.htm奈米量测技术与验证原子力显微镜(Atomic Force Microscope-AFM)应用由於AFM具有原子级的解析度,是各种薄膜粗糙度( roughness)检测及微观表面结构研究的重要工具,也适合与STEM搭配成为从mm至 .尺寸的表面分析仪器;在奈米材料结构的制作上,已有多种可行

24、的方法,应用在超高密度记忆装置及次微米元件上;并可用来量测物体局部的杨氏系数,进行分子尺寸的机械量测.奈米量测技术与验证原子力显微镜(Atomic Force Microscope-AFM)原子力显微镜(AFM)和扫描穿隧式显微镜(STM)影像Latex Spheresilicon CarbideCalcium FluorideRaspberry PolymerHairThermal PaperRazor BladeCotton Fiber奈米量测技术与验证原子力显微镜(Atomic Force Microscope-AFM)原子力显微镜图像_物理科学Silicon Carbide Screw

25、3-D Surface profiling of a Silicon Carbide screw dislocation on a Frank crystal奈米量测技术与验证原子力显微镜(Atomic Force Microscope-AFM)原子力显微镜图像_物理科学Non-contact AFM image of human hairField of view 50 um (left) 5 um (right)Human Hair奈米量测技术与验证原子力显微镜(Atomic Force Microscope-AFM)原子力显微镜图像_物理科学Contact AFM image of co

26、tton fibers (taken in liquid).Razor Blade奈米量测技术与验证原子力显微镜(Atomic Force Microscope-AFM)原子力显微镜图像_物理科学Force Modulation and Phase Detection Image of Carbon Fiber-Epoxy CompositeField of view 15umCarbon Fiber Epoxy Composite奈米量测技术与验证原子力显微镜(Atomic Force Microscope-AFM)原子力显微镜图像_物理科学Tin Oxide FilmContact AFM

27、 profiling of a Tin Oxide filmField of view 4um奈米量测技术与验证原子力显微镜(Atomic Force Microscope-AFM)原子力显微镜图像_物理科学MgO FilmNon-Contact AFM image of MgO film on GaAs substrateField of view 0.3um (left) and 0.1um (right)奈米量测技术与验证原子力显微镜(Atomic Force Microscope-AFM)原子力显微镜图像_物理科学CVD Diamond FilmNon-Contact AFM of C

28、VD Diamond Film奈米量测技术与验证原子力显微镜(Atomic Force Microscope-AFM)原子力显微镜图像_物理科学Gallium Antimonide (GaSb) on Gallium Arsenide (GaAs) using UHV STMCover picture of the program for the 42nd AVS National Meeting.奈米量测技术与验证原子力显微镜(Atomic Force Microscope-AFM)原子力显微镜图像_物理科学Silicon (111) 7x7UHV Non-Contact AFM imagi

29、ng of Silicon(111) 7x7 using FM detection electronicsNon-contact AFM image of Si(111) 7x7. Multi-tip switching effects briefly resolve into a single tip image. Unit cell A exhibits a misplaced central atom.Field of view 270um奈米量测技术与验证原子力显微镜(Atomic Force Microscope-AFM)原子力显微镜图像_半导体Epitaxial SiliconIn

30、termittent-contact AFM image of (100) epitaxial siliconNon-contact AFM image of atomic terraces on epitaxial silicon showing 1.4 layer steps. Structure on steps may be defect-altered oxide growth.Field of view 1.6um奈米量测技术与验证原子力显微镜(Atomic Force Microscope-AFM)原子力显微镜图像_半导体Integrated CircuitNon-contact

31、 AFM image of an integrated circuit (IC).NC-AFM image of an integrated circuit.Field of view 30 um奈米量测技术与验证原子力显微镜(Atomic Force Microscope-AFM)原子力显微镜图像_半导体TrueMetrix Scan of NIST StandardSuper-Tip in Contact modeField of view 5 um奈米量测技术与验证原子力显微镜(Atomic Force Microscope-AFM)原子力显微镜图像_半导体PolysiliconInte

32、rmittent-Contact AFM image of PolysiliconField of view 2 um奈米量测技术与验证原子力显微镜(Atomic Force Microscope-AFM)原子力显微镜图像_data storageNon contact AFM image of a compact diskCD Bit MetrologyA polycarbonate replica. Field of view 10 gm奈米量测技术与验证原子力显微镜(Atomic Force Microscope-AFM)原子力显微镜图像_data storageNon contact

33、AFM image of a laser zone texture on a hard disk. Field of view 26 gmLaser Zone Texture奈米量测技术与验证原子力显微镜(Atomic Force Microscope-AFM)原子力显微镜图像_data storageLaser Zone TextureCross-section line analysis of the laser-zone texture bump shown above.奈米量测技术与验证原子力显微镜(Atomic Force Microscope-AFM)原子力显微镜图像_data s

34、torageMagnetic Force Microscopy image of magnetic domains in the servo tracks of a hard disk.The bright and dark lines indicate transition between the longitudinal bits.Field of view 100 gmHard Disk奈米量测技术与验证原子力显微镜(Atomic Force Microscope-AFM)原子力显微镜图像_data storageHard DiskNear-Field Magnetic Force Mi

35、croscopy (MFM) and topography of glass hard disk sampleMagnetic force microscopy (MFM) and topography images of a glasshard disk. Topography image taken separately using IC-AFM.Field of view 25 gm (left) and 10 gm (right)奈米量测技术与验证原子力显微镜(Atomic Force Microscope-AFM)原子力显微镜图像_data storageSilicon Planer

36、 HeadCritical Dimension Measurements of Active DevicesTopography (left) and Magnetic Force Microscopy (right) images.Field of view 6.5 gm (left) and 3 gm (right)奈米量测技术与验证原子力显微镜(Atomic Force Microscope-AFM)原子力显微镜图像_生命科学F-actinBiomolecular Ultrastructure: Non-Contact AFM of F-actinNon-contact AFM imag

37、e of F-actin on Sapphire.Field of view 0.8 gm奈米量测技术与验证原子力显微镜(Atomic Force Microscope-AFM)原子力显微镜图像_生命科学Collagen FibersC-AFM image of collagen fibers in airCollagen fibers in air, C-AFM Error Signal ModeField of view 3 gm奈米量测技术与验证原子力显微镜(Atomic Force Microscope-AFM)原子力显微镜图像_生命科学C-AFM image of irradiate

38、d chromosomesIrradiated Chromosomes奈米量测技术与验证原子力显微镜(Atomic Force Microscope-AFM)原子力显微镜图像_生命科学Ivy LeafC-AFM image of a pore or stomata on the underside of an ivy leaf.Contact AFM of the stomata or guard cells on an ivy leafField of view 60 gm奈米量测技术与验证原子力显微镜(Atomic Force Microscope-AFM)原子力显微镜图像_生命科学Sup

39、ercoiledDNAField of view 600 nm (left) and 675 nm (right)奈米量测技术与验证原子力显微镜(Atomic Force Microscope-AFM)原子力显微镜图像_生命科学Near Contact Image of Soft Sample DNAField of view 400 nm奈米量测技术与验证原子力显微镜(Atomic Force Microscope-AFM)原子力显微镜图像_生命科学Tobacco Mosaic Virus (TMV)Field of view: 5000 nm奈米量测技术与验证原子力显微镜(Atomic F

40、orce Microscope-AFM)原子力显微镜图像_生命科学Nuclear Pore ComplexesBiomolecular Ultrastructure; C-AFM of Nuclear Pore Complexes on RBL-2H3 CellContact AFM images of Nuclear Pore Complexes taken using 0.6 g sharp Microlever.Field of view 1.8 gm奈米量测技术与验证原子力显微镜之分类接触式(Contact AFM)非接触式(Non-Contact AFM)间歇接触式(Intermit

41、tent-Contact AFM)奈米量测技术与验证原子力显微镜(Atomic Force Microscope-AFM)操作模式接触式(contact mode)是探针在扫描时总是接触著材料的表面.在此操作模式下,探针与样品表面间的作用力是原子间排斥力( repulsive force ).由於排斥力对距离非常敏感,所以接触式AFM较容易得到原子解析度,但因探针与样品间的接触面积极小,虽然其作用力很小,约只有10-610-10牛顿,仍会损坏样品,尤其是软性材质,但是较大的作用力通常会取得较佳的解析度,所以选择适当的作用力便十分重要了.奈米量测技术与验证原子力显微镜(Atomic Force

42、Microscope-AFM)操作模式接触式(contact mode)奈米量测技术与验证接触式原子力显微镜接触式AFM是一个排斥性的模式,探针尖端和样品之间做柔软性的实际接触,当探针尖端轻轻的扫过样品表面时,接触的力量引起悬臂弯曲,进而得到样品的表面图形.由於是接触式扫瞄,在扫瞄样品时可能会使样品表面变形.经过多次扫描后,探针或者样品有钝化的现象.奈米量测技术与验证原子力显微镜(Atomic Force Microscope-AFM)操作模式非接触式(non-contact mode)探针与材料表面总维持著一定的距离.利用原子间的长吸引力凡得瓦尔力( Van der waals force

43、)来运作,不过此力对距离变化的敏感度小,因此必须使用调变技术来增强讯号杂讯比.非接触式AFM一般只有50nm的解析度,不过在真空中即可得到原子级的解析,此操作方式的发展原因乃是为了解决接触式损害样品的缺点.奈米量测技术与验证原子力显微镜(Atomic Force Microscope-AFM)操作模式非接触式(non-contact mode)奈米量测技术与验证非接触式原子力显微镜需要使用较坚硬的悬臂(以防与样品接触)所得到的信号很小,需要更灵敏的装置由於为非接触状态,对於研究柔软或有弹性样品较佳探针不会有钝化的效应误判的现象奈米量测技术与验证原子力显微镜(Atomic Force Micro

44、scope-AFM)操作模式轻敲式(tapping mode)介於接触式和非接触式之间.探针以高频在z方向振动,但其振幅较非接触式小,而且每一振动周期中,探针在振荡底部和样品表面接触一次.与非接触式比较,由於此式直接接触样品表面,因此解析度提高为5至10nm;而与接触式比较,虽然解析度较差,但破坏样品的机率却大为降低,同时也较不受摩擦力的干扰.由於高频率敲击的影响,对很硬的物体而言,探针针尖可能受损,而对很软的样品,则样品仍可能会遭到破坏.奈米量测技术与验证原子力显微镜(Atomic Force Microscope-AFM)操作模式轻敲式(tapping mode)奈米量测技术与验证间歇接触

45、式原子力显微镜类似非接触式AFM比非接触式更靠近样品表面探针有时会击中,或轻打样品表面损害样品的可能性比接触式少(不用侧面力, 摩擦或拖曳)样品表面起伏较大的大型扫描比非接触式更有效磁力显微镜(Magnetic Force Microscopy, MFM)奈米量测技术与验证磁力显微镜MFM清华大学材料系林鹤南教授奈米量测技术与验证磁力显微镜MFM原理清华大学材料系林鹤南教授奈米量测技术与验证Examples of MFM Images清华大学材料系林鹤南教授奈米量测技术与验证Examples of MFM Images清华大学材料系林鹤南教授奈米量测技术与验证Examples of MFM I

46、magesMagnetic bits written with an MFM probe on perpendicular Co-Cr media with a NiFesublayer. The bits are about 180nm in size spaced 370nm, giving an equivalent area density of 5 Gbits/in2. 2.3 m scan courtesy Michael Azarian, Censtor Corporation. Magnetic bubbles and stripes in 8 m thick magnetic

47、 garnet film; 100 m scan. Such films were originally developed for magnetic bubble memories, in which external fields generate, annihilate, and move bubbles at high speed through the high-mobility, low-coercivity garnet. Garnet film courtesy of R.M. Westervelt, Harvard University. 近场光学显微镜(Near-field

48、 Scanning Optical Microscopy, NSOM)奈米量测技术与验证近场光学显微镜(NSOM)奈米量测技术与验证近场光学显微镜(NSOM)奈米量测技术与验证近场光学显微镜(NSOM)奈米量测技术与验证近场光学显微镜(NSOM)其他显微镜(Other microscopy)奈米量测技术与验证Scattering-type scanning near-field optical microscopy (s-SNOM)www.biochem.mpg.de/./personal/ Rainer/images/s-SNOM.JPG奈米量测技术与验证显微镜下微小世界Latex Sphe

49、res. Data by Christie Finney. 3D Rendering by Ben Grosser (Near Field Scanning Optical Microscope)/./gallery/ images/itgfanbook/nsom1.jpg奈米量测技术与验证扫描电容显微术奈米量测技术与验证扫描电容显微术奈米量测技术与验证Carbon nanotubescanning robe www.lif.kyoto-u.ac.jp/labs/ chrom/afm/nanotube1.jpgThe average length and cur

50、vature of nanotube was about 140 nm and 5.5 nm, respectively. 奈米量测技术与验证Nanoindentationwww.bbt.admin.ch/kti/ bilder/39002jpg.jpg www.iof.fhg.de/images/images_abt2/ scratch.JPG奈米量测技术与验证Quantum CorralSource:IBM图中的原子栅栏主要用於将电子之运动局限在栅栏内,在原子栅栏内的驻波现象可以使科学家了解量子力学的现象奈米量测技术与验证控制原子之移动Courtesy: IBM Research, Alm

51、aden Research Center 奈米量测技术与验证Tensile loading of the DNATensile loading of the DNA double-helix with the AFM: Complementary strands of DNA were covalently immobilized on an AFM probe and surface, allowed to hybridize and then loaded with the AFM. /gl/Images/ AFM%20DNA%20Pull%20.jpg

52、 奈米量测技术与验证DNA moleculeAtomic force microscope images of a DNA molecule partially covered with gold. The right image shows a modification introduced by the AFM tip. From LNM. Departmento Fsicade la Materia Condensada UAM. 奈米量测技术与验证Clever CantileversBiological samples can be screened for the presence

53、of particular genetic sequences using small beams (cantilevers) of the type employed in atomic force microscopes. The surface of each cantilever is coated with DNA able to bind to one particular target sequence. A sample is then applied to the beams. Binding induces a surface stress, which bends the

54、 affected beams by nanometers-not much, but enough to reveal that the bent beams found their specific targets in a sample.Biotechnology ProbesScientific America, September 2001奈米量测技术与验证IBM Millipede systemThis thermomechanical storagetechnique is capable of achieving data densities in the hundreds of Gb/in range, well beyond the expected limits for magnetic recording (60-70 Gb/in ). Whereas the readback rate of an individual probe is limited, high data rates can be achieved through the use of massive parallelism: in our Millipede