TFTLCD制造教材

1、Company Confidential Ver.Do not copy or distribute. Copyright 2010 CSOT入职培训0/68CHINA STAROPTOELECTRONICS TECHNOLOGYTFT-LCD制造CHINA STAROPTOELECTRONICS TECHNOLOGYCompany Confidential Ver.Do not copy or distribute. Copyright 2010 CSOT入职培训1/68CHINA STAROPTOELECTRONICS TECHNOLOGY课程内容课程目标了解TFT LCD产品轮廓建立TF

2、T LCD工艺流程概念1. TFT LCD概论2. 工艺流程与显示原理3. 新技术介绍CHINA STAROPTOELECTRONICS TECHNOLOGYCompany Confidential Ver.Do not copy or distribute. Copyright 2010 CSOT入职培训2/68CHINA STAROPTOELECTRONICS TECHNOLOGY TFT LCD概论概论 工艺流程与显示原理工艺流程与显示原理 新技术介绍新技术介绍Company Confidential Ver.Do not copy or distribute. Copyright 20

3、10 CSOT入职培训3/68CHINA STAROPTOELECTRONICS TECHNOLOGYn 技术、资金密集性的产业与艺术n 站在别人的肩上奋力一跳n 要做第一流的企业Company Confidential Ver.Do not copy or distribute. Copyright 2010 CSOT入职培训4/68CHINA STAROPTOELECTRONICS TECHNOLOGYTFT-LCD应用概论 n Thinner , Lighter (轻薄)n Power Saving (节能)n Flat Display (全平面)n High Definition (高

4、解像力, HD,FHD)产品特性CRTTFT LCDCompany Confidential Ver.Do not copy or distribute. Copyright 2010 CSOT入职培训5/68CHINA STAROPTOELECTRONICS TECHNOLOGY世界上第一台LCD显示器,1968年在RCA的David Sarnoff 研发中心制作出来 液晶被发现后, 并没有被加以利用, 直到经过80年后的1968年, 美国RCA公司的工程师利用液晶分子会随电压改变而排列, 进而使入射光线偏转的特性, 制造出世界第一台液晶显示器, 虽然第一台液晶显示器在美国诞生, 但真正加以

5、开发并商业化的却是在1970年代的SHARP与SONY . 从液晶被发现到应用于商业与民生用途, 花了约100年的时间, 巧妙的是, 液晶被发现的年代同时阴极射线管(CRT)也被发明! 但这两种显示器的发展却差了数十年, CRT独领风骚一个世纪, 但现在可确定的是 液晶显示器将取而代之, 并开创一个新的世纪! 附注 : 当时液晶发展过程遇到的瓶颈为半导体技术与制程尚未开始, 驱动液晶的微型化技术在那个年代不易达成, 直到1970年代半导体技术的发展, 液晶显示器才得以商业化!光学显微镜底下的液晶Company Confidential Ver.Do not copy or distribute

6、. Copyright 2010 CSOT入职培训6/68CHINA STAROPTOELECTRONICS TECHNOLOGYTFT-LCD应用概论 1.2 应用范畴 TFT LCD Audio / VideoCompany Confidential Ver.Do not copy or distribute. Copyright 2010 CSOT入职培训7/68CHINA STAROPTOELECTRONICS TECHNOLOGYFrom Display Search各应用类别成长率Company Confidential Ver.Do not copy or distribute.

7、 Copyright 2010 CSOT入职培训8/68CHINA STAROPTOELECTRONICS TECHNOLOGY特殊应用Company Confidential Ver.Do not copy or distribute. Copyright 2010 CSOT入职培训9/68CHINA STAROPTOELECTRONICS TECHNOLOGY TFT LCD概论概论 工艺流程与显示原理工艺流程与显示原理 新技术介绍新技术介绍Company Confidential Ver.Do not copy or distribute. Copyright 2010 CSOT入职培训

8、10/68CHINA STAROPTOELECTRONICS TECHNOLOGY模块组成要素 薄膜 薄膜n 背光源 (Back Light) n 偏光片 (Polarizer)n 玻璃+液晶 (Cell)n 驱动芯片 (Driver IC)n 其他零件Company Confidential Ver.Do not copy or distribute. Copyright 2010 CSOT入职培训11/68CHINA STAROPTOELECTRONICS TECHNOLOGY化学材料物理性材料电子零件型材料光学材料模块材料类别Company Confidential Ver.Do not

9、 copy or distribute. Copyright 2010 CSOT入职培训12/68CHINA STAROPTOELECTRONICS TECHNOLOGY单一像素结构漏极(Drain)源极(Source)水厂栅极(Gate)水龙头开关决定水是否可流过亦可决定水的流量大小每个像素皆有独立的开关元件(TFT)与储存电容(Cst)及像素透明电极(Pixel Electrode)B储存电容?透明电极Company Confidential Ver.Do not copy or distribute. Copyright 2010 CSOT入职培训13/68CHINA STAROPTOE

10、LECTRONICS TECHNOLOGYGate VoltagePixel Electrode像素电极Data Voltagen Gate功能 : 担任开与关的功能 n Data功能 : 负责将画面讯号送入像素中像素阵列电路示意图Company Confidential Ver.Do not copy or distribute. Copyright 2010 CSOT入职培训14/68CHINA STAROPTOELECTRONICS TECHNOLOGYTFT驱动简易原理图：四种必要电压的相互关系Company Confidential Ver.Do not copy or distri

11、bute. Copyright 2010 CSOT入职培训15/68CHINA STAROPTOELECTRONICS TECHNOLOGYTFT(Array)Thin-Film TransistorLC(Cell)Liquid CrystalLCMModuleCFColor FilterTFTLCD 制造概念Company Confidential Ver.Do not copy or distribute. Copyright 2010 CSOT入职培训16/68CHINA STAROPTOELECTRONICS TECHNOLOGYThin film 成膜Photo - photo-re

12、sist coating 光阻涂布Photo exposure 曝光Photo development 显影Etching 蚀刻Stripper 光阻剥离2.1 Array Process Flow Company Confidential Ver.Do not copy or distribute. Copyright 2010 CSOT入职培训17/68CHINA STAROPTOELECTRONICS TECHNOLOGYTFT substrate glassSource electrodeGate electrodeSiNxa-Sin+Al-NdMoMoNAlMoNSiNx (pass

13、ivation)ITOCSDrain electrodeReviewLayerThickness (reference value)1st3000 (AlNd: 17502000, Mo: 1200)2ndSiNx - 3500a-Si - 1100n+ - 4503rd2500 (MoNbuttom: 250, Al: 2000, MoNtop: 375)4th32005th700Company Confidential Ver.Do not copy or distribute. Copyright 2010 CSOT入职培训18/68CHINA STAROPTOELECTRONICS T

14、ECHNOLOGYTFT substrate glassTop viewaabbCompany Confidential Ver.Do not copy or distribute. Copyright 2010 CSOT入职培训19/68CHINA STAROPTOELECTRONICS TECHNOLOGYTFT substrate glassSiNxa-Sin+Al-NdMoMoNAlMoNSiNx (passivation)ITOSEMAAA-A cross-sectionBBB-B cross-sectionAlNdMoSiNxa-Si, n+MoNAlMoNPassITOCompa

15、ny Confidential Ver.Do not copy or distribute. Copyright 2010 CSOT入职培训20/68CHINA STAROPTOELECTRONICS TECHNOLOGY阵列检查设备Array 检查设备中文名英文名陈列检测设备装置Array Tester Machine光学自动外观检查装置Auto Optical Inspection Machine（AOI )特性测试设备TEG Prober Equipment激光修补仪Laser Repair Machine激光化学气相沉积修补设备Laser CVD Repair Machine断路或短路

16、检验装置O/S TEST of Machine微观/宏观检查装置Macro/Micro Check of Machine宏观检查装置Macro Check of Machine自动宏观检查装置Auto Macro Check of MachineCompany Confidential Ver.Do not copy or distribute. Copyright 2010 CSOT入职培训21/68CHINA STAROPTOELECTRONICS TECHNOLOGY阵列检查原理AOI的检查原理 : 是通过对相邻像素pattern的比较来检测是否有defectCompany Confid

17、ential Ver.Do not copy or distribute. Copyright 2010 CSOT入职培训22/68CHINA STAROPTOELECTRONICS TECHNOLOGYMacro的检查原理：是在Array基板摇动时，通过切换照明方式，从不同角度目视检查基板。从而可以检查出薄膜的厚度均匀性差别。Company Confidential Ver.Do not copy or distribute. Copyright 2010 CSOT入职培训23/68CHINA STAROPTOELECTRONICS TECHNOLOGYO/S short 的原理：通过对给电

18、侧施加200v的交流电压，给电端同基板的距离十分接近，形成电容，这样电压可以加到基板的线路，通过基板线路对交流信号的传送，在受电端检出，通过对放大后的信号的处理和判定，可以检出Open /Short缺陷。ACInputKHz給電側AMP基板Sensor sideCompany Confidential Ver.Do not copy or distribute. Copyright 2010 CSOT入职培训24/68CHINA STAROPTOELECTRONICS TECHNOLOGYLaser repair：根据坐标的信息，在短路的地方用，利用Laser 能量切断Company Conf

19、idential Ver.Do not copy or distribute. Copyright 2010 CSOT入职培训25/68CHINA STAROPTOELECTRONICS TECHNOLOGYLaser CVD : 以成膜方式修补断线Company Confidential Ver.Do not copy or distribute. Copyright 2010 CSOT入职培训26/68CHINA STAROPTOELECTRONICS TECHNOLOGYColor Filter 彩色滤光片以自然界的三原色进行混色, 并调整其亮度(灰阶)来呈现不同的色彩CF Glass

20、结构Company Confidential Ver.Do not copy or distribute. Copyright 2010 CSOT入职培训27/68CHINA STAROPTOELECTRONICS TECHNOLOGY光罩CF Process FlowBM 玻璃照射光照射光Process Flow : BMRGB( OC )ITO PS Company Confidential Ver.Do not copy or distribute. Copyright 2010 CSOT入职培训28/68CHINA STAROPTOELECTRONICS TECHNOLOGYBM PR

21、 Process Flow玻璃清洗BM光阻涂布(1)BM光阻涂布(2)Pre-cleanerSlit coater紫外线曝光显影烘烤去掉边缘光阻EBR(Edge Bead Rinse) (Spinless无此unit)AlignerDeveloperHot plate真空干燥Vacuum Dryer预烘烤与冷却Pre-bake & Cool plateCompany Confidential Ver.Do not copy or distribute. Copyright 2010 CSOT入职培训29/68CHINA STAROPTOELECTRONICS TECHNOLOGY光阻涂布旋转P

22、re-cleanerSlit coaterSpin coaterBM Glass清洗紫外线曝光显影去掉边缘光阻EBR (Edge Bead Rinse)AlignerDeveloper烘烤Oven真空干燥Vacuum Dryer预烘烤与冷却Pre-bake & Cool plateRed PR Process FlowCompany Confidential Ver.Do not copy or distribute. Copyright 2010 CSOT入职培训30/68CHINA STAROPTOELECTRONICS TECHNOLOGY绿色光阻涂布(1)绿色光阻涂布(2)Pre-cl

23、eanerSlit coaterSpin coaterR glass清洗紫外线曝光显影去掉边缘光阻EBR (Edge Bead Rinse)AlignerDeveloper烘烤Oven真空干燥Vacuum Dryer预烘烤与冷却Pre-bake & Cool plateGreen PR Process FlowCompany Confidential Ver.Do not copy or distribute. Copyright 2010 CSOT入职培训31/68CHINA STAROPTOELECTRONICS TECHNOLOGY蓝色光阻涂布(1)蓝色光阻涂布(2)Pre-cleane

24、rSlit coaterSpin coaterR,G glass清洗紫外线曝光显影去掉边缘光阻EBR (Edge Bead Rinse)AlignerDeveloper烘烤Oven真空干燥Vacuum Dryer预烘烤与冷却Pre-bake & Cool plateBlue PR Process FlowCompany Confidential Ver.Do not copy or distribute. Copyright 2010 CSOT入职培训32/68CHINA STAROPTOELECTRONICS TECHNOLOGYCF 制程检查项目(一)1.Pixel CD2.Overlay

25、3.厚度4.角段差5.段差(RGB膜厚差异)6.色度量测50060070080040020406080100透過率 波 長 (nm)2134Company Confidential Ver.Do not copy or distribute. Copyright 2010 CSOT入职培训33/68CHINA STAROPTOELECTRONICS TECHNOLOGYSide 1 ProcessLoad chamberUnload chamberSide 2 ProcessPre-cleanerRGB玻璃投入ITO sputteringITO膜溅镀ITO sputterUV曝照UV Ashe

26、rITO玻璃ITO glassCF ITO Process FlowCompany Confidential Ver.Do not copy or distribute. Copyright 2010 CSOT入职培训34/68CHINA STAROPTOELECTRONICS TECHNOLOGYPS光阻涂布(1)PS光阻涂布(2)Pre-cleanerSlit coaterSpin coaterglass清洗紫外线曝光显影去掉边缘光阻EBR (Edge Bead Rinse)AlignerDeveloper烘烤Oven真空干燥Vacuum DryerPre-bake & Cool plat

27、e预烘烤与冷却PS Process FlowPS : Photo SpacerCompany Confidential Ver.Do not copy or distribute. Copyright 2010 CSOT入职培训35/68CHINA STAROPTOELECTRONICS TECHNOLOGY50060070080040020406080100透過率 波 長 (nm)1.色度量测2. Rs量测3.穿透率量测4. ITO膜厚量测5. T/P量测6. PS CD,膜厚量测CF 制程检查项目(二)膜厚CDCompany Confidential Ver.Do not copy or

28、distribute. Copyright 2010 CSOT入职培训36/68CHINA STAROPTOELECTRONICS TECHNOLOGY最终检查(Final inspection)巨观检查光学检查前清洗光学检查出货Micro review微观检查Judgement & Sorting判定与品质分类Repair修补Company Confidential Ver.Do not copy or distribute. Copyright 2010 CSOT入职培训37/68CHINA STAROPTOELECTRONICS TECHNOLOGY在组合前先准备好彩色率光片（CF）及薄

29、膜电晶体（TFT）玻璃基板彩色滤光片薄膜晶体管1.在TFT及CF上涂上一层 化学薄膜(PI)( 2.在化学薄膜上开出纹路使液晶呈现一致性排列 for TN ) Cell Process FlowCompany Confidential Ver.Do not copy or distribute. Copyright 2010 CSOT入职培训38/68CHINA STAROPTOELECTRONICS TECHNOLOGY3.四周涂上框胶后再滴入液晶 ( ODF )4.把TFT 及CF基板在真空的腔体内进行高精密的组合5.将组合后的大基板切割成小尺寸面板6.切成小面板后上下两面进行偏光板贴附C

30、ell Process FlowCompany Confidential Ver.Do not copy or distribute. Copyright 2010 CSOT入职培训39/68CHINA STAROPTOELECTRONICS TECHNOLOGYPrintedcircuit board偏光板TFT框膠TABDriver LSIPhoto Spacer偏光板畫素電極液晶配向膜共通電極OvercoatColor filterBlack matrix成盒制程后示意图Company Confidential Ver.Do not copy or distribute. Copyrig

31、ht 2010 CSOT入职培训40/68CHINA STAROPTOELECTRONICS TECHNOLOGY传统制程与ODF制程比较 註: ODF 最早用於5代線毛细原理 v.s. One Drop FillingCompany Confidential Ver.Do not copy or distribute. Copyright 2010 CSOT入职培训41/68CHINA STAROPTOELECTRONICS TECHNOLOGY新的滴下式液晶注入法则是在先将液晶直接滴在玻璃上，然后在进行上下玻璃的对组。这种新的制程可以大幅节省灌液晶的时间与液晶材料，尤其在超大尺寸面板具有绝对的优势新旧差异:以三十吋面板为例，传统灌液晶方式灌一片大约需要五天的时间，ODF只需要2小时，并且节省约40%的液晶材料传统LCD的液晶注入方式，是在上下玻璃对组之后以毛细原理将液晶慢慢吸入，这种灌液晶方法缺点是非常耗时且浪费液晶 ODF 設备ODF制程优点Company Confidential Ver.Do not copy or distribute. Copyright