CT扩散炉培训教材(设备中英文版)

centrotherm扩散炉设备培训equipmenttrainingofcentrothermDiffusionfurnace

1.Centrotherm扩散炉的组成A．Loadingbox

推舟部分B.TGA

有毒气体排放C.Heatingfurnace

加热部分D.Gascabinet

气柜2.设备平面结构Equipmentplanestructure

1、CMI电脑2、Loadingbox上料箱3、Toxicgases

有毒气体排放4、Furnace

炉体5、Gasbox

气源柜3.Loadingbox上料箱

Baddlehead舟头Loadingwafer加栽的硅片4.Loadingbox上料箱

Mechanicalarm机械臂5.Loadingbox上料箱

Storagerack1，2

存储位1、2Paddlebearing,adjustablepaddleposition

碳化硅桨支座，调节桨位置6.TGA有毒气体排放quartzdoor石英门Doorcylinder炉门气缸7.Heatingfurnace炉膛1、CMSmodule3、Powerconnectioncover2、Thermocoupleconnection4、Temperaturesensormodule8.Gascabinet气源柜1、Flowmeter

气体流量计2、Pneumaticvalve

气动阀129.Coolingwaterinlet

andwatersystem冷却水系统Coolingtothetopofthefurnacebodyandfurnace对炉膛顶部和炉体进行冷却10.Thermostaticbath恒温槽OnthePOCL3constanttemperatureprocess,normaltemperature20degrees对POCL3进行恒温作用，正常工艺温度20度11.Siliconcarbidepaddle碳化硅桨Bearingquartzandsilicon,andoutofthecarriership承载石英舟和硅片石英舟进出的载体12.Rangedetectionalarm

范围检测报警器Detectionofarangeofwhetherobject,avoidhitboatphenomenon,thisrangecanbeadjusted检测某个范围内是否有物体，避免出现撞舟现象，些范围可进行调节13.

CommunicationNetworkOverview通信网络总览14.Heatingsystem加热系统15.Coolingsystem冷却系统1、Heatexchanger2、Cooling3、Shutoffvalve1、Cooling4、Heatexchanger2、Themainfan5、Electronicdevices3、Coolingtheairpassage16.AlarmlampinformationIndicatorlampcoloractionmeaninggreenopenReadytooperatetwinklepauseblueopenUserinteractionrequiredyellowopenwarningredShineshom:offAlarm\error17.Operationpanel操作面板operationpanel4keyboardTouchscreen5touchscreenbutton

USBsocket18.Operationpanel操作面板TheequipmenthasthefollowingbuttonStopaction--AllthemechanicalactionofloadingboxarestopLoadingboxlighting--open\closethelampoftheloadingboxAuto\handmanualswitch--Loadingandunloadingoftheoperatingsystemcanmanualoperationinanopenfeedingbox4Allowstounlock--Pressthisbutton,tounlockthecar19.Operationpanel操作面板1pushbuttonABCkeyboardcall4pushbuttonrightmousebuttonPushbuttontaskchange5pushbuttonshiftPushbuttonbrightnessABCkeyboardcall---callsup\clossesthekeyboardonthetouchscreen,keyboardentriescanbecarriedoutdirectlyonthetouchsceen.Pushbuttontaskchange---changesataskwindowsPushbuttonbrightness---pressthisbuttontogetherwiththeshifebuttontoincreasethebrightnessofthetouchscress.Pushbuttonrightmousebutton—opensrightmousebuttoncontextmenu,pressthisbuttontogetherwiththeshiftbuttontoreducethetouchscreen.Pushbuttonshift—callsupthesecondkeyboardlevel,pushthisbushbuttontogetherwiththerequiredfunctionbutton.20.CMIinterfaceCMI桌面信息Systemname7alarmcloseDatetime8notesCentrothermlogoandsystem9additionalinformationInformationbuttonCurrentdisplayareainthe10systemmodeInformationfield11connectionstatewithCEC\GEMSystemstatusLogin\logoutbutton21.CMIinterfaceCMI桌面信息Jobs4setupSystem5alarmsDatslog6help(onlinehelp)22.TheCMIuserinterface

CMI使用者桌面Titlebar3navigationbarCommandbar4informationfieldwithvariablefieldareas

23.简单介绍CESAR界面

AbriefintroductiontoCESARinterface

上图是CESAR的界面：1.系统工艺状态2.工艺时间状态3.时间日期4.气体流量状态5.系统准备状态6.温度检测显示ThisisaCESARinterface：1.Systemprocess2.Processtime3.Timeanddate4.Gasflowstate5.Systemreadiness6.Temperaturedetectionanddisplay24.CT操作注意事项

CToperationmattersneedingattention1.SLS处于“UP”位置时，管内有舟时不可手动进桨

SLSinthe"UP"position,theinnertubehasaboatcannotbemanuallyintothepaddle.2.SLS处于“DOWN”位置时，桨上有舟时不得手动进舟。SLSinthe"DOWN"position,thepaddleisnotmanuallyintotheboatboat.3.桨上有舟时，舟不在正确位置，不准切换到自动运行模式。Oarsonaboat,theboatisnotinthecorrectposition,arenotallowedtoswitchtoautomaticrunningmode.

25.CT操作注意事项

CToperationmattersneedingattention4.进舟、退舟失败报警时，一定要检查舟的位置是否在合理的位置，才可以对报警进行复位，自动/手动的切换要谨慎，若舟不在正确位置，请手动移至正确位置后再对报警进行复位（炉门以桨的位置作为开闭标准）

Intotheboat,boatbackfailurealarm,besuretochecktheboatpositionisinareasonableposition,canalarmreset,automatic/manualswitchmustbecareful,iftheshipisnotinthecorrectposition,pleasemanuallymovedtothecorrectpositionafterthealarmreset(doortopaddlepositionasopeningandclosingstandard)26.5.舟位于存储架（storage2,3）时，一定要确认存储架上的感应器有没有感应到，否则有可能导致撞舟。

Whentheboatislocatedonthestoragerack(storage2,3),makesurethatthestorageracksensorissensed,otherwisemaycausethebumpedboat.6.从手动切换自动时，Grip一定要在Middle位置，

否则机械臂可能因无法正常运行而报警。

Frommanualautomatic,GripmustbeintheMiddleposition,ormechanicalarmmaybeduetonormaloperationandalarm.27.7.进舟后，工艺无法运行，先确认舟在桨上的位置，以及Tube=readySLS=UPTGA=YES然后进行操作。

Intheboat,technologycannotrun,makesuretheboatontheoarposition,aswellasTube=readySLS=UPTGA=YESthenoperation.8.机械臂运动时不要上料，以免上料时抖动机械臂撞到舟。Asmechanicalarmmovementnotfeeding,inordertoavoidfeedingtimejittermechanicalarmhittheboat。9.单一炉管有故障时，应该及时琐闭并降温，以节约能源。Singletubehasfault,shouldbetimelyandclosedandcooling,inordertosaveenergy.28.常见故障1.ProcessrecipehasterminatedwitherrorstateAC进行中的工艺以错误状态结束―――警报确认Tostore储存Tostoreenableunload储存并缷下Restartrecipe重新开始工艺A――用于选错工艺号，手动结束工艺，

重新开始新的其他工艺时进行选择B――多数情况下选择此项C――工艺中断需要重新进行时选择，但不建议使用，

建议选择（B）ProcessrecipehasterminatedwitherrorstateACOngoing

processto

end

theerrorstatus―――Alarm

confirmationTostoreTostoreenableunload

Restartrecipe

A――Used

thewrong

process

number，Hand

endofthe

process，Startanew

choice

when

other

processesB――Inmostcases,

choicethisoneC――Interrupts

needtore-process

theselection,

but

notrecommended,

recommendedtochoose

(B)。29.Boatalreadyintube-------Select:{Process=0.Unload=1}(……….)选择0或1

说明：当管内有舟存在时，异常排除

后手动运行工艺时会出现此提示Boatalreadyintube-------Select:{Process=0.Unload=1}(……….)

Description:Whenthe

tube

has

aboat

there,theexception

ruleout

runningprocess

manuallyafter

thisprompt

willappear.30.Losthomingcheckpoti失去引导，检

查位置（一般此警报会自动解除）说明：此警报会自动解除，但需要

检查一下桨是否在原点位置即可LosthomingcheckpotiCheckthe

location

(usually

the

alarm

willbeautomaticallylifted)

Description:This

alarm

willbeautomaticallylifted,

butneedCheck

whetherthe

origin

location

to

paddle31.4.Recipeabort2--------processaborttocontinue:enterAB工艺退出――――运行终止！继续，请输入AB说明：对工艺异常结束的手动确认，然后就会出现报警

Recipeabort2--------processaborttocontinue:enterABDescription:The

manual

confirmation

process

ends,5.Recipecouldn’tbestartedpleasecheckprotocolforreason!

工艺不能运行，请检查原因

Recipecouldn’tbestartedpleasecheckprotocolforreason!

32..6.Boatsensorofgradhaschangedwithoutpermission机械手上的传感器被非允许的改动说明：机械臂在上下移动的时候，前后不能移动，若前后位置发生移动机械将被锁定，出现报警，此报警需设备人员的密码登陆在Handing对话框中的Tech模式下进行复位BoatsensorofgradhaschangedwithoutpermissionDescription:The

roboticarmto

moveupanddown

when

youcannotmove

around,if

thelocation

ismoved

aroundthe

machine

willbelocked,

analarm,the

alarmequipment,

personnel

needto

log

in

apassword

dialogbox

inthe

Tech

Handingreset

mode33.

7.Thereisalreadyanactiverecipe工艺名fromlocaltisting

已有×××工艺在此管的工艺列表中说明：这两个报警经常出现，若能够确认此管未有工艺在运行，就必须将此管重新启动，如果有工艺运行，可以将工艺手动停止，

或者等待工艺结束。

The