讲稿芯源-ntcc会议r14338r0-ltr2sth ks creport

Date:December29,Mr.Henry :STHInternationalCertificationGroupKINGSEMINo.16,FeiyunRoadHunnanNewDistrict,Shenyang, SEMIS2-0712LetterReportforKINGSEMIAutomaticCoater/DeveloperModelKS-Report R14338R0-LTR2KS-Thisletterandtheattachedreport(producedbySTH)representtheresultsoftheevaluationoftheKINGSEMIAutomaticCoater/DeveloperModelKS-C300/200Coater/DevelopertotheapplicablerequirementsoftheEnvironmentalHealthandSafetyGuidelineforSemiconductorManufacturingEquipment,SEMIS2-0712Guidelines.ESTECSolutions,Inc.(ESTEC)reviewedSTH Number:STH141002V2andconcurswiththeresultsdescribedinthisreport.Resultsdescribedinthereport,testmethodsordatagatheredwasdonebySTHInternationalCertificationGroup.ThereportwasreviewedbyESTECandfoundtocontaininformationasrequiredbythespecificSEMIsandarereferencedintheappropriatesectionsofthisreport.SincenophysicalsystemevaluationwasperformedbyESTEC,thedeterminationofconformancewiththerequirementswasbasedsolelyontheinformationprovided.ThisletterappliesexclusivelytotheSTHreviewoftheKINGSEMIAutomaticCoater/Developer.Nootheruseisimpliedorintended.PleasefeelfreetocontactusifyouhaveanyPaul AndrewChief DirectorofIndustrialAttaent:STH Number:STH141002V2KINGSEMIAutomaticCoater/DeveloperESTECSolutions,12901SchleicherAustin,TXFINALFINAL OFTHEAutomaticCoater/DeveloperTOSEMI®S2-0712b&S8-0712aKINGSEMI No.16,FeiyunHunnanNewDistrict,Shenyang,ReportNumberDecember12,DIThissafetyysishasbeenperformedexercisingourbestskillsandjudgmentaccordingtothebestofourknowledgeandbeliefandbasedoninformationgatheredfromsourcesbelievedtobereliableandtheinformationdtousbyyouandyourrepresentatives.ThisysisisnotanassumptionorundertakingonbehalfoforforthebenefitofKINGSEMICo.,.orothersbySTHInternationalCertificationGroupofobligationsimposeduponKINGSEMICo.,byanystatute,law,regulation,orlegaldecision. mendationsarepurelyadvisoryinnatureandanydecisiononriskreducingmeasuretobetakenaswellastheirimplementationandcontrolisthesoleobligationandresponsibilityofKINGSEMICo.,.Norepresentationismadeorintendedthatimplementationofour mendationswillfulfillyourobligationsasmayberequiredbyanycontractualrelationship,lawstatuteregulation,orlegaldecisionorrendertheequipmentfreeofhazardorloss.Norepresentationismadethatallnecessarysafety mendationsarecontainedinthisreport,orthatotheroradditionalmeasuresmaynotberequiredunderparticularorexceptionalconditionsorTableofEXECUTIVE SYSTEM SCOPEOFREVIEW/ YSIS/TEST Section9:sProvidedto Section10:HazardWarning Section11:SafetyInterlock Section12:Emergency Section13:Electrical Section14:Fire Section15:HeatedChemical Section16:ErgonomicsandHuman Section17:HazardousEnergy Section18:Mechanical Section19:Seismic Section20:AutomatedMaterial Section21:Environmental Section22:Exhaust Section Section Ionizing Section Non-IonizingRadiationand Section Section SoundPressure ListofAppendixA SEMI®S10HazardandRiskAssessmentAppendixB SEMI®S14FireRiskAssessmentAppendixCSEMI®S8Ergonomics(SESC)ChecklistAppendixDSeismic AppendixE ReviewofManualstoSEMI®S13AppendixF InterlockTestingAppendixGSEMI®S22ElectricalDielectricWithstandInputCurrentTemperatureRiseInsulationGroundContinuityTestAppendixHIndustrialHygiene(IH)TestingNoiseLevelSurfaceTemperatureAppendixI VaporGenerationandDilutionCalculationsAppendixJ EquipmentPhotosListofTable10.1–HazardWarningTable13.4.3–CriticalElectricalTable18.8–PotentiallyHazardousSurfacePagePageKINGSEMICo., .manufacturestheKS-C300/200AutomaticCoater/Developer,foruseinthesemiconductormanufacturingindustry.Themodelconsistsoftwocoaterunitsandtwodevelopersunits,orfourdeveloperunits,orfourcoaterunits,orthreecoaterunitsandonedeveloperunit,oronecoaterunitandthreedeveloperunits.ThisreportsathirdpartysafetyevaluationoftheKS-C300/200whichconsistsofthreecoaterunitsandonedeveloperunitasarepresentativemodeltoSEMIS2-0712bandallapplicable,supportingSEMI“S”standards.Inaccordancewithparagraph6.8ofSEMI®,S2-0712bariskassessmentandextensivehazardyseswereperformed.ThesafetyysisedinthefollowingreportrepresentsthelatestconfigurationasofthedateofthisEvaluationEvaluation HenryWu LeeoLiuQualificationofevaluators: SeniorEngineer, DateofEvaluation:2014.10.21-2014.10.24Numberofreport:STH141002V2HazardmendationsnecessarytobringthesystemincompliancewithSEMI®S2-0712bweremade.Theissueswererelatedmostlytohazardidentificationbothontheequipmentandinthesystemmanuals,andreplacingcertainelectricalcomponentsinordertocomplywithSEMIstandardsrequirement.ThetypesofhazardsassociatedandthemitigationinplacewiththeKS-C300/200designaresummarizedbelow:Electrical.TheelectricalhazardsincludeelectricalshockatcomponentlinevoltageterminalsinthemainACenclosure.Theelectricalshockhazardsaremitigatedthroughenclosinglinevoltageterminals,requiringtoolaccess,andhazardwarninglabels.Electricalfirehazardsaremitigatedbyadequateovercurrentprotectionforthecomponentswhichwasverifiedintheysis. Coater/Developerincludepinchandcrushhazardsatthewaferhandlingrobotandmovingspraynozzles.Thepinchandcrushhazardsassociatedwiththemovingpartsaremitigatedbyenclosingthemovingpartswithinenclosureswithinterlockedswitchandhazardwarninglabels.Chemical.ThechemicalsusedinthespraycoatingprocessesPhotoresist(HD8820/HD4100/JSR151)forcoatingtheDeveloliquid(RZX-3038/KS5400/KS7200)fordevelotheAcetone/IPA/ADP8000/EBR7030forcleaningthewafersEthanolisspecifiedforuseforcleaningtheequipment.S29.ModelKS-C300/200manualsprovidedandwerefoundto10.HazardWarningHazardwarninglabelspostedandidentifiedinmanuals11.SafetyInterlockInterlocksarehardwaredoorinterlockswitch,liquidleakagedetection,liquidleveldetection,hottemperaturedetection,exhaustairpressuredetection,chemicalconcentrationdetectionprovided12.EmergencyEMOoperationmeetsSEMI13.ElectricalSystemnameplateprovided.Groundterminalsprovided.Maindisconnectingswitchprovided.ComplywithSEMIS22requirement.14.FireTemperaturedetection,chemicalconcentrationdetectionprovided.Fireproofplasticmaterial15.HeatedChemicalNoheatedchemical16.ErgonomicsandHuman“HeavyWeight-LiftingHazard”warninglabelispostedontherobot.Loadingandunloadingcassettesisperformedmanually.Forthemanualloading,theloadheightofthecassetteplatformmeetstherequirement.Operatorbutton,EMO,displayscreen,plywithSEMIS817.HazardousEnergyLockoutcapabilityforelectrical,patics18.MechanicalWaferhandlerisenclosedandaccessinterlocked.liftingequipmentisprovidedwiththeequipment..19.SeismicCGandseismicanchoringlocationsidentified.20.AutomatedMaterialNoautomatedmaterial21.EnvironmentalMethodsforwastetreatment22.ExhaustDetailsonexhaustmonitoringprovided.23.Secondarycontainmentvaporleaksensors24.IonizingNosourcesofionizing25.Non-IonizingNosourcesofnon-ionizing26.Nolaser27.SoundPressureNoiselevelverifiedtobe<70dB(A).TheKS-C300/200AutomaticCoater/Developerisdesignedtoperformwafercoatingprocesseson300/200mmwafers.ThesystemconsistsofaCassetteStation(CS),AutomaticCoater/Developer,ChemicalDelivery,WaferHandler,AlignerModule,HotPlate,ACpowerdistribution,andexhaust.Thewaferhandlerretrieveswafersfromcassettesthatareplacedintheloadportsbyoperatorsandtransfersthemtothealigner,coater,developerandhotplatesubsystemsforprocess.TheKINGSEMIAutomaticCoater/DeveloperKS-C300/200systemoperateson380VAC,3-phasepowerataratedamperageof105A.PagePageSCOPEOFREVIEW/Thescopeoftheevaluationwastoidentifythehazardstooperators,assembly,maintenanceandtest nelandthefacilitiesfromtheKS-C300/200AutomaticCoater/Developer.Theysisidentifiedthemajorpotentialhazardsinherenttothesystem.Inadditiontoidentifyinghazards,themethodbywhichthehazardsarecontrolledormitigatedwasevaluatedanded.ThisreportisbasedonevaluationandinspectionofasysteminfinaltestattheKINGSEMICo.,.facilityinShenyang,China.Theysisisalsobasedonreferencetooperatorandmaintenancemanuals,componentandsystemschematicdrawings,designandsoftwarespecificationsandcorrespondence,meetings,existinghazardysisdataandparticipationinhazardyseswithKINGSEMIAspartoftheysis,thesystemwasreviewedforconformancewiththeapplicableportionsofvariouscodesandstandards.Theslistedbelowwerereviewedforapplicabilityandusedasreferencesduringtheevaluation.InternationalBuildingCode(IBC),NFPA70,NationalElectricalCode(NEC),NFPA79,ElectricalStandardforIndustrialMachinery, SemiconductorManufacturingEquipmentANSIZ535.4,ProductSafetySignsand S8-0712a,Safety EngineeringofSemiconductorManufacturingEquipment S10-0307ESafety EvaluationProcessSEMI®S12-0211GuidelinesforEquipmentSEMI®S13-0113SafetyGuidelinesForOperationAndMaintenanceManualsUsedWithSemiconductorManufacturingEquipment.SEMI®S14-0309,SafetyGuidelinesforFireRiskAssessmentandMitigationofSemiconductorManufacturingEquipment. S22-0712a,Safety SemiconductorManufacturingEquipment.PagePage susedintheevaluationKS-C300/200OperationManual,Version1.0,OctoberKS-C300/200MaintenanceManual,Version1.0,OctoberNote:safetyrequirementsaredescribedintheoperationmanualandmaintenancePagePageYSIS/TESTHazardandRisk ysis.Hazard ysisisasystemsengineeringtechniquedesignedtoidentifyhazardstooperationsand nel,theassociatedequipmentandtothefacility.Thetypesofpotentialhazardsthatarepresentincludeelectricalfire,electricalshockandburn,andpinchandcrush.Thehazard ysisandriskassessment,performedtoSEMI®S10issummarizedinAppendixA.FireRiskAssessment.ThesystemwasevaluatedagainsttherequirementsofSEMI®S14,FireRiskAssessmentofSemiconductorManufacturingEquipment.AcopyoftheevaluationreportiscontainedinAppendixB.Ergonomics/Taskysis.Aspartofthisevaluation,inaccordancewithparagraph16ofSEMI®S2-0712b,theoperationandserviceprocedureswerereviewedfortasks,whichcouldcausemusclestressandstrain.SEMI®S8-0712aandtherErgonomicSuccessCriteria(SESC)wereusedintheevaluation.TheresultsoftheergonomicassessmentareprovidedinAppendixC.Seismicysis.Theseismictiedowndesignforthesystemwasevaluatedforsusceptibilitytoforcesresultingfromseismicaccelerations.AcopyoftheysisreportisprovidedinAppendixD.EvaluationofManualstoSEMI®S13.ThesystemmanualswereevaluatedtoSEMI®S13aspartoftheevaluation. mendationsweremadetoKINGSEMItechnicalwritingdepartment,whichwereincorporated.ThemanualsnowconformtoSEMI®S13.AcopyoftheSEMI®S13evaluationreportisincludedinAppendixE.PagePageINTERLOCKActivationofthesafetyrelatedinterlocksandtheEmergencyStopcircuitwereobservedatthefactory.AcopyofthetestreportisprovidedinAppendixF.ELECTRICALHiPotTesting.HiPottesting(dielectricbreakdown)wassuccessfullyperformedonasystematthefactory.AcopyofthetestreportisinAppendixG.GroundContinuity.Measurementsfor togroundweremadeonanon-energizedcompletesystem.AcopyofthetestreportisinAppendixG.InputCurrentTest.Theinputcurrentwasmeasuredwiththesystemoperatingatfullloadtoverifythattheratingofthemaincircuitbreakerisatleast115%ofthefullloadcurrent.AcopyofthetestreportisinAppendixG.TemperatureRise.TemperaturesofelectricalcomponentsinthemainACenclosureweremeasuredwiththesystemoperatingatfullloadtoverifyanacceptabletemperaturerise.Theambienttemperatureinsidetheenclosurewasalsomeasuredtoverifythatitislessthan40oC.AcopyofthetestreportisinAppendixG.Insulation.Aninputvoltageof500VDCwasinjectedintothemainACconductorstomeasuretheoftheinsulation.Theminimumacceptableis1mega-ohm.AcopyofthetestreportisinAppendixG.INDUSTRIALHYGIENE(IH)NoiseLevelTesting.NoiselevelmeasurementsweremadearoundthesystemtoverifythattheumnoiselevelsallowedinSEMI®S2andOSHAarenotexceededbythesystem.AcopyofthetestreportisprovidedinAppendixH.PagePageSAFETYThissectionofthe ysisreport stheresultsofthehazard ysisandsafetyevaluationoftheKS-C300/200AutomaticCoater/Developerdesign.Thesafetyassessmentalso stheconformanceornon-conformancesofthesystemdesignand ationtoSEMI®S2-0712b.Theresultsoftheysisareincorporatedintoalinebylinediscussionoftheconformanceofthesystemtotheguidelines.EachparagraphisnotedwithConformstotheStatedCriteria,ConformstotheStatedPerformanceCriteria,DoesNotConform,orN/Aasdescribedbelow.Conforms Conforms Doesnot ConformstotheStatedCriteria(ConformsTSC)-notesconformancewiththeparagraphorsub-paragraph.ConformstothePerformanceGoal(ConformsDoesNotConform-statesthatthesystemdoesnotmeettherequirementsandisgenerallyfollowedby N/A-appearswhentheparagraphorentiresectionisnotTherequirement,aswritteninSEMI®S2-0712b,isincludedforSection sProvidedto ManualsBasedonOriginalIntendedrshouldprovidetheuserwithmanualsbasedontheoriginallyintendeduseoftheequipment.Theshoulddescribethescopeandnormaluseoftheequipmentandprovideinformationtoenablesafefacilitization,operation,maintenanceandserviceoftheequipment.ConformsTSC Conforms DoesNot ThesystemmanualsprovidedwithKS-C300/200AutomaticCoater/Developerarebasedontheintendeduseofthesystemwhichistoapplyphotoresistchemicals,develochemicalsandsolventstosemiconductorwafers. ConformancetoSEMI®ThemanualsshouldconformtoSEMI®ConformsTSC Conforms DoesNot ThesystemmanualsconformtoSEMI®S13Page InclusionsbeyondSEMI®InadditiontotheprovisionsofSEMI®S13,themanualsshouldSpecificwritteninstructionsonroutineType4tasks,excludingtroubleshooting(refertoSection13.3);instructionsforenergyisolation(“lockout/tagout”)(refertoSection17.2);descriptionoftheemergencyoff(EMO)andinterlockalistofhazardousmaterials(e.g.,lubricants,cleaners,coolants)requiredformaintenance,ancillaryequipmentorperipheraloperations,includinganticipatedchange-outfrequency, ty,andpotentialforcontaminationfromtheprocess;alistofitemsesolidwasteasaresultoftheoperation,maintenanceandservicingoftheandthatareconstructedoforcontainsubstanceswhosedisposalmightberegulated(e.g.,beryllium-containingparts,vaporlamps,mercuryswitches,batteries,contaminatedparts,maintenancewastes);maintenanceandtroubleshootingproceduresneededtomaintaintheeffectivenessofsafetydesignfeaturesordevices(i.e.,engineeringcontrols);andinstructionsforproperuse,maintenance,andinspectionofliftingequipment dbytheSME includinganyguidanceonspecificinspectionintervals.Forliftingequipmentspecifiedor mended,but d,bytheSME r,the ationprovidedbytheSME rshouldspecifythatsuchinstructionsbeobtainedbytheuserfromitsliftingequipment TSC Conforms DoesNot TheKS-C300/200manualswereevaluatedandfoundcontainthedatacorrespondingtothenumbereditemsintheparagraphabove:TherearenoType4TheOperatorManualhasasectionforlockoutandtagoutoftheTheaccessdoorinterlocksandEMOcircuitfunctionsaredescribedintheOperatorManual.AlistofhazardousmaterialsusedintheoperationormaintenanceoftheKS-C300/200AutomaticCoater/Developerprovidedandsafetyoperationrequirementprovidedinoperationandmaintenancemanual.ThereisnomaintenanceortroubleshootinganticipatedfortheinterlocksontheKS-C300/200AutomaticCoater/Developer.Theinterlocksarerequiredtobetestedatleastannually.ThereisnoliftingequipmentusedorprovidedforthePage UnintendedInformationshouldbeprovidedregardingpotentialroutesofunintendedreleases(seeSectionConforms Conforms DoesNot Therearepressurizedliquidchemicals,workingpressureis0.3Mpa,theratedpressurefor is0.49Mpaandthe havesafetyreliefvalvewhenworkingpressuremorethan0.59Mpa.Informationaboutthe providedintheusermanualandinformationofpossibleleakshouldbedescribedinthemanual.DecontaminationDecontaminationmendeddecontaminationand missioningproceduresshouldbeprovidedinaccordancewithSEMI®S12andshouldincludethefollowinginformation:Identityofcomponentsandmaterialsofconstruction,insufficientdetailtosupportrecycling,refurbishmentandreusedecisions(seeSection8.5.3);andResidualhazardousmaterials,orpartslikelyto econtaminatedwithhazardousmaterials,thatmaybeintheequipmentpriorto ConformsTSC Conforms DoesNot decontaminationand missioningprocedures. MaintenanceProcedureswithPotentialEnvironmentalmendedmaintenanceproceduresIdentifyproceduralstepsduringwhichreleasesmightoccurandthenatureofthereleases;Identifywastecharacteristicsandmethodstominimizethevolumeofeffluents,wastes,oremissionsgeneratedduringmaintenanceprocedures.ConformsTSC Conforms DoesNot Maintenanceprocedureswithpotentialenvironmentalimpactsinthemaintenancemanualprovided.PagePagePageFireProtectionThershouldAsummaryfireprotectionreportasdescribedinSectionDescriptionsofoptionalfireriskmitigationfeatures(seeSection14.3.2);Note:28:Itisthisbeprovidedpriortopurchase.mendedFiredetectionsystemoperations,maintenanceandtestFiresuppressionsystemoperations,maintenanceandtest5);andsprovidedbylicenseddesignersandinstallers(seeSections2Alistofanyspecialapparatusneededtotestthefiredetectionorsuppressionfeaturesoftheequipment.Thelistshouldnotewhethertheapparatusisincludedwiththeequipment,orissoldseparay.ConformsTSC Conforms DoesNot AfireriskassessmentinaccordancewithSEMI®S14wasperformedonthesystem.Itwasdeterminedthatnofiredetectionorfiresuppressionisrequiredtoreducetheriskoffire.Note:FiredetectionandfiresuppressioncanbeinstalledaccordingtouserSection10:HazardAlert WarningWhereitisimpracticaltoeliminatehazardsthroughdesignselectionortoadequayreducetheassociatedriskwithsafetyorwarningdevices,hazardalertlabelsshouldbeprovidedtoidentifyandwarnagainsthazards.ConformsTSC Conforms DoesNot Hazardwarninglabelshavebeenpostedonthesystem. ThehazardwarninglabelsandtheirlocationsaresummarizedinTable10.1.HazardWarningPinchCassetteFlammableProcessToxicChemicalstoragearea/develounit/coaterunitPinch/CrushmovingWaferElectricalMainACHeavyWaferElectricalWaferHotHotFlammableChemicalstoragearea/develounit/coaterunitCorrosiveChemicalstoragearea/develounit/coaterunitWearearProcessWeareyeProcessTable10.1–HazardWarning LabelsshouldbedurableandsuitablefortheenvironmentoftheintendedConformsTSC Conforms DoesNot Thehazardwarninglabelsaremadefromdurablepolyester.Polyesterissuitableforthelaboratoryorcleanroomenvironmentinwhichthetoolwillbeused. ConformanceWithSEMI®EXCEPTION:Somehazardlabelformatsandcontentaredictatedbylaw(e.g.,laserlabelingandchemicalhazardcommunicationlabelingincertaincountriesofuse)andmaynotconformtoSEMI®S1.ConformsTSC Conforms DoesNot TheexistinghazardidentificationlabelingconformstointernationalconventionsusingacombinedIEC-417/ISO3864/ISOtypepictograms(iconsymbols)andSEMI®S1/ANSIZ535.4format.WarninglabelswillbepostedinEnglishand/orMandarindependingonthelocationofinstallation.Section11:SafetyInterlock ThissectioncoverssafetyinterlocksandsafetyinterlockNOTE29:Ifafiredetectionorsuppressionsystemisprovidedwiththeequipment,seesection14foradditional Protectionnel,Facilities,andWhereappropriate,equipmentshouldusesafetyinterlocksystemsthatprotectcommunityfromhazardsinherentintheoperationoftheequipment.nel,facilities,andConformsTSC Conforms DoesNot Thehardwarebased,safetyrelatedinterlocksareasLevelsensingatthecollectcanister/canistersofphotoresist,develoliquidandLeaksensinginthesecondarycontainmentforphotoresist,develoandsolventdeliveryDoorinterlocksforcoateranddeveloperOvertemperatureforhotExhaustairpressureswitchforexhaustChemicalconcentrationdetectionforprocessDoorelectricalinterlockformainpower InterlockSafetyinterlocksystemsshouldbedesignedsuchthat,uponactivationoftheinterlock,theequipment,orrelevantpartsoftheequipment,isautomaticallybroughttoasafecondition.ConformsTSC Conforms DoesNot Activationofsafetyrelatedinterlocksputsthesystemorsubsysteminasafe,standbyconditionasissummarizedbelow.ReactionofPageThedoorisDoorWhenthedoorinterlockisactivated,theunitisplacedtoasafeconditionasallmovementinthedoorwillstop,chemicalsupplyvalvesareclosedandalarmLiquidleakageThetoolisplacedtoasafetystateasallchemicalsupplyvalvesareclosedandanalarmoccur.LiquidlevelPressureliquidlevel:high-levelsensorIfthehigh-levelsensorisactivated,analarmwilloccur,andafterthiscurrentprocessiscompleted,thetoolwillstopchemicalTemperaturecontrolofhotplateOver-temperatureIfthetemperatureishigherthanthesettemperature,theheatercontactorisopen,thepowerofthehotplateisExhaustairpressureExhaustairpressureIftheexhaustairpressureisbelowthesetvalue,analarmwilloccurandallmovementwillstop,chemicalsupplyvalvesareclosed.concentrationdetectorVapor(LEL)detectionIftheVapor(LEL)ishigherthanthesetvalue,analarmwilloccurandallwillstop,chemicalsupplyvalvesareclosed.DoorswitchofmainpowercabinetDoorlimitswitchinthepowerIfthemaincabinetdooropen,themaincontactorwillopenandshutoffthepowerinthecabinet.Page OperatorUponactivation,thesafetyinterlockshouldalerttheoperatorimmediaEXCEPTION:AlertingtheoperatorisnotexpectedifasafetyinterlocktriggerstheEMOcircuit(seeSection12)orotherwiseremovespowertotheuserinterface.TSC Conforms DoesNot ActivationofanyofthesafetyrelatedinterlockresultsinavisualALARMattheoperatordisplayandlighttowerandanaudiblealarm. FaultTolerantSafetyinterlocksystemsshouldbefault-tolerantanddesignedsothatthefunctionsorsetpointsofthesystemcomponentscannotbealteredwithoutdisassembling,physicallymodifying,ordamagingthedeviceorcomponent.EXCEPTION:Componentsorcircuitswithadjustablesetpointsortripfunctionsmaybeusedinsafetyinterlocksystemsifaccessislimitedbyrequiringadeliberateaction,suchasusingatoolorspecialkeypadsequences,toaccesstheadjustabledevicesortoadjustthedevices.Thejustificationfortheadjustabilityoftheinterlockcomponentsorcircuitsshouldbeincludedintheequipmentevaluationreportandequipment NOTE33:TheintentistolimitaccesstotheadjustablesetpointstoproperlytrainedmaintenanceandserviceNOTE34:Thissectiondoesnotaddressthedefeatabilityofsafetyinterlocks.Seesection11.7foradditionalTSC Conforms DoesNot Theadjustablesetpointsontheequipmentcanonlybealteredbyapproved,trainednelwithpasswords.Highintegritycomponentusedinthesafetyinterlocksystemtoensurethefaulttolerantdesign,seetable13.4.3Page.1RemovalofHazardousInterlockandEMOcircuitsshouldremovehazardousenergiesbyde-energizingratherthanenergizing.Shunttripsareanexampleofcomponentsthatdonotoperatebyde-energizing.EXCEPTION1:Thiscriterionisconsideredtobemetifa)onepartofaredundantcircuitoperatesbyde-energizingandthesecondpartoperatesbyenergizing,orb)themonitoringcircuitoperatesbyenergizingaslongasthemonitoredcircuitoperatesbyde-energizing.EXCEPTION2:EarthLeakage(groundfault)sensingcomponents(e.g.,GFI,GFCI,RCDandELB)oftenworkbyenergizingwithinthecomponentsandareacceptableifa)theearthleakagesensingcomponent(s)meets13.4.3andb)therestoftheearthleakageinterlockorEMOcircuitoperatesbyde-TSC Conforms DoesNot EMOcircuitsremovehazardousenergiesbyopenmaincontactorandtheinterlocksonthesystemwereobservedtomitigatethehazardbyremovalofhazardousenergy(shutdownthemechanicalpartsandopenthevalvesofchemicalsupply). InterlockSystemElectromechanicaldevicesandcomponentsarepreferred.Solid-statedevicesandsolid-statecomponentsmaybeused,providedthatthesafetyinterlocksystem,orrelevantpartsofthesystem,areevaluatedforsuitabilityforuseinaccordancewiththeappropriatestandard(s).Theevaluationforsuitabilityshouldtakeintoconsiderationabnormalconditionssuchasovervoltage,undervoltage,powersupplyinterruption,transientovervoltage,rampvoltage,electromagneticsusceptibility,electrostaticdischarge,thermalcycling,humidity,dust,vibration,andjarring.EXCEPTION:WheretheseverityofareasonablyforeseeablemishapisdeemedtobeMinorperSEMIS10,asoftware-basedinterlockmaybeconsideredsuitable.TSC Conforms DoesNot AllInterlockcomponentsareapprovedandspecificationforinterlockcomponentslistedintable13.4.3.Page.1FECSmaybeusedinconjunctionwithelectromechanicalorsolidstatedevicesandcomponentsprovidedtheprogrammablesafetycontrolsystemconformstoanappropriatestandardforelectronicsafetysystems.ComponentsoftheFECSshouldbetestedandcertifiedaccordingtotherequirementsofthestandardused.ExamplesofrecognizedelectronicsafetysystemsstandardsincludeIEC61508ISO13849-1,ANSI/ISASP84.01DIN/V/VDE-ConformsTSC Conforms DoesNot SafetyPLCusedandthesafetyPLCcomplywiththestandardIEC61508,ENISO13849-1requirement. DefeatableThesafetyinterlocksystemshouldbedesignedtominimizetheneedtooverridesafetyinterlocksduringmaintenanceactivities.TSC Conforms DoesNot TherearenodefeatableinterlocksontheKS-C300/200Automatic.1OperatorSafetyinterlocksthatnelduringoperatortasksshouldnotbedefeatablewithouttheuseofaConforms Conforms DoesNot N/A Therearenodefeatableinterlocksonthe.2DefeatableInterlocksforWhenmaintenanceaccessisnecessarytoareasprotectedbyinterlocks,defeatablesafetyinterlocksmaybeused,providedthattheyrequireanintentionaloperationtobypass.Conforms Conf