微机电系统1课件

CHAPTERONE:IntroductionofMEMSDefinitionandfundamentalconceptofMEMSMEMShistoryMEMSpresentMEMSprospectApplicationsofMEMSMEMSadvantageDefinition:

MEMSistheintegrationofelectricalelements,mechanicalelements,sensor,actuatorsonacommonsiliconsubstratethroughmicrofabricationtechnology.Thesesystemcansense,controlandactuateonthemicroscale,andfunctionindividuallyorinarraystogenerateeffectsonmacroscale.Sensorsgatherinformationfromtheenvironmentthroughmeasuringmechanical,thermal,biological,chemical,optical,andmagneticphenomena.Theelectronicsthenprocesstheinformationderivedfromthesensorsandthroughsomedecisionmakingcapabilitydirecttheactuatorstorespondbymoving,positioning,regulating,pumping,andfiltering,therebycontrollingtheenvironmentforsomedesiredoutcomeorpurpose.

MEMS

historyIn1750s,Firstelectrostaticmotors;In1958,Siliconstraingaugescommerciallyavailable;December26,1959,AtCaliforniaInstituteofTechnology,RichardFeynmangavearemarkablyinsightfullecture,“Thereisplentyofroomatthebottom”.

Hetriedtospurinnovativeminiaturefabricationtechniquesformicromechannics,buthefailedtogenerateafundamentallynewfabricationtechnique;In1967,Inventionofsurfacemicromachining;In1980s,earlyexperimentsinsurface-micromachined

polysilicon,firstelectrostaticcombdriveactuators—micropositioningdiscdriveheads;In1989,Lateralcombdrive;Inlate1980s,micromachiningleveragesmicroelectronicsindustry,widespreadexperimentationanddocumentationincreasedpublicinterest;Earlytransductionandactuationmethodsproducesimpleactuators;Micromachiningmethodsaimedtowardimprovingsensors,thermalandelectricalisolationbetweenlayerswithsuspendedstructures;Inearly1990s,GovernmentagenciesstartlargeMEMSsupportprograms,AFOSRsupportbasicresearchinmaterialsandMEMSresearch,DARPAcreatesMUMPSfoundryserviceswithMCNCin1993,NISTsupportscommercialfoundriesforCMOSandMEMS;Inourcountry,“micron/nanometermanufacturetechnologynationalkeylaboratory”wasfoundedin1996;In1992,ChrisPister(UCLA)createsfirstmicromachinedhinge,it’sfeaturesopenpossibilitiesforpseudo-3Dstructuresandassembly;In1992,MCNCstartstheMultiUserMEMSProcess(MUMPS);In1993,Firstsurfacemicromachinedaccelerometersold(AnalogDevices,ADXL50)In1994,BoschprocessforDeepReactiveIonEtchingispatented;In1995,Bio-MEMScomesofage;In1998,ThepremiereofStarWarsshownonTI’sDigitalMirrorDevice;Inlater1990s,actuationandfabricationmethods(suchasdeepreactiveionetching,lasermachining,fluidics,tunneling,deepUV)produceadvancedsystems.In2000,MEMSFiberswitchesbecomebigbusiness;

control,andperformancetoweaponssystemsandbattlefieldenvironments,andtheyarereadytomergeinformationprocessingwithsensingandactuationtorealize

newsystemsandstrategiestobringco-locatedperceptionandcontroltothephysical,biological,andchemicalenvironment.ThedomesticMEMSresearchstartedatthebeginningofthe90’s.Aftertwentyyears’development,ourcountryhasacquiredconsiderablefoundationtechnicalstorageinmanyfields,suchasmicrosensor,microactuator,microrobot,biosensorandbiochip,microsystemprototypesandsoon.

AndsomecentralizedMEMSresearchcentershaveprimarilycomeintobeing,suchasTsinghuaUniversity,PekingUniversity,InstituteofElectronicsCAS,ShanghaiJiaoTongUniversity,FudanUniversity,SoutheastUniversity,ZhejiangUniversity,UniversityofScience&TechnologyofChina,theForty-ninthResearchInstituteofMinistryofInformationIndustry,DalianUniversityofTechnology,ShenyangInstituteofInstrumentationTechnology,ChongqingUniversity,Xi’anJiaoTongUniversity,No.618InstituteofAeronauticMinistry,

No.771InstituteofAstronauticMinistry,etc.theymadefavorablefoundationforthedomesticMEMSresearch.Onthestorageofresearchability,“micro/nanometermanufacturetechnologynationalkeylaboratory”wasfoundedin1996,ithighlyenhancedthedomesticresearchonMEMSmanufacturetechnology.ThemostadvancedkeyfacilityforMEMSmanufacturedeviceswereequippedintheabovelaboratory,suchasSTSquicketchingmachine,Karlsussdieder-photo-etchingmachine/bondingjointmachine,Karlsussbonding

domesticMEMSmanufacturetechnology.TheexistingtechnicalconditionhasprimarilyformedacontinuoussystemofMEMS.However,becauseofthedecentralizationofresearchareaandstrengthscatteringcausedbyhistoricalreason,togetherwithinsufficientfund,thoughwehavemadeconsiderableprogress,wealsohavegreatgapintermofquality,costperformance,commercializationcomparingwithdevelopedcountries.However,onemoreproposalmightbeuseful.

TheUnitedStatesand

JapanhavemonopolizedproductionofIC,butnotproductionofMEMScomponents.Untilthisday,MEMSisstillrisingasanindustryandthisistruetoallcountries.Inotherwords,allcountries,Chinacertainlyinclude,enjoyavastpotentialfordevelopmentofMEMSindustry.Thisisindeedanopportunitythatwecannotaffordtomiss.MEMS

Prospect

TheMEMSindustryisstillataveryearlystageofdevelopmentandtheon-goingeffortsaredirectedtowardsfundamentalresearchratherthancommercialapplications,Butithasaprojected20-30%annualgrowthrate.Usinganever-expandingsetoffabricationprocessesandmaterials,MEMSwillprovidetheadvantagesofsmallsize,low-power,low-mass,low-costandhigh-functionalitytointegrated

electromechanicalsystemsbothonthe

ofallkindscanbemetbytheintegrationofMEMSintomacrodevicesandsystems.Manydemandingapplicationsrequiretosolvemoreandmoredifficultsensingandactuationproblemswhichrequireahigherlevelofprocessingpower(i.e.moreintelligence)thanisachievablefromcurrentmicro-systems.Thus,themajorthrustofthisresearcheffortistomakesensorsandactuatorssmaller,cheaper,andsmarterthantheyarenow.Thisgoalwillbeachievedbyintegratinganumberoffunctionsonachipincludingstructuralcompensation

capabilities,integrationofsignalprocessing,self-calibration,self-testing,communicationwithoneormoreotherdevices.Undoubtedly,Thedevelopmentofthenextgenerationengineeringdevices

–MEMSthatonedaywillbeabletothink,act,sense,andcommunicate.ManyexpertsbelievethatMEMStechnologyisthenextlogicalstepinthemicroelectronicsrevolutionandthatMEMSdevelopmentsandproductionmayverywellbecomethesemiconductorindustryofthenewmillennium.Justastheneedtoincreasecomputingpowerona

siliconchipofPentiumprocessor,MEMStechnologysupplieselectronicsystemswithamuchneededwindowtothephysicalworld,permittingthemtosenseandcontrollight,motion,sound,heat,andotherphysicalphenomena.ThesetechnologieswillgreatlybenefitiftheparadigmofSmartMicro-Electro-MechanicalSystemsisextendedandimplementedforthisclassofsystems,inthefuture,itisconceivablethatMEMSwillplayprominentrolesinourhumanlife,asthepersonalcomputertoday.Electromechanicalsignalprocessing;Accelerometers(forairbags,pacemakersandgames)；Micro-flowsystems;Temperature,pressuremeasurement,chemicalandvibrationsensors;Distributedcontrolofaerodynamicandhydrodynamicsystems,Hydro-thermographicvibrationsensor;Inwirelesscommunicationsarea,Radiofrequencydevices：Highfrequencycircuits，RF-switches，Electricalcomponentssuchasinductorsandtunablecapacitors,Withtheintegrationofsuchcomponents,theperformanceofcommunicationcircuitswillimprove.

Distributedsensorsbothforcond