《半导体工程专业英语》课件-2.1 Crystal Structure of Solids

微专业---半导体制造技术课程：半导体工程专业英语ContentsSemiconductorProperties半导体特性01SemiconductorMaterials半导体材料02SemiconductorDeviceandHowTheyareUsed半导体器件及其使用03ProcessTechnology工艺技术04FabricationProcesses制造工艺05SemiconductorMaterialsandProcessCharacterization半导体材料与工艺表征06SemiconductorMaterials2.1CrystalStructureofSolids2.2ElementsofSemiconductorMaterialSystem2.3InorganicSemiconductors2.4MaterialsSelectionCriteria2.5OrganicSemiconductors2.6BulkSingle-CrystalFormation2.7Thin-FilmSingleCrystalFormation2.8Substrates2.9Thin-FilmInsulators2.10Thin-FilmConductors022

SemiconductorMaterials1ChapterOverview

Followinganoverviewofthepropertiesofthesolidsknownassemiconductorsinthepreviouschapter,thegoalofthischapteristointroduce

semiconductormaterialswhichareusedtomanufacturedevicesperforming

varietyofelectronicandphotonicfunctions./,foʊ'tɑnɪk/光子2Introduction

Thediscussionofthecrystalstructureofsolidsisconcernedwiththeway

atomscomprisingasolidarespatiallydistributed.Inthecaseofsemiconductorsthisissueisoffundamentalimportanceasthewayinwhichatoms

inanygivenmaterialareconfiguredwithrespecttoeachotherisamongkey

factorsdefiningelectricalconductivityofsemiconductors,andhence,definingthewayanygivensemiconductormaterialisusedtoconstructfunctional

devices./kənˈfɪɡjərd/排布2

SemiconductorMaterials

2.1CrystalStructureofSolids/ˈspeɪʃəli/空间3Introduction

Anunderlyingconsiderationinthisregardistheextenttowhichspatial

distributionofatomsinthesolidisordered,andwhatisthegeometricalnatureoftheensuing

crystallographicorder.Twodistinctcasesarerepresented

by(i)crystalsfeaturingalong-rangeperiodicorderand(ii)non-crystalline

materials,commonlyreferredtoasamorphousmaterialsinwhich,incontrasttocrystals,atomicarrangementexhibitsnoperiodicityorlong-range

order.Anamorphous,non-crystallinematerial

doesnotfeaturealong-rangeorderatall./ˌʌndərˈlaɪɪŋ/根本的2

SemiconductorMaterials

2.1CrystalStructureofSolids/ˈspeɪʃl/空间的/ˌpɪriˈɑːdɪk/周期的/dɪˈstɪŋkt/不同的/,krɪstəlɑ'ɡræfɪk/结晶的/ˌpɪriəˈdɪsəti/周期性/ɪnˈsuːɪŋ/随之产生的4IntroductionTwo-dimensionalrepresentationsofcrystallographicstructureofsolids,

(a)single-crystalmaterial,(b)polycrystalline/multicrystallinematerial,and

(c)non-crystalline,amorphous,material.2

SemiconductorMaterials

2.1CrystalStructureofSolids/,krɪstəlɑ'ɡræfɪk/结晶的5Text

Inthefollowupdiscussionthetermcrystallatticeisusedinreferencetotherepeatedthree-dimensionalarrangementofatomsinthecrystal.Anycrystallatticeiscomprisedoftheelementalcellsreproducedthroughoutthematerial.Elementalcellsmayappearinthevarietyofformswhichfallintosevenbasicclasses./əˈreɪndʒmənt/排列2

SemiconductorMaterials

2.1CrystalStructureofSolids2.1.1

Crystallattice/ˌriːprəˈdjuːst/重现晶胞6Thephysicaldimensionoftheunitcellisdefinedbythelatticeconstants.Inthecaseofcubiccrystals,singlelatticeconstanta(Fig(a))whichinthecaseofsiliconisa=0.543nmandinthecaseofgallium

arsenideisa=0.564nm,determinesthelattice.Inthecaseofhexagonal

wurtzitecrystalstructure,twoconstantsaandcareneededtodefinephysicaldimensionsofthecell(Fig(b))./ˈlætɪsˈkɑːnstənts/晶格常数2

SemiconductorMaterials

2.1CrystalStructureofSolids2.1.1

Crystallattice/ˈkjuːbɪk/立方/ˈɡæliəm/镓Schematicrepresentationof(a)face-centeredcubiccelland(b)hexagonalcell./ˈɑrsəˌnaɪd/砷化物/ˈwərtˌsaɪt/纤锌矿/heksˈæɡənl/六方晶系/heksˈæɡənl/六方晶系7Byconnectingpointsonthemaincrystallographic

axesofthesinglecrystalmaterial,variouscrystallographicplaneswithinthecrystalcanbeidentified.CoordinatesdeterminingorientationofthespecificcrystallographicplaneinthecrystalareknownasMillerindices.Millerindicesinvolvethreedigits,either1or0,e.g.(111)or(100),whichdefinehowtheplaneintersectsthemaincrystallographicaxesofthecrystal.2

SemiconductorMaterials

2.1CrystalStructureofSolids2.1.1

Crystallattice/

ˈæksɪz/坐标轴IllustrationsshowingtheuseofMillerindicestodefinecrystallographicplanesinthecubiccell./ˈmɪlərˈɪndɪsiːz/米勒指数/ˌɪntərˈsekts/相交/koʊˈɔːrdɪneɪts/坐标/,krɪstəlɑ'ɡræfɪk/结晶的/pleɪnz/位面8Text

Dependingontheirnature,defectsobservedinsemiconductorcrystalsfallintofourclasseswhichincludepointdefects,linedefects,planardefects,andvolumedefects./ˈpleɪnər/平面的2

SemiconductorMaterials

2.1CrystalStructureofSolids2.1.2

StructuraldefectsSchematicrepresentationoffour