器件和工艺数值模拟求解

1、Solution Specification,MODELS,MODELS 复合 统计分布 电离 碰撞电离 迁移率,复合: SRH | CONSRH SRH复合/与浓度有关的SRH复合 R.TUNNEL 带带隧穿 AUGER 俄歇复合 能带相关的模型: BGN 禁带变窄效应 FN.CUR Fowler-Nordheim tunneling model BOLTZMAN | FERMIDIR 统计分布 INCOMPLE 不完全电离 IMPACT.I 碰撞电离(电场相关) II.TEMP 碰撞电离(载流子温度相关) BTBT 隧穿引起载流子增加,迁移率: CONMOB ANALYTIC ARORA

2、CCSMOB PHUMOB LSMMOB SRFMOB SRFMOB2 UNIMOB PRPMOB LSMMOB GMCMOB TFLDMOB HPMOB HPMOB FLDMOB TMPMOB # ND.MOB C.ND.MOB= # E.EFFECT EJ.MOBIL EHSCAT,量子效应: QM.PHILI QM.NORP= QM.EFIEL= QM.METHO= 热电子和栅电流: GATE1 GATE2 GATE.SUR GATE.GEN= GATE.TEM 自热效应(晶格温度): TMPDIFF 热扩散项参数 ET.MODEL 能量平衡方程 与各种模型相关 EF.TMP EFI.T

3、MP COMP.ET EBLT.HT TMPTAUWN TMPTAUWP EB.SRH.G 3KT.LT ECII.LAT HJSC2 HJTEM HJTUN TEMPERAT=,SYMBOLIC,The SYMBOLIC statement performs a symbolic factorization in preparation for the LU decompositions in the solution phase of the program.,SYMBOLIC 算法: NEWTON | GUMMEL 载流子种类: CARRIERS= ELECTRON | HOLES 温度

4、: ELE.TEMP COUP.ELE HOL.TEMP COUP.HOL LAT.TEMP COUP.LAT 后处理方式求能量平衡方程: EB.POST 代数方程的求法: MIN.DEGR ILUCGS BICGS STRIP,METHOD,The METHOD statement sets parameters associated with a particular solution algorithm chosen in the SYMBOLIC statement.,METHOD 误差 LU分解参数 Gummel法参数/Newton法参数,迭代次数 ITLIMIT= 误差定义 XNO

5、RM RHSNORM XRNORM NODE.ERR= PX.TOLER= CX.TOLER= PR.TOLER= CR.TOLER= LIMIT,误差定义,ILUCGS Solver Parameters ILU.ITER= ILU.TOL= ILU.XTOL=,Gummels Method Parameters DVLIMIT= DAMPED DELTA= DAMPLOOP= DFACTOR= ICCG LU1CRIT= LU2CRIT= MAXINNER= SINGLEP ACCELERA ACCSTART= ACCSTOP= ACCSTEP=,Newtons Method Parame

6、ters AUTONR NRCRITER= ERR.RAT= CONT.RHS ITRHS= CONT.PIV CONT.ITL | STOP.ITL CONT.STK STACK= ACONTINU= TAUTO 2NDORDER TOL.TIME= L2NORM DT.MIN= EXTRAPOL CARR.MIN= CARR.FAC= N.DVLIM= N.DVMAX N.DAMP,Energy Balance Parameters ETX.TOLE= ETR.TOLE= N.MAXBL= N.MAXEB= Lattice Temperature AAM Parameters LTX.TO

7、LE= LTR.TOLE= LTX.FACT= LTR.FACT= MAX.TEMP=,SOLVE,The SOLVE statement instructs Medici to perform a solution for one or more specified bias points.,SOLVE Initial Guesses, Biasing, and Fermi Potentials INITIAL | PREVIOUS | PROJECT | LOCAL | P.LOCAL V(name1)= | I(name1)= | T(name1)= | Q(name1)= . V(na

8、me60)= | I(name60)= | T(name60)= | Q(name60)= N.REGION= N.BIAS= P.REGION= P.BIAS=,Example SOLVE INITIAL SOLVE V(gate)=0 V(source)=0 V(drain)=0 SOLVE V(gate)=1 V(source)=0 V(drain)=0 SOLVE PREVIOUS,Steady State Analysis Parameters solve + ELECTROD= VSTEP= | ISTEP= + NSTEPS=,Example: SOLVE ELECTROD=DR

9、AIN VSTEP=0.5 NSTEP=20,Continuation Method Parameters Solve + CONTINUE ELECTROD= C.VSTEP= + C.AUTO C.TOLER= + C.VMIN=/C.IMIN= C.VMAX=/C.IMAX= + C.DVMAX=,Example: SOLVE V(drain)=1 CONTINU ELECT=drain C.VSTEP=0.5 C.VMAX=10 + C.IMAX=1E-2,Transient Analysis Parameters solve + Electrod= + TSTEP= TSTOP= | NSTEPS= TMULT= + RAMPTIME= | ENDRAMP= DT.MAX=,Example: SOLVE OUT.FILE=MDE3S00 SOLVE V(Anode)=2 TSTEP=1E-12 TSTOP=10E-9 + OU