易普森真空炉故障报警信息及处理.doc

报警信息说明1Roughing Pump FailCheck the Roughing Pump Starter and the Roughing Pump Auxillary ContactThe output to start the roughing pump was energized, but the auxiliary contact from the motor starter failed to energize. 粗泵故障 (机械泵故障)检查粗泵起动器和辅助触头启动粗泵的输出接通，但是电机起动器的辅助触头没有接通。2Vacuum Booster FailCheck the Vacuum Booster Starter and the Vacuum Booster Auxiliary ContactThe output to start the vacuum booster was energized, but the auxiliary contact from the motor starter failed to energize.真空增压泵故障（罗茨泵故障）检查真空增压泵起动器和辅助触头。启动真空增压泵的输出接通，但是电机起动器的辅助触头没有接通。3Chamber OverpressureCheck the Chamber Transducer for proper operation. Check Chamber Overpressure Switch.Chamber pressure has exceeded the setpoint for the Event. If 16 PSIG switch made, furnace is prevented from automatically backfilling炉腔过压检查炉腔传感器是否正常工作，检查炉腔过压开关。炉腔压力超过事件的设置点。如果开关设置为16 PSIG，炉子不能自动回填。4Holding Pump FaultCheck the Holding Pump Starter and the Holding Pump Auxiliary ContactThe output to start the holding pump was energized, but the auxiliary contact from the motor starter failed to energize.前支泵故障（维持泵故障）检查前支泵起动器和辅助触头。启动前支泵的输出接通，但是电机起动器的辅助触头没有接通。5Heat FaultCheck the Heat Enab Contactor and the Heat Auxiliary contact The output to enable the heat contactor was energized, but the auxiliary contact from the motor starter failed to energize. 加热故障检查加热启用起动器和加热辅助触头启动加热接触器的输出接通，但是电机起动器的辅助触头没有接通。6Transducer RangeChamber Transducer may need replaced. replaced The output to enable the heat contactor was energized, but the auxiliary contact from the motor starter failed toenergize. 传感器量程（控制面板的超温设置）可能需要更换炉腔传感器传感器模拟输入值超过限值7Diffusion Pump Fail Check Diffusion Pump Contactor and the Diffusion Pump Auxiliary ContactThe output to start the diffusion pump was energized, but the auxiliary contact from the contactor failed to energize or the TAS opened.扩散泵故障检查扩散泵起动器和辅助触头。启动扩散泵的输出接通，但是接触器的辅助触头没有接通或TAS打开。8Pump Water Pressure FailCheck the Pump Water Pressure Switch. Check Pump Water FlowThe pump water pressure had dropped below the minimum limit as defined by the pump water pressure Switch.泵水压故障(没开内循环)检查泵的水压开关和水流量。泵的水压降到泵水压开关规定的最低限值以下。9Air Pressure Fail.Check the Air Pressure Switch. Check incoming Air PressureThe air (pneumatic) pressure has dropped below the minimum limit, as defined by the air (pneumatic) pressure switch.气压故障（压力小于0.4MPa）检查气压开关，检查入口气压。气(气动)压力降到气(气动)压力开关规定的最低限值以下。10Power Supply Water Pressure AlarmCheck Power Supply Water Flow and TemperatureThe power supply water pressure has dropped below the minimum limit, as defined by the power supply water switch and individual VRT temperature activated switches.电源水压报警（内循环水压力不正常）检查电源水流量和温度电源的水压降到电源水压开关和各个VRT温度启动开关规定的最低限值以下。11Chamber Water Pressure FailCheck Chamber Water Pressure and TemperatureThe chamber water pressure had dropped below the minimum limit, as defined by the chamber water pressure switch or the external chamber temperature activated switches.炉腔水压故障（一般是内循环水温过高）检查炉腔水压和温度炉腔的水压降到炉腔水压开关或炉腔外温度启动开关规定的最低限值以下。12Heat Exchanger Water FlowCheck the Heat Exchanger Water Flow Switch. Check incoming water supply to Heat ExchangerThe heat exchanger water pressure has dropped below the minimum limit, as defined by the heat exchanger water flow and temperature switches.热交换器水流量检查热交换器水流量开关，检查到热交换器水流量的进水供应。热交换器的水压降到热交换器水流量或温度启动开关规定的最低限值以下。13Door AlarmCheck the Door Closed Limit SwitchThe chamber door limit switch input has de-energized while process cycle is on, indicating that door might be open.门报警 (炉门没关好)检查门关闭限位开关。炉腔门限位开关输入接通，但工艺循环打开，显示门可能打开。14Gas Blower FailCheck the Gas Blower Starter and Gas Blower Auxiliary ContactThe output to start the gas blower was energized, but the auxiliary contact from the motor starter failed to energize or the temperature activated switch in the gas blower opened.鼓风机故障检查鼓风机起动器和辅助触头。启动鼓风机的输出接通，但是电机起动器的辅助触头没有接通或鼓风机的温度启动开关打开。15Cooling Pressure LowCheck Chamber Transducer or 5 switch setting.The chamber pressure is less than 5 Hg while the gas blower output is energized.冷却压力低检查炉腔传感器或5开关设置炉腔压力低于5Hg，但鼓风机输出接通。16E-Stop Not ClosedReset E-StopThe emergency stop pushbutton has been pressed and held open没有按复位键按复位键17Battery LowChange Battery on PLC processor.The programmable controllers CPU battery level is low.电池低更换PLC处理器电池PLC的CPU电量低18Forces OnRemove all PLC forces.There are currently forces enabled within the ladder logic program.力量打开取消所有PLC力量梯级逻辑程序内现在启用了力量。19Cold Leaktest FailLeaks exist in the furnace or Leaktest Parameters can not be achievedThe leaktest has failed to pass after completing the number attempts selected冷泄漏测试故障炉子有泄漏或没有达到泄漏测试参数完成预设的测试次数后，泄漏测试没有合格。20Diffusion Pump Hi-Temp (Not Applicable)Check Diffusion Pump temperature thermocoupleThe diffusion pump temperature has exceeded the maximum limit as indicated by the thermocouple placed on the pump.扩散泵高温(不适用)检查扩散泵热电偶泵上安装的热电偶显示扩散泵温度超过最高限值。21Diffusion Pump Low Temp (Not Applicable)Check Diffusion Pump temperature thermocoupleThe diffusion pump temperature is below the minimum limit as indicated by the thermocouple placed on the pump.扩散泵低温(不适用)检查扩散泵热电偶泵上安装的热电偶显示扩散泵温度超过最低限值。22Chamber OvertempCheck Chamber Overtemperature thermocouple. Check Overtemperature instrument limits.The furnace overtemperature controller has indicated that its setpoint was exceeded as determined by the overtemperature thermocouple炉腔过热检查炉腔过热热电偶，检查过热仪表限值。炉子的过热控制器显示已经超过过热热电偶确定的设置点。23Preventive Maint AlarmPerform system maintenance and RESET the Hour CounterThe hourmeter of one of the devices monitored has exceeded its setpoint. Preventive maintenance needs to be performed on that device.预防性维护报警（把报警音消除,重设维护日期）进行系统维护，复位计时器一个处于监控下的装置的计时器超过设置点和偏移值，需要立即对其进行预防性维护。24Preventive Maint Offset AlarmPerform system maintenance and RESET the Hour CounterThe hourmeter of one of the devices had exceeded its setpoint plus the offset. Preventive maintenance needs to be performed on that device as soon as possible.预防性维护偏移报警进行系统维护，复位计时器一个处于监控下的装置的计时器超过设置点和偏移值，需要立即对其进行预防性维护。25Excess Hold Change Excess Hold Global Value. Check alarms to see why furnace is in HOLD.Excess hold global value has been exceeded.过量保持更改过量保持全局值，检查报警，找出炉子处于保持的原因。已经超过过量保持全局值。26Gsoak WKTC SetupSelect Work TCs for a Guaranteed Soak Event.No work thermocouples were required for Event 10保证吸收工作热电偶设置给保证吸收事件选择工作热电偶。事件10不需要工作热电偶27Roughing Valve Jammed.Check the Roughing Valve Solenoid and the Roughing Valve Closed Limit SwitchRoughing Valve jammed粗泵堵塞检查粗泵阀门螺线管和粗泵阀门关闭限位开关粗泵堵塞28WKTC Minimum Alarm Change Total Number of WKTCs or Minimum WKTCs allowed global values.?The number of good work thermcouples (not open-circuited) has dropped below the minimum specified in that recipe工作热电偶最低报警更改工作热电偶总数或允许的最低全局值正常工作的热电偶数量(不是开路)已经降到配方规定的最低值。29Pumpdown Max Time AlarmChange Pumpdown Time Global Value. Check leaksThe furnace failed to pump below the vacuum setpoint in the recipe within the all